CN-121973106-A - High-efficient circulation recovery control system of polishing machine essence throwing liquid

CN121973106ACN 121973106 ACN121973106 ACN 121973106ACN-121973106-A

Abstract

The invention discloses a polishing machine fine polishing liquid high-efficiency circulation recycling control system, which relates to the technical field of fine polishing processes and comprises a polishing liquid collecting box, a temporary storage tank, a detection unit and a control unit, wherein a liquid outlet of a fine polishing machine is connected with the polishing liquid collecting box through a separator, the polishing liquid collecting box is connected with the temporary storage tank through a primary conveying pipeline, the temporary storage tank is connected with a middle polishing machine liquid storage tank through a secondary conveying pipeline, pump components are arranged on the primary conveying pipeline and the secondary conveying pipeline, a temperature regulation and control unit is arranged on the temporary storage tank, a filter is further arranged on the secondary conveying pipeline, detection units for detecting liquid levels are arranged in the polishing liquid collecting box and the temporary storage tank, and the control unit is electrically connected with the temperature regulation and control unit, the detection unit and the pump components. The polishing machine fine polishing liquid efficient circulating recovery control system solves the problems of concentration unbalance and viscosity change of the recovery liquid in the prior art, ensures that the performance of the recovery liquid is basically consistent with that of the new liquid, and ensures the stability of polishing effect.

Inventors

ZHU KANG
DING LINGHUI
ZHU KAI
ZHOU JIE
JIANG XIAOGENG

Assignees

海纳半导体(金华)有限公司

Dates

Publication Date: 20260505
Application Date: 20260310

Claims (10)

1. The polishing machine fine polishing liquid efficient circulating recovery control system is characterized by comprising a polishing liquid collecting box, a temporary storage tank, a detection unit and a control unit, wherein a liquid outlet of a fine polishing machine is connected with the polishing liquid collecting box through a separator, the polishing liquid collecting box is connected with the temporary storage tank through a primary conveying pipeline, the temporary storage tank is connected with a middle polishing machine liquid storage tank through a secondary conveying pipeline, pump assemblies are arranged on the primary conveying pipeline and the secondary conveying pipeline, a temperature regulation and control unit is arranged on the temporary storage tank, a filter is further arranged on the secondary conveying pipeline, detection units for detecting liquid levels are arranged in the polishing liquid collecting box and the temporary storage tank, and the control unit is electrically connected with the temperature regulation and control unit, the detection unit and the pump assemblies.
2. The polishing machine polishing liquid high-efficiency recycling control system of claim 1, wherein the detection unit in the polishing liquid collection box comprises four liquid level sensors, and the four liquid level sensors are respectively arranged at a low liquid level, a storage liquid level, an extraction liquid level and a full liquid level in the polishing liquid collection box from bottom to top.
3. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein a polishing liquid overflow port and a liquid discharge port are further formed in the polishing liquid collecting box, the polishing liquid overflow port is arranged on one side of the top of the polishing liquid collecting box, and the liquid discharge port is connected with the temporary storage tank through a primary conveying pipeline.
4. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein a first magnetic pump is adopted as a pump assembly on the primary conveying pipeline, and a first manual valve is arranged between the first magnetic pump and an inlet connecting pipe of the temporary storage tank on the primary conveying pipeline.
5. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein the temperature regulating unit comprises a temperature sensor, a cooling pipe and a heating device, the temperature sensor is used for measuring the temperature of polishing liquid in the temporary storage tank, the cooling pipe is wound on the outer wall of the temporary storage tank and used for cooling the polishing liquid, and the heating device is used for heating the polishing liquid to a set temperature.
6. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein the detection unit in the temporary storage tank comprises four liquid level sensors, and the four liquid level sensors are respectively arranged at a low liquid level, a storage liquid level, an extraction liquid level and a full liquid level in the temporary storage tank from bottom to top.
7. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein a temporary storage overflow port and a bottom outlet are further formed in the polishing liquid collecting box, the temporary storage overflow port is formed in one side of the top of the temporary storage tank, and the bottom outlet is connected with an inlet connecting pipe of a liquid storage tank of the middle polishing machine through a secondary conveying pipeline.
8. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein a pump assembly on the secondary conveying pipeline adopts a magnetic pump II, and a manual valve II is arranged between an outlet at the bottom of the temporary storage tank and the magnetic pump II on the secondary conveying pipeline.
9. The polishing machine fine polishing liquid efficient recycling control system of claim 1, wherein the temporary storage tank is further provided with a self-circulation pipeline, and a bottom outlet of the temporary storage tank is connected with a top inlet of the temporary storage tank through the self-circulation pipeline.
10. The polishing machine fine polishing liquid efficient recycling control system of claim 9, wherein a magnetic pump III is arranged on the self-circulation pipeline, and a manual valve III is arranged between an outlet at the bottom of the temporary storage tank and the magnetic pump III on the self-circulation pipeline.

Description

High-efficient circulation recovery control system of polishing machine essence throwing liquid Technical Field The invention relates to the technical field of precise polishing processes, in particular to a polishing machine precise polishing liquid efficient recycling control system. Background In the precision polishing process of the industries of semiconductors, optical elements, precision machinery and the like, the precision polishing liquid is one of core consumables, and the performance of the precision polishing liquid directly determines key indexes such as the surface roughness, the flatness and the like of a product. However, the polishing liquid is mixed with solid particle impurities (such as workpiece scraps and abrasive residues) generated in the polishing process after being used, if the polishing liquid is directly discharged, a large amount of resource waste can be caused, and the environmental protection treatment cost can be increased due to the inclusion of pollutants. In order to solve the problem, the technology for recovering the fine polishing liquid is gradually popularized in the industry, but the existing recovery scheme still has obvious short plates, so that the requirement of the high-precision polishing process on the performance of the recovery liquid is difficult to meet, and the recycling range and the recycling efficiency of the fine polishing liquid are limited. In the prior art, waste fine polishing liquid firstly enters a pretreatment filtering unit, large-particle impurities are trapped through a filter screen and then flow into a liquid storage TANK for temporary storage, and when the fine polishing liquid needs to be supplemented by a middle polishing machine, the fine polishing liquid is scooped from the liquid storage TANK through a measuring cup and poured into a TANK of a polishing machine. The scheme in the prior art has low circulation efficiency, can not accurately supply the recovery liquid according to the real-time requirement of the polishing equipment, has the problem of excessive or insufficient supply, has low automation degree, needs to manually clean the filter screen periodically and monitor the state of the fine polishing liquid, not only increases labor cost, but also is easy to cause secondary pollution of the recovery liquid due to manual misoperation. Disclosure of Invention The invention aims to provide a high-efficiency circulating recovery control system for polishing liquid of a polishing machine, which solves the problems in the prior art, optimizes a conveying and control mechanism, realizes accurate adjustment of the supply amount of the recovery liquid, improves the recycling efficiency, realizes full-automatic monitoring and control of the recovery process, reduces manual intervention and reduces the risk of secondary pollution. In order to achieve the above object, the present invention provides the following solutions: The invention provides a polishing machine fine polishing liquid efficient recycling control system which comprises a polishing liquid collecting box, a temporary storage tank, a detection unit and a control unit, wherein a liquid outlet of a fine polishing machine is connected with the polishing liquid collecting box through a separator, the polishing liquid collecting box is connected with the temporary storage tank through a primary conveying pipeline, the temporary storage tank is connected with a middle polishing machine liquid storage tank through a secondary conveying pipeline, pump assemblies are arranged on the primary conveying pipeline and the secondary conveying pipeline, a temperature regulation and control unit is arranged on the temporary storage tank, a filter is further arranged on the secondary conveying pipeline, detection units for detecting liquid levels are arranged in the polishing liquid collecting box and the temporary storage tank, and the control unit is electrically connected with the temperature regulation and control unit, the detection unit and the pump assembly. In an embodiment, the detection unit in the polishing solution collecting box comprises four liquid level sensors, and the four liquid level sensors are respectively arranged at the low liquid level, the storage liquid level, the extraction liquid level and the full liquid level in the polishing solution collecting box from bottom to top. In an embodiment, the polishing solution collecting box is further provided with a polishing solution overflow port and a liquid discharge port, the polishing solution overflow port is arranged on one side of the top of the polishing solution collecting box, and the liquid discharge port is connected with the temporary storage tank through a primary conveying pipeline. In an embodiment, the pump assembly on the primary conveying pipeline adopts a first magnetic pump, and a first manual valve is arranged between the first magnetic pump and an inlet connecting pipe of the temporary storage tank