CN-121762097-B - Three-dimensional proximity-contact multi-mode sensor for smart operation of robot

CN121762097BCN 121762097 BCN121762097 BCN 121762097BCN-121762097-B

Abstract

The invention discloses a three-dimensional proximity-contact multi-mode sensor for smart operation of a robot, which comprises a basal layer, a circuit layer, a hollow elastomer, a magnetic electrode layer and a packaging layer, wherein the basal layer, the circuit layer, the hollow elastomer, the magnetic electrode layer and the packaging layer are sequentially stacked from bottom to top, the circuit layer is arranged on the basal layer, a three-axis Hall sensor is arranged on the circuit layer, the hollow elastomer is arranged on the circuit layer, the magnetic electrode layer is attached to the hollow elastomer, the packaging layer is covered on the surface of the magnetic electrode layer, the magnetic electrode layer comprises a plurality of mutually independent magnetic electrodes distributed in an array, each magnetic electrode is mutually coupled to form a plurality of mutual capacitance sensing units for proximity sensing, the magnetic electrode layer is magnetized to form stable three-dimensional magnetic field distribution in space, and the hollow elastomer is used for generating elastic deformation when being subjected to external load and driving the magnetic electrode layer to displace relative to the magnetic sensor on the circuit layer. The invention realizes synchronous integration of multidirectional proximity sensing and three-dimensional contact force sensing, and has compact structure and high sensitivity.

Inventors

WU HAO
FU YUANPENG
Bu Tianzhao

Assignees

华中科技大学

Dates

Publication Date: 20260512
Application Date: 20260303

Claims (9)

1. The three-dimensional proximity-contact multi-mode sensor for smart operation of the robot is characterized by comprising a substrate layer (5), a circuit layer (4), a hollow elastomer (3), a magnetic electrode layer (2) and a packaging layer (1) which are sequentially stacked from bottom to top, wherein the circuit layer (4) is arranged on the substrate layer (5), a three-axis Hall sensor is arranged on the circuit layer (4), the hollow elastomer (3) is arranged on the circuit layer (4), the magnetic electrode layer (2) is attached to the hollow elastomer (3), the packaging layer is covered on the surface of the magnetic electrode layer, the magnetic electrode layer (2) is used for forming stable three-dimensional magnetic field distribution in space after magnetizing, and the hollow elastomer (3) is used for generating elastic deformation when being subjected to external load and driving the magnetic electrode layer (2) to displace relative to the magnetic sensor on the circuit layer; The magnetic electrode layer (2) comprises a plurality of magnetic electrodes which are mutually independent and are arranged in an array, the whole structure of the magnetic electrode layer (2) is in a dome-shaped bulge and is attached to the surface of a truncated cone-shaped hollow elastomer, and the magnetic electrodes are mutually coupled to form a plurality of mutual capacitance sensing units for proximity sensing; The circuit layer also comprises a multiplexing switch, wherein the multiplexing switch is connected with each magnetic electrode, and the mutual capacitance sensing units of the channels in all directions are polled and gated so as to detect the change of the multi-directional mutual capacitance sensing units caused by the approach of an external object.
2. The three-dimensional proximity-contact multimodal sensor for smart operation of a robot of claim 1, wherein the number of the magnetic electrodes is four, the four magnetic electrodes are independent of each other and are distributed in a central symmetry manner and are in a cross-radial shape, and the four magnetic electrodes are mutually coupled to form four mutual capacitance sensing units for proximity sensing.
3. The three-dimensional proximity-contact multimodal sensor for smart operation of a robot of claim 2, wherein the four mutual capacitance sensing units for proximity sensing are a front channel proximity capacitance, a rear channel proximity capacitance, a left channel proximity capacitance, and a right channel proximity capacitance, respectively, and the four magnetic electrodes are designated as a front electrode, a rear electrode, a left electrode, and a right electrode in terms of orientation; The front channel approach capacitor is characterized in that a left electrode and a right electrode are short-circuited through a multiplexing switch to jointly form one end of a mutual capacitor, the other end of the mutual capacitor is a front electrode, the capacitor between the two ends is the front channel approach capacitor, the rear channel approach capacitor is formed by shorting the left electrode and the right electrode through the multiplexing switch to jointly form one end of the mutual capacitor, the other end of the mutual capacitor is a rear electrode, the capacitor between the two ends is the rear channel approach capacitor, the left channel approach capacitor is formed by shorting the front electrode and the rear electrode through the multiplexing switch to jointly form one end of the mutual capacitor, the other end of the mutual capacitor is a left electrode, the capacitor between the two ends is the left channel approach capacitor, the right channel approach capacitor is formed by shorting the front electrode and the rear electrode through the multiplexing switch to jointly form one end of the mutual capacitor, the other end of the mutual capacitor is the right electrode, and the capacitor between the two ends is the right channel approach capacitor.
4. The three-dimensional proximity-contact multimodal sensor for robot smart operation of claim 1 wherein the magnetic electrode terminals are cross-layer interconnected with the underlying circuit layers by conductive silicone filled vertical conductive vias.
5. The three-dimensional proximity-contact multi-modal sensor for smart operation of a robot of claim 1, wherein when the three-dimensional proximity-contact multi-modal sensor receives a normal force, the hollow elastic body and the magnetic electrode layer generate compression deformation along a Z-axis direction, resulting in an increase in magnetic flux density along the Z-axis direction of a position of the three-axis Hall sensor, and a substantial unchanged magnetic flux density along the X-axis direction and the Y-axis direction, and when the three-dimensional proximity-contact multi-modal sensor receives a tangential force, the hollow elastic body and the magnetic electrode layer generate horizontal displacement along the X-axis direction and/or the Y-axis direction, resulting in a change in magnetic flux density along the X-axis direction and/or the Y-axis direction of the position of the three-axis Hall sensor, and the magnetic flux density along the Z-axis direction is substantially unchanged, and the magnitude and the direction of a contact force in a three-dimensional space can be obtained by synchronously acquiring the multi-directional proximity signal outputted by the multiplexing switch and the three-dimensional contact force signal outputted by the three-axis Hall sensor.
6. The three-dimensional proximity-contact multi-modal sensor for smart operation of a robot as set forth in any one of claims 1 to 5, wherein the hollow elastic body is filled between the magnetic electrode layer and the circuit layer, the hollow elastic body is integrally in a frustum shape with a narrow upper part and a wide lower part, and provides structural support and elastic deformation space for the sensor; The whole magnetic electrode layer is a dome-shaped bulge in a cross radial shape, and can be closely and conformally attached to the top plane and the cylindrical surface of the hollow elastomer to form the hollow magnetic elastomer.
7. The three-dimensional proximity-contact multimodal sensor for robotic dexterous operation of claim 1 wherein the encapsulation layer, the base layer, the hollow magneto-elastomer are insulating flexible stretchable materials; The insulating flexible stretchable material is selected from any one or a combination of a plurality of polydimethyl siloxane, ecoflex, thermoplastic polyurethane, polyvinylidene fluoride-hexafluoropropylene and styrene-ethylene-butylene-styrene block copolymer.
8. The three-dimensional proximity-contact multimodal sensor for robot smart operation of claim 1 wherein the magnetic electrode is made of a magneto-electric composite material having both hard magnetic properties and high electrical conductivity.
9. The three-dimensional proximity-contact multimodal sensor for robot smart operation of claim 8 wherein the magnetic electrode material is prepared by incorporating magneto-electric particles having hard magnetic properties and high conductivity into a polymer matrix to form a magneto-electric composite film, wherein the polymer matrix is a thermoplastic polyurethane or polydimethylsiloxane, the incorporated magneto-electric particles are NdFeB@Ag, and the synthetic magneto-electric composite film is NdFeB@Ag\thermoplastic polyurethane.

Description

Three-dimensional proximity-contact multi-mode sensor for smart operation of robot Technical Field The invention relates in particular to a three-dimensional proximity-contact multimodal sensor for smart operation of a robot. Background Robots are highly required to have human-like multiple perceptions when performing fine gripping and dexterous manipulation tasks in unstructured dynamic environments. Among these, proximity sensation and contact force sensation are two crucial sensing modes. The proximity sense can sense the space orientation and distance of the object before the robot actuator is in actual contact with the object, and provide pre-contact information for the robot, so that the robot can adjust the pose in advance, and the compliant and collision-free proximity is realized. The contact force sense can monitor the magnitude, the direction and the action point of the contact force in real time in the grabbing and operating processes, and the object damage caused by the falling of the object or the overlarge grabbing force due to insufficient grabbing force is prevented. Currently, most robotic sensors can only achieve a single modal perception. The proximity sensor and the force sensor are separately combined, so that the complexity and the volume of the system are increased, the system is difficult to integrate into a limited finger space of a smart hand of a robot, and efficient and consistent 'perception-decision-action' closed-loop control is difficult to realize due to the problems of asynchronous signals, non-uniform coordinate systems and the like. Furthermore, existing partial multimodal sensors have limitations in implementation. For example, some proximity sensors based on optics or vision are susceptible to interference from ambient light and have difficulty multiplexing the same sensitive unit with the force sensor, while some force sensors based on magnetic induction typically employ solid magneto-elastomer structures that are stiffer, resulting in limited force detection sensitivity, and the magnet and capacitive electrodes are typically discrete components with low integration and miniaturization. Therefore, there is an urgent need in the art for a novel sensor that is compact in structure, highly integrated, and capable of sensing multidirectional proximity information and three-dimensional contact force information in real time, so as to truly enhance the smart operation capability of a robot in a dynamic environment. Disclosure of Invention The invention aims to provide a three-dimensional approach-contact multi-mode sensor for smart operation of a robot, which realizes synchronous integration of multidirectional approach sensing and three-dimensional contact force sensing and has the advantages of compact structure, high sensitivity and comprehensive sensing dimension. The technical scheme adopted by the invention is as follows: The three-dimensional proximity-contact multi-mode sensor comprises a basal layer, a circuit layer, a hollow elastomer, a magnetic electrode layer and a packaging layer, wherein the basal layer, the circuit layer, the hollow elastomer, the magnetic electrode layer and the packaging layer are sequentially stacked from bottom to top; The magnetic electrode layer comprises a plurality of magnetic electrodes which are mutually independent and distributed in an array, the whole structure of the magnetic electrode layer is in a dome-shaped bulge and is attached to the surface of a truncated cone-shaped hollow elastomer, and the magnetic electrodes are mutually coupled to form a plurality of mutual capacitance sensing units for proximity sensing; The magnetic electrode layer is used for forming stable three-dimensional magnetic field distribution in space after magnetizing, the hollow elastic body is used for generating elastic deformation when receiving external load and driving the magnetic electrode layer to displace relative to the magnetic sensor on the circuit layer, and the magnetic electrodes in the magnetic electrode layer are magnetized in a vertical direction and are used for forming preset three-dimensional magnetic field distribution in space. Preferably, the circuit layer further comprises a multiplexing switch, the multiplexing switch is connected with each magnetic electrode, and the mutual capacitance sensing units of the channels in all directions are polled and gated so as to detect the change of the multi-direction mutual capacitance sensing units caused by the approach of an external object, thereby realizing three-dimensional approach sensing. Preferably, the number of the magnetic electrodes is four, the four magnetic electrodes are mutually independent and are distributed in a central symmetry manner and are in a cross radial shape, the consistency of sensing signals in all directions is ensured, and the four magnetic electrodes are mutually coupled through a multiplexing switch to form four mutual capacitance sensing units for proxi