Search

CN-121696155-B - Fluoride liquid vacuum cleaning device and cleaning method thereof

CN121696155BCN 121696155 BCN121696155 BCN 121696155BCN-121696155-B

Abstract

The invention relates to the technical field of fluoride liquid cleaning, in particular to a fluoride liquid vacuum cleaning device and a cleaning method thereof, comprising a cleaning bin, a base, a placing table, a vibrator, a levelness adjuster, a gravity sensor and a controller, wherein the base is arranged in the cleaning bin, the placing table is arranged on the base in an array mode, a workpiece to be cleaned is placed on the placing table, the vibration frequency of the vibrator can be adjusted, the vibrator is connected to the placing table and used for vibrating the placing table, the levelness adjuster is connected to the base and used for changing the inclination angle of the base compared with the horizontal plane, the gravity sensor is arranged on the placing table and used for testing the weight of the workpiece to be cleaned, the controller is connected with the vibrator, the levelness adjuster and the gravity sensor, the controller controls the vibration frequency of the vibrator to be related to the weight of the workpiece to be cleaned, and the controller controls the levelness adjuster to change the inclination angle of the base compared with the horizontal plane, so that the workpieces with different fluoride liquid retention amounts can reach the same cleaning progress effect in the same time.

Inventors

  • TONG GAOQIANG
  • YAN JUEZHI
  • DU MINGMING
  • SHEN QINGHUA

Assignees

  • 无锡冠亚恒温制冷技术有限公司

Dates

Publication Date
20260508
Application Date
20260212

Claims (6)

  1. 1. The vacuum fluoride liquid cleaning device is used for removing fluoride liquid attached to the surface of a workpiece and comprises a cleaning bin, and is characterized by further comprising: The base is arranged in the cleaning bin; the placing table is arranged on the base in an array manner, and a workpiece to be cleaned is placed on the placing table; The vibrator is connected to the placing table and used for vibrating the placing table; A levelness adjuster connected to the base for changing an inclination angle of the base with respect to a horizontal plane; the gravity sensor is arranged on the placing table and is used for testing the weight of the workpiece; The controller is connected with the vibrator, the levelness adjuster and the gravity sensor; wherein the controller controls the vibration frequency of the vibrator to be related to the weight of the workpiece, and the controller controls the levelness adjuster to change the inclination angle of the base compared with the horizontal plane; The weight of the workpieces, to which the fluorinated liquid is not attached, is a first weight, the levelness adjuster continuously rotates and changes the inclination angle of the base, and when the weight of each workpiece is reduced to the first weight, the base is restored to be horizontal; a resonant cavity is arranged in the placing table, resonant liquid is filled in the resonant cavity, and the resonant cavity is not filled with the resonant liquid; The device also comprises a resonance liquid supplementing device which is arranged at one side of the placing table, wherein an output pipe of the resonance liquid supplementing device is communicated with the resonance cavity, the difference range between the weight of the workpiece and the first weight is a conventional weight range of the surface fluorinated liquid of the workpiece to be cleaned, the weight of the workpiece surface fluorinated liquid exceeds the maximum value of the conventional weight range by 1.5 times and is a second weight, and the resonance liquid supplementing device fills the resonance cavity when the weight of the workpiece exceeds the second weight; The cleaning device further includes: An expansion tank having a top portion storing a clean gas and a bottom portion storing a fluorinated liquid; a gas delivery tube group connecting the expansion tank and the gas inlet end of the cleaning bin; The vacuum pump is arranged on a pipeline of the gas transmission pipe group and used for driving pure gas in the expansion tank to enter the cleaning bin; And the recovery tube group is connected with the expansion tank and the air outlet end of the cleaning bin and is used for recovering the fluoride liquid and the pure gas.
  2. 2. A fluorinated liquid vacuum cleaning apparatus according to claim 1, further comprising a refrigerant member disposed on the pipe line of the recovery pipe group for cooling the fluorinated liquid.
  3. 3. A fluorinated liquid vacuum cleaning apparatus according to claim 2, further comprising an air separation unit having one end connected to said refrigerant member and the other end connected to said expansion tank for separating said fluorinated liquid from said purified gas; wherein, the gas extension includes: a head space, which is respectively communicated with the refrigerant piece and the top of the expansion tank; a bottom space communicating with the bottom of the expansion tank; a liquid-blocking orifice plate fixed between the head space and the bottom space; The venturi tube is arranged on one side of the air separation machine and is communicated with the top space, and the throat part of the venturi tube is communicated with the bottom space.
  4. 4. A method of vacuum cleaning a fluorinated liquid, based on a fluorinated liquid vacuum cleaning apparatus according to any one of claims 1 to 3, characterized in that the method comprises: S1, setting the net weight of the non-attached fluoridized liquid of the workpiece as a first weight, taking the first weight as a calibration weight, placing a plurality of workpiece arrays to be cleaned on the placing table, wherein the base is in a horizontal state at the moment, and the gravity sensor tests the weight of each workpiece at the moment; s2, summarizing the sum of the weights of the workpieces to be cleaned on two sides of the center by taking the center of the base as a reference, wherein the controller controls the levelness adjuster to drive the base to incline towards the side with the larger sum of the weights; S3, starting the vibrator, wherein the controller adjusts the vibration frequency of the vibrator according to the weight of a workpiece, and the vibration frequency of the vibrator increases in a lifting range as the weight of the workpiece increases; And S4, testing that the net weight of the workpiece, to which the fluoride liquid is not attached, is the first weight, and when the weight of the workpiece is reduced to the first weight, driving the base to recover the level by the levelness regulator.
  5. 5. The method for vacuum cleaning a fluorinated liquid according to claim 4, further comprising: s5, forming a gas-liquid mixture of the fluorinated liquid on the surface of the workpiece, cooling, forming fluorinated liquid drops and pure gas after cooling, and carrying out gas-liquid separation on the fluorinated liquid drops and the pure gas to recycle the fluorinated liquid and the pure gas.
  6. 6. The method according to claim 5, wherein the temperature of the liquid droplets of the fluorinated liquid is adjusted according to the property of the fluorinated liquid, the temperature is 20 ℃ when the volatilization temperature of the fluorinated liquid is greater than 40 ℃, and the temperature is 10 ℃ when the volatilization temperature of the fluorinated liquid is 40 ℃ or less.

Description

Fluoride liquid vacuum cleaning device and cleaning method thereof Technical Field The invention relates to the technical field of fluoride liquid cleaning, in particular to a fluoride liquid vacuum cleaning device and a fluoride liquid vacuum cleaning method. Background In the high-tech industries such as semiconductor manufacturing, precision optics, aerospace, etc., fluorinated liquids are widely used as cleaning agents, coolants or impregnating liquids due to their excellent chemical stability, insulation and heat conductivity properties. During the production process, the fluoridation liquid can be attached to the surface of the workpiece and the inside of the complex cavity and the micro gap. Because the fluoride liquid is expensive, the high-efficiency recovery of the fluoride liquid is important for reducing the production cost, and meanwhile, the residual fluoride liquid can influence the quality of the subsequent process steps, so that the fluoride liquid needs to be thoroughly removed, and the conventional device generally adopts fixed vibration frequency and fixed workpiece placement angle to clean all workpieces. However, in actual production, the weight, shape and size of the workpieces to be cleaned are greatly different, the amount of the fluorinated liquid retained on the surfaces of the workpieces to be cleaned in the same batch is more different, the workpieces to be cleaned in the same batch are generally put into a cleaning machine to be cleaned at the same time, and the cleaning finishing time is the same. Disclosure of Invention Therefore, the invention aims to solve the problems that the prior art cannot clean workpieces with different strength aiming at different retention degrees of the fluoridation liquid, so that the cleaning effect is unbalanced, the average quality of products and the implementation of subsequent procedures are possibly influenced, therefore, the fluoride liquid vacuum cleaning device is arranged, and the cleaning strength of the fluoride liquid can be adjusted through the weight of the workpiece to be cleaned, so that workpieces with different hold-up amounts of the fluoride liquid can be cleaned in the same time, and the contradiction phenomenon that excessive cleaning and incomplete cleaning occur is prevented. In order to solve the technical problems, the invention provides a fluorinated liquid vacuum cleaning device for removing fluorinated liquid attached to the surface of a workpiece, which comprises a cleaning bin and further comprises: The base is arranged in the cleaning bin; the placing table is arranged on the base in an array manner, and a workpiece to be cleaned is placed on the placing table; The vibrator is connected to the placing table and used for vibrating the placing table; A levelness adjuster connected to the base for changing an inclination angle of the base with respect to a horizontal plane; the gravity sensor is arranged on the placing table and is used for testing the weight of the workpiece; The controller is connected with the vibrator, the levelness adjuster and the gravity sensor; The controller controls the vibration frequency of the vibrator to be related to the weight of a workpiece, and the controller controls the levelness adjuster to change the inclination angle of the base compared with the horizontal plane. In one embodiment of the present invention, the weight of the workpiece to which the fluorinated liquid is not attached is a first weight, the levelness adjuster continuously rotates and changes the inclination angle of the base, and when the weight of each workpiece is reduced to the first weight, the base returns to the level. In one embodiment of the invention, a resonant cavity is arranged in the placing table, resonant liquid is filled in the resonant cavity, and the resonant cavity is not filled with the resonant liquid. In one embodiment of the invention, the device further comprises a resonance liquid supplementing device which is arranged on one side of the placing table, wherein the resonance liquid supplementing device is connected with the controller, an output pipe of the resonance liquid supplementing device is communicated with the resonance cavity, the difference value range of the weight of the workpiece and the first weight is a conventional weight range of the surface fluoride liquid of the workpiece to be cleaned, the weight of the surface fluoride liquid of the workpiece exceeds the maximum value of the conventional weight range by 1.5 times, the weight of the surface fluoride liquid of the workpiece is a second weight, and the resonance liquid supplementing device fills the resonance cavity when the weight of the workpiece exceeds the second weight. In one embodiment of the invention, the cleaning device further comprises: An expansion tank having a top portion storing a clean gas and a bottom portion storing a fluorinated liquid; a gas delivery tube group connecting the expansion tank and the gas