CN-121972827-A - Square optical core cutting system and cutting method

CN121972827ACN 121972827 ACN121972827 ACN 121972827ACN-121972827-A

Abstract

The application provides a square optical core cutting system and a cutting method, which relate to the field of precision medical device processing, wherein the cutting system comprises a self-adaptive positioning module, a femtosecond laser cutting module, a real-time detection feedback module and a cooperative control system module; the self-adaptive positioning module is used for clamping and positioning the square optical core, the femtosecond laser cutting module is used for generating femtosecond laser pulses and cutting the positioned square optical core at an included angle of 45 degrees, the real-time detection feedback module is used for detecting the shape and angle parameters of a cutting surface in real time during and after cutting and feeding data back to the cooperative control system module, and the cooperative control system module adjusts the cutting parameters or the positioning parameters in real time according to the feedback data. The application can effectively improve the positioning precision and the cutting precision of the square optical core, ensure the consistency of the angle and the shape of the cutting surface and improve the cutting quality and the running stability of the system.

Inventors

ZHU MIN
PENG YUQI
ZHOU ZHENYOU

Assignees

安徽宏元聚康医疗科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260327

Claims (10)

1. The square optical core cutting system is characterized by comprising a self-adaptive positioning module, a femtosecond laser cutting module, a real-time detection feedback module and a cooperative control system module, wherein the self-adaptive positioning module, the femtosecond laser cutting module and the real-time detection feedback module are in signal connection with the cooperative control system module and are cooperatively controlled by the cooperative control system module to finish cutting; The self-adaptive positioning module is used for clamping and positioning the square optical core; The femtosecond laser cutting module is used for generating femtosecond laser pulses and cutting the positioned square optical core at an included angle of 45 degrees; the real-time detection feedback module is used for detecting morphology and angle parameters of the cutting surface in real time during and after the cutting process and feeding back data to the cooperative control system module; and the cooperative control system module adjusts the cutting parameters or the positioning parameters in real time according to the feedback data.
2. The square optical core cutting system according to claim 1, wherein the adaptive positioning module comprises: the vacuum adsorption base is provided with a V-shaped positioning groove, and the V-shaped positioning groove is matched with the shape of the square optical core; The micropore vacuum matrix is distributed at the bottom of the V-shaped positioning groove and is used for adsorbing and fixing the square optical core; The flexible silica gel pad is attached to the inner wall of the V-shaped positioning groove; the piezoelectric ceramic micro-stage is used for bearing the vacuum adsorption base and driving the square optical core to adjust the pose of the nano-scale precision in a three-dimensional space; A piezoelectric ceramic fine tuning mechanism for bearing the vacuum adsorption base, a displacement sensor connected with the vacuum adsorption base for driving the square optical core to adjust the position and the posture of nanometer precision within the preset threshold range in the three-dimensional space, and And the temperature compensation unit adopts a U-shaped bimetal and piezoelectric lamination composite structure and is used for monitoring and compensating the thermal deformation of the vacuum adsorption base caused by the change of the ambient temperature in real time.
3. The square optical core cutting system according to claim 2, wherein the femtosecond laser cutting module comprises: The servo motor is used for driving the optical galvanometer system so as to realize scanning and guiding of the laser beam; the device comprises a femtosecond laser, a power supply and a control unit, wherein the femtosecond laser is used for parameter adjustment in a preset wavelength and power interval, is configured with a transmitting mode capable of generating a specific pulse sequence, and outputs pulses in the magnitude of femtosecond; The cutting head is provided with a dynamic focusing lens group, the light-emitting axis forms an included angle of 45 degrees with the reference surface of the V-shaped positioning groove, the cutting head is driven by the servo motor to lock and finely adjust the included angle of 45 degrees so as to focus and guide the laser beam to the position of the optical core to be cut, and The CO 2 cyclone dust removal component is used for removing dust and cooling in the cutting process.
4. The square optical core cutting system according to claim 1, wherein the real-time detection feedback module is composed of a laser interferometer module, a visual detection unit module, a reference storage subsystem module, a comparison and judgment subsystem module and a verification receiving module; The laser interferometer module is provided with a double-channel measurement structure and adopts a double-channel measurement mode, wherein the double-channel measurement structure comprises a first polarization channel and a second polarization channel, the first polarization channel is used for measuring the angle deviation of a cutting surface relative to a reference surface in real time, and the second polarization channel is used for measuring the surface roughness or flatness of the cutting surface in real time; The visual detection unit module is used for capturing the optical core image of the element to be assembled on the assembly station in real time, acquiring a microscopic image of the cutting area, identifying the morphological characteristics of the cutting edge through a preset image processing algorithm, and obtaining real-time positioning data based on image analysis; The standard storage subsystem module pre-stores standard positioning data of the qualified optical core; The comparison and judgment subsystem module is used for comparing the real-time positioning data with the standard positioning data, generating a deviation alarm signal and feeding back the deviation alarm signal to the cooperative control system module when the calculated data deviation exceeds a preset tolerance threshold, and not sending out the alarm signal if the calculated data deviation exceeds the preset tolerance threshold; the verification receiving module is used for receiving the modified signal data sent by the cooperative control system module, comparing the modified signal data with the standard positioning data, continuously generating a deviation alarm signal when the data deviation of the modified signal data exceeds a preset tolerance threshold value, feeding back the deviation alarm signal to the cooperative control system module, and not sending the deviation alarm signal if the data deviation of the modified signal data is within the preset tolerance threshold value.
5. The square optical core cutting system according to claim 1, wherein the cooperative control system module is configured to synchronously adjust the pose of the adaptive positioning module and the processing parameters of the femto-second laser cutting module according to the real-time feedback data of the real-time detection feedback module, so as to form closed-loop control; The detection light path of the real-time detection feedback module and the processing light path of the femtosecond laser cutting module are in space conjugate layout, so that morphology and angle data of a cutting surface can be obtained in real time without interference in the cutting process.
6. The square optical core cutting system according to claim 4, wherein the visual detection unit module is used for calculating the positioning deviation of the optical core, and comprises an image acquisition module and an image processing module; The image acquisition module comprises a light source and an image sensor, wherein the light source is used for providing illumination for the end face of the optical core to be detected, and the image sensor is used for receiving reflected light or transmitted light from the end face so as to capture a target image containing the optical core; The image processing module is electrically connected with the image acquisition module and is used for receiving the target image, identifying the outline of the optical core area in the target image through an edge detection and outline extraction algorithm, calculating the geometric center of the outline and taking the geometric center as the actual position coordinate of the optical core, comparing the actual position coordinate with the preset standard position coordinate, calculating the linear offset or the angular offset of the actual position coordinate and the preset standard position coordinate in at least one direction, and determining the linear offset or the angular offset as positioning deviation.
7. A square optical core cutting method, cutting by using the square optical core cutting system according to any one of claims 1 to 6, comprising: Sequentially performing ultrasonic cleaning and supercritical CO 2 drying on the optical core; placing the optical core in a V-shaped positioning groove, fixing the optical core through vacuum adsorption, and combining temperature compensation by utilizing a visual detection and piezoelectric ceramic fine adjustment mechanism so as to enable the optical core to reach preset positioning precision; the laser parameters matched with the material and the size of the optical core are called through the cooperative control system module, the cutting head is driven to move according to the set track, and meanwhile, the low-temperature dust removal and the shielding gas purging are started to cut; In the cutting process, the quality of a cutting surface is synchronously detected by using a laser interferometer, and if deviation exists in detection, the deviation is fed back to a cooperative control system module to adjust the technological parameters in real time; After the cutting is completed, the optical core is cleaned and the 45-degree end face is subjected to laser sealing.
8. The method for cutting a square optical core according to claim 7, wherein before the optical core is sequentially subjected to ultrasonic cleaning and supercritical CO 2 drying, the method further comprises the steps of performing size detection on the side length and verticality of the optical core before and after cleaning and drying by using a micrometer with the precision of 0.001 mm; the ultrasonic cleaning adopts absolute ethyl alcohol as a medium, the ultrasonic frequency is 40-60kHz, the power is 100-200W, and the cleaning time is 5-10 minutes; the conditions of supercritical CO 2 drying are 35 ℃ and 8MPa, the drying time is 3 minutes, and the concentration of particle pollutants of which the surface of the optical core is more than or equal to 5 mu m after the supercritical CO 2 is dried is less than or equal to 1 particle pollutant/mm < 2 >.
9. The square optical core cutting method according to claim 7, wherein the vacuum adsorption negative pressure value is 0.08-0.1MPa, the alignment error between the center of the optical core and the focusing center of the cutting head is less than or equal to 0.002mm after the positioning is completed through vacuum adsorption fixation, the parallelism between the axis of the optical core and the cutting reference plane is less than or equal to 0.02 μm/mm, and the single fine adjustment precision of the piezoelectric ceramic fine adjustment mechanism is less than or equal to 0.1 μm.
10. The square optical core cutting method according to claim 7, wherein the moving speed of the cutting head is 5-20mm/s, and argon with the flow of 5-10L/min is introduced for purging protection, and the dynamic focusing lens group of the cutting head adjusts the focal position in real time according to the actual height of the optical core and controls the diameter of a focusing light spot to be in a range of 5-20 μm; When the angle deviation of the cutting surface is detected to exceed +/-0.05 degrees, the angle or the laser power of a servo motor is adjusted through a cooperative control system module, wherein the adjustment step length of the laser power is 0.1W, the flatness of the final cutting surface is required to be smaller than or equal to 0.1 mu m, the end surface roughness Sa is smaller than or equal to 0.05 mu m, the edge breakage size is smaller than or equal to 2 mu m, and the edge breakage rate is smaller than 1%; The laser sealing is carried out in an inert atmosphere glove box, the oxygen content in the glove box is less than or equal to 10ppm, the water content in the glove box is less than or equal to 10ppm, H 2 O is less than or equal to 10ppm, the sealing laser power is 8-10W, and the action time is 2-3 seconds.

Description

Square optical core cutting system and cutting method Technical Field The application relates to the technical field of precision medical device processing, in particular to a square optical core cutting system and a square optical core cutting method. Background The square optical core fiber has the characteristics of excellent light spot shaping function, high coupling efficiency with a semiconductor laser and the like, and is increasingly widely applied to the fields of laser cleaning, cladding, optical communication modules and the like. The 45-degree cutting is a key process for processing the square optical core, and the cutting precision directly influences the optical signal transmission efficiency, the coupling loss and the device reliability. The conventional square optical core cutting technology has the defects that (1) the conventional mechanical cutting relies on manual operation experience, the cutting angle error often exceeds +/-0.5 degrees, the difference of verticality of four side surfaces of a square optical core is easy to cause inclination of a cutting surface, the angle precision is controlled poorly, the produced square optical core influences light reflection and transmission performance, (2) when common laser cutting is adopted, the thermal influence of temperature on the environment is large, defects such as edge breakage and microcrack are easy to occur, especially for a micro optical core with the side length less than or equal to 1mm, the breaking risk is obviously increased, the cutting quality is unstable, (3) the conventional device is designed for a square optical core with fixed specification, a clamp is required to be debugged again when a processing object is replaced, a real-time detection feedback mechanism is lacked, independent precision detection is required after cutting, the working procedure is complicated, the working efficiency is low, the suitability is poor, and when the optical core is fixed in an adhesive mode, positioning error is easy to occur in the optical core transferring process due to uneven thickness of an adhesive layer, and the deviation of verticality of the cutting surface and the optical core axis exceeds a preset range, and the positioning error is large. Therefore, a 45-degree cutting technology for the square optical core with high precision, high stability and strong adaptability needs to be developed to solve the existing process bottleneck. Disclosure of Invention Aiming at the defects of the prior art, the application provides a square optical core cutting system and a square optical core cutting method, which are used for solving the problems in the prior art in the background art. In order to achieve the above purpose, the application is realized by the following technical scheme: The embodiment of the application provides a square optical core cutting system, which comprises a self-adaptive positioning module, a femtosecond laser cutting module, a real-time detection feedback module and a cooperative control system module, wherein the self-adaptive positioning module, the femtosecond laser cutting module and the real-time detection feedback module are in signal connection with the cooperative control system module and are cooperatively controlled by the cooperative control system module to finish cutting, the self-adaptive positioning module is used for clamping and positioning a square optical core, the femtosecond laser cutting module is used for generating femtosecond laser pulses and cutting the positioned square optical core at an included angle of 45 degrees, the real-time detection feedback module is used for detecting the morphology and angle parameters of a cutting surface in real time during and after cutting and feeding data back to the cooperative control system module, and the cooperative control system module is used for adjusting the cutting parameters or the positioning parameters in real time according to feedback data. According to the first aspect of the embodiment of the application, the self-adaptive positioning module comprises a vacuum adsorption base provided with a V-shaped positioning groove, a micropore vacuum matrix, a flexible silica gel pad, a piezoelectric ceramic micro-motion stage, a bearing vacuum adsorption base, a piezoelectric ceramic micro-motion mechanism and a displacement sensor, wherein the V-shaped positioning groove is matched with the square optical core in shape, the micropore vacuum matrix is distributed at the bottom of the V-shaped positioning groove and is used for adsorbing and fixing the square optical core, the flexible silica gel pad is attached to the inner wall of the V-shaped positioning groove, the piezoelectric ceramic micro-motion stage is used for driving the square optical core to conduct position and position adjustment with nanometer-level precision in a three-dimensional space, the piezoelectric ceramic micro-motion mechanism is used for bearing the vacuum adsorption b