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CN-121973075-A - Heavy caliber diamond element grinding and polishing integrated machine and processing method based on same

CN121973075ACN 121973075 ACN121973075 ACN 121973075ACN-121973075-A

Abstract

The invention relates to the technical field of processing equipment, in particular to a large-caliber diamond element grinding and polishing integrated machine and a processing method based on the large-caliber diamond element grinding and polishing integrated machine, wherein the integrated machine comprises a horizontal guide rail, a tool main shaft, a processing mechanism and a trimming mechanism, and the tool main shaft is movably arranged on the horizontal guide rail; the invention integrates the processing station and the trimming station on the shared horizontal air-float guide rail, so that the tool main shaft can be horizontally switched between the processing station and the trimming station, secondary positioning errors caused by frequent disassembly and assembly of tools or workpieces among different devices in the traditional multi-process are avoided, and the maintenance of the on-site trimming and the processing posture of the grinding and polishing tool is realized.

Inventors

  • FENG KE
  • LIU FENGQI
  • LEI DAJIANG
  • YANG NING
  • JIA LU
  • WU MINGTAO

Assignees

  • 中国工程物理研究院机械制造工艺研究所

Dates

Publication Date
20260505
Application Date
20260313

Claims (10)

  1. 1. The utility model provides a heavy-calibre diamond component grinds throws all-in-one which characterized in that includes: A horizontal guide rail (2); A tool spindle (10) which is movably arranged on the horizontal guide rail (2) and is used for installing a polishing tool (11), wherein the tool spindle (10) is switched to move between a processing station and a finishing station along the horizontal guide rail (2); The machining mechanism is arranged at the machining station and comprises a first vertical driving device (4), a workpiece main shaft (6) and a pressure loading device (5), wherein the workpiece main shaft (6) is used for loading diamond elements, the first vertical driving device (4) is used for driving the workpiece main shaft (6) to vertically lift, and the pressure loading device (5) is used for controlling the contact pressure between the diamond elements and the polishing tool (11) during machining; The trimming mechanism is arranged at the trimming station and comprises a second vertical driving device (7) and a trimming main shaft (8) and is used for driving a trimming tool (9) to trim the polishing tool (11) at the trimming station.
  2. 2. The large-caliber diamond element grinding and polishing integrated machine according to claim 1 is characterized by further comprising an equipment lathe bed (1) and a frame (3), wherein the horizontal guide rail (2) is arranged on the equipment lathe bed (1), and the frame (3) is arranged in the middle of the horizontal guide rail (2); The machining station and the trimming station are respectively located at two sides of the frame (3), and the first vertical driving device (4) and the second vertical driving device (7) are respectively and correspondingly arranged at two sides of the frame (3).
  3. 3. The large-caliber diamond element grinding and polishing integrated machine according to claim 1 is characterized in that the horizontal guide rail (2) is a gas hydrostatic guide rail, and the tool spindle (10) and the workpiece spindle (6) are gas hydrostatic spindles.
  4. 4. The large-caliber diamond element grinding and polishing integrated machine according to claim 3, wherein the horizontal guide rail (2) comprises side guide rails, upper guide rails and sliding fit sliding blocks, the side guide rails and the upper guide rails are fixed on a machine body (1), the side guide rails, the upper guide rails and the machine body (1) are in a C-shaped structure, two ends of the sliding blocks are in sliding fit with the two C-shaped structures and are driven to move along the C-shaped structures through linear motors, and the tool spindle (10) is mounted on the sliding blocks.
  5. 5. The machine of claim 4, wherein the C-shaped structure and the sliding block are air-supported by adopting a small-hole throttling technology, and the linear motor is a double linear motor which is arranged below the sliding block.
  6. 6. A heavy caliber diamond element grinding and polishing integrated machine according to claim 3, wherein the aerostatic spindle comprises: a fixation kit (108); A rotor core shaft (109) which is rotatably arranged in the fixing sleeve (108) and is driven to rotate by a torque motor (110); The rotor (104) is connected to the rotor mandrel (109), a workbench (101) is fixed at the top of the rotor (104), and an upper thrust disc (102) and a lower thrust disc (107) are respectively arranged at the upper end and the lower end of the rotor (104); a restrictor (105) provided between the upper thrust plate (102) and the lower thrust plate (107) and forming a porous air bearing; The radial bearing (106) and the two thrust bearings (103) are both arranged on the fixing sleeve (108), the two thrust bearings (103) are respectively arranged between the throttle (105) and the upper thrust disk (102) and the lower thrust disk (107), and the radial bearing (106) is arranged between the throttle (105) and the outer peripheral surface of the rotor (104).
  7. 7. A heavy caliber diamond element grinding and polishing integrated machine according to claim 1, characterized in that the pressure loading device (5) comprises: a pressure loading guide rail which is arranged along the vertical direction; The vertical telescopic device is arranged on the moving part of the first vertical driving device (4), and the telescopic end of the vertical telescopic device is connected with the workpiece spindle (6) and is used for driving the workpiece spindle (6) to vertically move along the pressure loading guide rail; The pressure sensor and the distance sensor are arranged at the workpiece spindle (6) or the vertical telescopic device; During machining, the first vertical driving device (4) drives the workpiece spindle (6) to move downwards to a preset distance and then keep static, the vertical telescopic device drives the workpiece spindle (6) to move downwards until the diamond element is in contact with the polishing tool (11), and the pressure sensor and the distance sensor feed back signals realize closed-loop constant pressure control of pressure.
  8. 8. A heavy caliber diamond element grinding and polishing integrated machine according to claim 1, characterized in that the dressing mechanism further comprises a dressing tool (9); the trimming main shaft (8) is arranged on a moving part of the second vertical driving device (7), and the trimming tool (9) is arranged at the bottom end of the trimming main shaft (8); During dressing, the tool spindle (10) moves to the dressing station along the horizontal guide rail (2), and the second vertical driving device (7) drives the dressing spindle (8) to move downwards, so that the dressing tool (9) is contacted with the grinding and polishing tool (11) and the surface of the dressing tool is subjected to flat dressing.
  9. 9. A heavy caliber diamond element grinding and polishing integrated machine according to claim 1, characterized in that the first vertical driving device (4) and/or the second vertical driving device (7) are a first driving assembly or a second driving assembly: the first driving assembly comprises a vertical linear guide rail and an electric cylinder, wherein the vertical linear guide rail adopts a gas supporting structure, and the electric cylinder is connected with a moving part of the vertical linear guide rail and is used for driving the workpiece spindle (6) or the trimming spindle (8) to vertically lift; the second driving assembly comprises a vertical mechanical guide rail, a screw rod and a driving motor, wherein the driving motor drives the workpiece spindle (6) or the trimming spindle (8) to lift along the vertical mechanical guide rail through the screw rod.
  10. 10. A method for polishing a large-caliber diamond element, characterized in that the method comprises the following steps based on the polishing integrated machine according to any one of claims 1 to 9: The tool in-situ trimming comprises the steps of installing a grinding and polishing tool (11) on a tool main shaft (10), and controlling the tool main shaft (10) to move to a trimming station along a horizontal guide rail (2), wherein a second vertical driving device (7) drives a trimming mechanism to move downwards to perform flat trimming on the surface of the grinding and polishing tool (11); after finishing the repair, controlling the tool main shaft (10) to translate to the processing station along the horizontal guide rail (2); The macroscopic positioning feeding comprises the steps of installing a diamond element to be processed on the workpiece spindle (6), and starting rotation of the tool spindle (10) and the workpiece spindle (6), wherein the first vertical driving device (4) drives the workpiece spindle (6) to move downwards until the diamond element is stopped and kept still after reaching a preset distance from the surface of the polishing tool (11); the micro constant-pressure polishing is carried out, namely the pressure loading device (5) is started, the diamond element is driven to continuously move downwards until the diamond element contacts with the polishing tool (11), and closed-loop constant-pressure polishing processing is carried out according to a preset pressure value; And detecting and iterating, namely detecting the surface shape precision and/or the surface roughness of the diamond element after finishing processing, and returning an execution tool to a step of in-situ trimming to a step of microcosmic constant-pressure polishing if the preset index is not reached, until the diamond element reaches the requirement.

Description

Heavy caliber diamond element grinding and polishing integrated machine and processing method based on same Technical Field The invention relates to the technical field of processing equipment, in particular to a large-caliber diamond element grinding and polishing integrated machine and a processing method based on the same. Background The large-caliber diamond element is a key device of hypersonic aircraft, high-power laser equipment, magnetic control constraint fusion, EUV lithography and high-performance chips, and has important influence on the detection capability, output power, heat dissipation capability and other core performances of the equipment. The cooperative control of the surface shape precision, the surface roughness and the damage defects of the large-size diamond element has great difficulty, and ultra-precise grinding, chemical mechanical polishing and the like are important processing methods of the manufacturing technology of the large-caliber element. Currently, general ultra-precise grinding equipment or wafer thinning equipment is generally adopted in the industry to replace the grinding and polishing problem of diamond elements. However, existing imported or universal equipment of this type is mainly directed to hard and brittle materials of low hardness and is not suitable for ultra-precise polishing of superhard elements such as diamond: in conventional ultra-precise machining processes, large-margin finishing, rough grinding, fine grinding, and polishing are typically performed in steps on different equipment or stations. Frequent disassembly and secondary clamping of the workpiece or tool can introduce irremovable positioning errors, and limit the final surface shape precision. The polishing of diamond is highly dependent on stable contact pressure. Most of the existing equipment adopts a simple counterweight or a common hydraulic/pneumatic system to macroscopically apply pressure, and cannot realize high-precision closed-loop constant-pressure control, so that polishing is uneven and machining efficiency is low. Disclosure of Invention The invention aims to solve the technical problems, and provides a large-caliber diamond element grinding and polishing integrated machine and a processing method based on the large-caliber diamond element grinding and polishing integrated machine, which can adapt to the processing characteristics of superhard materials, have extremely high rigidity and motion precision, and can realize precise constant-pressure control of grinding and polishing, thereby solving the difficult problem of high-efficiency and high-quality manufacturing of large-caliber diamond elements. The invention is realized by the following technical scheme: a heavy caliber diamond element grinding and polishing integrated machine, comprising: A horizontal guide rail; The tool spindle is movably arranged on the horizontal guide rail and used for installing a polishing tool, and the tool spindle is switched to move between a processing station and a trimming station along the horizontal guide rail; The processing mechanism is arranged at the processing station and comprises a first vertical driving device, a workpiece main shaft and a pressure loading device, wherein the workpiece main shaft is used for loading a diamond element, the first vertical driving device is used for driving the workpiece main shaft to vertically lift, and the pressure loading device is used for controlling the contact pressure between the diamond element and the polishing tool during processing; The trimming mechanism is arranged at the trimming station and comprises a second vertical driving device and a trimming main shaft, and is used for driving a trimming tool to trim the polishing tool at the trimming station. The integrated machine further comprises an equipment lathe bed and a frame, wherein the horizontal guide rail is arranged on the equipment lathe bed, and the frame is arranged in the middle of the horizontal guide rail; The processing station and the trimming station are respectively positioned at two sides of the frame, and the first vertical driving device and the second vertical driving device are respectively and correspondingly arranged at two sides of the frame. Optionally, the horizontal guide rail is a hydrostatic guide rail, and the tool spindle and the workpiece spindle are hydrostatic spindles. The horizontal guide rail comprises side guide rails, upper guide rails and sliding blocks in sliding fit, the side guide rails and the upper guide rails are fixed on the machine tool body, the side guide rails, the upper guide rails and the machine tool body are in C-shaped structures, two ends of the sliding blocks are in sliding fit with the two C-shaped structures and are driven by a linear motor to move along the C-shaped structures, and the tool main shaft is mounted on the sliding blocks. Optionally, an air bearing is carried out between the C-shaped structure and the sliding block