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CN-121972883-A - Quartz annular cavity machining method and machining jig

CN121972883ACN 121972883 ACN121972883 ACN 121972883ACN-121972883-A

Abstract

The invention discloses a quartz annular cavity machining method and a machining jig, which comprise the following steps of S1, manufacturing a first half-ring part, a second half-ring part, a third half-ring part, a fourth half-ring part, a first flange assembly and a second flange assembly in a machining center, wherein flange pipe parts are arranged on the first flange assembly and the second flange assembly, an included angle alpha is formed between two end faces of the flange pipe parts, S2, finishing welding of the first half-ring cavity and the second half-ring cavity in the machining jig, S3, grinding inner and outer welding seams on the first half-ring cavity and the second half-ring cavity, S4, respectively butt-jointing the first flange assembly and the second flange assembly with two ends of the first half-ring cavity and the second half-ring cavity, and S5, grinding inner and outer welding seams at welding joints to finish machining of the quartz annular cavity. Effectively avoid the easy inefficacy position in welding process, guaranteed welding process quality, improved the quality and the machining efficiency of product.

Inventors

  • HUANG XIANWEI
  • WU RANHONG
  • YANG JUN

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251223

Claims (10)

  1. 1. A processing method of a quartz annular cavity is characterized by comprising the following steps: S1, manufacturing a first half ring part, a second half ring part, a third half ring part, a fourth half ring part, a first flange assembly and a second flange assembly in a machining center, wherein the first flange assembly and the second flange assembly are respectively provided with a flange pipe part, and an included angle alpha is formed between two end surfaces of the flange pipe part; s2, welding the first semi-ring cavity and the second semi-ring cavity on the processing jig; S3, grinding inner and outer welding seams on the first semi-ring cavity and the second semi-ring cavity; s4, respectively butting and welding the first flange assembly and the second flange assembly with two ends of the first semi-ring cavity and the second semi-ring cavity; And S5, grinding the inner and outer welding seams at the welding position to finish the processing of the quartz ring cavity.
  2. 2. The method for processing the quartz ring cavity according to claim 1, wherein the included angle alpha between the two end surfaces of the flange pipe part in the step 1 is 45-55 degrees.
  3. 3. The method for processing the quartz annular cavity according to claim 1 or 2, wherein the processing jig in the step 2 comprises a jig base (1), a plurality of annular cavity characteristic limiting structures are arranged on the jig base, and the annular cavity characteristic limiting structures comprise ring body limiting structures (3) and flange limiting structures (4).
  4. 4. The method for processing the quartz annular cavity according to claim 3, wherein in the step 2, the first half ring part (911) and the second half ring part (912) are buckled and placed on the jig base (1) relatively, and the third half ring part (921) and the fourth half ring part (922) are buckled and placed on the jig base relatively and are radially limited through the outside of the ring body limiting structure (3).
  5. 5. The method for machining the quartz annular cavity according to claim 3, wherein in the step 2, graphite gaskets are inserted between the first half ring part (911) and the second half ring part (912) and between the third half ring part (921) and the fourth half ring part (922) and are drawn out after spot welding connection, or inner diameter limit welding is performed on the first half ring part (911) and the second half ring part (912) and between the third half ring part (921) and the fourth half ring part (922) by inserting an inner annular limiting piece (2) into the jig base (1).
  6. 6. The method of claim 3, wherein in step 4, the first flange assembly (93) and the second flange assembly (94) are respectively fixed by a flange limiting structure (40).
  7. 7. A processing jig for a quartz annular cavity processing method according to any one of claims 1 to 5 is characterized by comprising a jig base (1), wherein a jig central cavity (5) and a plurality of annular cavity characteristic limiting structures are arranged on the jig base, and each annular cavity characteristic limiting structure comprises a ring body limiting structure (3) and a flange limiting structure (4).
  8. 8. The processing jig according to claim 6, wherein the ring body limiting structure (3) comprises a ring body limiting surface (6) and a ring body roundness limiting part (7), the ring body limiting surface (6) and the jig central cavity (5) are concentrically arranged, the ring body limiting surface (6) is fixedly or replaceably arranged on a jig base, and the ring body roundness limiting part (7) is fixedly or adjustably arranged on the jig base.
  9. 9. The processing jig according to claim 6, wherein the flange limiting structure (4) comprises a flange pipe diameter limiting clamp ring (41) and a flange plate limiting clamping groove (42), flange limiting clamping blocks (8) are respectively arranged at two ends of the jig base (1), the flange limiting clamping blocks (8) comprise a first flange limiting clamping block (81) and a second flange limiting clamping block (82) which are oppositely arranged, and limiting cambered surfaces (83) for forming the flange pipe diameter limiting clamp ring (41) and limiting grooves (84) for forming the flange plate limiting clamping groove (42) are respectively arranged on one side, opposite to the first flange limiting clamping block (81) and the second flange limiting clamping block (82).
  10. 10. The fixture of claim 6, further comprising a removable inner ring core limiting member (2), wherein the inner ring surface limiting member (20) is provided with a slot (21) for welding.

Description

Quartz annular cavity machining method and machining jig Technical Field The invention relates to the technical field of semiconductor welding, in particular to a quartz annular cavity machining method and a machining jig. Background The quartz annular cavity has a plurality of characteristics with different shapes due to the special structure, including a plurality of semi-annular cavities, a plurality of opposite flanged cavities and the like. The existing welding method is that the annular part is welded to form an annular cavity, then the flange cavity is welded on the annular cavity, the heights, the relative positions and the like of the flange and the annular cavity are manually adjusted on the universal graphite block/graphite platform, and finally the annular cavity and the flange are welded together. Moreover, by means of simple graphite blocks and measuring tools, the shape tolerance and the position tolerance of products are difficult to ensure, so that the quality of the products is poor, the difference between the products in the same batch is large, the size is easy to be out of tolerance, the products are scrapped, and the like. The existing Chinese patent document CN115351464A discloses a method for welding a quartz cavity. The welding system comprises a base, a heating device, a fixing device, a supporting rotating device and a welding device, wherein the method for welding the quartz cavity comprises the following steps of repairing a welding seam of the quartz cavity by using the welding system, controlling the rotating speed of the quartz cavity to be 20-50 rpm in the welding process, controlling the temperature of the quartz cavity to be 700-900 ℃ and controlling the welding temperature to be 1600-1800 ℃. The method for welding the quartz cavity can realize automatic welding through motor driving and operation of the mechanical arm, can replace manual welding, improves welding safety, increases the welding range of the quartz cavity and the uniformity of the surface of the quartz cavity, and achieves better welding effect by being carried out at higher temperature. The technical scheme can realize the vacuum cavity, but is applicable to welding of cylindrical or circular quartz cavities, and does not involve a complex annular cavity structure. It is necessary to design a processing method and a processing jig for a quartz annular cavity with a flange, so that the processing precision is ensured, the failure phenomenon is avoided, the processing precision and quality are improved, and the effective efficiency is improved. Disclosure of Invention The invention aims to solve the problems that the welding operation of the existing quartz annular cavity with the flange structure is complex, the welding quality has dimensional deviation, failure parts are easy to generate, the product quality is poor, the product is scrapped and the like, and provides the quartz annular cavity processing method and the quartz annular cavity processing jig. The technical scheme adopted by the invention for achieving the purpose of the invention is that the quartz annular cavity processing method comprises the following steps: S1, manufacturing a first half ring part, a second half ring part, a third half ring part, a fourth half ring part, a first flange assembly and a second flange assembly in a machining center, wherein the first flange assembly and the second flange assembly are respectively provided with a flange pipe part, and an included angle alpha is formed between two end surfaces of the flange pipe part; s2, welding the first semi-ring cavity and the second semi-ring cavity on the processing jig; S3, grinding inner and outer welding seams on the first semi-ring cavity and the second semi-ring cavity; s4, respectively butting and welding the first flange assembly and the second flange assembly with two ends of the first semi-ring cavity and the second semi-ring cavity; And S5, grinding the inner and outer welding seams at the welding position, thereby finishing the welding processing of the whole quartz ring cavity. The processing method of the quartz annular cavity aims at the situation that the cavity is a weak part which is opposite to the center line of two flanges of the quartz annular cavity, and is easy to lose efficacy in the manufacturing process, so that products are scrapped, firstly, reasonable design is carried out on manufacturing components of the quartz annular cavity, a first half ring part, a second half ring part, a third half ring part and a fourth half ring part, a first flange assembly with a flange pipe part and a second flange assembly are respectively manufactured in a processing center, through making flange and pipe portion of certain length as an organic wholely, effectively avoid the easy inefficacy position in the welding process, with welding seam position reasonable adjustment, simultaneously, set up into the contained angle structure with two terminal surfaces of flan