CN-121757654-B - Roll-to-roll conveying control method of substrate processing equipment

CN121757654BCN 121757654 BCN121757654 BCN 121757654BCN-121757654-B

Abstract

The invention discloses a roll-to-roll transmission control method of substrate processing equipment, which relates to the technical field of semiconductors and comprises the steps of splicing a first traction substrate at the head end of the substrate to be processed to draw the substrate to be processed, identifying the position of the substrate, generating a first signal after the head end of the substrate to be processed passes through a cutting device, generating a second signal after the tail end of the substrate to be processed starts to be transmitted, controlling the cutting device to cut off the head end of the substrate to be processed after the first signal is received by a control terminal, releasing the first traction substrate by a storage device and splicing the first traction substrate on the substrate to be processed, controlling the storage device to adjust the storage amount of the substrate to be processed after the second signal is received by the control terminal, and releasing the substrate to be processed to the cutting device by the storage device and splicing the substrate to the head end of the second traction substrate after the tail section of the substrate to be processed is cut by the control terminal. The invention solves the problem that the base material is inconvenient to splice after being cut.

Inventors

GU QIANGANG
MO SONGTING
SHEN JIANGUO
XU ZONGYI
HU HAOZHE
CHEN JUNSHUO
CHEN HAO
ZHAO PENGFEI
XIE YONGBO

Assignees

宁波寰采星科技股份有限公司

Dates

Publication Date: 20260508
Application Date: 20260304

Claims (12)

1. A roll-to-roll transfer control method of a substrate processing apparatus, characterized in that the processing apparatus includes, in order from upstream to downstream, a cutting device (200), a storage device for storing a part of a passing substrate or releasing the stored substrate to the cutting device (200), the substrate including a first traction substrate, a second traction substrate, and a substrate to be processed, and further includes a control terminal and an identification unit, the transfer control method comprising: Splicing the first traction substrate at the head end of the substrate to be processed to draw the substrate to be processed; the recognition unit recognizes the position of the base material, and generates a first signal after detecting that the head end of the base material to be processed passes through the cutting device (200); After receiving the first signal, the control terminal controls the storage device to release the first traction substrate to the cutting device (200) so that the head end of the substrate to be processed is retracted to the upstream of the cutting device (200), and controls the cutting device (200) to cut the head end of the substrate to be processed by a set length and splice the head end of the substrate to be processed on the first traction substrate; the identification unit generates a second signal after detecting that the tail end of the substrate to be processed starts to be transmitted; After receiving the second signal, the control terminal controls the storage device to adjust the storage amount of the substrate to be processed, so that the length of the substrate to be processed between the cutting device (200) and the exposure device (300) is an integral multiple of the length of the exposure area on the exposure device (300), controls the cutting device (200) to cut the tail section of the substrate to be processed, and controls the storage device to release the substrate to be processed to the cutting device (200) and splice the substrate to the head end of the second traction substrate.
2. The roll-to-roll transfer control method of a substrate processing apparatus according to claim 1, further comprising a plurality of first rollers (100) for transferring the substrate, wherein the storage means comprises at least one second roller (400) located between the two first rollers (100), and wherein the second roller (400) is movable synchronously with the substrate in a thickness direction of the substrate to adjust a storage amount of the substrate.
3. The roll-to-roll transfer control method of a substrate processing apparatus according to claim 2, wherein the processing apparatus further comprises a holding device provided between a storage device and an exposure device (300), the holding device being for holding and fixing the substrate to be processed, the control storage device releasing the substrate to be processed to a cutting device (200), comprising: suspending the processing equipment from transferring the substrate to be processed; after the substrate to be processed stops conveying, controlling the clamping device to fix the substrate to be processed; And adjusting the position of the second roller (400) along the pressing direction of the substrate to be processed on the second roller (400) so that the substrate to be processed is retracted towards the cutting device (200) under the action of self tension.
4. The roll-to-roll transfer control method of the substrate processing apparatus according to claim 2, wherein the tail section of the substrate to be processed includes a remainder section and a contaminated section including a tail end, the control storage device adjusts a storage amount of the substrate to be processed, comprising: calculating the remainder of the length of the substrate to be processed divided by the length of the exposure area between the cutting device (200) and the exposure device (300); calculating the difference value between the length of the exposure area and the remainder, and comparing the length of the remainder section with the difference value; If the length of the excess material section is not smaller than the difference value, adjusting the position of the second roller (400) to increase the storage amount of the substrate to be processed; Wherein the adjustment distance of the second roller (400) satisfies the following formula: Adjustment distance = difference/(2 x number of second rollers (400); If the length of the excess material section is smaller than the difference value, adjusting the position of the second roller (400) to reduce the storage amount of the base material to be processed; Wherein the adjustment distance of the second roller (400) satisfies the following formula: adjustment distance = remainder/(2 x number of second rollers (400)).
5. The roll-to-roll transfer control method of the substrate processing apparatus according to claim 2, wherein the storage device further comprises a lifting mechanism on which the second roller (400) is mounted, the lifting mechanism being for adjusting a position of the second roller (400) in a thickness direction of the substrate.
6. The roll-to-roll transfer control method of the substrate processing apparatus according to claim 5, wherein the elevating mechanism comprises a driver (410), a screw (420) and a nut member (430), the screw (420) is screw-fitted with the nut member (430), and the second roller (400) is connected to the nut member (430) so as to be movable in an axial direction of the screw (420) when the screw (420) is driven to rotate by the driver (410).
7. The roll-to-roll transfer control method of a substrate processing apparatus according to claim 5, further comprising tension sensors for detecting tension differences at both sides in a substrate width direction, wherein the lifting mechanism is provided with two lifting mechanisms respectively connected to both ends of the second roller (400), and the two lifting mechanisms respectively adjust positions of both ends of the second roller (400) to change an inclination angle of the second roller (400) with respect to the substrate to balance the tension values at both sides in the substrate width direction.
8. A roll-to-roll transfer control method of a substrate processing apparatus according to claim 3, wherein the clamping means comprises a lifting press plate (500) on a radial side of one of the first rollers (100), the lifting press plate (500) being disposed in a substrate width direction, the lifting press plate (500) being movable in a radial direction of the first roller (100) to clamp the substrate between the lifting press plate (500) and the first roller (100).
9. The roll-to-roll transfer control method of a substrate processing apparatus according to claim 1, wherein the controlling the storing means to release the first traction substrate to the cutting means (200) to retract the head end of the substrate to be processed to the upstream of the cutting means (200), controlling the cutting means (200) to cut the head end of the substrate to be processed by a set length and splice it to the first traction substrate, comprises: suspending the processing equipment from transferring the substrate to be processed; After the substrate to be processed stops conveying, the storage device releases the first traction substrate to the cutting device (200), so that the head end of the substrate to be processed returns to the upstream of the cutting device (200) under the action of tension, and the first traction substrate is cut; Transmitting the substrate to be processed to a storage device, and cutting the substrate to be processed after the head end of the substrate passes through a cutting device (200) for a preset distance; and splicing the base material to be processed of which the head end is cut off with the first traction base material.
10. The roll-to-roll transfer control method of the substrate processing apparatus according to any one of claims 1 to 9, further comprising a tension detecting unit that detects tension of the substrate to be processed during continuous exposure of the substrate to be processed, the tension detecting unit sending a third signal to the control terminal when detecting a tension deviation from a set value, the control terminal adjusting the tension of the substrate to be processed after receiving the third signal.
11. The roll-to-roll transfer control method of a substrate processing apparatus according to claim 10, wherein the processing apparatus further comprises an unreeling device and a reeling device for reeling and unreeling the substrate, and the control terminal adjusts the unreeling speed of the unreeling device and the reeling speed of the reeling device after receiving the third signal, so as to adjust the tension of the substrate to be processed.
12. The roll-to-roll transfer control method of the substrate processing apparatus according to claim 10, wherein the tension detection unit includes a gravity roller (600) and a position sensor, the gravity roller (600) presses the substrate to be processed by self gravity, the position sensor is used for detecting a position of the gravity roller (600), the position of the gravity roller (600) changes with a tension change of the substrate to be processed, and the position sensor sends a third signal to the control terminal after detecting that the gravity roller (600) deviates from a preset position.

Description

Roll-to-roll conveying control method of substrate processing equipment Technical Field The invention relates to the technical field of semiconductors, in particular to a roll-to-roll conveying control method of substrate processing equipment. Background The metal mask plate (FMM, fineMetalMask) is a core material in the production process of the display screen, and is mainly used for realizing the accurate transfer of patterns in the evaporation process. The FMM is prepared from a metal sheet through a plurality of processing procedures, and the metal sheet is conveyed in a roll-to-roll mode in the processing process, so that a substrate in the conveying process is processed through processing equipment. One of the FMM processing procedures is exposure, a photosensitive film needs to be attached to the surface of the metal thin material before exposure, and the head end section and the tail end section of the metal thin material need to be cut off due to the film attaching process, otherwise, the photosensitive films on the two sections of base materials easily pollute exposure equipment due to overflow. In the prior art, the cutting equipment can stop the substrate to continuously transmit to the downstream in the process of cutting the substrate, but can not pull the substrate back to the upstream for splicing, so that the spliced substrate is inconvenient, and the substrate is easy to damage in the splicing process. Disclosure of Invention The present invention aims to solve one of the technical problems in the related art to a certain extent. Therefore, the invention provides a roll-to-roll conveying control method of substrate processing equipment, which solves the problem that the substrates are inconvenient to splice after being cut. In order to achieve the above purpose, the invention adopts the following technical scheme: A roll-to-roll transfer control method of a substrate processing apparatus including, in order from upstream to downstream, a cutting device, a storage device for storing a portion of a passing substrate or releasing the stored substrate to the cutting device, the substrate including a first traction substrate, a second traction substrate, and a substrate to be processed, the processing apparatus further including a control terminal and an identification unit, the transfer control method comprising: Splicing the first traction substrate at the head end of the substrate to be processed to draw the substrate to be processed; the recognition unit recognizes the position of the base material, and generates a first signal after detecting that the head end of the base material to be processed passes through the cutting device; after receiving the first signal, the control terminal controls the storage device to release the first traction substrate to the cutting device so that the head end of the substrate to be processed is retracted to the upstream of the cutting device, and controls the cutting device to cut the head end of the substrate to be processed by a set length and splice the head end of the substrate to be processed on the first traction substrate; the identification unit generates a second signal after detecting that the tail end of the substrate to be processed starts to be transmitted; After receiving the second signal, the control terminal controls the storage device to adjust the storage amount of the substrate to be processed, so that the length of the substrate to be processed between the cutting device and the exposure device is an integral multiple of the length of the exposure area on the exposure device, and controls the cutting device to cut the tail section of the substrate to be processed, and then controls the storage device to release the substrate to be processed to the cutting device and splice the substrate to the head end of the second traction substrate. The invention discloses a roll-to-roll conveying control method of substrate processing equipment, wherein a substrate comprises a first traction substrate, a second traction substrate and a substrate to be processed, the substrate is conveyed by the processing equipment in a roll-to-roll mode, namely, the substrate is unreeled in a roll form, and is rewound into a roll after being conveyed. The substrate conveying device comprises a substrate conveying path, a cutting device, a storage device and an exposure device, wherein the cutting device is used for cutting the substrate, a part of the substrate can be stored when the substrate passes through the storage device in the conveying process, the storage device can also release a part of the stored substrate, so that the length of the substrate between the cutting device and the exposure device can be adjusted, and the exposure device is used for exposing the substrate to be processed. The substrate to be processed and the traction substrate are two different materials, the cost of the substrate to be processed is higher, if the substrate to be processe