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CN-121719749-B - Dual-channel circulating pump of semiconductor temperature control equipment and control method

CN121719749BCN 121719749 BCN121719749 BCN 121719749BCN-121719749-B

Abstract

The invention relates to the technical field of conveying pump structures, in particular to a double-channel circulating pump of a semiconductor temperature control device and a control method, wherein the double-channel circulating pump comprises a pump body, a channel arranged in the pump body and a pushing unit arranged in the channel and used for pushing fluid in the channel to flow, the pushing unit is horizontally positioned in the channel, the pushing unit comprises a hollow shaft rotatably arranged on the inner wall of the channel, the fan blades can be inclined towards different directions according to requirements through adjustment of an adjusting unit on the direction of the fan blades, so that forward or reverse conveying of the fluid is realized.

Inventors

  • ZHOU HANGJUN
  • YU SHUYI
  • TONG GAOQIANG
  • YAN JUEZHI

Assignees

  • 无锡冠亚智能装备有限公司

Dates

Publication Date
20260508
Application Date
20260225

Claims (9)

  1. 1. The double-channel circulating pump of the semiconductor temperature control equipment is characterized by comprising a pump body (1), a channel (2) arranged in the pump body (1) and a pushing unit (3) arranged in the channel (2) and used for pushing fluid in the channel (2) to flow, wherein the pushing unit (3) is horizontally arranged in the channel (2); The pushing unit (3) comprises a hollow shaft (4) rotatably arranged on the inner wall of the channel (2), the axial direction of the hollow shaft (4) is consistent with the flow direction of fluid in the channel (2), a plurality of rotary tables (5) are rotatably arranged on the outer wall of the hollow shaft (4), the rotary tables (5) are distributed around the circumferential direction of the hollow shaft (4), and each rotary table (5) is provided with a fan blade (6) for providing pushing force for the fluid; The rotary hollow shaft (4) is internally provided with an adjusting unit for adjusting the rotation of each rotary table (5), when the fan blades (6) incline towards one end of the hollow shaft (4), the rotary hollow shaft (4) and the fan blades (6) provide forward flowing thrust for the fluid, and when the fan blades (6) incline towards the other end of the hollow shaft (4), the rotary hollow shaft (4) and the fan blades (6) provide reverse flowing thrust for the fluid; sealing tables (7) are filled between two adjacent rotary tables (5); a cavity (22) is formed in the pump body (1), and the rotary table (5) extends to the inside of the hollow shaft (4) towards the end face of the axis of the hollow shaft (4); the adjusting unit comprises a movable shaft (8) which is inserted in the hollow shaft (4), one end of the movable shaft (8) passes through the channel (2) and extends into the cavity (22), the other end of the movable shaft (8) is rotatably provided with a plurality of first connecting shafts (9), the plurality of first connecting shafts (9) are distributed around the circumference of the movable shaft (8), the rotation axis of the first connecting shafts (9) is along the radial direction of the movable shaft (8), a connecting rod (10) is fixed on the first connecting shafts (9), the connecting rod (10) is connected with the rotary table (5) through a second connecting shaft (11), and the second connecting shafts (11) are eccentrically positioned on the rotary table (5); The two movable shafts (8) in the cavity (22) are in butt joint through a connecting disc (12), the radius of the connecting disc (12) is smaller than that of the movable shafts (8), and therefore the end surfaces of the two movable shafts (8) and the connecting disc (12) between the two movable shafts form a circular groove together; A driving plate (13) is arranged in the cavity (22), the driving plate (13) is clamped into the circular groove, a polygonal shaft (14) is inserted in the middle of the driving plate (13) in a sliding mode, two ends of the polygonal shaft (14) are rotatably arranged on the inner wall of the cavity (22), and the driving plate (13) is connected with the polygonal shaft (14) through a spring (15); The hollow shaft (4) is composed of a movable sleeve (23) positioned in the middle and two rotating sleeve shafts (24) positioned at two ends of the movable sleeve (23), the rotating sleeve (24) is inserted into the movable sleeve (23) in a sliding mode, the movable sleeve (23) is elastically connected with the rotating sleeve (24) through a plate spring, and the rotary table (5) and the sealing table (7) are both positioned on the movable sleeve (23).
  2. 2. The dual-channel circulating pump of semiconductor temperature control equipment according to claim 1, wherein a sealing table (7) is fixed on the outer wall of the hollow shaft (4), two planes are arranged on the sealing table (7), one plane is perpendicular to the axis of one turntable (5) of two adjacent turntables (5), and the other plane is perpendicular to the axis of the other turntable (5) of the two adjacent turntables (5); The end face of the fan blade (6) facing the axis of the hollow shaft (4) is a smooth surface, the smooth surface is in sliding contact with a plane on the sealing table (7), and when the surface of the fan blade (6) is perpendicular to the axis of the hollow shaft (4), the plurality of fan blades (6) and the plurality of sealing tables (7) form a cover and seal the channel (2).
  3. 3. The dual-channel circulating pump of semiconductor temperature control equipment according to claim 2, wherein both end surfaces of the sealing table (7) along the axial direction of the hollow shaft (4) are arc surfaces.
  4. 4. A two-channel circulating pump for semiconductor temperature control equipment according to claim 3, wherein the number of the channels (2) and the number of the pushing units (3) are two, the two channels (2) are all arranged in the pump body (1), the directions of the two channels (2) are opposite, the directions of fluid in the two channels (2) are opposite, and the two pushing units (3) are respectively arranged in the two channels (2).
  5. 5. A two-channel circulation pump for semiconductor temperature control equipment according to claim 4, characterized in that when the moving shaft (8) moves, the moving shaft (8) pulls the turntable (5) to rotate through the second connecting shaft (11); Wherein the two movable shafts (8) are butted in the cavity (22).
  6. 6. A two-channel circulation pump for semiconductor temperature control equipment according to claim 5, characterized in that the axis of the turntable (5) is offset from the axis of the first connecting shaft (9).
  7. 7. The dual-channel circulating pump of semiconductor temperature control equipment according to claim 6, wherein the stirring unit comprises a cross rod (16) arranged in a motor (21), a sliding sleeve (17) is slidably arranged on the cross rod (16), two stirring posts (18) for stirring the movement of the driving plate (13) are arranged on the surface of the sliding sleeve (17) facing the driving plate (13), and the sliding sleeve (17) is connected with the inner wall of the motor (21) through an air cylinder (19).
  8. 8. The dual-channel circulating pump of the semiconductor temperature control equipment according to claim 7, wherein worm teeth are arranged on the outer wall of the moving shaft (8), a worm (20) meshed with the worm teeth is rotationally arranged on the motor (21), and a motor (21) for providing power for the worm (20) is arranged on the pump body (1).
  9. 9. The control method of a dual-channel circulation pump of a semiconductor temperature control apparatus according to claim 8, comprising the steps of: S1, connecting two ends of a channel (2) on a circulating pump into a pipeline; s2, enabling fluid in the pipeline to naturally flow into the channel (2), starting the motor (21), and enabling the motor (21) to drive the movable shaft (8) to rotate through the worm (20) so that the hollow shaft (4) and the fan blades (6) are in a rotating state; S3, pushing the driving plate (13) to move through the stirring unit, wherein the driving plate (13) can push the adjusting unit to move through a circular groove between the two moving shafts (8), so that the fan blades (6) incline; s4, the fan blades (6) rotate and provide pushing force for the fluid; S5, when the flow direction of the fluid needs to be regulated, the position of the driving plate (13) is regulated through the stirring unit, and the inclination direction of the fan blade (6) is regulated by the regulating unit.

Description

Dual-channel circulating pump of semiconductor temperature control equipment and control method Technical Field The invention relates to the technical field of conveying pump structures, in particular to a double-channel circulating pump of semiconductor temperature control equipment and a control method. Background Semiconductor temperature control devices generally require that both high and low temperature media be delivered by a circulation pump to effect corresponding temperature control of the device. Two media with large temperature difference are conveyed simultaneously, so that two independent circulating pumps are required to work, and synchronous conveying of the two media can be completed. The semiconductor temperature control equipment is placed in a dust-free workshop, the workshop occupation area is limited, two circulating pumps are utilized for working, the space occupation is large, the energy consumption and the operation cost are high, and the resource waste is caused. Meanwhile, a general circulating pump is characterized in that a motor provides power for an impeller, the impeller drives a medium to perform centrifugal motion, and the medium is pressurized and conveyed from the input end of a pump chamber to the output end of the pump chamber, so that the conveying function of fluid can be realized. In the semiconductor temperature control equipment, the circulating pump of the type can only flow unidirectionally due to limited flow direction, which is not beneficial to installation. And, when both high and low temperature media are transported therein, a quick response is required, and the flow direction is changed, the functionality is also poor. Disclosure of Invention In order to solve the technical problems, the invention provides a semiconductor temperature control equipment double-channel circulating pump and a control method, and the specific technical scheme adopted by the invention is as follows: The semiconductor temperature control equipment double-channel circulating pump comprises a pump body, a channel arranged in the pump body and a pushing unit arranged in the channel and used for pushing fluid in the channel to flow, wherein the pushing unit is horizontally positioned in the channel; the pushing unit comprises a hollow shaft rotatably arranged on the inner wall of the channel, the axial direction of the hollow shaft is consistent with the flow direction of fluid in the channel, a plurality of rotary tables are rotatably arranged on the outer wall of the hollow shaft, the rotary tables are distributed around the circumferential direction of the hollow shaft, and each rotary table is provided with a fan blade for providing pushing force for the fluid; The rotary hollow shaft and the fan blades provide forward flowing thrust for the fluid when the fan blades incline towards one end of the hollow shaft, and reverse flowing thrust for the fluid when the fan blades incline towards the other end of the hollow shaft. In the implementation, a sealing table is filled between two adjacent rotary tables, the sealing table is fixed on the outer wall of the hollow shaft, two planes are arranged on the sealing table, one plane is perpendicular to the axis of one rotary table of the two adjacent rotary tables, and the other plane is perpendicular to the axis of the other rotary table of the two adjacent rotary tables; the end face of the fan blade, which faces the axis of the hollow shaft, is set to be a smooth surface, the smooth surface is in sliding contact with a plane on the sealing table, and when the surface of the fan blade is vertical to the axis of the hollow shaft, the fan blade and the sealing tables form a cover and seal the channel. In the implementation, the two end surfaces of the sealing table along the axial direction of the hollow shaft are both arc surfaces. In optimizing the implementation, the number of the channels and the number of the pushing units are two, the two channels are all arranged in the pump body, the directions of the two channels are opposite, and the fluid flow directions in the two channels are opposite, and the two pushing units are respectively arranged in the two channels. In the optimization of the implementation, a cavity is formed in the pump body, and the end face of the turntable, which faces the axis of the hollow shaft, extends into the hollow shaft; The adjusting unit comprises a movable shaft inserted in the hollow shaft, one end of the movable shaft penetrates through the channel and extends into the cavity, the other end of the movable shaft is rotatably provided with a plurality of first connecting shafts, the first connecting shafts are distributed around the circumference of the movable shaft, the rotating axes of the first connecting shafts are in the radial direction of the movable shaft, connecting rods are fixed on the first connecting shafts, the connecting rods are connected with the rotary table through second connecting