CN-121972339-A - Developing swing spraying device

CN121972339ACN 121972339 ACN121972339 ACN 121972339ACN-121972339-A

Abstract

The application discloses a developing swing spraying device which is used for improving spraying consistency. The device comprises a cavity, a linear moving mechanism, a spraying assembly and a swinging mechanism, wherein a spraying space is arranged in the cavity, the linear moving mechanism and the spraying assembly are both arranged in the spraying space, the spraying assembly is positioned above the linear moving mechanism, the spraying assembly comprises at least one spray head, the spraying assembly sprays a workpiece on the linear moving mechanism through the at least one spray head, the swinging mechanism is fixed on the cavity, a rocker connected with the spraying assembly is arranged on the swinging mechanism, and the swinging mechanism is matched with the rocker to control the spraying assembly to swing in a reciprocating manner along the direction perpendicular to the moving direction of the workpiece.

Inventors

YANG MEIGAO
HUANG YIWEN

Assignees

深圳市八零联合装备有限公司

Dates

Publication Date: 20260505
Application Date: 20260407

Claims (10)

1. A developing swing shower apparatus, comprising: the device comprises a cavity, a linear moving mechanism, a spraying assembly and a swinging mechanism; the cavity is internally provided with a spraying space, the linear moving mechanism and the spraying assembly are both arranged in the spraying space, the spraying assembly is positioned above the linear moving mechanism, the spraying assembly comprises at least one spray head, and the spraying assembly sprays workpieces on the linear moving mechanism through the at least one spray head; the swinging mechanism is fixed on the cavity, a rocker connected with the spraying assembly is arranged on the swinging mechanism, and the swinging mechanism is matched with the rocker to control the spraying assembly to swing reciprocally along the direction perpendicular to the moving direction of the workpiece.
2. The developing swing spraying device according to claim 1, wherein two groups of guiding components are arranged in the spraying space, the two groups of guiding components are respectively positioned at two sides of the spraying component and connected with the cavity, and two sides of the spraying component are respectively connected with the two groups of guiding components.
3. The developing swing spray apparatus according to claim 2, wherein the guide assembly includes a fixing base fixed on opposite sides of the cavity, a guide rod fixed on the fixing base, and a pulley on which the guide rod abuts; the guide rod is provided with a clasping piece, and the clasping piece is used for being connected with the spraying assembly.
4. A developing swing shower apparatus according to claim 3, wherein an axial direction of said guide bar is perpendicular to a moving direction of said workpiece.
5. The developing swing spray device according to claim 3 or 4, wherein the spray assembly comprises a spray rack, a spray pipe, and a shunt pipe; The two sides of the spray frame are respectively connected to two groups of holding pieces corresponding to the guide assemblies, a plurality of spray pipes are fixed in the spray frame, a plurality of spray heads are arranged on one side of each spray pipe facing the workpiece, the shunt pipes are arranged above the spray pipes and connected with the spray pipe pipelines, and the shunt pipes are used for being connected with external spraying pumping equipment.
6. The developing swing spray apparatus according to any one of claims 1 to 4, wherein the swing mechanism includes a first drive motor, a slider, a rocker, and a disk; a bracket is fixed outside the cavity, and the first driving motor is fixed on the bracket; the disc is fixed on a driving shaft of the first driving motor, a horizontal sliding rail is arranged on the bracket, and the sliding piece is positioned above the disc and is movably connected with the horizontal sliding rail; The sliding piece is provided with a horizontal groove, the disc is provided with an eccentric pin, and the eccentric pin is inserted into the horizontal groove; the sliding piece is provided with a fixed block, one end of the rocker is fixedly connected to the fixed block, and the other end of the rocker is connected with the spraying assembly.
7. The developing swing spray device of claim 6, wherein said rocker is sleeved with a seal, said seal being located between said spray assembly and said cavity inner wall.
8. The developing swing spray device according to any one of claims 1 to 4, wherein a mist discharge port is provided on the chamber, the mist discharge port being in communication with the spray space, the mist discharge port being for connection to an external exhaust system.
9. The developing swing spraying device according to any one of claims 1 to 4, wherein the linear moving mechanism comprises a second driving motor, a power connection group and a plurality of cleaning rods, a cleaning frame is arranged in the spraying space, a plurality of the cleaning rods are movably connected to the cleaning frame, and the workpiece is placed on the cleaning rods; The power connection group is arranged on one side of the cleaning frame, and one ends of the cleaning rods are movably connected with the power connection group; the second driving motor is fixed on the cavity, and a driving shaft on the second driving motor is movably connected with the power connection group.
10. The developing swing spraying device according to claim 9, wherein an upper roller member and a lower roller bar are arranged on the cleaning frame, and the end part of the lower roller bar is movably connected with the power connection group; the upper roller piece is arranged above the lower rolling rod and in rolling contact with the lower rolling rod, and the upper roller piece is matched with the lower rolling rod to limit the workpiece.

Description

Developing swing spraying device Technical Field The application relates to the technical field of developing solution spraying equipment, in particular to a developing swing spraying device. Background In the photolithography process of precision electronics industry such as semiconductor manufacturing and flat panel display, uniform and precise liquid spraying of wafers is a key step in patterning process. For example, in the developing process, a developing solution is uniformly applied to the exposed wafer surface by spraying to dissolve a photoresist in a specific area, thereby precisely forming a fine circuit pattern. The conventional common spraying scheme is fixed multi-nozzle array spraying, and the scheme is that one or more rows of nozzles are fixedly arranged above a wafer transmission path to form a static spraying array with invariable positions and intervals. When the spray head is in operation, the spray heads are simultaneously opened, and when the wafer passes through the lower part of the spray heads at a uniform speed, the spray heads are respectively responsible for covering a fixed strip-shaped area, and finally, the whole coverage of the surface of the wafer is realized through the parallel splicing of a plurality of spraying belts. However, in the joining process of the spraying areas of the adjacent spray heads, the flow rate, the spraying angle and other characteristics of each spray head are difficult to be completely consistent, so that the liquid film is too thick in some areas due to the superposition of the two spray heads, the thin strips are formed in some areas due to insufficient coverage, interference fringes with alternate brightness are formed, and finally, the consistency of spraying is poor. Disclosure of Invention In order to solve the technical problems, the application provides a developing swing spray device which can improve the consistency of spraying. The following describes the technical scheme provided by the application: The application provides a developing swing spraying device, which comprises: the device comprises a cavity, a linear moving mechanism, a spraying assembly and a swinging mechanism; the cavity is internally provided with a spraying space, the linear moving mechanism and the spraying assembly are both arranged in the spraying space, the spraying assembly is positioned above the linear moving mechanism, the spraying assembly comprises at least one spray head, and the spraying assembly sprays workpieces on the linear moving mechanism through the at least one spray head; the swinging mechanism is fixed on the cavity, a rocker connected with the spraying assembly is arranged on the swinging mechanism, and the swinging mechanism is matched with the rocker to control the spraying assembly to swing reciprocally along the direction perpendicular to the moving direction of the workpiece. Optionally, two groups of guide components are arranged in the spraying space, the two groups of guide components are respectively positioned at two sides of the spraying component and connected with the cavity, and two sides of the spraying component are respectively connected with the two groups of guide components. Optionally, the guide assembly includes a fixing seat, a guide rod and a pulley, the fixing seat is fixed on two opposite sides of the cavity, the pulley is fixed on the fixing seat, and the guide rod is abutted on the pulley; the guide rod is provided with a clasping piece, and the clasping piece is used for being connected with the spraying assembly. Optionally, the axial direction of the guide rod is perpendicular to the moving direction of the workpiece. Optionally, the spraying assembly comprises a spraying frame, a spraying pipe and a shunt pipe; The two sides of the spray frame are respectively connected to two groups of holding pieces corresponding to the guide assemblies, a plurality of spray pipes are fixed in the spray frame, a plurality of spray heads are arranged on one side of each spray pipe facing the workpiece, the shunt pipes are arranged above the spray pipes and connected with the spray pipe pipelines, and the shunt pipes are used for being connected with external spraying pumping equipment. Optionally, the rocking mechanism comprises a first driving motor, a sliding piece, a rocking rod and a disc; a bracket is fixed outside the cavity, and the first driving motor is fixed on the bracket; the disc is fixed on a driving shaft of the first driving motor, a horizontal sliding rail is arranged on the bracket, and the sliding piece is positioned above the disc and is movably connected with the horizontal sliding rail; The sliding piece is provided with a horizontal groove, the disc is provided with an eccentric pin, and the eccentric pin is inserted into the horizontal groove; the sliding piece is provided with a fixed block, one end of the rocker is fixedly connected to the fixed block, and the other end of the rocker is connected with t