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CN-121655670-B - Measurement device and system based on cascaded optical resonant cavity

CN121655670BCN 121655670 BCN121655670 BCN 121655670BCN-121655670-B

Abstract

The application relates to the technical field of measuring devices, in particular to a measuring device and a measuring system based on a cascade optical resonant cavity, wherein the measuring device comprises a laser light source for emitting laser beams to a circulator; the circulator is used for guiding the incident laser beam to the fixed resonance component and outputting the reflected light from the fixed resonance component to the photoelectric conversion device, the photoelectric conversion device is used for converting the reflected light into an electric signal, the air resonance device is used for reflecting the incident laser beam with the fixed resonance component and defining the optical cavity length, the fixed resonance component is used for reflecting the incident laser beam with the air resonance device, sensing a signal to be measured is achieved, the incident laser beam is subjected to high-order mode filtering, the processing difficulty of the measuring device is reduced, and the stability of the measuring device is improved.

Inventors

  • WANG HUAN
  • FAN LINLIN
  • ZHANG FENG
  • LONG YUEJIN
  • LIAO CHANGRUI

Assignees

  • 光越科技(深圳)有限公司

Dates

Publication Date
20260512
Application Date
20260204

Claims (6)

  1. 1. The measuring device based on the cascade optical resonant cavity is characterized by comprising a laser light source, a circulator, a photoelectric conversion device, an air resonant device and a fixed resonant assembly, wherein: the laser light source is used for emitting laser beams to the circulator; The circulator is used for guiding the incident laser beam to the fixed resonance component and outputting reflected light from the fixed resonance component to the photoelectric conversion device; A photoelectric conversion device for converting the reflected light into an electrical signal; The air resonance device is used for reflecting the incident laser beam with the fixed resonance component and defining an optical cavity length; The fixed resonance component is used for reflecting the incident laser beam with the air resonance device to realize the sensing of a signal to be detected and filtering a high-order mode of the incident laser beam; the collimator is also included; the circulator is connected with the collimator; The reflection grating is positioned between the circulator and the collimator; the partial reflecting film is positioned at one end of the collimator; the system also comprises a processing unit, a first feedback unit and a second feedback unit; The processing unit is connected between the output end of the photoelectric conversion device and the input end of the first feedback unit, and the output end of the first feedback unit is connected with the laser light source; The processing unit is used for analyzing the electric signal of the photoelectric conversion device, comparing the electric signal with a reference value to obtain an offset value, matching the adjustment parameter of the laser light source according to the offset value, feeding back the adjustment parameter through the first feedback unit to adjust the laser light source, analyzing the electric signal of the photoelectric conversion device, comparing the electric signal with the reference value to obtain an offset value, matching the adjustment parameter of the air resonance device position according to the offset value, and feeding back the adjustment parameter through the second feedback unit to control the moving assembly to adjust the air resonance device position.
  2. 2. The measurement device based on cascaded optical resonators according to claim 1, characterized in that the air resonator device comprises a mirror.
  3. 3. The measurement device based on cascaded optical resonator according to claim 2 further comprising a feedback adjustment assembly for generating an adjustment signal based on an electrical signal for adjusting the laser light source or the air resonator device.
  4. 4. A measurement device based on a cascaded optical resonator according to claim 3 wherein the air resonator device comprises a moving assembly connected to the mirror for changing the position of the mirror in accordance with the adjustment signal of the feedback adjustment assembly.
  5. 5. The measurement device based on cascaded optical resonant cavities of claim 3, wherein the feedback adjustment assembly further comprises a temperature acquisition unit; the temperature acquisition unit is connected between the reflection grating and the processing unit and is used for acquiring temperature signals of the reflection grating; And the feedback adjusting component generates an adjusting signal according to the temperature signal to adjust the laser light source or the air resonance device.
  6. 6. A measurement system based on a cascaded optical resonator, characterized in that it comprises a measurement device based on a cascaded optical resonator according to any one of claims 1 to 5.

Description

Measurement device and system based on cascaded optical resonant cavity Technical Field The application relates to the technical field of measuring devices, in particular to a measuring device and a measuring system based on a cascade optical resonant cavity. Background Optical acoustic wave measurement is mainly divided into two main types of inertial type and non-inertial type according to the difference of sensing principles. The inertial measurement device responds to the change of signals such as sound pressure by means of the displacement of mechanical vibration units such as diaphragms, the low-frequency response is limited by mechanical inertia, the high-frequency response is limited by structural resonant frequency, and signal tailing and distortion are easy to introduce. The non-inertial optical measuring device realizes signal demodulation by detecting the refractive index change of the medium in the cavity caused by sound waves based on the measuring method of the optical resonant cavity, avoids mechanical inertia in principle, and has wider frequency response range and lower signal distortion. The existing non-inertial optical measurement device, especially based on the scheme of the resonant cavity, has the overall performance and reliability limited by the structural design and integration mode of the resonant sensing unit. The common scheme at present is generally formed by a plurality of reflectors, and the structure is complicated in resonant cavity structure and large in volume, so that the preparation process is complicated, the cost is high, the structure is sensitive to environmental disturbance such as temperature fluctuation and mechanical vibration, and the long-term stability is insufficient. In addition, the existing system has strict requirements on alignment and coupling precision of the light path, and the problems can be solved because the misalignment can cause unstable mode or excite a high-order mode, so that the sensing sensitivity is reduced or even the signal is invalid, and the practical application of the system in complex environments or occasions needing long-term stable operation is limited. Disclosure of Invention In order to reduce the processing difficulty of a measuring device and improve the stability of the measuring device, the application provides a measuring device and a measuring system based on a cascade optical resonant cavity, which adopt the following technical scheme: in a first aspect, the application provides a measurement device based on a cascaded optical resonant cavity, comprising a laser light source, a circulator, a photoelectric conversion device, an air resonant device and a fixed resonant assembly, wherein: the laser light source is used for emitting laser beams to the circulator; The circulator is used for guiding the incident laser beam to the fixed resonance component and outputting reflected light from the fixed resonance component to the photoelectric conversion device; A photoelectric conversion device for converting the reflected light into an electrical signal; The air resonance device is used for reflecting the incident laser beam with the fixed resonance component and defining an optical cavity length; the fixed resonance component is used for reflecting the incident laser beam with the air resonance device, sensing a signal to be detected, and filtering the incident laser beam in a high-order mode. Preferably, the fixed resonant assembly includes a reflective grating and a partially reflective film. Preferably, the device further comprises a collimator; the circulator is connected with the collimator; The reflection grating is positioned between the circulator and the collimator; The partially reflective film is located at one end of the collimator. Preferably, the air resonant device comprises a mirror. Preferably, the laser light source or the air resonance device further comprises a feedback adjusting component for generating an adjusting signal according to the electric signal to adjust the laser light source or the air resonance device. Preferably, the air resonance device comprises a moving assembly connected with the reflecting mirror for changing the position of the reflecting mirror according to the adjusting signal of the feedback adjusting assembly. Preferably, the feedback adjustment assembly comprises a processing unit and a first feedback unit; The processing unit is connected between the output end of the photoelectric conversion device and the input end of the first feedback unit, and the output end of the first feedback unit is connected with the laser light source. Preferably, the feedback adjustment assembly further comprises a second feedback unit; The second feedback unit is connected between the processing unit and the moving component of the air resonance device. Preferably, the feedback regulation assembly further comprises a temperature acquisition unit; the temperature acquisition unit is connected betwe