CN-121972464-A - Metal mask plate dirt cleaning system and method

CN121972464ACN 121972464 ACN121972464 ACN 121972464ACN-121972464-A

Abstract

The invention discloses a metal mask plate cleaning system and method, wherein the cleaning device comprises a cleaning device and a conveying device, the cleaning device comprises a heating module and an ultrasonic cleaning module, the cleaning device at least comprises a first temperature area and a second temperature area, the first temperature area and the second temperature area are sequentially arranged on a conveying path of the conveying device, the conveying device is used for conveying a metal mask plate to the first temperature area to be heated to a drying temperature and to the second temperature area to be controlled to a cleaning temperature, the drying temperature is higher than the cleaning temperature, the heating module is arranged in the cleaning device and used for heating the first temperature area to the drying temperature and the second temperature area to the cleaning temperature, and the ultrasonic cleaning module is arranged in the cleaning device and positioned in the second temperature area and used for sending ultrasonic waves to shake off particles attached to the metal mask plate and shake-off particles through negative pressure. The invention can improve the yield of the FMM at the client.

Inventors

HUANG CHAO
MO SONGTING
LIU XUEMING
XU ZONGYI
SHEN JIANGUO
CHEN SHUNLIANG
SUN YINGZHI

Assignees

宁波寰采星科技股份有限公司

Dates

Publication Date: 20260505
Application Date: 20260303

Claims (10)

1. The metal mask plate cleaning system comprises a cleaning device and a conveying device (82), and is characterized in that the cleaning device comprises a heating module and an ultrasonic cleaning module, the cleaning device at least comprises a first temperature area and a second temperature area, and the first temperature area and the second temperature area are sequentially arranged on a conveying path of the conveying device (82); The conveying device (82) is used for conveying the metal mask plate to the first temperature area to be heated to a drying temperature and to the second temperature area to be controlled to be at a cleaning temperature, and the drying temperature is higher than the cleaning temperature; the heating module is arranged in the cleaning device and is used for heating the first temperature area to a drying temperature and heating the second temperature area to a cleaning temperature; the ultrasonic cleaning module is arranged in the dirt cleaning device and located in the second temperature area and is used for sending out ultrasonic waves to shake off particles attached to the metal mask plate and sucking away the shake-off particles through negative pressure.
2. The metal mask cleaning system according to claim 1, wherein the cleaning device comprises a first chamber (22) and a second chamber (23), the first temperature region being within the first chamber (22) and the second temperature region being within the second chamber (23); The heating module comprises a first heating unit, a second heating unit and an air injection unit (223), wherein the first heating unit is arranged in the first box chamber (22) and used for heating a first temperature area to the drying temperature, the air injection unit (223) is connected with the first box chamber (22) and used for injecting compressed drying air into the first box chamber (22), and the second heating unit is arranged in the second box chamber (23) and used for controlling the temperature of a second temperature area to the decontamination temperature.
3. The metal mask cleaning system according to claim 2, wherein the first heating unit comprises an infrared light-emitting lamp tube array (221) and a first water cooling component (222), the infrared light-emitting lamp tube array (221) is arranged above the conveying device (82) and used for generating infrared light, the first water cooling component (222) is arranged on one side of the infrared light-emitting lamp tube array, which is away from the conveying device (82), cooling water is flowed into the first water cooling component (222) and used for cooling the infrared light-emitting lamp tube array, the second heating unit comprises a heating plate array (232), and the heating plate array (232) is arranged on two sides of the conveying device (82) and used for heating the second temperature region.
4. The metal mask cleaning system according to claim 2, wherein the ultrasonic cleaning module (231) is disposed in the second chamber (23) and located at the upper side and the lower side of the conveying device (82), the ultrasonic cleaning module comprises an ultrasonic generator and a negative pressure aspirator, a resonant cavity (2315) is formed in the ultrasonic generator, an injection opening (2316) is disposed at one side of the resonant cavity (2315) facing the conveying device (82), an air injection opening (2311) is disposed at one end of the resonant cavity (2315), the air injection opening (2311) is used for being connected with an external compressed air source, compressed air is injected into the resonant cavity (2315), the negative pressure aspirator is disposed around the outer side of the ultrasonic generator, the negative pressure aspirator exposes out of the injection opening (2316), an air flow channel (2313) is formed in the negative pressure aspirator, an air inlet (2314) is disposed at one side of the air flow channel (2313) facing the conveying device (82), and an air extraction opening (2312) is disposed at one end of the air flow channel (2313) for being connected with an external extraction device.
5. The metal mask cleaning system according to any one of claims 1 to 4, further comprising a third chamber (21) and an ultraviolet cleaning module, wherein the third chamber (21), the first temperature region and the second temperature region are sequentially arranged on a conveying path of the conveying device (82), the ultraviolet cleaning module is arranged in the third chamber (21) and is used for performing photochemical decomposition on stains on the metal mask carried on the conveying device (82), and the conveying device (82) is used for conveying the metal mask to the first temperature region after cleaning in the third chamber (21).
6. The metal mask plate decontamination system according to claim 5, wherein the ultraviolet decontamination module comprises an ultraviolet light-emitting lamp tube array (211), a nitrogen injection unit (213), an exhaust unit (214) and a second water cooling component (212), wherein the ultraviolet light-emitting lamp tube array (211) is arranged in the third box chamber (21) and positioned on the upper side and the lower side of the conveying device (82) respectively, and is used for generating ultraviolet light, the second water cooling component (212) is arranged on one side, away from the conveying device (82), of the ultraviolet light-emitting lamp tube array (211), cooling water flows through the second water cooling component (212) and is used for cooling the ultraviolet light-emitting lamp tube array (211), the nitrogen injection unit (213) and the exhaust unit (214) are arranged oppositely and are communicated with the third box chamber (21), the nitrogen injection unit (213) is used for injecting nitrogen into the third box chamber (21), and the exhaust unit (214) is used for exhausting the gas in the third box chamber (21).
7. A metal mask plate decontamination method applied to the metal mask plate decontamination system as claimed in any one of claims 5 to 6, characterized in that the method comprises the following steps: Performing first cleaning treatment on the surface of the metal mask plate by using ultraviolet light; Heating the metal mask plate subjected to the first cleaning treatment to a drying temperature, and drying; And controlling the temperature of the metal mask plate after the drying treatment to the cleaning temperature, and performing the second cleaning treatment by utilizing ultrasonic waves.
8. The method for cleaning a metal mask according to claim 7, wherein the step of performing the first cleaning treatment on the surface of the metal mask by using ultraviolet light comprises: the metal mask plate is placed on a conveying device, and is conveyed into a third box chamber by the conveying device, wherein the conveying speed is 0.5-2.0 m/min; and setting the opening number of the ultraviolet light-emitting lamp tubes in the ultraviolet light-emitting lamp tube array in the third box chamber to be 5-20, setting the ultraviolet wavelength to be 160-180 nm, setting the nitrogen injection flow to be 500-1000L/min, and setting the cooling water flow in the second water cooling assembly to be 50-100L/min.
9. The method for cleaning metal mask plate according to claim 8, wherein the heating the metal mask plate after the first cleaning treatment to a drying temperature, and performing the drying treatment, comprises: Transmitting the metal mask plate into a first box by using a conveying device, wherein the transmission speed of the conveying device in the first box is 0.5-2.0 m/min; The number of the opened infrared light-emitting tubes in the infrared light-emitting tube array in the first box is 5-20, and the infrared wavelength is 3-15 The drying temperature is 60-90 ℃, the injection amount of the compressed drying air is 50-200L/min, and the cooling water flow is 50-100L/min.
10. The method for cleaning metal mask plate according to claim 9, wherein the step of controlling the temperature of the dried metal mask plate to the cleaning temperature, and performing the second cleaning treatment by using ultrasonic waves comprises the steps of: transmitting the metal mask plate into a second box by using a conveying device, wherein the transmission speed of the conveying device in the second box is 0.5-2.0 m/min; And setting the ultrasonic frequency to be 80-120 KHz, the air injection pressure to be 0.6-0.8 MPa and the air extraction pressure to be 0.3-0.5 MPa.

Description

Metal mask plate dirt cleaning system and method Technical Field The invention relates to the technical field of metal mask plate manufacturing, in particular to a metal mask plate trash removal system and method. Background The qualified metal mask plate (FMM, fine Metal Mask) is used as a core precise component in the evaporation process of the display panel, and the surface cleanliness and flatness of the metal mask plate directly determine the pattern precision and the product yield of the subsequent evaporation process. After finishing the final inspection of the whole process and confirming that each index reaches the standard, the standard is required to be transferred to a packing machine in time for sealing, protecting and packing, so that preparation is provided for subsequent storage, transportation and production line application. However, in the actual production process, the FMM which is qualified after final inspection and is packed is found, when the client is put into the vapor deposition process, color spots at fixed positions appear, so that the product yield is reduced by 5% -10%, and yield loss is caused to the client. Disclosure of Invention The present invention aims to solve one of the technical problems in the related art to a certain extent. Therefore, the invention provides a metal mask plate dirt cleaning system. In order to achieve the above object, a first aspect of the present invention provides a metal mask plate cleaning system, which includes a cleaning device and a conveying device, the cleaning device includes a heating module and an ultrasonic cleaning module, the cleaning device has at least a first temperature region and a second temperature region, and the first temperature region and the second temperature region are sequentially disposed on a conveying path of the conveying device; The conveying device is used for conveying the metal mask plate to the first temperature area to be heated to a drying temperature and to the second temperature area to be controlled to be at a cleaning temperature, and the drying temperature is higher than the cleaning temperature; the heating module is arranged in the cleaning device and is used for heating the first temperature area to a drying temperature and heating the second temperature area to a cleaning temperature; the ultrasonic cleaning module is arranged in the dirt cleaning device and located in the second temperature area and is used for sending out ultrasonic waves to shake off particles attached to the metal mask plate and sucking away the shake-off particles through negative pressure. Optionally, the cleaning device comprises a first box chamber and a second box chamber, the first temperature area is located in the first box chamber, and the second temperature area is located in the second box chamber; The heating module comprises a first heating unit, a second heating unit and an air injection unit, wherein the first heating unit is arranged in the first box and is used for heating a first temperature area to the drying temperature, the air injection unit is connected with the first box and is used for injecting compressed drying air into the first box, and the second heating unit is arranged in the second box and is used for heating a second temperature area to the decontamination temperature. Optionally, the first heating unit comprises an infrared light-emitting lamp tube array and a first water cooling component, the infrared light-emitting lamp tube array is arranged above the conveying device and used for generating infrared light, the first water cooling component is arranged on one side, away from the conveying device, of the infrared light-emitting lamp tube array, cooling water is circulated in the first water cooling component and used for cooling the infrared light-emitting lamp tube array, and the second heating unit comprises a heating plate array, and the heating plate array is arranged on two sides of the conveying device and used for heating the second temperature area. The ultrasonic cleaning module comprises an ultrasonic generator and a negative pressure aspirator, wherein a resonant cavity is formed in the ultrasonic generator, an injection opening is formed in one side of the resonant cavity, which faces the conveying device, an air injection opening is formed in one end of the resonant cavity, the air injection opening is used for being connected with external air supply equipment so as to inject air into the resonant cavity, compressed air forms an air flow carrying ultrasonic waves after passing through the resonant cavity and is injected to a metal mask plate conveyed on the conveying device through the injection opening so as to shake off particles attached to the metal mask plate, the negative pressure aspirator is arranged around the outer side of the ultrasonic generator and exposes out of the injection opening, an air flow channel is formed in the negative pressure aspirator, an air inlet