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CN-121973111-A - Sand blasting device and sand blasting method for semiconductor quartz product

CN121973111ACN 121973111 ACN121973111 ACN 121973111ACN-121973111-A

Abstract

The invention discloses a sand blasting device and a sand blasting method for a semiconductor quartz product, wherein the sand blasting device comprises a device seat, an automatic rotating mechanism and a multi-angle adjusting type sand blasting mechanism are arranged in the device seat, the automatic rotating mechanism comprises a rotary driving device and a universal rotating device driven to rotate by the rotary driving device, the rotating device comprises a universal rotary disc and a limiting clamp which is arranged on the universal rotary disc in an adjusting mode, and the universal rotary disc and the horizontal surface are obliquely arranged. This quartzy product sand blasting unit of semiconductor has realized pressing from both sides tight spacing to various quartzy products, can realize the regulation of sand blasting mechanism in space optional position to can realize with the sand blasting of quartzy product optional position, solve the limitation that current sand blasting unit exists only can be directed against the sand blasting of the regular product of same type, simple structure, convenient operation can effectively improve production efficiency.

Inventors

  • TIAN BOTAO
  • WANG ZHENLI
  • YANG JUN
  • WU RANHONG
  • Xiang Hanli

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251216

Claims (10)

  1. 1. The sand blasting device for the semiconductor quartz products comprises a device seat (1) and is characterized in that an automatic rotating mechanism (2) and a multi-angle adjusting type sand blasting mechanism (3) are arranged inside the device seat (1), the automatic rotating mechanism (2) comprises a rotating driving device (4) and a universal rotating device (5) which is driven to rotate through the rotating driving device (4), the rotating device (5) comprises a universal rotary table (51) and an adjusting type limiting clamp (52) which is arranged on the universal rotary table (51), and the universal rotary table (51) and a horizontal surface form an included angle.
  2. 2. The blasting apparatus for semiconductor quartz products according to claim 1, wherein the universal turntable (51) is provided with a plurality of adjustment mounting holes (511).
  3. 3. The sand blasting device for the semiconductor quartz product according to claim 2, wherein the limiting clamp (52) comprises a limiting bottom plate (521) and a radial limiting clamping block (522) arranged on the limiting bottom plate (521), a plurality of adjusting and positioning holes (523) are formed in the limiting fixed plate (521), and a profiling positioning structure is arranged on the radial limiting clamping block (522).
  4. 4. The apparatus of claim 3, wherein the limiting base plate (521) has a common hole (53) for inserting a limiting dummy or leveling member.
  5. 5. The device for blasting semiconductor quartz products according to any one of claims 1 to 4, wherein the transmission shaft (43) in the rotary driving mechanism (4) is disposed at an angle of 45 degrees with respect to the horizontal bottom surface of the device base (1), the transmission shaft (43) is vertically connected with the rotary device (5) for driving, and the universal turntable (51) is disposed at an angle of 45 degrees with respect to the horizontal surface.
  6. 6. The sand blasting apparatus for semiconductor quartz products according to any one of claims 1 to 4, wherein the sand blasting mechanism (3) comprises a sand blasting support (6) arranged inside the apparatus base (1), a plurality of multi-angle sand blasting adjusting mechanisms (7) arranged on the sand blasting support (6) in a sliding adjusting manner, and sand blasting nozzles (8) arranged on the multi-angle sand blasting adjusting mechanisms (7).
  7. 7. The sand blasting apparatus for semiconductor quartz products according to claim 5, wherein the multi-angle sand blasting adjusting mechanism (7) comprises an adjusting slide block (71) slidably disposed on the sand blasting bracket (6) and an angle adjusting lever (72) connected to the adjusting slide block (71).
  8. 8. The blasting apparatus for semiconductor quartz products according to claim 7, wherein the angle adjusting lever (72) comprises a plurality of adjusting levers rotatably connected to each other by a rotation adjusting member (723), and the blast nozzle (8) is connected to free ends of the plurality of adjusting levers by a hinge base (81) and is adjusted at any angle of 360 degrees in space.
  9. 9. The blasting apparatus for semiconductor quartz products according to any of claims 1 to 4, wherein a dust removing device (16) is provided on the apparatus base (1).
  10. 10. A sand blasting method for a semiconductor quartz product is characterized by comprising the following steps of: a blasting apparatus for a semiconductor quartz product according to any of claims 1 to 9, comprising the steps of: S1, fixing a quartz product to be sandblasted on a universal turntable through a limit clamp; s2, driving the semiconductor quartz product to rotate at an angle inclined to the horizontal plane through an automatic rotating mechanism; S3, adjusting the position and the angle of an angle adjusting rod to enable a sand spraying nozzle to be aligned with a sand spraying area set by a quartz product to be sprayed; And S4, starting a sand blasting machine, and carrying out sand blasting treatment on the quartz product to be blasted.

Description

Sand blasting device and sand blasting method for semiconductor quartz product Technical Field The invention relates to the technical field of semiconductor devices, in particular to a sand blasting device and a sand blasting method for a semiconductor quartz product. Background Currently, in the use process of quartz products in many places, sand blasting is required to obtain certain roughness. For example, since semiconductor etching equipment uses quartz spacer rings and the like, reaction byproducts may be deposited as thin films on the inner walls of the chamber, including the quartz spacer rings, during some etching and deposition processes. If the surface of the quartz spacer ring is very smooth, the adhesion of these films is often poor, and during the process, the films are easily peeled off due to thermal stress or particle bombardment, creating particulate contaminants that can become fatal defects once they fall onto the wafer. In order to obtain a certain roughness, a manual sand blasting method is generally adopted, and the manual sand blasting method has the defects of low efficiency, poor stability and the like. The automatic sand blasting is generally performed on regular products of the same kind in batches, for example, a quartz ring automatic sand blasting device disclosed in China patent document CN 121018413A comprises a frame, a conveying device, a rotating device, a driving device, a spray head, a drying device and a discharging device, wherein the conveying device is arranged on the frame and drives the quartz ring to reciprocate, the rotating device is arranged on the frame and drives quartz to rotate around the axis of the rotating device, the driving device is arranged on the frame and drives the conveying device and the rotating device, the spray head sprays materials to the quartz ring, the drying device is used for drying the quartz ring, and the discharging device is used for automatically discharging the processed quartz ring. However, the automatic blasting apparatus in the prior art performs blasting operation for the outside of regular products or blasting products of specific shapes. For the production enterprises which need to sandblast quartz products with different specifications and shapes, the existing automatic equipment can meet the production requirements of the enterprises. Therefore, it is necessary to design a device which can be suitable for quartz products with various specifications and shapes and can perform omnibearing sand blasting. Disclosure of Invention The invention aims to solve the problem that an automatic sand blasting device in the prior art cannot meet the requirements of omnibearing sand blasting of quartz products with different specifications and different shapes, and provides a semiconductor quartz product sand blasting device and a semiconductor quartz product sand blasting method, which can meet the requirements of omnibearing sand blasting of quartz products with different shapes and different specifications, such as ring-shaped quartz products, special-shaped quartz products and the like, and are convenient to operate, good in sand blasting effect and simple in structure. The technical scheme includes that the sand blasting device for the semiconductor quartz products comprises a device seat, an automatic rotating mechanism and a multi-angle adjusting type sand blasting mechanism are arranged in the device seat, the automatic rotating mechanism comprises a rotary driving device and a universal type rotary device which is driven to rotate by the rotary driving device, the rotary device comprises a universal rotary disc and a limiting clamp which is arranged on the universal rotary disc in an adjusting mode, and the universal rotary disc and the horizontal surface form an included angle. This sand blasting device for semiconductor quartz products sets up automatic rotary mechanism and multi-angle regulation formula sand blasting mechanism in the inside of device seat, can realize the automatic sand blasting to various quartz rings class, quartz dysmorphism spare etc. through the general rotary device in the automatic rotary mechanism, the installation of various different grade type limit clamps can be realized to general carousel, thereby realize the clamp spacing to various quartz products, because quartz products mostly are annular or dysmorphism class product, consequently, for easy to assemble and the adjustment of sandblast position, with general rotary device that is general carousel and horizontal personally submit certain contained angle setting, can conveniently realize the comprehensive sand blasting to each part of quartz products, and this sand blasting device for semiconductor quartz products, multi-angle regulation formula sand blasting mechanism's setting makes the regulation nimble convenience, can realize the regulation of sand blasting mechanism in space optional position, thereby can realize the sand blasting with qua