CN-121772664-B - Wafer box with anti-collision baffle

CN121772664BCN 121772664 BCN121772664 BCN 121772664BCN-121772664-B

Abstract

A wafer box with an anti-collision baffle comprises a box body, a wafer storage box and a limiting baffle. The wafer storage box is provided with a storage groove. The limit baffle comprises a baffle plate and an anti-collision structure. The baffle includes baffle main part, side shield, connection structure. Both anti-collision structures comprise anti-collision parts and guide parts. Each anti-collision part comprises an anti-collision surface, a contact groove, a first contact point and a second contact point. The guide part comprises a connecting end, an inserting end and a guide inclined plane. Compared with the prior art, the anti-collision part is arranged, so that the baffle main body is prevented from being in direct contact with the wafer, the wafer is prevented from being damaged due to collision, and meanwhile, the wafer can be propped against, and the wafer is prevented from being deviated, so that a protection effect is achieved. Through setting up the portion of leading, the lock is when the lid is followed wafer that slides in the wafer storage box is guided and is revised, guarantees that the wafer is arranged neatly, guarantees the guard action of anticollision portion.

Inventors

YAO QINGLI
WANG DENGKE
LI CHUANG
TONG MING

Assignees

浙江赛瑾半导体科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260304

Claims (10)

1. A wafer cassette with an anti-collision baffle, characterized in that: the wafer box with the anti-collision baffle comprises a box body, a wafer storage box arranged in the box body and a limit baffle arranged in the box body, wherein the box body comprises a bottom plate and a box cover buckled on the bottom plate, the wafer storage box is provided with a plurality of storage tanks, the limit baffle comprises a baffle plate and two anti-collision structures arranged on the baffle plate, the baffle plate comprises a baffle plate main body, two side baffle plates arranged on two sides of the baffle plate main body and a plurality of connecting structures arranged on the baffle plate main body, the baffle plate main body is parallel to the baffle plate seat, the two side baffle plates are arranged on two sides of the baffle plate main body, the two anti-collision structures are respectively arranged on the two side baffle plates, and each of the side baffles includes an anti-collision part fixed on the side baffle, and a guide part positioned at one side of the anti-collision part, wherein the extension direction of the length of the anti-collision part is consistent with the arrangement direction of the wafers in the wafer storage box, the anti-collision part adopts an internal hollow arch shape on the section perpendicular to the extension direction of the anti-collision part, each anti-collision part includes an arc anti-collision surface, a contact groove arranged on the anti-collision surface, a first contact point positioned at one side of the contact groove, and a second contact point positioned at the other side of the contact groove, on the same section perpendicular to the extension direction of the anti-collision part, the connecting line of the circle center of the contact groove and the circle center of the anti-collision surface is arranged at intervals with the geometric center of the storage groove, the connecting lines of the circle centers of the contact grooves and the circle centers of the anti-collision surfaces of the two anti-collision parts are respectively positioned at two sides of the geometric center of the storage groove, so that wafers deviating from the geometric center of the storage groove can collide on the first contact point or the second contact point, the guide part is arranged at the end part of the anti-collision part and is positioned at one end of the anti-collision part, which faces the bottom plate, the guide part comprises a connecting end connected with the anti-collision part, an inserting end positioned at one end far away from the anti-collision part and a guiding inclined surface positioned between the connecting end and the inserting end, the distance from the connecting end to the surface of the side baffle is larger than the distance from the inserting end to the surface of the side baffle, and the connecting end is connected with the side baffle through the guiding inclined surface to form a cone-shaped structure.
2. The wafer cassette with the anti-collision baffle plate as claimed in claim 1, wherein the bottom plate is of a rectangular plate-shaped structure, the box cover is of a rectangular box with a single-side opening, a containing cavity for containing the wafer storage box is formed in the box cover, and the opening of the box cover is buckled on the bottom plate.
3. The wafer cassette with the anti-collision baffle plate according to claim 1, wherein the baffle plate seat is integrally injection molded and fixed on the top of the inner side of the cavity of the cassette cover through screws, and a rectangular frame structure is formed by two cross bars and two vertical bars, and the structure is arranged at intervals and in parallel with the side wall of the cassette cover.
4. The wafer cassette with an anti-collision baffle plate according to claim 1, wherein the limit baffle plate further comprises a baffle plate seat fixed on the box cover, and two connecting pieces arranged on the baffle plate seat, wherein the two connecting pieces are mutually spaced and arranged in parallel, and each connecting piece comprises a rotating shaft connected to the baffle plate seat, two fins arranged on the rotating shaft, and a connecting rod arranged between the two fins.
5. The wafer cassette with an anti-collision baffle plate as set forth in claim 4, wherein insertion ends are provided at both ends of the rotation shaft, insertion holes into which the rotation shaft is inserted are respectively provided on two vertical rods of the baffle plate seat, and a stopper is further provided on the baffle plate seat.
6. The wafer cassette with the anti-collision baffle plate as set forth in claim 4, wherein two fins are integrally formed with the rotating shaft, are respectively located at two sides of the rotating shaft in the radial direction, are spaced from each other and are axially symmetrically arranged by taking the connecting rod as a symmetry axis, and the extending direction of each fin is the radial direction of the rotating shaft.
7. The wafer cassette with the anti-collision baffle plate as set forth in claim 4, wherein two ends of the connecting rod are respectively connected with two fins, and are spaced from the rotating shaft and arranged in parallel.
8. The wafer cassette with the crash barrier of claim 1, wherein each of the crash features is formed from a soft gel.
9. The wafer cassette with an anti-collision baffle plate as set forth in claim 4, wherein the limit baffle plate further comprises a rotating wheel disposed on the baffle plate, the rotating wheel being disposed at a bottom of the baffle plate near the bottom plate, an axial direction of the rotating wheel being consistent with an axial direction of the rotating shaft.
10. The wafer cassette with the crash barrier of claim 1, wherein the contact groove is an arc groove formed on the crash face, the extending direction of the groove body is identical to the extending direction of the crash part, the groove opening direction is toward the wafer placed in the wafer storage cassette, and the groove body is an arc shape opposite to the curvature of the crash face on a section perpendicular to the extending direction.

Description

Wafer box with anti-collision baffle Technical Field The invention relates to the technical field of semiconductor storage, in particular to a wafer box with an anti-collision baffle. Background The wafer box, namely the wafer carrier, belongs to one type of semiconductor carrier, is a precise bearing device specially designed for semiconductor wafers, and plays a vital role in semiconductor production. The device is mainly used for placing and conveying the wafers, simplifies the transportation process of the wafers, reduces the risk of the wafers being polluted, and ensures the smooth circulation of the wafers among different production links. In the prior art, wafers are transported by inserting the wafers into a placing groove of a wafer box, and because the wafers may vibrate and displace during transportation, a limit baffle needs to be arranged inside the wafer box to protect the wafers, for example, in a wafer box with a protective limit device disclosed in China patent publication No. CN119673833B, related contents related to arranging a limit frame inside the wafer box are mentioned, and the related contents comprise a bottom plate, a wafer storage box, a box cover and a limit component. The limiting assembly comprises a limiting seat, a propping assembly, a rotating piece, a limiting frame and a rotating wheel. The limiting seat comprises a connecting cross rod, a connecting arm and a supporting baffle. The propping assembly comprises a connecting part, a propping protrusion, a connecting rod, a stretching piece and a reinforcing rib. In the technical scheme, the wafer storage box is arranged to insert the wafer, and the limiting assembly is arranged to resist the wafer, so that the wafer is effectively prevented from being damaged. Meanwhile, the propping component is arranged, so that the propping effect has a protection limit, and the damage of rigid propping to the wafer is prevented. However, in the actual use process of the wafer box, if the limit baffle directly abuts against the side surface of the wafer, the limit baffle is made of hard plastic, and the wafer is in rigid contact with the limit baffle when in contact, so that the edge of the wafer is knocked and broken. If the spacing baffle and the wafer are arranged at intervals, although the distance between the spacing baffle and the wafer can be controlled to be extremely tiny, so that a space for wafer movement is provided, and the impact force generated by the wafer moving and impacting on the spacing baffle cannot damage the wafer, the arrangement can enable the wafers inserted into the wafer storage box to generate different orientations due to inconsistent moving paths when the wafers move, so that the crystallographic directions of the wafers cannot be accurately identified and aligned. As is well known, crystallographic direction is commonly referred to as ‌ crystal orientation ‌, which refers to a specific orientation of the crystal structure on the wafer surface, such as the <100> or <110> directions), if the crystallographic direction cannot be accurately identified and aligned, the subsequent photolithography, etching, ion implantation, etc. steps are affected because the performance of the semiconductor device is highly dependent on its fabrication in the specific direction of the crystal surface. Disclosure of Invention In view of the above, the present invention provides a wafer cassette with an anti-collision baffle to solve the above-mentioned technical problems. A wafer box with an anti-collision baffle comprises a box body, a wafer storage box arranged in the box body and a limit baffle arranged in the box body. The box body comprises a bottom plate and a box cover buckled on the bottom plate. The wafer storage box is provided with a plurality of storage tanks. The limit baffle comprises a baffle and two anti-collision structures arranged on the baffle. The baffle comprises a baffle main body, two side baffles arranged on two sides of the baffle main body, and a plurality of connecting structures arranged on the baffle main body. The baffle main body is parallel to the baffle seat, and the two side baffles are arranged on two sides of the baffle main body. The two anti-collision structures are respectively arranged on the two side baffles and each anti-collision structure comprises an anti-collision part fixed on the side baffle and a guide part positioned on one side of the anti-collision part. The extending direction of the length of the anti-collision part is consistent with the arrangement direction of the wafers in the wafer storage box. The collision preventing part adopts a circular arch shape with hollow inside on the section perpendicular to the extending direction of the collision preventing part. Each anti-collision part comprises an arc-shaped anti-collision surface, a contact groove arranged on the anti-collision surface, a first contact point positioned on one side of the contact groove, and a second c