CN-121607913-B - Double-station press mounting equipment for wafer box assembly

Abstract

The invention relates to the technical field of semiconductor assembly, in particular to double-station press-fitting equipment for wafer box assembly, which comprises an equipment rack, a moving station and a pressing assembly. Each movable station comprises a sliding rail assembly, a carrying platform, a nylon plate and a stop block. Each pressing component comprises a supporting structure, a servo electric cylinder and a pressing head mechanism. The pressure head mechanism comprises a lifting plate, a guide pillar, a pressing plate, a driving assembly and a movable clamping jaw. The movable clamping jaw comprises a base part, a connecting part and a pressing end. Compared with the prior art, the invention performs multistage pressing operation by arranging the servo electric cylinder, performs pressing operation on the buffer piece for a plurality of times in a sectionalized manner, avoids the spring out of the buffer piece caused by air in the insertion part during one-time pressing, effectively improves the pressing efficiency and improves the product quality rate. By arranging the pressure head mechanism, the movable clamping jaw is inserted into the diamond structure of the buffer piece and then pressed, so that incomplete press fitting caused by the diamond structure of the buffer piece is avoided.

Inventors

• YAO QINGLI
• CHEN JINLONG

Assignees

• 浙江赛瑾半导体科技有限公司

Dates

Publication Date

20260512

Application Date

20260203

Claims (10)

1. 1. A duplex position pressure equipment for wafer box equipment, its characterized in that: the double-station press-fitting equipment for assembling the wafer box comprises an equipment rack, two moving stations arranged in the equipment rack and two pressing components respectively acting on the moving stations, wherein the wafer box used by the double-station press-fitting equipment for assembling the wafer box comprises a base, a box cover buckled on the base, a plurality of inserting seats arranged on the box cover, and a plurality of buffer pieces inserted in the inserting seats, each buffer piece comprises an inserting part and a buffer part arranged on the inserting part, the buffer part is of a diamond structure surrounded by a plurality of elastic sheets, each moving station comprises a slide rail component, a carrying platform arranged on the slide rail component and a nylon plate arranged on the carrying platform, the four baffle blocks are arranged around the nylon plate, the nylon plate and the carrying platform are concentrically arranged, the baffle blocks are vertically fixed on the carrying platform through fasteners, the two pressing assemblies are respectively arranged on the two moving stations, each pressing assembly comprises a supporting structure, a servo electric cylinder arranged on the supporting structure, and a pressure head mechanism connected on the servo electric cylinder, the servo electric cylinder adopts a multi-stage pressing working flow when working, the pressure is gradually increased, the buffer part is pressed down for a plurality of times in a sectionalized way, the pressure head mechanism comprises a lifting plate connected on the servo electric cylinder, two guide posts connected on the lifting plate, a pressing plate connected on the lifting plate, four groups of driving assemblies arranged on the pressing plate, the four groups of driving components are fixed on the pressing plate and are positioned on one side, far away from the lifting plate, of the pressing plate, the movable clamping jaw comprises a base part connected to the driving component, a connecting part perpendicular to the base part, and a pressing end perpendicular to the connecting part, the base part is fixed to the driving component, the connecting part vertically extends towards the outside far away from the driving component, one end of the pressing end is vertically fixed to the connecting part, the other end of the pressing end is parallel to the base part, the surface, far away from the base part, of the pressing end is a pressing surface, the distance from the pressing surface to the base part is smaller than the distance between the pressing surface and the base part in the deformation direction in the free state of the buffer part, and the pressing end is inserted into the diamond-shaped structure of the buffer part under the action of the driving component and is pressed down under the action of the servo electric cylinder to press the buffer part into the insert seat.
2. 2. The double-station press-fitting apparatus for wafer cassette assembly as set forth in claim 1, wherein: the equipment rack comprises a cabinet body, a workbench arranged on the cabinet body and a shell covered on the workbench.
3. 3. The apparatus of claim 2, wherein two of said stations are disposed side-by-side and spaced apart on said table.
4. 4. The dual-station press-fit device for assembling wafer cassettes as recited in claim 2, wherein each of the moving stations further comprises a photoelectric sensing assembly disposed at one side of the slide rail assembly, the photoelectric sensing assembly comprises an adjusting rail disposed on the table, two photoelectric sensors disposed in the adjusting rail, and a sensor sheet metal part disposed on the table, the adjusting rail is disposed parallel to and spaced apart from the linear rail of the slide rail assembly, and the sensor sheet metal part is fixed at an edge of the table by fasteners, extends and is inserted into a sensing portion of the photoelectric sensor.
5. 5. The apparatus of claim 1, wherein the slide rail assembly comprises two parallel and spaced apart linear guides, a plurality of sliders disposed on the linear guides, and a driving cylinder.
6. 6. The dual-station press-fitting device for assembling wafer cassettes as set forth in claim 1, wherein four accommodating grooves for accommodating the stoppers are further formed in the carrier, two waist-shaped holes are formed in each accommodating groove, the accommodating grooves are located between the edges of the nylon plate and the edges of the carrier, and the length direction of the waist-shaped holes is perpendicular to the edges of the nylon plate and the carrier.
7. 7. The dual-station press-fit apparatus for wafer cassette assembly as defined in claim 2 wherein said support structure includes four support posts vertically fixed to said table and a fixing plate disposed on said support posts.
8. 8. The dual-station press-fit apparatus for wafer cassette assembly as defined in claim 7 wherein said lift plate is positioned on the other side of said servo cylinder passing through said support structure and said guide post passes through a fixed plate and is attached to said lift plate.
9. 9. The dual-station press-fitting apparatus for wafer cassette assembly as set forth in claim 1, wherein the platen is fixed to a side of the lift plate remote from the servo cylinder and is disposed concentrically with the lift plate, and the platen is circular or regular octagon in shape.
10. 10. The dual-station press-fit apparatus for wafer cassette assembly as set forth in claim 1 wherein each of said sets of drive assemblies comprises an axially disposed linear guide and a slider, a mounting plate disposed on the slider, and a drive apparatus coupled to said mounting plate.

Description

Double-station press mounting equipment for wafer box assembly Technical Field The invention relates to the technical field of semiconductor assembly, in particular to double-station press-fitting equipment for wafer box assembly. Background The wafer box, namely the wafer carrier, belongs to one type of semiconductor carrier, is a precise bearing device specially designed for semiconductor wafers, and plays a vital role in semiconductor production. The device is mainly used for placing and conveying the wafers, simplifies the transportation process of the wafers, reduces the risk of the wafers being polluted, and ensures the smooth circulation of the wafers among different production links. In the prior art, wafers are inserted into a placing groove of a wafer box for transportation, so that the wafers may vibrate and displace in the transportation process, and the stored wafers may be damaged. Therefore, a buffer propping piece is arranged at the top of the wafer box and is used for buffering and damping the wafer storage box, and a related structure is mentioned in the invention patent with publication number CN119673833B, namely, the wafer box with the protective limiting device. However, in order to achieve the better buffering effect, the buffering propping piece adopts a diamond-shaped elastic structure, the end part of the buffering piece is directly pressed to deform the diamond-shaped structure and cannot be stressed, and the inside of the diamond-shaped structure is required to be pressed to enable the buffering propping piece to be mounted on the corresponding part of the top of the wafer box, so that more reliable press-mounting equipment is required to be provided. Disclosure of Invention In view of the above, the present invention provides a dual-station press-fitting apparatus for assembling wafer cassettes, so as to solve the above-mentioned technical problems. A double-station press-fitting device for assembling wafer boxes comprises an equipment rack, two moving stations arranged in the equipment rack, and two pressing assemblies respectively acting on the moving stations. The wafer box used for the double-station press-fitting equipment for assembling the wafer box comprises a base, a box cover buckled on the base, a plurality of inserting seats arranged on the box cover and a plurality of buffer pieces inserted in the inserting seats. Each buffer member includes an insertion portion, and a buffer portion provided on the insertion portion. The buffer part is of a diamond-shaped structure surrounded by a plurality of elastic sheets. Each mobile station comprises a sliding rail component, a carrying platform arranged on the sliding rail component, a nylon plate arranged on the carrying platform and four stop blocks arranged on the periphery of the nylon plate. The nylon plate and the carrying platform are concentrically arranged. The stop block is vertically fixed on the carrying platform through a fastener. The two pressing assemblies are respectively arranged on the two moving stations. Each pressing assembly comprises a supporting structure, a servo electric cylinder arranged on the supporting structure and a pressing head mechanism connected to the servo electric cylinder. The servo electric cylinder adopts a multistage pressing work flow when working, the pressure is gradually increased, and the buffer piece is pressed for a plurality of times in a sectionalized way. The pressure head mechanism comprises a lifting plate connected to the servo electric cylinder, two guide posts connected to the lifting plate, a pressing plate connected to the lifting plate, four groups of driving assemblies arranged on the pressing plate, and four movable clamping jaws arranged on the driving assemblies. The four groups of driving assemblies are fixed on the pressing plate and are positioned on one side, far away from the lifting plate, of the pressing plate. The movable clamping jaw comprises a base part connected to the driving assembly, a connecting part perpendicular to the base part, and a pressing end perpendicular to the connecting part. The base is secured to the drive assembly. The connection portion extends perpendicularly away from the exterior of the drive assembly. One end of the pressing end is vertically fixed on the connecting part, and the other end of the pressing end is parallel to the base part. The surface of the pressing end far away from the base part is a pressing surface. The distance from the pressing surface of the pressing end to the base is smaller than the distance between the pressing surface and the base in the deformation direction in the free state of the buffer part. The pressing end is inserted into the diamond-shaped structure of the buffer piece under the action of the driving assembly, and is pressed downwards under the action of the servo electric cylinder to press the buffer piece into the insertion seat. Further, the equipment rack comprises a cabinet body, a w