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CN-121972882-A - Quartz cavity flange positioning device and flange and fin positioning method

CN121972882ACN 121972882 ACN121972882 ACN 121972882ACN-121972882-A

Abstract

The invention relates to the technical field of semiconductor equipment, and particularly discloses a quartz cavity flange positioning device and a quartz cavity flange and fin positioning method, which are applied to precise assembly of a quartz cavity, a quartz flange and a fin in high-temperature vacuum semiconductor equipment, wherein the quartz cavity flange positioning device comprises a fixed block and an adjusting screw; the fixing block is provided with a first fixing plate and a second fixing plate which are oppositely arranged, a fixing groove is formed between the first fixing plate and the second fixing plate, the first fixing plate is provided with a screw hole and is in threaded connection with a fixing bolt, one side of the second fixing plate, which is opposite to the fixing groove, is provided with a screw hole, one end of the adjusting screw rod is in threaded connection with the screw hole of the second fixing plate, and the other end of the adjusting screw rod is in threaded connection with the adjusting end head. The invention has simple and reliable structure, convenient use and stronger flexibility, can accurately determine the welding position between the quartz cavity and the flange, and prevents the occurrence of distance retraction in the welding process.

Inventors

  • SHEN WENJIE
  • WU RANHONG
  • YANG JUN

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251112

Claims (10)

  1. 1. A quartz cavity flange positioning device is characterized in that the end face of a quartz cavity is flat, the section of the quartz cavity is rectangular, long fins are welded on two long side faces of the quartz cavity respectively, the long fins are parallel to the end face of the quartz cavity, and the distances between the two long fins and the end face of the quartz cavity are equal; the positioning device comprises a fixed block, wherein the fixed block is provided with a first fixed plate and a second fixed plate which are oppositely arranged, a fixed groove is formed between the first fixed plate and the second fixed plate, the first fixed plate is provided with a screw hole and is in threaded connection with a fixed bolt, the side surface of the second fixed plate, which is opposite to the fixed groove, is provided with a screw hole and is in threaded connection with an adjusting screw, and the adjusting screw is in threaded connection with an adjusting end head.
  2. 2. The quartz cavity flange positioning device according to claim 1, wherein the fixing block is U-shaped, the bottom surface of the fixing groove is flat, and the side surface of the fixing groove is flat and perpendicular to the bottom surface of the fixing groove.
  3. 3. The quartz chamber flange positioning device of claim 1, wherein the adjustment screw is threaded to a lock nut, the lock nut being located between the fixed block and the adjustment head.
  4. 4. The quartz cavity flange positioning device according to claim 1, wherein the adjusting end head is provided with a screw hole, and the adjusting end head is provided with a butt end face which is flat and perpendicular to the axis of the screw hole of the adjusting end head.
  5. 5. A quartz cavity flange and fin positioning method based on the positioning device of any one of claims 1 to 5, which is applied to the precise assembly of a rectangular section quartz cavity, a square quartz flange and a fin in high-temperature vacuum semiconductor equipment, and is characterized by comprising the following steps: S1, butting the fixing groove with the flange plate, and screwing the fixing bolt to clamp the flange plate in the fixing groove; S2, enabling the butt end face of the adjusting end to be tightly abutted against the long fin, adjusting the length of the adjusting screw, and measuring and calibrating the set distance between the flange and the long fin; S3, welding the flange neck and the quartz cavity along a welding line between the flange neck and the quartz cavity; S4, repeating the steps S1 to S3 after welding and cooling, and welding the short fins and the long fins by using a positioning device.
  6. 6. The method for positioning flanges and fins of a quartz cavity according to claim 5, wherein in step S4, the positioning device and the flanges are clamped and fixed, the length of the adjusting screw is adjusted, the set distance between the flanges and the short fins is measured and calibrated, and the two are welded along the welding seam between the long fins and the short fins.
  7. 7. The flange and fin positioning method for a quartz cavity according to any of claims 5 and 6, wherein a thermal expansion gap of 0.5-2 mm is reserved between the short fin and the quartz cavity side wall.
  8. 8. The method for positioning flanges and fins of a quartz chamber according to any one of claims 5 or 6, wherein in step S2, a set distance between the flanges and the long fins is measured and calibrated by using a vernier caliper.
  9. 9. The method for positioning flanges and fins of a quartz cavity according to claim 5, wherein in step S2, the set pitch is calculated in advance according to a thermal expansion coefficient of a quartz material at an operating temperature.
  10. 10. The method for positioning flanges and fins in a quartz cavity according to claim 5, wherein in step S2, an adjusting screw close to a set distance between the flanges and the long fins is selected, and the distance between the flanges and the long fins is adjusted by rotating the adjusting head.

Description

Quartz cavity flange positioning device and flange and fin positioning method Technical Field The invention relates to the technical field of semiconductor equipment, and particularly discloses a quartz cavity flange positioning device and a quartz cavity flange and fin positioning method. Background In the welding process of the flange at the end part of the quartz cavity in the semiconductor wafer manufacturing equipment, the gap size between the first quartz fin at the end part of the quartz cavity and the flange needs to be determined, and then the flange and the quartz cavity are welded, but the interval between the flange and the quartz fin is easily retracted during welding, the accuracy of the quartz cavity is influenced, even the use is influenced, and a positioning device for fixing the welding position of the flange is further needed. For example, the combined die for welding the quartz cavity disclosed in China patent No. CN117567050A comprises a first set of dies for welding a first quartz plate and a second quartz plate into a quartz frame body, a second set of dies for welding two flanges on two sides of the quartz frame body, and a third set of dies for welding the quartz frame body and a quartz circular tube. The second set of die is used for fixing the flanges through at least six fixing pieces, so that the two flanges are symmetrically arranged, and the quartz frame body is welded between the two flanges. In the invention, the quartz frame body can be symmetrically welded between the two flange quartz frame bodies by using the second set of dies. The method has the defects that the second set of dies only aims at the quartz frame body with the determined size to position and weld the flange, and the second set of dies is required to be manufactured separately for the quartz frame body exceeding the determined size. Disclosure of Invention Aiming at the problems of limited application scenes of flange welding dies for quartz frames in the prior art, limited application scenes, lack of flexibility and the like because the dies are required to be manufactured independently for the quartz frames with different sizes, the invention discloses a quartz cavity flange positioning device which can accurately position the welding position between the quartz frames (quartz cavities) and flanges, has a simple structure and a using method, cannot be limited by the size of the quartz frames, and has flexible application scenes. In order to achieve the technical effects, the invention provides: The quartz cavity flange positioning device comprises a quartz cavity, a flange plate and a flange neck, wherein the quartz cavity is flat in end face, the cross section of the quartz cavity is rectangular, long fins are welded on two long side faces of the quartz cavity respectively, the long fins are parallel to the quartz cavity end face, and the distances between the two long fins and the quartz cavity end face are equal; the positioning device comprises a fixed block, wherein the fixed block is provided with a first fixed plate and a second fixed plate which are oppositely arranged, a fixed groove is formed between the first fixed plate and the second fixed plate, the first fixed plate is provided with a screw hole and is in threaded connection with a fixed bolt, the side surface of the second fixed plate, which is opposite to the fixed groove, is provided with a screw hole and is in threaded connection with an adjusting screw, and the adjusting screw is in threaded connection with an adjusting end head. The section of the quartz cavity is rectangular, the end face of the quartz cavity is flat, long fins are welded on the side face of the long side of the quartz cavity respectively, and the two long fins are respectively parallel to and correspondingly arranged on the end part of the quartz cavity, namely, the distance between the two long fins and the end part of the quartz cavity is equal in size. The fixed block is in threaded connection with the adjusting screw, and the fixed block is used for being fixed with the edge (flange plate) of the flange, and the adjusting end head at the end part of the adjusting screw is abutted with the quartz fins by adjusting the length of the adjusting screw, so that the space size between the flange and the quartz fins is determined, the space between the flange and the quartz cavities is prevented from being retracted in the welding process of the flange and the quartz cavities, and the space precision between the flange and the quartz fins is ensured. The fixed block is U-shaped, the fixed slot bottom surface is level and smooth, the fixed slot side is level and smooth and with the fixed slot bottom surface looks vertically. The design improves the matching precision and reliability between the clamping groove and the flange. The adjusting screw is in threaded connection with the lock nut, and the lock nut is located between the fixed block and the adjusting end. The lo