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CN-121973078-A - High-precision polishing device and process

CN121973078ACN 121973078 ACN121973078 ACN 121973078ACN-121973078-A

Abstract

The invention relates to the technical field of polishing, in particular to a high-precision polishing device and a high-precision polishing process, which comprise a machine base, wherein a grading polishing assembly is arranged on the machine base, a dust cover is arranged on the machine base, the dust collection assembly is arranged on the machine base, the cooling and blowing assembly is arranged on the grading polishing assembly, and a blowing opening of the cooling and blowing assembly faces to a polishing area of the grading polishing assembly. According to the invention, the dust collection assembly and the cooling and blowing assembly synchronously work, so that the dust collection assembly can quickly adsorb a large amount of high-temperature graphite scraps generated in the polishing process, the whole environment temperature is prevented from being too high, the cooling and blowing assembly is utilized to intensively cool the polishing area, the problem of too high temperature is further avoided, the risk of oxidization of the graphite heating rod in the polishing process is reduced by the cooling mode of adsorbing the large-range high-temperature graphite scraps and intensively cooling the polishing area, the polishing effect of the graphite heating rod is ensured, and the processing quality of the graphite heating rod is improved.

Inventors

  • LONG FENG
  • ZHOU GUANG
  • LI YINGXIN
  • SONG RUXUAN
  • Yi Heyan

Assignees

  • 株洲瑞德尔智能热工装备股份有限公司

Dates

Publication Date
20260505
Application Date
20260319

Claims (10)

  1. 1. The utility model provides a high accuracy burnishing device, its characterized in that, includes frame (1), be provided with on frame (1) and be used for carrying out hierarchical polishing subassembly (2) of polishing to graphite pole that generates heat, install the dust cover that can provide the enclosed environment on frame (1), install the dust absorption subassembly that is used for collecting polishing dust on frame (1), be provided with the cooling purge subassembly that is used for the cooling on hierarchical polishing subassembly (2), the purge mouth orientation of cooling purge subassembly the polishing region of hierarchical polishing subassembly (2).
  2. 2. The high-precision polishing device according to claim 1, wherein the grading polishing assembly (2) comprises a rough polishing module, a semi-fine polishing module and a fine polishing module, the rough polishing module, the semi-fine polishing module and the fine polishing module comprise fixing frames (201), electric rollers (202), lifting cylinders (203) and polishing wheels (204), the fixing frames (201) are slidably mounted on the machine base (1), the electric rollers (202) and the lifting cylinders (203) are mounted on the corresponding fixing frames (201), sliding rails corresponding to the electric rollers (202) are arranged on the machine base (1), the polishing wheels (204) are rotatably mounted at telescopic ends corresponding to the lifting cylinders (203), the polishing wheels (204) on different polishing modules are different in roughness, the polishing wheels (204) of the rough polishing module are rough polishing friction wheels, the polishing wheels (204) of the semi-fine polishing module are semi-fine polishing friction wheels, and the polishing wheels (204) of the fine polishing module are polishing friction wheels.
  3. 3. A high precision polishing apparatus according to claim 2, wherein the holders (201) are each provided with a polishing paste supply tube (205) for supplying polishing paste, and the polishing paste in the polishing paste supply tube (205) is matched with the roughness of the corresponding polishing wheel (204).
  4. 4. The high-precision polishing device according to claim 1, wherein the dust collection assembly comprises a dust filtering box (301) and a fan (302), the dust filtering box (301) is provided with an air inlet and an air outlet, the fan (302) is communicated with the air outlet of the dust filtering box (301), and a filter element (303) for filtering dust is arranged inside the dust filtering box (301).
  5. 5. The high precision polishing apparatus as recited in claim 4, wherein an air outlet of the blower (302) is provided with an exhaust gas filter (304) for further filtering dust.
  6. 6. The high-precision polishing device according to claim 2, wherein the cooling and blowing assembly comprises a gas blowing pipe (401) and an air pump, the gas blowing pipes (401) are arranged on the fixing frames (201), the gas blowing pipes (401) are connected with the corresponding air pumps, and air blowing ports of the gas blowing pipes (401) face the corresponding polishing wheels (204).
  7. 7. The high-precision polishing apparatus as recited in claim 6, wherein a temperature sensor for detecting the temperature of the polishing area is mounted on the holder (201), and the temperature sensor is connected to the corresponding air pump.
  8. 8. The high precision polishing apparatus as set forth in claim 6, wherein the air inlets of the air pump are all connected to the inert gas storage tank.
  9. 9. The high-precision polishing device process according to claim 1, wherein a control panel is arranged on the machine base (1), and the control panel is electrically connected with the grading polishing component (2), the dust collection component and the cooling and blowing component.
  10. 10. A high-precision polishing process using the high-precision polishing apparatus according to any one of claims 1 to 9, characterized by comprising the steps of: S1, preprocessing, namely placing graphite heating rod blanks into a cleaning machine for cleaning, and placing the graphite heating rod blanks into a drying box for drying after cleaning; s2, rough polishing is carried out on the graphite heating rod blank, microcracks and burrs on the surface of the graphite heating rod blank are removed, and the surface roughness Ra of the graphite heating rod is reduced to 1.0-1.2 mu m; s3, performing semi-fine polishing on the graphite heating rod blank, and further refining the surface of the graphite heating rod to reduce the surface roughness Ra of the graphite heating rod to 0.4-0.6 mu m; S4, finely polishing the graphite heating rod blank, and finally polishing the surface of the graphite heating rod to reduce the surface roughness Ra of the graphite heating rod to below 0.2 mu m; s5, cleaning and drying, namely placing the graphite heating rod into a cleaning machine, and placing the graphite heating rod into a vacuum drying oven for drying after cleaning.

Description

High-precision polishing device and process Technical Field The invention relates to the technical field of polishing, in particular to a high-precision polishing device and a high-precision polishing process. Background The graphite heating rod is used as a high-performance heating element, is widely applied to high-end thermal equipment such as light Fu Jinggui growth, semiconductor wafer annealing, high-temperature heat treatment furnace and the like by virtue of excellent high-temperature resistance, low thermal expansion coefficient and high heat radiation efficiency, and is a key component for realizing accurate temperature control and energy conversion. In practical application, the surface state, particularly the surface roughness, of the graphite heating rod is a core factor affecting the comprehensive performance of the graphite heating rod. Research shows that the smoother the surface of the graphite heating rod is, the smaller the heat radiation loss is, the higher the energy utilization rate is, and the service life and the stability of the graphite heating rod are obviously influenced. The graphite heating rod with smooth surface is often formed by polishing graphite heating rod blanks, in the polishing process, the temperature rise generated by the processing environment temperature and the polishing area can directly influence the quality of the final product, the internal structure of the graphite heating rod is easily subjected to thermal damage at an excessively high temperature, the compactness of the graphite heating rod is reduced, the graphite heating rod blanks are more easily oxidized, and the polishing effect is further seriously influenced. Disclosure of Invention In order to overcome the disadvantages mentioned in the background art, the present application provides a high-precision polishing apparatus and process. The utility model provides a high accuracy burnishing device, includes the frame, be provided with the hierarchical polishing subassembly that is used for carrying out hierarchical polishing to graphite pole that generates heat on the frame, install the dust cover that can provide the confined environment on the frame, install the dust absorption subassembly that is used for collecting polishing dust on the frame, be provided with the cooling that is used for the cooling on the hierarchical polishing subassembly and sweep the subassembly, the cooling sweeps the mouth orientation of sweeping of subassembly the polishing area of hierarchical polishing subassembly. As an implementation mode, the hierarchical polishing assembly comprises a rough polishing module, a semi-fine polishing module and a fine polishing module, wherein the rough polishing module, the semi-fine polishing module and the fine polishing module comprise a fixing frame, an electric roller, a lifting cylinder and polishing wheels, the fixing frame is slidably mounted on a machine base, the electric roller and the lifting cylinder are mounted on the corresponding fixing frame, a sliding rail corresponding to the electric roller is arranged on the machine base, the polishing wheels are rotatably mounted at the telescopic ends corresponding to the lifting cylinder, the polishing wheels on different polishing modules are different in roughness, the polishing wheels of the rough polishing module are rough polishing friction wheels, the polishing wheels of the semi-fine polishing module are semi-fine polishing friction wheels, and the polishing wheels of the fine polishing module are fine polishing friction wheels. As an implementation mode, the fixing frames are provided with grinding paste supply pipes for supplying grinding paste, and the grinding paste in the grinding paste supply pipes is matched with the roughness corresponding to the grinding wheels. As an embodiment, the dust collection assembly comprises a dust filtering box and a fan, wherein the dust filtering box is provided with an air inlet and an air outlet, the fan is communicated with the air outlet of the dust filtering box, and a filter element for filtering dust is arranged inside the dust filtering box. As an implementation mode, an air outlet of the fan is provided with an exhaust gas filter for further filtering dust. As an implementation mode, the cooling and blowing component comprises a gas blowing pipe and an air pump, wherein the gas blowing pipes are arranged on the fixing frames, the gas blowing pipes are connected with the corresponding air pumps, and the air blowing ports of the gas blowing pipes face the corresponding polishing wheels. As an implementation mode, a temperature sensor for detecting the temperature of the polishing area is arranged on the fixing frame and is connected with the corresponding air pump. As an implementation mode, the air inlets of the air pumps are communicated with the inert gas storage tank. As an implementation mode, the machine base is provided with a control panel, and the control panel is elect