CN-121973090-A - Grinding method

CN121973090ACN 121973090 ACN121973090 ACN 121973090ACN-121973090-A

Abstract

The disclosure relates to a grinding method, which comprises the steps of determining grinding parameters of each grinding stage according to an initial thickness, a target thickness and the number of preset grinding stages of an object to be ground, sequentially executing grinding operations of each grinding stage according to the determined grinding parameters, determining thickness errors according to the measured actual measured thickness and the preset thickness of any grinding stage after finishing grinding of any grinding stage, determining the grinding stage to be executed next and whether to adjust the grinding parameters according to the thickness errors and a first preset error threshold value until the object to be ground reaches the target thickness, and executing a tool withdrawal operation if preset tool withdrawal conditions are met in the process of executing grinding. According to the embodiment of the disclosure, the grinding operation can be performed in stages, the grinding stage to be performed next and whether the grinding parameters are adjusted or not are determined according to the real-time thickness measurement, and the grinding precision, efficiency and reliability can be improved.

Inventors

PAN XINGXING
DONG ZHUANGZHUANG
WANG HUI
ZHANG WEINAN
Zhu Wangzhe

Assignees

上海矽加半导体有限公司

Dates

Publication Date: 20260505
Application Date: 20260313

Claims (12)

1. A method of grinding, the method comprising: Determining grinding parameters of each grinding stage according to the initial thickness, the target thickness and the number of preset grinding stages of the object to be ground, wherein the grinding parameters comprise preset thickness, preset feed speed and preset feed amount after grinding; Sequentially executing grinding operations of each grinding stage according to the determined grinding parameters, wherein after finishing grinding of any grinding stage, thickness errors are determined according to the measured actual measured thickness and the preset thickness of the grinding stage; determining a grinding stage to be executed next and whether to adjust grinding parameters according to the thickness error and a first preset error threshold value until the object to be ground reaches the target thickness, And executing the tool retracting operation if the preset tool retracting condition is met in the process of executing the grinding.
2. The method of claim 1, wherein the predetermined thickness after grinding is gradually reduced from the first grinding stage to the last grinding stage, and wherein the predetermined feed rate and the predetermined feed amount are gradually reduced.
3. The method of claim 1, wherein determining a thickness error based on the measured actual measured thickness and the predetermined thickness for the grinding stage comprises: and determining the thickness error according to the difference between the measured actual measured thickness and the preset thickness in the grinding stage.
4. The method of claim 1, wherein determining a subsequent polishing stage to be performed and whether to adjust polishing parameters based on the thickness error and a first predetermined error threshold comprises any one of: If the thickness error is less than 0 and the absolute value of the thickness error is greater than the first preset error threshold, determining the grinding stage to be executed next and whether to adjust the grinding parameters, namely, entering the next grinding stage and reducing the feed speed and the feed amount of the next grinding stage; if the absolute value of the thickness error is smaller than or equal to the first preset error threshold, determining the grinding stage to be executed next and whether to adjust the grinding parameters, namely, entering the next grinding stage; if the thickness error is greater than 0 and the absolute value of the thickness error is greater than the first preset error threshold, determining the next polishing stage to be performed and whether to adjust polishing parameters is to continue performing the next polishing stage of the current polishing stage and whether to adjust polishing parameters until the absolute value of the thickness error is less than the first preset error threshold.
5. The method of claim 4, wherein reducing feed rate and feed rate for a next grinding stage comprises: Setting the feed rate of the next grinding stage as max (0, min (d_temp, d_plan (n+1))), wherein d_temp represents the difference between the preset feed rate corresponding to the next grinding stage and the absolute value of the thickness error, and d_plan (n+1) represents the preset feed rate corresponding to the next grinding stage; setting the feed speed of the next grinding stage as the sum of the preset feed speed and the preset speed adjustment value corresponding to the next grinding stage.
6. The method of claim 1, wherein the preset retract condition comprises at least one of: Executing a tool retracting operation when the absolute value of the thickness error is larger than 0 and the thickness error is larger than a preset warning thickness corresponding to the grinding stage; executing a tool retracting operation when the absolute value of the thickness error is smaller than 0 and the thickness error is larger than a preset warning thickness corresponding to the grinding stage; When the grinding disc does not satisfy the vacuum condition, the retracting operation is performed.
7. The method of claim 1, wherein if the number of preset polishing steps is greater than or equal to 4, the sum of preset polishing thicknesses of the first three polishing steps is greater than or equal to a x H, wherein 0.3 a 0.95, H is the difference between the initial thickness and the target thickness, Wherein the method further comprises: And adjusting the grinding thicknesses of the second grinding stage and the third grinding stage according to the actual grinding thickness of the first grinding stage so that the sum of the grinding thicknesses of the first three grinding stages is kept to be the preset grinding thickness.
8. The method of claim 1, wherein if the number of preset polishing steps is 5, the sum of preset polishing thicknesses of the first three polishing steps is 0.75H, The adjusting the polishing thickness of the second polishing stage and the third polishing stage according to the actual polishing thickness of the first polishing stage so that the sum of the polishing thicknesses of the first three polishing stages is kept to be the preset polishing thickness comprises: If the actual polishing thickness of the first polishing stage is greater than 0.25H, the polishing thicknesses of the second polishing stage and the third polishing stage are adjusted to be the difference between 0.75H and the actual polishing thickness of the first polishing stage.
9. The method according to claim 1, wherein the method further comprises: if the thickness error of the current batch of the to-be-ground objects in each grinding stage is greater than a third preset error threshold value and the number of times that the thickness error is greater than 0 reaches the preset number of times, increasing the preset feed speed corresponding to the next batch of to-be-ground objects according to the preset proportion, setting the grinding thickness of the last grinding stage of the next batch of to-be-ground objects as a preset value, Wherein the third preset error threshold is greater than the first preset error threshold.
10. The method according to claim 1, wherein the polishing parameters are the same when polishing a plurality of objects to be polished in the same batch using the same polishing apparatus, and/or Under the condition that other grinding equipment with the same model is replaced by the same manufacturer to grind a plurality of objects to be ground in the same batch, at least one of a first preset error threshold value, a feed speed, a withdrawal speed and a preset guard thickness value in grinding parameters is the same as the corresponding grinding parameters of the previous grinding equipment.
11. An abrasive device, the device comprising: The first determining module is used for determining grinding parameters of each grinding stage according to the initial thickness, the target thickness and the preset grinding stage number of the object to be ground, wherein the grinding parameters comprise preset thickness, preset feed speed and preset feed amount after grinding; The second determining module is used for determining thickness errors according to the measured actual measured thickness and the preset thickness of the grinding stage after finishing the grinding of any grinding stage; a third determining module, configured to determine a grinding operation according to the thickness error and a first preset error threshold until the object to be ground reaches the target thickness, And executing the tool retracting operation if the preset tool retracting condition is met in the process of executing the grinding.
12. An abrasive system, the system comprising: The grinding disc is used for placing an object to be ground; a grinding wheel assembly for performing a grinding operation; a thickness measuring assembly for measuring the thickness of the object to be ground, and A control assembly for implementing the grinding method of any one of claims 1-10.

Description

Grinding method Technical Field The disclosure relates to the technical field of precision machining, and in particular relates to a grinding method. Background In the precision grinding process, the preset feed amount and the actual removal amount often deviate due to factors such as grinding disc loss, grinding liquid concentration change, material batch difference and the like. At present, a fixed feed strategy or simple PID feedback control is generally adopted, nonlinear changes of a process are difficult to deal with, errors cannot be corrected rapidly after single feed, and product out-of-tolerance or low processing efficiency are easy to cause. Therefore, a method for real-time judging and intelligently correcting the polishing stage to be performed next and adjusting the polishing parameters is needed to improve the processing efficiency while ensuring the accuracy. Disclosure of Invention In view of this, the present disclosure proposes a grinding method, the method comprising: Determining grinding parameters of each grinding stage according to the initial thickness, the target thickness and the number of preset grinding stages of the object to be ground, wherein the grinding parameters comprise preset thickness, preset feed speed and preset feed amount after grinding; Sequentially executing grinding operations of each grinding stage according to the determined grinding parameters, wherein after finishing grinding of any grinding stage, thickness errors are determined according to the measured actual measured thickness and the preset thickness of the grinding stage; determining a grinding stage to be executed next and whether to adjust grinding parameters according to the thickness error and a first preset error threshold value until the object to be ground reaches the target thickness, And executing the tool retracting operation if the preset tool retracting condition is met in the process of executing the grinding. In one possible implementation, the preset thickness after grinding gradually decreases from the first grinding stage to the last grinding stage, and the preset feed speed and the preset feed amount gradually decrease. In one possible implementation, determining the thickness error from the measured actual measured thickness and the preset thickness for the grinding stage includes: and determining the thickness error according to the difference between the measured actual measured thickness and the preset thickness in the grinding stage. In one possible implementation, determining the polishing stage to be performed next and whether to adjust the polishing parameters according to the thickness error and the first preset error threshold includes any one of the following: If the thickness error is less than 0 and the absolute value of the thickness error is greater than the first preset error threshold, determining the grinding stage to be executed next and whether to adjust the grinding parameters, namely, entering the next grinding stage and reducing the feed speed and the feed amount of the next grinding stage; if the absolute value of the thickness error is smaller than or equal to the first preset error threshold, determining the grinding stage to be executed next and whether to adjust the grinding parameters, namely, entering the next grinding stage; if the thickness error is greater than 0 and the absolute value of the thickness error is greater than the first preset error threshold, determining the next polishing stage to be performed and whether to adjust polishing parameters is to continue performing the next polishing stage of the current polishing stage and whether to adjust polishing parameters until the absolute value of the thickness error is less than the first preset error threshold. In one possible implementation, the reducing the feed rate and the feed amount of the next grinding stage includes: Setting the feed rate of the next grinding stage as max (0, min (d_temp, d_plan (n+1))), wherein d_temp represents the difference between the preset feed rate corresponding to the next grinding stage and the absolute value of the thickness error, and d_plan (n+1) represents the preset feed rate corresponding to the next grinding stage; setting the feed speed of the next grinding stage as the sum of the preset feed speed and the preset speed adjustment value corresponding to the next grinding stage. In one possible implementation, the preset retracting condition is at least one of the following: Executing a tool retracting operation when the absolute value of the thickness error is larger than 0 and the thickness error is larger than a preset warning thickness corresponding to the grinding stage; executing a tool retracting operation when the absolute value of the thickness error is smaller than 0 and the thickness error is larger than a preset warning thickness corresponding to the grinding stage; And when the grinding disc does not meet the vacuum condition, executing the too