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CN-121656304-B - Vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiment

CN121656304BCN 121656304 BCN121656304 BCN 121656304BCN-121656304-B

Abstract

The invention discloses a vacuum cavity sample transfer device for an angle-resolved photoelectron spectroscopy experiment, which comprises a transfer cavity, wherein the side of the transfer cavity is respectively communicated with an analysis cavity and a sample injection cavity through a communication cavity, and a first gate valve and a second gate valve are arranged in the communication cavity. The transfer cavity is internally provided with a steering arm and a supporting seat provided with a plurality of sections of sample transmission arms, and the supporting seat is provided with a first trigger, a second trigger and a trigger rod. When the driving device drives the multi-section sample transmission arm to stretch out and draw back, the driving device synchronously drives the trigger rod to trigger the first trigger or the second trigger. The lower end of the sleeve is connected with a connecting rod through the connecting rod to realize alignment switching of the trigger and the trigger rod in the steering process. The invention realizes the logical synchronization of the gate valve and the sample conveying stroke through a physical linkage mechanism, namely, the corresponding gate valve is opened immediately when the sample conveying arm moves to a preset position, and the corresponding gate valve is closed immediately after the sample conveying is finished. The design effectively reduces the diffusion of residual gas among the cavities, maintains the ultra-high vacuum environment of the analysis cavity, and remarkably improves the experimental accuracy and the system operation safety.

Inventors

  • TIAN HUI
  • CUI SHENGTAO
  • SUN ZHE
  • LIU YI

Assignees

  • 中国科学技术大学

Dates

Publication Date
20260512
Application Date
20260206

Claims (7)

  1. 1. The vacuum cavity sample conveying device for the angle-resolved photoelectron spectroscopy experiment comprises a transfer cavity (1), wherein an analysis cavity (2) and a sample feeding cavity are respectively communicated with the side of the transfer cavity (1) through a communication cavity (3), a first gate valve (31) and a second gate valve (32) are respectively arranged in the two communication cavities (3), and the vacuum cavity sample conveying device is characterized in that: The transfer cavity (1) is coaxially provided with a steering arm (43), and the lower end of the steering arm (43) extends into the transfer cavity (1) and is provided with a supporting seat (5) in a hanging mode; The support seat (5) is provided with a plurality of sections of sample conveying arms (6), the head ends and the tail ends corresponding to the sections of sample conveying arms (6) are mutually sleeved and are in telescopic fit, the tail end sample conveying arms (6) are arranged on the support seat (5), and the free ends of the head end sample conveying arms (6) are provided with clamping devices for clamping and fixing sample holders (9); The support seat (5) is provided with a first trigger (71), a second trigger (72) and a trigger rod (73), wherein the first trigger (71) is used for triggering and controlling the opening and closing of the first gate valve (31), and the second trigger (72) is used for triggering and controlling the opening and closing of the second gate valve (32); the steering device comprises a steering arm (43), a sleeve (4), a connecting rod (44), a first trigger (71) and a second trigger (72), wherein the sleeve (4) is sleeved on the outer side of the steering arm (43), a second motor (42) for driving the steering arm (43) to perform horizontal angle steering adjustment is arranged beside the sleeve (4), the connecting rod (44) is arranged at the lower end of the sleeve (4), and the connecting rod (44) is used for driving the first trigger (71) and the second trigger (72) to generate switching displacement integrally in the steering process of the steering arm (43) so as to realize the alignment of the target trigger and the trigger rod (73); The first trigger (71) and the second trigger (72) are fixedly arranged into a whole in a row, the first trigger (71) and the second trigger (72) are integrally arranged on a positioning frame (7), the positioning frame (7) is provided with a sliding groove (74) for the first trigger (71) and the second trigger (72) to slide along the length direction, and the positioning frame (7) is provided with a rod sleeve sleeved at the end part of a trigger rod (73) for limiting the telescopic movement of the trigger rod (73); The first trigger (71) and the second trigger (72) are used as a whole, a positioning rod is fixed on the upper side of the first trigger, a positioning groove for accommodating the positioning rod is formed in the positioning frame (7), one end of the connecting rod (44) is hinged to the sleeve (4), and the other end of the connecting rod is hinged to the positioning rod.
  2. 2. The vacuum cavity sample transferring device for the angle-resolved photoelectron spectroscopy experiment according to claim 1, wherein the sample transferring arms (6) are of strip-shaped plate structures, tooth rails (61) are arranged at the center line positions along the length direction, the driving device comprises tooth discs (51), the tooth discs (51) are hinged to the supporting seat (5) through hinged arms (52), tension springs (50) are arranged between the hinged arms (52) and the supporting seat (5), and the ends of the tooth discs (51) are driven by the tension springs (50) to keep meshed with the tooth rails (61) of the sample transferring arms (6) all the time.
  3. 3. The vacuum cavity sample conveying device for the angle-resolved photoelectron spectroscopy experiment according to claim 2, wherein the upper side and the lower side of the sample conveying arm (6) are provided with side walls (62), a groove body is formed on one side of the corresponding sample conveying arm (6) and is used for sleeving the head end and the tail end of the sample conveying arm (6), pulleys (65) are arranged at two ends of the side walls (62), and wheel grooves (63) for limiting the sliding of the pulleys (65) are formed in the inner side and the outer side of the side walls (62).
  4. 4. The vacuum chamber sample transfer device for the angle-resolved photoelectron spectroscopy experiment according to claim 3, wherein a spring piece (66) is connected between the pulley (65) and the side wall (62) and is used for elastically mounting the pulley (65) on the side wall (62), and the tail end of the pulley groove (63) is provided with an arc-shaped groove (64) for limiting the pulley (65).
  5. 5. The vacuum cavity sample transfer device for the angle-resolved photoelectron spectroscopy experiment according to claim 2, wherein the driving device further comprises a first motor (41), the first motor (41) is located at the upper end of the steering arm (43), the steering arm (43) is of a hollow structure, a crankshaft corresponding to the first motor (41) extends through the steering arm (43) and extends to a supporting seat (5), a rotating shaft (53) is fixed at the axis position of the fluted disc (51), chain wheels (54) are respectively arranged at the same plane position of the crankshaft and the rotating shaft, and transmission is carried out between the two chain wheels (54) through a chain (55).
  6. 6. The vacuum cavity sample transfer device for the angle-resolved photoelectron spectroscopy experiment according to claim 5, wherein the supporting seat (5) is provided with an arc waist groove (57) for limiting the end part of the rotating shaft (53) to move, the end part of the rotating shaft (53) is sleeved with a shaft sleeve (56), and the tension spring (50) is arranged between the shaft sleeve (56) and the supporting seat (5).
  7. 7. The vacuum chamber sample transfer apparatus for angle-resolved photoelectron spectroscopy as set forth in claim 6, wherein the trigger rod (73) is mounted on the shaft sleeve (56), the trigger rod (73) is arc-shaped, one end of the trigger rod is fixed on the shaft sleeve (56), and the other end of the trigger rod is used as a trigger end for aligning the first trigger (71) or the second trigger (72).

Description

Vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiment Technical Field The invention belongs to the technical field of synchrotron radiation experimental equipment, and particularly relates to a vacuum cavity sample transfer device for an angle-resolved photoelectron spectroscopy experiment. Background The angle-resolved photoelectron spectroscopy (ARPES) experiment utilizes the characteristics of high brightness, high collimation, adjustable polarization and the like of a synchronous radiation light source to become a super microscope for revealing the microstructure and dynamic process of substances, and is widely applied to the fields of material science, physics, chemistry, biology and the like. The extremely high energy and momentum resolution of ARPES places stringent requirements on the experimental environment in that experiments must be performed in ultra-high vacuum (UHV) environments to extend the "lifetime" of the sample surface and eliminate scattering of the photoelectronic signals by gas molecules, thereby ensuring the accuracy and reliability of the measured data. ARPES is a key experimental technique for revealing the microscopic electronic structure of materials such as metals and semiconductor compounds. To ensure measurement accuracy and eliminate gas molecular interference, the analysis chamber needs to maintain an ultra-high vacuum environment superior to 8×10 -11 torr. However, in practical scientific research, frequent sampling and sampling operations inevitably introduce trace amounts of gas, even resulting in impaired sealability of the apparatus, thereby affecting the vacuum degree and accuracy of experimental results. In order to improve and protect the vacuum environment of the analysis cavity while frequently injecting samples, experimental equipment is generally required to adopt a layer-by-layer progressive mode for sample transfer. Based on the requirement, the standard ARPES experimental device consists of a sample injection cavity, a transfer cavity and an analysis cavity, wherein the sample injection cavity is used for placing a sample from an atmospheric environment and pre-pumping the sample to high vacuum, and the transfer cavity is used as a pressure buffer area to prevent the analysis cavity from being directly exposed to a higher pressure environment during sample injection. Blocking is carried out among the cavities through a communicating cavity provided with a gate valve. Currently, the sample transfer at a line station is mostly dependent on a manual operation of a sample transfer arm. The experimenter needs to judge the position through the naked eye of the observation window to open the gate valve manually for the sample arm to pass. However, in such a complex sample transfer path, which progresses layer by layer, the manual operation has the following significant drawbacks: 1. The action coordination is poor, and collision damage risks exist, namely a physical linkage mechanism is lacked between the manual opening gate valve and the pushing sample transferring arm. When operation is tired or many people fit improperly, the condition that the gate valve is not completely opened and the sample transferring arm is delivered easily appears, so that the end part of the sample transferring arm or the sample support directly impacts the valve plate, the precision sample transferring system is damaged and vacuum sealing is invalid, high maintenance cost is generated, and the experimental progress is seriously influenced. 2. The contradiction between vacuum environment maintenance and experimental efficiency, namely the contradiction between vacuum maintenance and experimental efficiency, namely the opening and closing time of the gate valve is difficult to grasp due to the lack of accurate control of instant linkage. On one hand, operators tend to open the gate valve in advance to avoid collision risk, or fail to close in time after sample transfer is completed, so that an analysis cavity is communicated with a low vacuum cavity for a long time, diffusion and cross contamination of gas molecules are increased, the vacuum degree of the analysis cavity is deteriorated, the vacuum recovery time is prolonged, and on the other hand, if the opening is delayed or the closing is attempted too early due to consideration of vacuum, frequent pause and even mechanical clamping risk in the sample transfer process are caused, so that the experimental efficiency is seriously reduced. Therefore, research and development of a device which can cooperate with layer-by-layer progressive sample conveying logic, realize smooth operation among all cavities and realize instant linkage control of a gate valve according to the stroke of a sample arm is an urgent need for improving the safety and the vacuum stability of ARPES experiments. Disclosure of Invention The invention aims to provide a vacuum cavity sample transfer device for angle-resolved photoe