CN-121972835-A - Quartz injection tube laser drilling device and method

CN121972835ACN 121972835 ACN121972835 ACN 121972835ACN-121972835-A

Abstract

The invention discloses a quartz jet tube laser drilling device and a quartz jet tube laser drilling method, and relates to the field of workshop devices. The device comprises a device workbench, wherein a plurality of spray pipe placement jigs are linearly arranged on the upper surface of the device workbench, an air blowing assembly is movably arranged on the device workbench and comprises an upper air passage assembly and a lower air passage assembly, the upper air passage assembly is connected with a magnetic suction fixing clamp through a right-angle bent quartz air blowing pipe fixing support, and the upper air passage assembly is connected with the lower air passage assembly through a rubber hose. Through setting up the subassembly of blowing, can blow away the piece and the heat of punching fast, be difficult to let quartz injection pipe product produce quality problems such as flaw. The yield can be effectively improved, and the production cost of the single quartz injection tube is further reduced.

Inventors

TONG ZHONG
Lu Peishuang
WANG ZIHAN
ZHANG PENG
YANG JUN

Assignees

杭州大和热磁电子有限公司

Dates

Publication Date: 20260505
Application Date: 20251231

Claims (10)

1. The utility model provides a quartzy jet pipe laser drilling device, its characterized in that, includes equipment table (3) the upper surface fixed linearity of equipment table (3) has arranged a plurality of jet pipes and has placed tool (2), movable installation has the subassembly of blowing on equipment table (3), and the subassembly of blowing includes gas circuit subassembly and lower gas circuit subassembly, goes up the gas circuit subassembly and is connected with magnetism suction fixation clamp (4) through the quartzy gas blow pipe fixed bolster (5) of right angle bending, goes up gas circuit subassembly and is connected through rubber hose (8) with lower gas circuit subassembly.
2. The quartz injection tube laser drilling device according to claim 1, wherein the upper gas path assembly comprises a gas blowing nozzle (6) and a right-angle bent quartz gas blowing tube (7), and the gas blowing nozzle (6) is in airtight communication with the right-angle bent quartz gas blowing tube (7).
3.A quartz injection tube laser drilling device according to claim 1 or 2, characterized in that the lower gas circuit assembly comprises a compressed air filter (14), one end of the compressed air filter (14) is connected with a compressed air inlet tube (16) through a second compressed air vacuum joint (15), and the other end of the compressed air filter (14) is connected with a compressed air pressure regulating valve (11) through a first compressed air connecting tube (10).
4. A quartz injection tube laser drilling device according to claim 1 or 2, characterized in that a laser moving frame (18) is movably matched on the equipment workbench (3), a laser (17) is fixedly arranged at one end of the laser moving frame (18), and the laser moving frame (18) moves independently of the equipment workbench (3).
5. A laser drilling method for a quartz injection tube, which is applied to the laser drilling device for the quartz injection tube according to any one of claims 1 to 4, and is characterized by comprising the following steps: S1, assembling an air blowing assembly and fixedly mounting the air blowing assembly on an equipment workbench; s2, fixedly mounting an injection tube placing jig on an equipment workbench, and placing a quartz injection tube on the injection tube placing jig; S3, connecting the closed end of the quartz injection tube with the air blowing nozzle, adjusting the shape of the air path assembly through the magnetic fixing clamp, and introducing compressed air into the quartz injection tube; And S4, starting the laser moving frame, moving the laser to the corresponding position of the quartz spraying tube, starting the laser to punch holes, and moving to the next position.
6. The laser drilling method of the quartz injection tube according to claim 5, wherein the step S1 comprises the step of forming the air blowing assembly by an upper air passage assembly and a lower air passage assembly, wherein the upper air passage assembly is fixedly installed with the equipment workbench through a magnetic fixing frame for adjusting the installation position.
7. The laser drilling method of the quartz injection tube according to claim 6, wherein the upper air passage component and the lower air passage component are connected through a rubber hose.
8. The laser drilling method of a quartz injection tube according to claim 5, 6 or 7, wherein S2 comprises cleaning the quartz injection tube before placing it in the injection tube placement jig, removing dust and debris, drying, placing it on the injection tube placement jig, and placing graphite sheets inside the quartz injection tube.
9. The laser drilling method of a quartz injection tube according to claim 5,6 or 7, wherein the step S4 further comprises that one end of the quartz injection tube connected with the blowing nozzle is closed, and the other end is open.
10. A method of laser drilling a quartz injection tube according to claim 9, wherein the direction of laser drilling is selected to feed from an open end to a closed end.

Description

Quartz injection tube laser drilling device and method Technical Field The invention relates to the field of material surface evaporation treatment, in particular to a quartz injection tube laser drilling device and a quartz injection tube laser drilling method. Background Because the inner wall of the jet pipe can generate higher heat and gas in the laser processing process of the quartz jet pipe, the parameters such as the power and the air pressure of laser equipment are mainly adjusted to lighten the jet pipe at present, but the heat and the gas can not be discharged, the appearance problems such as air marks, air halos and the like at the bottom of the inner wall hole of the jet pipe are serious, the problem of incapability of being effectively and fundamentally solved, the rejection rate of the jet pipe is relatively high, and the cost and the pressure are high. Patent document CN213507187U discloses a "fusion-type spray pipe", which welds two spray pipes after half holes are machined, and reduces the difficulty of punching, but also reduces the precision of the product, and is not suitable for the field of high-precision lithography or high-temperature atomization spraying. Disclosure of Invention The invention aims to blow out scraps from the quartz injection pipe during laser drilling by introducing the blowing component to blow compressed air, and rapidly take away the waste heat of laser so as to avoid scraps from being fused and stuck on the quartz injection pipe and being scrapped. It is a further object of the present invention that the quartz sparge tube is closed at one end and open at the other end in communication with the blowing assembly so that the high static pressure of compressed air is used to directly blow out the chips and heat generated by laser drilling in the vicinity of the blowing assembly during drilling, and the static pressure is weaker than the proximal end because of the greater distance in the remote location during drilling, and the provision of an opening allows a high velocity flow of compressed air to directly blow out the chips and heat from the opening. The invention achieves the aim by the following technical means: The utility model provides a quartzy injection pipe laser drilling device, includes the equipment workstation the fixed linear a plurality of injection pipes of having arranged of upper surface of equipment workstation place the tool, the subassembly of blowing is movably installed on the equipment workstation, and the subassembly of blowing includes gas circuit subassembly and lower gas circuit subassembly, goes up the gas circuit subassembly and is inhaled the fixation clamp through the quartzy gas blow pipe fixed bolster of right angle bending and be connected with magnetism, goes up gas circuit subassembly and lower gas circuit subassembly and passes through the rubber hose connection. Further, the upper gas circuit component comprises a gas blowing nozzle and a right-angle bending quartz gas blowing pipe, and the gas blowing nozzle is in airtight communication with the right-angle bending quartz gas blowing pipe. Further, the lower air path assembly comprises a compressed air filter, one end of the compressed air filter is connected with the compressed air inlet pipe through a second compressed air vacuum connector, and the other end of the compressed air filter is connected with the compressed air pressure regulating valve through a first compressed air connecting pipe. Preferably, a laser moving frame is movably matched on the equipment workbench, a laser is fixedly arranged at one end of the laser moving frame, and the laser moving frame moves independently of the equipment workbench. A quartz injection tube laser drilling method is applied to a quartz injection tube laser drilling device, and comprises the following steps: s1, assembling the air blowing assembly and fixedly mounting the air blowing assembly on an equipment workbench. S2, fixedly mounting an injection tube placing jig on the equipment workbench, and placing the quartz injection tube on the injection tube placing jig. And S3, connecting the closed end of the quartz injection tube with the air blowing nozzle, adjusting the shape of the air path assembly through the magnetic fixing clamp, and introducing compressed air into the quartz injection tube. And S4, starting the laser moving frame, moving the laser to the corresponding position of the quartz spraying tube, starting the laser to punch holes, and moving to the next position. Further, in S1, the air blowing assembly comprises an upper air path assembly and a lower air path assembly, the upper air path assembly adjusts the installation position through the magnetic fixing frame, and the lower air path assembly is fixedly installed with the equipment workbench. Further, the upper air passage component and the lower air passage component are connected through a rubber hose. Further, S2 includes that the quartz injection tube n