CN-121751418-B - Dual-loop control method and system for medium-frequency induction heating of semiconductor body fluid source

CN121751418BCN 121751418 BCN121751418 BCN 121751418BCN-121751418-B

Abstract

The invention relates to a double-loop control method and a double-loop control system for medium-frequency induction heating of a semiconductor liquid source, and belongs to the technical field of semiconductor manufacturing configuration equipment. The method comprises the steps of obtaining medium-frequency induction frequency, synchronously adjusting resonant frequency, providing a liquid source heating control basis, constructing a temperature-pressure dual-loop feedback curve, dynamically adjusting inversion output power through a proportional integral algorithm, controlling the amplitude and distribution of medium-frequency induction heating current, transmitting the medium-frequency induction heating current to a flexible heating coil through a twisted pair shielding wire and a differential signal interface through a differential serial communication protocol, inducing eddy current to heat a liquid source, controlling the temperature of an induction eddy current heat source based on a fan-free cooling scheme, adjusting cooling intensity in association with the medium-frequency induction frequency, and executing power limitation when load impedance is abnormal based on built-in safety interlocking logic when the fact that the temperature of the liquid source deviates from a preset safety cooling temperature interval is monitored.

Inventors

Gan wan
SHEN JIA
JIANG FURONG
LI ZHEN

Assignees

上海盛韬半导体科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260227

Claims (12)

1. The double-loop control method for medium-frequency induction heating of the semiconductor body fluid source is characterized by comprising the following steps of: s1, acquiring an intermediate frequency induction frequency, controlling the frequency range of outputting intermediate frequency alternating current based on a full-bridge insulation inversion topological structure, synchronously adjusting the resonant frequency through a phase-locked loop, enabling the inversion output frequency to always track a load resonant point, and providing a liquid source heating control foundation; S2, constructing a temperature-pressure dual-loop feedback curve, collecting liquid source bottle wall temperature and pressure signals in real time, comparing the temperature signals and the pressure signals with corresponding target set values, generating temperature deviation signals and pressure deviation signals, dynamically adjusting inversion output power through a proportional-integral algorithm, controlling the amplitude and the distribution of the medium-frequency induction heating current, and generating a directional vortex heating signal; s3, constructing a closed electromagnetic shielding loop according to a reflux path formed by induced current of the directional eddy current heating signal, and transmitting the closed electromagnetic shielding loop to a flexible heating coil through a twisted pair shielding wire and a differential signal interface by a differential serial communication protocol, and inducing an eddy current heating liquid source; and S4, controlling the temperature of the induced vortex heat source based on a fanless cooling scheme, and regulating cooling intensity by associating with intermediate frequency induced electric frequency, and when the liquid source temperature is monitored to deviate from a preset safe cooling temperature interval, executing power limitation when load impedance is abnormal based on built-in safety interlocking logic.
2. The method of claim 1, wherein the method for obtaining the intermediate frequency induction frequency comprises the steps of modeling equivalent impedance of an intermediate frequency induction heating load, calculating a resonance frequency interval of a load system, performing intermediate frequency sweep detection, collecting inversion output voltage and current signals, calculating a phase difference between the voltage and the current, determining an actual resonance frequency of the load according to a frequency point with the minimum phase difference or the maximum current amplitude, and obtaining the frequency induction frequency by taking the frequency as an initial output frequency.
3. The method of claim 1, wherein the method for controlling the frequency range of the output medium-frequency alternating current by the full-bridge insulation inversion topology structure is characterized in that a target frequency interval of the output medium-frequency alternating current of the inverter is preset according to the heating power requirement of the medium-frequency induction heating load, the driving signal of the full-bridge inversion power switch is subjected to frequency modulation in the target frequency interval, the working frequency of the output alternating current of the inverter is limited not to exceed the upper limit and the lower limit of the target frequency interval, the target frequency interval is used as a frequency constraint condition of the phase-locked loop, and when the load resonance frequency changes, the output frequency of the phase-locked loop is always limited in the target frequency interval, and the frequency range of the output medium-frequency alternating current is controlled.
4. The method according to claim 1, wherein the method for synchronously adjusting the resonant frequency of the phase-locked loop is characterized in that a phase difference is calculated according to an intermediate frequency alternating voltage signal and an intermediate frequency alternating current signal output by a full-bridge insulation inversion topological structure, the phase difference is used as a phase error signal of the phase-locked loop, the phase error signal is filtered and fed back through the phase-locked loop, and the resonant frequency of the intermediate frequency alternating current output by the inverter is dynamically adjusted.
5. The method of claim 2, wherein the temperature-pressure dual-loop feedback curve is constructed by setting a target temperature curve and a target pressure curve according to characteristics of a semiconductor body fluid source and process requirements, performing filtering time alignment on a wall temperature signal and an internal pressure signal of the fluid source, mapping the temperature signal and the internal pressure signal to corresponding target position detection control deviation values respectively, wherein the control deviation values comprise temperature control deviation and pressure control deviation, constructing a temperature-pressure dual-loop feedback curve, and coordinating two paths of control amounts according to a preset priority rule when the temperature control deviation and the pressure control deviation coexist, so as to obtain feedback data of inversion output power.
6. The method of claim 5, wherein the method for dynamically adjusting the inversion output power by the proportional-integral algorithm comprises the steps of comparing the temperature and pressure signals of the wall of the liquid source bottle with target set temperature and pressure values to obtain temperature deviation and pressure deviation values, carrying out weighted superposition according to preset weight coefficients to obtain a power control integrated error signal, inputting the power control integrated error signal to a proportional-integral controller, carrying out amplitude limiting or anti-integral saturation treatment on an integral term, and adjusting the inversion output power.
7. The method of claim 4, wherein the method for generating the directional eddy current heating signal comprises adjusting the amplitude of the intermediate frequency induction heating current output by the full-bridge insulation inversion topology according to the inversion output power adjustment command output by the proportional-integral controller, and controlling the current phase and the on-off time sequence of the induction heating coil under the condition that the frequency of the intermediate frequency induction heating current is in a load resonance tracking state, so as to generate the corresponding directional eddy current heating signal.
8. The method of claim 2, wherein the differential serial communication protocol transmits the directional eddy current heating signal by differentially encoding the directional eddy current heating signal to enable the same signal to be transmitted in the form of a pair of electric signals with equal amplitude and opposite phases, and encapsulates the power adjustment parameters in the directional eddy current heating signal according to a frame structure to transmit the directional eddy current heating signal in a strong electromagnetic interference environment.
9. The method of claim 4, wherein the fanless cooling scheme comprises a gas cabinet self-circulating gas cooling system and a peltier solid-state active refrigeration heat dissipation system; The self-circulation gas cooling system of the gas holder is internally provided with a spiral guide channel, so that natural convection is generated after the gas in the gas holder is heated and the gas circulates along a preset path, and the gas is driven to flow in a self-circulation manner by utilizing the density difference formed by the temperature gradient in the gas holder, so that heat is conducted to the wall of the gas holder or a heat dissipation structure from a high temperature area, and a gas production-heat dissipation cavity-downstream self-circulation loop of the gas holder is formed; The Peltier solid active refrigeration and heat dissipation system is characterized in that a control current is applied, a control cold end is thermally coupled with a heating end, heat generated by the heating end is actively extracted, the heat is thermally connected with a heat dissipation structure, the extracted heat is released to the external environment, and active temperature control heat dissipation is completed.
10. The method of claim 2, wherein the safe cooling temperature interval is set by determining a corresponding minimum safe temperature threshold and a corresponding maximum safe temperature threshold according to an allowable working temperature range of a liquid source bottle body, and correcting the minimum safe temperature threshold and the maximum safe temperature threshold by combining the heat radiation capacity of a self-circulating gas cooling system of a gas holder and a Peltier solid active refrigeration heat radiation system under a fanless cooling scheme, and setting a safe cooling temperature interval.
11. The method of claim 7, wherein the method for limiting execution power by built-in safety interlock logic comprises judging whether an overtemperature or load impedance abnormality exists according to the impedance state of an intermediate frequency induction heating load and the working state of a cooling system, triggering safety interlock control when any parameter is detected to exceed a corresponding safety threshold value, and executing power limitation according to an abnormality level, wherein the safety interlock control comprises executing inversion output power limitation or frequency offset control when a slight abnormality is detected, triggering a Peltier solid active refrigeration heat dissipation system and limiting the output of a directional eddy current heating signal when a moderate abnormality is detected, immediately turning off a full-bridge insulation inversion topology and maintaining a system locking state until abnormality release or system reset and maintaining the interlocking state before abnormality release.
12. A dual loop control system for medium frequency induction heating of a semiconductor body fluid source for performing the method of any one of claims 1-11, comprising: The intermediate frequency resonance control module is used for acquiring intermediate frequency induction frequency, controlling the frequency range of outputting intermediate frequency alternating current based on a full-bridge insulation inversion topological structure, synchronously adjusting the resonance frequency through a phase-locked loop, enabling the inversion output frequency to always track a load resonance point, and providing a liquid source heating control basis; The temperature-pressure dual-feedback control module is used for constructing a temperature-pressure dual-loop feedback curve, collecting liquid source bottle wall temperature and pressure signals in real time, comparing the temperature signals and the pressure signals with corresponding target set values, generating temperature deviation signals and pressure deviation signals, dynamically adjusting inversion output power through a proportional integral algorithm, controlling the amplitude and the distribution of the medium-frequency induction heating current, and generating a directional vortex heating signal; the differential shielding transmission module constructs a closed electromagnetic shielding loop according to a reflux path formed by induced current of the directional eddy current heating signal, and transmits the closed electromagnetic shielding loop to the flexible heating coil through a twisted pair shielding wire and a differential signal interface by a differential serial communication protocol, and the induced eddy current heating liquid source; And the cooling interlocking limiting module is used for controlling the temperature of the induction vortex heat source based on a fanless cooling scheme, regulating cooling intensity in association with the medium-frequency induction electric frequency, and executing power limiting when the load impedance is abnormal based on the built-in safety interlocking logic when the liquid source temperature is monitored to deviate from a preset safe cooling temperature interval.

Description

Dual-loop control method and system for medium-frequency induction heating of semiconductor body fluid source Technical Field The invention belongs to the technical field of semiconductor manufacturing configuration equipment, and particularly relates to a double-loop control method and system for medium-frequency induction heating of a semiconductor body fluid source. Background In the processes of semiconductor fabrication, thin film deposition, and chemical vapor delivery, the liquid precursor or reactant liquid source is typically heated under controlled conditions to ensure stable vaporization or delivery properties. The existing liquid source heating mode mostly adopts the modes of resistance heating, external heating belt or hot plate heating and the like, and the structure of the scheme is relatively simple, but the problems of low heating efficiency, large thermal inertia, local overheating, insufficient electromagnetic compatibility and the like exist in practical application, and the process requirements of high precision, quick response and high reliability are difficult to meet. In recent years, medium frequency induction heating has been gradually introduced into the field of liquid source heating because of its advantages of non-contact heating, high response speed, high energy utilization rate, and the like. However, the conventional medium frequency induction heating system focuses on power output or single temperature control, and lacks comprehensive consideration on liquid source pressure change, load impedance change and coupling relation of multiple physical quantities in the heating process. When the state of the liquid source changes, the heating power is unstable, and even potential safety hazards such as resonance deviation, over-temperature or over-pressure occur. In addition, the existing induction heating system mostly adopts a fixed frequency or rough frequency modulation mode in the aspect of inversion control, and is difficult to always work at an optimal resonance point under the condition of dynamic change of load parameters, so that energy transmission efficiency is affected. Meanwhile, under a complex electromagnetic environment, heating control signals and power signals are easy to be subjected to electromagnetic interference, so that control accuracy is reduced and even a system malfunctions. In the aspects of heat dissipation and safety, the traditional liquid source heating equipment is mostly dependent on a fan or forced air cooling mode for heat dissipation, so that mechanical noise and maintenance cost are increased, and the problems of dust introduction and insufficient reliability exist. For the semiconductor application scene with high cleanliness requirement, the heat dissipation mode is difficult to stably operate for a long time. In addition, the safety protection in the existing system is mainly simple over-temperature or over-current protection, a safety interlocking mechanism based on multi-parameter cooperative judgment is lacked, and effective intervention is difficult to be carried out before abnormality occurs. Therefore, how to realize the cooperative control of frequency, power, temperature and pressure in the liquid source medium frequency induction heating process and improve the stability and reliability of the system under the premise of ensuring the electromagnetic compatibility and the system safety is still a technical problem to be solved in the field. Disclosure of Invention In order to solve the problems in the prior art, the invention provides a double-loop control method for medium-frequency induction heating of a semiconductor body fluid source. The aim of the invention can be achieved by the following technical scheme: s1, acquiring an intermediate frequency induction frequency, controlling the frequency range of outputting intermediate frequency alternating current based on a full-bridge insulation inversion topological structure, synchronously adjusting the resonant frequency through a phase-locked loop, enabling the inversion output frequency to always track a load resonant point, and providing a liquid source heating control foundation; S2, constructing a temperature-pressure dual-loop feedback curve, collecting liquid source bottle wall temperature and pressure signals in real time, comparing the temperature signals and the pressure signals with corresponding target set values, generating temperature deviation signals and pressure deviation signals, dynamically adjusting inversion output power through a proportional-integral algorithm, controlling the amplitude and the distribution of the medium-frequency induction heating current, and generating a directional vortex heating signal; s3, constructing a closed electromagnetic shielding loop according to a reflux path formed by induced current of the directional eddy current heating signal, and transmitting the closed electromagnetic shielding loop to a flexible heating coil through a