CN-121702147-B - Continuous sintering integrated device for processing aluminum nitride ceramic substrate

CN121702147BCN 121702147 BCN121702147 BCN 121702147BCN-121702147-B

Abstract

The invention discloses an integrated device for processing and continuously sintering an aluminum nitride ceramic substrate, and belongs to the field of processing and conveying of ceramic substrates. The invention discloses an aluminum nitride ceramic substrate processing continuous sintering integrated device, which comprises a base, a conveying belt, an aluminum nitride ceramic substrate sintering furnace, a ceramic substrate placing seat, a ceramic substrate feeding area, a ceramic substrate conveying area and a ceramic substrate discharging area which are connected, wherein a pushing plate is slidably connected in a long groove, an auxiliary wheel and a driving wheel are rotatably connected in a supporting seat respectively, and a limiting plate is slidably arranged on the ceramic substrate conveying area.

Inventors

WANG WENLI
WANG NANA
YANG JUNHUA
WANG GAOXIANG
WANG HUI

Assignees

浙江昶科陶瓷新材料有限公司

Dates

Publication Date: 20260505
Application Date: 20260205

Claims (5)

1. The utility model provides an aluminium nitride ceramic substrate processing continuous sintering integrated device, includes base (1), conveyer belt (104), aluminium nitride ceramic substrate fritting furnace (105) and ceramic substrate place seat (106), conveyer belt (104) and aluminium nitride ceramic substrate fritting furnace (105) set up respectively at the both ends of base (1), its characterized in that still includes: the ceramic substrate feeding area (101), the ceramic substrate conveying area (102) and the ceramic substrate discharging area (103) are connected and are arranged on the base (1), the ceramic substrate feeding area (101) corresponds to the conveying belt (104), and the ceramic substrate discharging area (103) corresponds to the aluminum nitride ceramic substrate sintering furnace (105); The long groove (2) is arranged on the ceramic substrate conveying area (102), and a pushing plate (508) is connected in a sliding manner in the long groove (2); The support seat (203) is fixedly connected with the base (1), and the support seat (203) is respectively and rotatably connected with an auxiliary wheel (211) and a driving wheel (212); A limiting plate (604) slidably disposed on the ceramic substrate transfer area (102); the support seat (203) is rotatably connected with a first rotating shaft (205) and a second rotating shaft (206); the novel anti-theft lock is characterized in that a first groove (201) is formed in each of the supporting seat (203) and the base (1), a driving gear (3) is arranged at one end of the first rotating shaft (205) arranged in the first groove (201), a locking rod (301) propped against the irregular plate (5) is connected to the base (1) in a sliding mode, a baffle plate (302) is arranged at one end of the locking rod (301) arranged in the first groove (201), a second elastic piece (303) is arranged between the baffle plate (302) and the inner wall of the first groove (201), and a tooth block (304) meshed with the driving gear (3) is arranged on the locking rod (301); one end of the locking rod (301) close to the irregular plate (5) is obliquely arranged, an inclined surface (501) is arranged on one side, close to the inside, of the irregular plate (5), a guide rod (406) is fixedly arranged in the long groove (2), and the irregular plate (5) is slidably arranged on the guide rod (406); The support seat (203) is internally and fixedly provided with a U-shaped plate (204), the first rotating shaft (205) and the second rotating shaft (206) are both rotationally connected with the U-shaped plate (204), the first rotating shaft (205) and the second rotating shaft (206) are respectively and fixedly provided with a first supporting rod (209) and a second supporting rod (210), the auxiliary wheel (211) is rotationally connected to the first supporting rod (209), and the driving wheel (212) is rotationally connected to the second supporting rod (210); a circular plate (207) is arranged on each of the first rotating shaft (205) and the second rotating shaft (206), a torsion spring (208) is arranged between each of the two circular plates (207) and the inner wall of the supporting seat (203), and the two torsion springs (208) are respectively sleeved on the outer walls of the first rotating shaft (205) and the second rotating shaft (206); A fixed plate (213) is fixedly arranged in the long groove (2), a stepping motor (404) is arranged on the outer wall of the fixed plate (213), a screw rod (405) is arranged at the output end of the stepping motor (404), a deformed plate (5) is connected to the screw rod (405) in a threaded manner, an L plate (502) is arranged on the deformed plate (5) in a sliding manner, a connecting plate (507) is arranged on the L plate (502), a pushing plate (508) is arranged at the top of the connecting plate (507), The novel pressure switch is characterized in that a trapezoid block (402) is further fixedly arranged on the inner wall of the first groove (201), a first pressure switch (403) is arranged on the trapezoid block (402), a sleeve (4) is arranged at one end of the second rotating shaft (206) in the first groove (201), a pressing plate (401) matched with the first pressure switch (403) is arranged on the outer wall of the sleeve (4), and the first pressure switch (403) is electrically connected with a stepping motor (404) through a wire.
2. The continuous sintering integrated device for processing an aluminum nitride ceramic substrate according to claim 1, wherein the outer walls of the first support rod (209) and the second support rod (210) are respectively provided with a buffer plate (214), and a first elastic piece (215) is arranged between the buffer plate (214) and the inner wall of the U-shaped plate (204).
3. The continuous sintering integrated device for processing an aluminum nitride ceramic substrate according to claim 1, wherein a rubber pad (509) is arranged on the outer wall of the pushing plate (508).
4. The aluminum nitride ceramic substrate processing and continuous sintering integrated device according to claim 3, wherein a second groove (202) is formed in the base (1), a T-shaped toothed plate (6) which is connected with the second groove (202) in a sliding mode is arranged on the side wall of the special-shaped plate (5), an auxiliary gear (601) is further arranged in the second groove (202), the T-shaped toothed plate (6) is meshed with the auxiliary gear (601), a sliding block (602) is connected onto the base (1) and the ceramic substrate conveying area (102) in a sliding mode, a rack plate (603) meshed with the auxiliary gear (601) is arranged at the bottom of the sliding block (602), a limiting plate (604) is fixedly arranged on the sliding block (602), and a plugboard (605) is arranged at the end portion of the limiting plate (604).
5. The aluminum nitride ceramic substrate processing and continuous sintering integrated device according to claim 3, wherein a fixing rod (504) is fixedly arranged on the top of the irregular plate (5), the L plate (502) is connected with the fixing rod (504) in a sliding mode, a spring (505) is sleeved on the fixing rod (504), the spring (505) is arranged between the top of the irregular plate (5) and the L plate (502), a stop block (506) is arranged on the outer wall of the fixing rod (504), and a second pressure switch (503) is further arranged on the top of the irregular plate (5).

Description

Continuous sintering integrated device for processing aluminum nitride ceramic substrate Technical Field The invention relates to the technical field of ceramic substrate processing and conveying, in particular to an integrated device for continuously sintering an aluminum nitride ceramic substrate. Background The aluminum nitride ceramic substrate is widely applied to the field of electronic device packaging due to the high heat conduction and high insulation characteristics, high-temperature sintering is required to be completed through a continuous aluminum nitride ceramic substrate sintering furnace in the preparation process, and accurate conveying of the substrate is one of the core links for guaranteeing sintering consistency and yield. At present, the conveying and positioning precision of the sintering and conveying system of aluminum nitride ceramic substrates is insufficient, a pushing plate does not have a linkage limiting mechanism, the pushing plate is likely to be in a non-initial position, collision is generated between a ceramic substrate placing seat for placing the ceramic substrates and the pushing plate, the position of the ceramic substrate placing seat entering a sintering station is deviated, the next group of ceramic substrate placing seats can be easily slid into the pushing position in advance, a plurality of groups of ceramic substrate placing seats are stacked or are deviated, the problem of non-uniform heating of the substrate during sintering is further caused, and the yield is reduced by about 8% -12%. Disclosure of Invention The invention aims to solve the problems in the prior art, and provides an integrated device for processing and continuously sintering an aluminum nitride ceramic substrate. In order to achieve the above purpose, the present invention adopts the following technical scheme: the utility model provides an aluminium nitride ceramic substrate processing continuous sintering integrated device, includes base, conveyer belt, aluminium nitride ceramic substrate fritting furnace and ceramic substrate place the seat, conveyer belt and aluminium nitride ceramic substrate fritting furnace set up respectively at the both ends of base, still include: the ceramic substrate feeding area, the ceramic substrate conveying area and the ceramic substrate discharging area which are connected are all arranged on the base, the ceramic substrate feeding area corresponds to the conveying belt, and the ceramic substrate discharging area corresponds to the aluminum nitride ceramic substrate sintering furnace; The long groove is arranged on the ceramic substrate conveying area, and a pushing plate is connected in a sliding manner in the long groove; the support seat is fixedly connected with the base, and the support seat is respectively and rotatably connected with an auxiliary wheel and a driving wheel; and the limiting plate is arranged on the ceramic substrate conveying area in a sliding manner. Preferably, the first rotating shaft and the second rotating shaft are rotatably connected to the supporting seat, a U-shaped plate is fixedly arranged in the supporting seat, the first rotating shaft and the second rotating shaft are rotatably connected with the U-shaped plate, a first supporting rod and a second supporting rod are fixedly arranged on the first rotating shaft and the second rotating shaft respectively, the auxiliary wheel is rotatably connected to the first supporting rod, and the driving wheel is rotatably connected to the second supporting rod. Further, circular plates are arranged on the first rotating shaft and the second rotating shaft, torsion springs are arranged between the two circular plates and the inner wall of the supporting seat, and the two torsion springs are respectively sleeved on the outer walls of the first rotating shaft and the second rotating shaft. Further, the outer walls of the first support rod and the second support rod are respectively provided with a buffer plate, and a first elastic piece is arranged between the buffer plates and the inner walls of the U-shaped plates. Preferably, the fixed plate is fixedly arranged in the long groove, the stepping motor is arranged on the outer wall of the fixed plate, the output end of the stepping motor is provided with a screw rod, a deformed plate is connected to the screw rod in a threaded mode, an L plate is arranged on the deformed plate in a sliding mode, a connecting plate is arranged on the L plate, the pushing plate is arranged at the top of the connecting plate, and a rubber pad is arranged on the outer wall of the pushing plate. Further, first recess has all been seted up on supporting seat and the base, first pivot is arranged in and is equipped with drive gear on the one end in the first recess, sliding connection has the latch lever that offsets with the abnormal plate on the base, the one end that the latch lever was arranged in the first recess is equipped with the baffle, be equipped wit