CN-121972848-A - Welding method for thin-wall pipe and thick-wall piece

CN121972848ACN 121972848 ACN121972848 ACN 121972848ACN-121972848-A

Abstract

The invention discloses a welding method of a thin-wall pipe and a thick-wall piece, and aims to solve the defects of high welding difficulty and poor welding effect of the thin-wall pipe. The method comprises the following steps of S1, inserting the end part of the thin-wall pipe into a mounting hole in a thick-wall piece, sleeving a welding ring outside the thin-wall pipe, S2, enabling the welding ring to lean against the opening of the mounting hole, and S3, welding the welding ring to form a circle of welding seam, so that the welding ring, the outer wall of the thin-wall pipe and the opening of the mounting hole are welded together. The welding operation of the thin-wall pipe fitting and the thick-wall pipe fitting is convenient, the thin-wall pipe fitting is not required to be processed in the welding process, the thin-wall pipe fitting adopts standard parts which can be purchased in the market, the production period is shortened, the cost is reduced, and the welding effect of the thin-wall pipe fitting and the thick-wall pipe fitting is good.

Inventors

Li tianpu
JIN HONGXIN
XIE RUYING

Assignees

杭州大和热磁电子有限公司

Dates

Publication Date: 20260505
Application Date: 20251231

Claims (10)

1. A welding method for a thin-wall pipe and a thick-wall piece is characterized by comprising the following steps of S1, inserting the end part of the thin-wall pipe into a mounting hole in the thick-wall piece, sleeving a welding ring outside the thin-wall pipe, S2, enabling the welding ring to lean against the opening of the mounting hole, and S3, welding at the welding ring to form a circle of welding seam, so that the welding ring, the outer wall of the thin-wall pipe and the opening of the mounting hole are welded together.
2. The method of welding a thin-walled pipe to a thick-walled member according to claim 1 wherein the mounting hole is provided with a chamfer at the opening.
3. The welding method for a thin-walled pipe and a thick-walled member according to claim 2, wherein both end surfaces of the welding ring are inclined from outside to inside in a direction away from each other, the inner wall of the welding ring is abutted against the outer wall of the thin-walled pipe, and one end surface of the welding ring is abutted against the chamfer.
4. The method according to claim 1, wherein one end face of the welding ring is abutted against the surface of the thick-walled member at the edge of the mounting hole, and the other end face of the welding ring is inclined from outside to inside in a direction away from the thick-walled member.
5. The welding method for the thin-wall pipe and the thick-wall piece, which is disclosed in claim 1, is characterized in that a shaping sleeve is connected in a mounting hole, a convex ring is arranged on the inner wall of the mounting hole, the shaping sleeve is in threaded connection and fastened with the convex ring, the end part of the shaping sleeve extends out of the mounting hole, the end part of the thin-wall pipe is inserted between the inner wall of the mounting hole and the outer wall of the shaping sleeve in the S1 process, and the end part of the thin-wall pipe is limited at the convex ring.
6. The welding method for the thin-wall pipe and the thick-wall piece, which is disclosed in claim 1, is characterized in that a shaping sleeve is connected in a mounting hole, a convex ring is arranged on the inner wall of the mounting hole, the end part of the shaping sleeve extends out of the mounting hole, the end part of the thin-wall pipe is inserted between the inner wall of the mounting hole and the outer wall of the shaping sleeve in S1, the end part of the thin-wall pipe is limited at the convex ring, a plurality of circumferentially-spaced welding through holes are drilled on the pipe wall of the thin-wall pipe, and the welding through holes are arranged at the opening of the mounting hole.
7. The welding method of the thin-wall pipe and the thick-wall piece according to claim 1, wherein in the S1 process, a positioning column is inserted into the mounting hole, a conical guide head is arranged at the end part of the positioning column, a step surface is arranged on the positioning column, the thin-wall pipe is inserted between the positioning column and the mounting hole from the guide head, and the end part of the thin-wall pipe is limited at the step surface.
8. The method for welding a thin-walled pipe and a thick-walled member according to claim 7, wherein a plurality of radially movable positioning guide plates are circumferentially arranged on the positioning column at intervals, positioning springs are connected between the positioning guide plates and the positioning column, inclined guide surfaces are arranged on the outer edges of the positioning guide plates, the welding ring is sleeved outside the positioning column, the welding ring slides over the guide surfaces, the outer edges of the positioning guide plates are abutted against the inner walls of the welding ring to position the welding ring, and then the thin-walled pipe is inserted between the positioning column and the mounting hole.
9. The welding method for the thin-wall pipe and the thick-wall piece according to claim 7, wherein the positioning column is rotatably arranged, an air hole is formed in the positioning column, an air cavity is formed in the side wall of the positioning column, a movable tensioning column is arranged in the air cavity, high-pressure air flow is introduced into the air hole to enable the tensioning column to move outwards, tensioning and positioning of the mounting hole and the inner hole of the thin-wall pipe are achieved, and the positioning column is rotated to drive the thin-wall pipe and the thick-wall piece to rotate together in the S3 process.
10. The method according to any one of claims 1 to 9, wherein S3 is performed by argon arc welding, and the welding wire is filled with the same material as the welding ring during welding to form a complete weld.

Description

Welding method for thin-wall pipe and thick-wall piece Technical Field The invention relates to semiconductor processing equipment, in particular to a method for welding a thin-wall pipe and a thick-wall piece. Background The gas piping of the semiconductor tool is a core subsystem for precisely delivering ultrapure process gases to the reaction chamber, the design of which directly affects process quality and safety. The method has the core functions of gas delivery, namely, chemical reaction gas (such as gas required by etching or CVD process) is delivered from a gas cylinder or a gas source to a process cavity, so that the purity and flow control of the gas are ensured. The safety is guaranteed, and the explosion or corrosion risk caused by gas leakage is prevented through a sealing design and a leakage detection mechanism. Conventional piping is based on stainless steel, but special locations need to be made of aluminum alloy. This welding, because of its small wall thickness, is difficult to weld and requires a specific form to weld perfectly, thus limiting the use of standard pipes and in many cases bringing about a great deal of inconvenience and a sharp rise in cost. Chinese patent application number 2012102967797 discloses a processing method for improving the strength of a friction welding joint of a thin-wall pipe, wherein the ends of two pipe fittings are in contact friction welding, the coaxiality requirement of the welding mode on the two welding pipe fittings is higher, and the welding effect is poor when the welding is carried out on the pipe fittings with different wall thicknesses. Disclosure of Invention In order to overcome the defects, the invention provides a welding method of a thin-wall pipe and a thick-wall pipe, which is convenient for welding the thin-wall pipe and the thick-wall pipe, and the thin-wall pipe adopts a standard part, can be purchased directly, shortens the production period, reduces the cost, and is convenient and reliable for welding the thin-wall pipe and the thick-wall pipe. The technical scheme includes that the welding method of the thin-wall pipe and the thick-wall piece comprises the following steps of S1, inserting the end portion of the thin-wall pipe into a mounting hole in the thick-wall piece, sleeving a welding ring outside the thin-wall pipe, S2, enabling the welding ring to lean against an opening of the mounting hole, and S3, welding at the welding ring to form a circle of welding seam, so that the welding ring, the outer wall of the thin-wall pipe and the opening of the mounting hole are welded together. When the thin-wall pipe is welded with the thick-wall piece, the end part of the thin-wall pipe is inserted into the mounting hole on the thick-wall piece to realize positioning, a welding ring is arranged at the welding position between the opening of the mounting hole and the outer wall of the thin-wall pipe before welding, the arc is deflected to the welding ring in the welding process, most of welding heat is absorbed by the welding ring, the thin-wall pipe is well protected, the damage phenomenon at the welding position of the thin-wall pipe is prevented, and the welding reliability is ensured. The thin-wall part does not need to be processed before welding, and the thin-wall pipe only needs to be a standard part which can be purchased in the market, so that the production period can be shortened, and the cost can be reduced. Preferably, a chamfer is provided at the opening of the mounting hole. The welding ring is arranged at the chamfer, and after welding, the welding seam is full of the chamfer, so that the connection strength is improved. In the first scheme, two end faces of the welding ring are obliquely arranged from outside to inside in a mutually far away direction, the inner wall of the welding ring is close to the outer wall of the thin-wall pipe, and one side end face of the welding ring is close to the chamfer. The section of the welding ring is isosceles triangle, the inner end face of the welding ring is close to the chamfer, so that the welding strength is ensured, and the inclined outer end face of the welding ring is used as a welding face, thereby facilitating the welding operation. The inner wall of the welding ring is close to the outer wall of the thin-wall pipe, the contact area is large, the damage to the pipe wall caused by local overheating is avoided, In the second scheme, one end face of the welding ring is abutted against the surface of the thick-wall part at the edge of the mounting hole, and the other end face of the welding ring is obliquely arranged from outside to inside in the direction away from the thick-wall part. The end face of the welding ring is directly abutted against the end face of the mounting hole, a chamfer is not required to be arranged, the welding step is simplified, the work efficiency is improved, and the cost is reduced. In the third scheme, a shaping sleeve is connected in the mounting hol