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CN-121972750-A - Manufacturing method of split type flexible gear

CN121972750ACN 121972750 ACN121972750 ACN 121972750ACN-121972750-A

Abstract

The application relates to a manufacturing method of a split flexible gear, which is applied to the field of welding and comprises the following steps of manufacturing a cup body and a flange plate respectively, placing the cup body and the flange plate into a cleaning device, carrying out surface treatment on the cup body and the flange plate, assembling the cup body on the flange plate to form a workpiece, placing brazing filler metal and a flow blocking agent on a joint surface between the cup body and the flange plate, placing the workpiece into a vacuum brazing furnace integrally, starting a vacuum system to vacuumize the vacuum brazing furnace, and raising the temperature in the vacuum brazing furnace to a target brazing temperature. The method for integrally processing the flexible wheel by the complex deep-cavity thin-wall part in the traditional technology is optimized and decomposed into two relatively simple parts, and the two relatively simple parts are welded, so that raw materials are saved, meanwhile, the production flow is optimized and shortened, the heat affected zone can be greatly reduced by vacuum brazing, and the production quality and the production efficiency of the flexible wheel are improved.

Inventors

  • ZHAO GUOQING
  • SUN WEI
  • LI LIXIA
  • WANG NA

Assignees

  • 无锡海古德新技术有限公司

Dates

Publication Date
20260505
Application Date
20260205

Claims (9)

  1. 1. The manufacturing method of the split type flexible gear is characterized by comprising the following steps of: manufacturing a cup body (1) and a flange plate (2) respectively; placing the cup body (1) and the flange plate (2) into cleaning equipment, and carrying out surface treatment on the cup body (1) and the flange plate (2); assembling the cup body (1) on the flange plate (2) to form a workpiece; the brazing filler metal and the flow blocking agent are placed on the lap joint surface between the cup body (1) and the flange plate (2); placing the workpiece into a vacuum brazing furnace, and starting a vacuum system to vacuumize the vacuum brazing furnace; raising the temperature in the vacuum brazing furnace to a target brazing temperature, wherein the target brazing temperature range is 1050-1150 ℃; Maintaining the target brazing temperature for a preset time, wherein the heat preservation time range is 10-15 min; cooling the workpiece subjected to heat preservation in the vacuum brazing furnace to room temperature; And taking out the workpiece after the temperature in the vacuum brazing furnace is reduced to room temperature, cleaning the workpiece, and performing heat treatment on the cleaned workpiece.
  2. 2. The manufacturing method of the split type flexible gear according to claim 1, wherein the cup body (1) and the flange plate (2) are made of 40CrNiMoA materials, the chemical components are C0.37% -0.44%, si 0.17% -0.37%, mn 0.50% -0.80%, cr 0.60% -0.90%, ni 1.25% -1.65%, mo 0.15% -0.25% and the balance being Fe, the brazing filler metal is nickel-based BNi2, the chemical components are Cr 7.0% -9.0%, si 3.5% -4.5%, B2.5% -3.0% and the balance being Ni.
  3. 3. The method of manufacturing a split flexspline according to claim 1, wherein the surface treatment step comprises at least: the cleaning equipment carries out surface cleaning treatment on the cup body (1) and the flange plate (2), and absolute ethyl alcohol is used for flushing the cup body (1) and the flange plate (2) after surface dirt and grease are removed; And (3) placing the cup body (1) with the oxide layer removed and the flange plate (2) into drying equipment for drying.
  4. 4. The method for manufacturing the split flexspline according to claim 1, wherein the flow blocking agent is prepared by mixing alumina powder and a sodium silicate binder according to a mass ratio of 7:3.
  5. 5. The method of manufacturing a split flexspline according to claim 1, wherein the step of activating the vacuum system to evacuate the vacuum brazing furnace comprises: And starting a vacuum system to pump the vacuum degree in the vacuum brazing furnace to 10 -3 Pa~10 -4 Pa.
  6. 6. The method of manufacturing a split flexspline according to claim 1, wherein the step of increasing the temperature in the vacuum brazing furnace to the target brazing temperature comprises: Heating the vacuum brazing furnace to a first temperature at a first speed, and preserving heat for a first time, wherein the first speed is 4-6 ℃ per minute, the first temperature is 390-410 ℃, and the first time is 28-32 min; Heating the vacuum brazing furnace to a second temperature at a second speed, and preserving heat for a second time, wherein the second speed is 4-6 ℃ per minute, the second temperature is 790-810 ℃, and the second time is 18-22 min; heating the vacuum brazing furnace to a third temperature at a third speed, and preserving heat for a third time, wherein the third speed is 2-4 ℃ per minute, the third temperature is 1050-1150 ℃, and the third time is 10-15 min.
  7. 7. The method of manufacturing a split flexspline according to claim 1, wherein the step of cooling the heat-insulated workpiece in the vacuum brazing furnace to room temperature comprises: after the temperature in the vacuum brazing furnace is reduced to 450-550 ℃, filling inert gas into the vacuum brazing furnace for cooling; And when the temperature in the vacuum brazing furnace is reduced to be below 95-105 ℃, closing inert gas supply to cool the vacuum brazing furnace to room temperature.
  8. 8. The method of manufacturing a split flexspline according to claim 1, wherein the heat treatment step comprises: Placing the workpiece into oil quenching equipment, heating the oil quenching equipment to 840-860 ℃ and preserving heat for 20-30 min, and immersing the workpiece subjected to oil quenching and heat preservation into quenching oil at 50-80 ℃ for rapid cooling; and (3) placing the quenched workpiece into tempering equipment, heating the tempering equipment to 580-620 ℃ and preserving heat for 1.8-2.2 h, and cooling the workpiece to the target temperature after tempering to finish heat treatment and taking out.
  9. 9. The flexible gear is characterized by being manufactured by adopting the manufacturing method of the split flexible gear according to any one of claims 1-8.

Description

Manufacturing method of split type flexible gear Technical Field The application relates to the technical field of welding, in particular to a manufacturing method of a split type flexible gear. Background The electrostatic chuck is a key component for manufacturing wafers, and realizes precise fixation and temperature control of silicon wafers under the complex working conditions of vacuum, high temperature and the like. Because the ceramic surface is extremely sensitive to mechanical vibration, the transfer robot must have extremely high clean, stable and low vibration performance, so the joint transmission device mostly adopts a harmonic reducer with stable transmission and high precision. The flexible wheel in the harmonic reducer is a thin-wall elastic part, is driven by the wave generator to continuously and periodically elastically deform, and is meshed with the rigid wheel to transmit motion and force. The flexible wheel in the related art is integrally processed by adopting a single blank, and a thin-wall cup-shaped structure and a relatively thick flange structure are directly processed on the blank. According to the mode of integrally processing the flexible gear by the single blank, the material waste is serious, meanwhile, the cooling speed of the thin-wall cup body and the thick flange part of the flexible gear in the heat treatment process is uneven, the heat treatment is easy to deform, and the production quality of a finished flexible gear is low. Disclosure of Invention In order to help solve the problem that the production quality of a finished flexible gear is low due to uneven cooling speed of a thin-walled cup body and a thick flange part of the flexible gear in the heat treatment process and easy deformation in the heat treatment process in the mode of integrally processing the flexible gear by using the single blank, the application provides a split type flexible gear manufacturing method which adopts the following technical scheme that: Respectively manufacturing a cup body and a flange plate; placing the cup body and the flange plate into cleaning equipment, and carrying out surface treatment on the cup body and the flange plate; Assembling the cup body on the flange plate to form a workpiece; placing brazing filler metal and a flow blocking agent on the lap joint surface between the cup body and the flange plate; Placing the whole workpiece into a vacuum brazing furnace, and starting a vacuum system to vacuumize the vacuum brazing furnace; raising the temperature in the vacuum brazing furnace to a target brazing temperature, wherein the target brazing temperature range is 1050-1150 ℃; Maintaining the target brazing temperature for a preset time, wherein the heat preservation time range is 10-15 min; cooling the workpiece subjected to heat preservation in the vacuum brazing furnace to room temperature; And taking out the workpiece after the temperature in the vacuum brazing furnace is reduced to room temperature, cleaning the workpiece, and performing heat treatment on the cleaned workpiece. In a specific implementation scheme, the cup body and the flange are made of 40CrNiMoA materials, the chemical components of the cup body and the flange are C0.37% -0.44%, si 0.17% -0.37%, mn 0.50% -0.80%, cr 0.60% -0.90%, ni 1.25% -1.65%, mo 0.15% -0.25% and the balance of Fe, and the brazing filler metal is nickel-based brazing filler metal BNi2, the chemical components of the brazing filler metal are Cr 7.0% -9.0%, si 3.5% -4.5%, B2.5% -3.0% and the balance of Ni. In a specific embodiment, the surface treatment step comprises at least: the cleaning equipment carries out surface cleaning treatment on the cup body and the flange plate, and the cup body and the flange plate are washed by absolute ethyl alcohol after surface dirt and grease are removed; and (5) placing the cup body and the flange plate with the oxide layers removed into drying equipment for drying. In a specific embodiment, the flow inhibitor is prepared by mixing alumina powder and a sodium silicate binder according to a mass ratio of 7:3. In a specific embodiment, the step of activating the vacuum system to evacuate the vacuum of the vacuum brazing furnace comprises activating the vacuum system to evacuate the vacuum of the vacuum brazing furnace to 10 -3Pa~10-4 Pa. In a specific embodiment, the step of increasing the temperature in the vacuum brazing furnace to the target brazing temperature comprises: Heating the vacuum brazing furnace to a first temperature at a first speed, and preserving heat for a first time, wherein the first speed is 4-6 ℃ per minute, the first temperature is 390-410 ℃, and the first time is 28-32 min; Heating the vacuum brazing furnace to a second temperature at a second speed, and preserving heat for a second time, wherein the second speed is 4-6 ℃ per minute, the second temperature is 790-810 ℃, and the second time is 18-22 min; heating the vacuum brazing furnace to a third temperature at a third sp