CN-121973227-A - Partitioned track control method of direct-drive manipulator aiming at interference station

Abstract

The invention relates to a zonal track control method of a direct-drive manipulator aiming at an interference station, which comprises the following steps of constructing an obstacle avoidance area and a safety point, and avoiding the contact between the front end of a finger and the elbow end of an arm and a sector disc interference area when the manipulator is lifted and rotated; and carrying out regional track planning control based on the obstacle avoidance area and the safety point, namely controlling the manipulator to rotate to the safety point of a certain working area, then lifting the manipulator to a working height, and finally controlling the manipulator to rotate and then execute telescopic action so as to avoid entering the obstacle avoidance area.

Inventors

• Che Dongqi
• ZHANG CHIYUAN
• YANG QIFENG
• LI CHANGKAI
• LI ZHITIAN
• JIA HANYANG
• Tan Xueke
• DENG ZHONGYU

Assignees

• 沈阳新松半导体设备有限公司

Dates

Publication Date

20260505

Application Date

20260319

Claims (5)

1. 1. The method for controlling the partitioned track of the direct-drive manipulator aiming at the interference station is characterized by comprising the following steps of: Constructing an obstacle avoidance area and a safety point, so that when the manipulator ascends and descends and rotates, the front end of a finger and the elbow end of an arm are prevented from touching an interference area comprising a fan-shaped disc; and carrying out regional track planning control based on the obstacle avoidance area and the safety points, namely controlling the manipulator to rotate to the safety points of the dividing area, then lifting the manipulator to the working height, and finally controlling the manipulator to rotate and then execute actions so as to avoid entering the obstacle avoidance area.
2. 2. The method for controlling the partitioned track of the direct-drive manipulator for the interference station according to claim 1, wherein the constructing of the obstacle avoidance area and the safety point is specifically as follows: Setting a safety position, wherein fingers and arms of the manipulator cannot scratch an interference area comprising a fan-shaped disc in the lifting process of the manipulator, and the safety position is arranged between an interference station and a processing chamber; The obstacle avoidance area is constructed in a space with a fan-shaped disc interference station and stations for taking and placing wafers at two sides of a chamber, wherein the boundary of a rotation axis is TL and TR, and the boundary of a lifting axis is the upper Z_up of the fan-shaped disc and the lower Z_dn of the fan-shaped disc, so that when a manipulator rotates back to the fan-shaped disc, the elbow joint of the manipulator cannot collide with the fan-shaped disc, and the TL and TR are two rays TL and TR taking the origin of the lifting axis of the manipulator as the center.
3. 3. The method for controlling the partitioned trajectory of the direct-drive manipulator for the intervention station as set forth in claim 1, wherein said partitioned trajectory planning control comprises the steps of: The platform area is divided into a plurality of areas, and the station for picking and placing is firstly judged to be in the area, if the station is in the 1 st area, the station returns to the safety point P1 in the 1 st area, if the station is in the 2 nd area, the station returns to the safety point P2 in the second area, and if the station is in the n-th area, the station returns to the safety point Pn in the n-th area; The manipulator rotates to a safety point Pn of an nth area, the lifting shaft is lifted to the station height and then rotates to the alignment position of the station, so that the manipulator is guaranteed to be positioned above the fan-shaped disc when rotating, then the telescopic shaft stretches again to finish the action of taking or placing a piece, the same height is kept to rotate to the position of the safety point Pn after the action is finished, and the lifting shaft is lowered to a mechanical origin.
4. 4. The method for controlling the partition track of the direct-drive manipulator for the interference station according to claim 1 or 3, wherein if the transmission track is from an a-th area to a b-th area, the transmission track reaches a safety point Pa of the a-th area, then the height of a mechanical origin is kept to rotate from the safety point Pa of the a-th area to a safety point Pb of the b-th area, the height of the transmission track is increased to the height of a designated station after reaching a right safety point Pb, and the height of the transmission track is outside a lifting shaft obstacle avoidance area, otherwise, an alarm is given, and after the height of the designated station of the b-th area is increased, the rotation alignment of the height to the b-th area is kept, wherein a and b are natural numbers between 1 and n, and b is larger than a.
5. 5. A method for controlling a partitioned track of a direct-drive manipulator for an interference station according to claim 1 or 3, wherein if the transmission track is from the b-th area to the a-th area, the transmission track reaches the safety point Pb of the b-th area, then the height of the mechanical origin is kept to rotate from the right safety point Pb to the left safety point Pa, the height of the transmission track is raised to the height of the designated station after reaching the left safety point Pa, and the height of the transmission track is outside the obstacle avoidance area of the lifting shaft, otherwise, an alarm is given, the height is kept to be rotationally aligned to the a-th area after raising to the height of the designated station of the a-th area, wherein a and b are natural numbers between 1 and n, and b is greater than a.

Description

Partitioned track control method of direct-drive manipulator aiming at interference station Technical Field The invention relates to the fields of intelligent manufacturing, automatic control and semiconductor transmission, in particular to a zoned track control method of a direct-drive manipulator aiming at an interference station. Background In modern semiconductor manufacturing processes, wafer transfer robots play a critical role. As semiconductor process nodes continue to shrink, wafer sizes continue to increase, increasingly demanding transfer systems are being required. Typical wafer transfer scenarios include 1) transfer between a wafer cassette (FOUP/POD) and process equipment, 2) wafer handoff inside a vacuum chamber, 3) wafer transfer between process modules, 4) wafer handling at inspection/measurement stations, which require high speed, high precision, high cleanliness handling operations within a highly constrained space (typically only millimeter level of margin). The risk of motion interference is further increased by the influence of the spatial structure. Thus, there are several advantages to improving transportation safety: The high value and fragility of a wafer, namely a semiconductor wafer (particularly a large-size wafer of 300mm and above) is made of high-purity silicon, the mechanical strength is low, and slight collision or vibration can cause microcracks, edge chipping or surface scratch, so that the chip yield is directly affected. b) Contamination risk-collisions may lead to particle contamination, even micro-sized particles may lead to device failure in nano-scale processes (e.g. 3nm/2 nm). c) Economic impact is that the manufacturing cost of a 300mm wafer can reach thousands of dollars, and if the whole wafer is scrapped due to collision, the loss is huge. Avoiding equipment damage, reducing maintenance cost, a) ensuring that the internal structure of precise equipment (such as a photoetching machine and an etching cavity) is precise, enabling a manipulator to collide with the cavity, a sensor or other mechanical parts to deform a mechanical arm or an end effector (End Effector), ensuring that a high-precision guide rail/bearing is damaged, ensuring that a vacuum seal is invalid (particularly serious in a vacuum transmission system), b) ensuring that equipment maintenance or replacement parts are stopped, and ensuring that the loss can reach tens of thousands to hundreds of thousands of dollars (such as the stop cost of an EUV photoetching machine is extremely high) per hour. Thirdly, ensuring production continuity and improving efficiency, and a) collision-free track = higher throughput, wherein the optimized track planning can reduce unnecessary deceleration or stopping, so that the manipulator operates at a speed close to a limit, and the wafer transfer efficiency (WPH) is improved. b) Avoiding the interruption of the production line, that is, the collision can cause chain reaction, such as the wafer is blocked in the transmission path, and manual intervention is needed to influence the automatic flow of the whole production line. Fourth, the personnel safety is guaranteed, and a) the man-machine cooperation risk is that an engineer may need to enter a manipulator working area during equipment maintenance, debugging or exception handling. Without reliable collision precautions (e.g., safety gratings, scram mechanisms), high-speed moving robotic arms may cause injury to personnel. b) Vacuum/special environmental risks-in a vacuum or inert gas environment, collisions may cause equipment to leak, causing safety hazards (e.g. vacuum burst, gas pollution). At present, the working space of a wafer is limited in a narrow way, the traditional solution is to modify the size of a manipulator, so that the measuring range of the manipulator is shortened, the safety control in the wafer transmission is difficult to realize due to the existing manipulator structure or measuring range, and the transmission safety of the wafer is reduced due to the increased risk of motion interference. Disclosure of Invention The invention aims to provide a zonal track control method of a direct-drive manipulator aiming at an interference station. The invention mainly provides a zonal track control for narrow chambers and working conditions with interference stations, and has important significance for improving the safety and operability of wafer transmission. Under the condition that the working space of the interference station exists, the direct-drive manipulator can still ensure the transmission safety and operability under the condition that the mechanical structure is not changed and the measuring range of the manipulator is not shortened. The technical scheme adopted by the invention for realizing the purpose is that the method for controlling the partitioned track of the direct-drive manipulator aiming at the interference station comprises the following steps: Constructing an obstacle avoidance ar