Search

CN-121763558-B - Multi-freedom-degree adjustable laser interference type alignment device

CN121763558BCN 121763558 BCN121763558 BCN 121763558BCN-121763558-B

Abstract

The invention relates to the field of optical detection and optical path alignment, and discloses a multi-degree-of-freedom adjustable laser interference type alignment device which comprises a frame, wherein a main optical path channel is fixedly arranged on one side of the interior of the frame, a polarization beam splitter prism is fixedly arranged in the middle of the interior of the main optical path channel, the installation inclination angle of the polarization beam splitter prism is 45 degrees, a fixed wave plate is fixedly arranged below the interior of the main optical path channel, a polarization state sensor is fixedly arranged at the position, located between the polarization beam splitter prism and the fixed wave plate, of the interior of the main optical path channel, and a beam splitter mirror is fixedly arranged on the lower side of the interior of the main optical path channel, and the installation inclination angle of the beam splitter mirror is 45 degrees. The invention realizes the precise adjustment of multiple degrees of freedom and submicron alignment precision, has strong environmental adaptability and convenient operation, effectively solves the problems of single alignment dimension, insufficient precision and the like of the traditional device, and is suitable for the requirements of high-end scenes such as high-power laser communication and the like.

Inventors

  • ZENG ZHICHAO
  • ZHANG LAN
  • XU YAGUO
  • LI WEI
  • GONG YIDONG
  • YANG MEIJIAN

Assignees

  • 上海芬创信息科技有限公司

Dates

Publication Date
20260505
Application Date
20260303

Claims (8)

  1. 1. The utility model provides a multi freedom adjustable laser interference formula aligning device, includes frame (1), its characterized in that, inside one side fixed mounting of frame (1) has main light path passageway (2), the installation inclination of polarization beam splitter prism (5) and polarization beam splitter prism (5) is 45 in the inside middle part fixed mounting of main light path passageway (2), the inside below near polarization beam splitter prism (5) fixed mounting has fixed wave plate (7), the inside of main light path passageway (2) is located the position department fixed mounting between polarization beam splitter prism (5) and fixed wave plate (7) has polarization state sensor (6), the inside downside fixed mounting of main light path passageway (2) has beam splitter reflector (8) and the installation inclination of beam splitter reflector (8) is 45, the position department fixed mounting of one side upper portion near polarization beam splitter prism (5) of main light path passageway (2) has first beam splitter passageway (9), the inside middle part fixed mounting of first beam splitter passageway (9) has non-polarizing prism (12), the inside of first beam splitter passageway (2) is kept away from the fixed mounting of first optical path (13), the top of the first beam splitting path channel (9) is fixedly provided with a first beam splitting path branch channel (14) at a position close to the unpolarized beam splitting prism (12), the inner middle part of the first beam splitting path branch channel (14) is fixedly provided with a half-reflecting lens group (15) and the installation inclination angle of the half-reflecting lens group (15) is 45 degrees, the inner top of the first beam splitting path branch channel (14) is fixedly provided with a polaroid array (16), one side of the first beam splitting path branch channel (14) is fixedly provided with a second beam splitting path branch channel (17) at a position close to the half-reflecting lens group (15), the inner middle part of the second beam splitting path branch channel (17) is fixedly provided with a second gluing double-lens group (18), one side of the second beam splitting path branch channel (17) far away from the first beam splitting path branch channel (14) is fixedly provided with a micro-lens array (19), one side lower part of the main beam path channel (2) is fixedly provided with a second beam splitting path channel (20), one side lower part of the main beam path channel (1) is fixedly provided with a second beam splitting path (29) near to the inner bottom of the main beam path channel (2) and is provided with a sealing support (30) near to the lower part of the main beam path channel (2) of the main beam path (1) and is fixedly provided with a sealing support (30), the tail end of the electric cylinder (31) at the corresponding side is movably arranged at one end of the left hinge support (32), the outer side end of the left hinge support (32) is fixedly arranged at one end of the fixed ring (33), and the middle part of the fixed ring (33) is fixedly provided with the collimating lens group (34).
  2. 2. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a focusing beam expander (3) is installed on the upper side of the inside of the main light path channel (2), and a focusing objective lens group (4) is fixedly installed at a position, close to the lower position of the focusing beam expander (3), of the inside of the main light path channel (2).
  3. 3. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a focusing lens (10) is fixedly arranged on one side, close to the main light path channel (2), of the interior of the first light splitting path channel (9), and an electric rotary wave plate (11) is fixedly arranged on one side, close to the focusing lens (10), of the interior of the first light splitting path channel (9).
  4. 4. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a frosted glass sheet (21) is fixedly installed in the second light splitting path (20), an alignment imaging lens group (22) is fixedly installed in the position, away from the main light path (2), of the second light splitting path (20), a cross division lens (23) is fixedly installed in the position, located between the frosted glass sheet (21) and the alignment imaging lens group (22), of the second light splitting path (20), and mark points are arranged in the middle of one end, close to the main light path (2), of the frosted glass sheet (21).
  5. 5. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a laser emission group (24) is fixedly installed at a position, close to the upper position of the main light path channel (2), on one side of the top wall of the frame (1), a first high-speed CMOS imaging target surface (25) is fixedly installed at a position, close to the upper position of the first light splitting path channel (14), on the other side of the top wall of the frame (1), a second high-speed CMOS imaging target surface (26) is fixedly installed at a position, close to the tail end of the second light splitting path channel (20), on one end of the inner side wall of the frame (1), a second CCD imaging target surface (28) is fixedly installed at a position, close to the tail end of the first light splitting path channel (9), on the other end of the inner side wall of the frame (1), and a first CCD imaging target surface (27) is fixedly installed at a position, close to the tail end of the second light splitting path channel (17).
  6. 6. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a narrow-band filter lens (35) is fixedly arranged on one side, close to the main light path channel (2), of the interior of the sealing bin (29), and a plane wedge mirror (36) is fixedly arranged on one side, close to the narrow-band filter lens (35), of the interior of the sealing bin (29).
  7. 7. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein an adjusting cylinder (37) is fixedly arranged at one end of the sealing bin (29) far away from the main light path channel (2), the driving end of the adjusting cylinder (37) extends to the inside of the sealing bin (29) and is fixedly provided with a placing table (38), and an auxiliary reflecting mirror (39) is fixedly arranged at one side, close to the adjusting cylinder (37), of the top end of the placing table (38).
  8. 8. The multi-degree-of-freedom adjustable laser interference type alignment device according to claim 1, wherein a nitrogen inlet pipe (40) is fixedly arranged on one side of the sealing bin (29), a nitrogen outlet pipe (41) is fixedly arranged on the other side of the sealing bin (29), and a bin gate (42) is hinged to the front end of the sealing bin (29).

Description

Multi-freedom-degree adjustable laser interference type alignment device Technical Field The invention relates to the field of optical detection and optical path alignment, in particular to a multi-degree-of-freedom adjustable laser interference type alignment device. Background In the high-end optical application fields such as ultra-wide field capturing of high-power laser communication and long-distance transmission detection of laser nuclear fusion, the accuracy of light path alignment directly determines the upper limit of system performance. Along with the development of the fields to the directions of high power, long distance and wide view field, stringent requirements are put on the alignment of the optical paths, namely, the alignment precision of submicron level is required to be realized, multi-dimensional errors such as optical axis deviation, inclination angle deviation, torsion deviation and the like are also required to be dealt with, and meanwhile, long-term stable operation under complex environments is required to be adapted. For example, in laser communication, ultra-wide field capturing needs to quickly lock a target optical path, laser nuclear fusion transmission detection needs to overcome alignment deviation caused by long-distance optical path difference, and all the scenes need to be provided with a multi-degree-of-freedom and high-precision alignment solution. However, existing laser interferometry devices have significant limitations in light path alignment. The traditional optical axis alignment technology relies on a single photoelectric detector, only can identify deviation of limited dimensions, has insufficient resolving power, causes high light spot superposition alignment difficulty, ensures that alignment accuracy stays at a micron level more and cannot meet submicron application requirements, and most devices only support single-degree-of-freedom or few-degree-of-freedom adjustment, are difficult to synchronously correct multi-dimensional errors such as translation, pitching, torsion and the like, have poor adaptability, are sensitive to environmental interference, and are easy to cause performance drift of optical elements due to humidity, dust and temperature change, so that alignment stability is further reduced. In addition, the operation of the traditional device depends on manual repeated fine adjustment, the alignment efficiency is low, the visual alignment reference is lacked, the difficulty of the new hand is high, and the high-beat test or the field application scene cannot be adapted. Along with the wide penetration of optical technology in the fields of aerospace, semiconductors, laser processing and the like, the short plates of the existing alignment device are more and more prominent in precision, degree of freedom, environmental adaptability and operation convenience, and become the bottleneck for restricting the technical upgrading of the related fields. Therefore, the laser interference type alignment device with the characteristics of multiple degrees of freedom precise adjustment, high-precision sensing feedback, strong environment adaptation capability and convenient operation is developed, the problems of low alignment precision, single dimension, poor environment adaptability and the like in the traditional technology are solved, and the laser interference type alignment device becomes urgent requirements for industry development. Disclosure of Invention Aiming at the defects of the prior art, the invention provides the multi-degree-of-freedom adjustable laser interference type alignment device, which solves the problems of low alignment precision, insufficient multi-dimensional error correction capability, poor environmental adaptability and complex operation of the traditional device and meets the high-precision multi-degree-of-freedom alignment requirements of scenes such as high-power laser communication, laser nuclear fusion and the like. In order to achieve the above purpose, the invention is realized by the following technical scheme: the utility model provides a multi freedom adjustable laser interference formula aligning device, which comprises a frame, the inside one side fixed mounting of frame has the main light path passageway, the inside middle part fixed mounting of main light path passageway has polarization beam splitter prism and polarization beam splitter prism's installation inclination is 45, the inside of main light path passageway is close to polarization beam splitter prism's below fixed mounting has fixed wave plate, the inside position department fixed mounting polarization state sensor that lies in between polarization beam splitter prism and the fixed wave plate of main light path passageway has, the inside downside fixed mounting of main light path passageway has the beam splitter reflector and the installation inclination of beam splitter reflector is 45, the inside upper portion of one side of main light path passagew