CN-121973274-A - Flexible adsorption device integrated debugging tool assembly and integrated debugging method

CN121973274ACN 121973274 ACN121973274 ACN 121973274ACN-121973274-A

Abstract

The application relates to the technical field of mask plate transmission, in particular to an integrated debugging tool assembly of a flexible adsorption device and an integrated debugging method, wherein a convex plate part protrudes out of a main plate part from one side away from a bottom surface in a first direction, the main plate part comprises a first positioning surface and a second positioning surface, the first positioning surface is positioned on one side of the convex plate part in a second direction, the second positioning surface is positioned on the other side of the convex plate part, a plate surface of the convex plate part, which is away from the main plate part, is a shell positioning plate surface, the first positioning surface and the second positioning surface face are oriented the same and are parallel to the bottom surface, the first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction. The application aims at least one technical problem related to the background technology and provides an integrated debugging tool assembly and an integrated debugging method for a flexible adsorption device.

Inventors

LIU YING
GUAN HONGWU
LIN JIZHU
ZHAO DONGLEI
WANG XINYU

Assignees

北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所）

Dates

Publication Date: 20260505
Application Date: 20260205

Claims (10)

1. The utility model provides an integrated debugging frock subassembly of flexible adsorption equipment, its characterized in that, includes the frock bottom plate, the frock bottom plate includes mainboard portion and is fixed in the boss portion of mainboard portion, mainboard portion has the bottom surface, in first direction boss portion from deviating from one side protrusion in mainboard portion of bottom surface, mainboard portion includes first locating surface and second locating surface, in the second direction first locating surface is located one side of boss portion, the second locating surface is located the opposite side of boss portion, the face that deviates from of boss portion setting is the casing locating plate face, the casing locating plate face first locating surface with the second locating surface orientation is the same and all is parallel to the bottom surface, first direction perpendicular to the bottom surface, the second direction perpendicular to the first direction.
2. The flexible adsorption device integrated debugging tool assembly of claim 1, further comprising a first locating pin, wherein the first locating pin comprises a first pin body and a first stop block portion which are sequentially connected and coaxially arranged, the diameter of the first stop block portion is larger than that of the first pin body, and the first pin body is used for connecting a housing of the flexible adsorption device and a bearing fixing seat in the second direction.
3. The flexible adsorption device integrated debugging tool assembly of claim 2, further comprising a second locating pin, wherein the second locating pin comprises a second pin body and a second stop block part which are sequentially connected and coaxially arranged, the diameter of the second stop block part is larger than that of the second pin body, the diameter of the second pin body is smaller than that of the first pin body, the second pin body is used for connecting a shell of the flexible adsorption device and a bearing fixing seat in the second direction, and the second locating pin is used for being arranged below the first locating pin in the first direction.
4. The flexible adsorption device integrated debugging tool assembly of claim 3, further comprising a limit stop, wherein the limit stop comprises a third stop portion and an insert portion, one end of the insert portion is fixed to the third stop portion, the size of the insert portion in the thickness direction of the third stop portion is smaller than that of the third stop portion, the insert portion is located in the middle of the third stop portion, the thickness direction of the third stop portion is used for being parallel to the second direction, the insert portion is used for being inserted into a bearing fixing seat, and the third stop portion in the second direction is used for being abutted against the shell.
5. The flexible suction device integrated debugging tool assembly of claim 4, wherein the limit stop further comprises a fourth stop portion, the insert portion, the third stop portion and the fourth stop portion are connected in sequence, and the third stop portion is smaller than the fourth stop portion in size in the thickness direction of the stop portion.
6. The flexible suction device integrated debugging tool assembly of any one of claims 1-5, further comprising a dovetail block alignment tool comprising a slot body and a stopper portion fixed to the slot body, wherein a through slot is formed in the slot body, the stopper portion is located in the middle of the through slot, and the length direction of the stopper is parallel to the extending direction of the through slot.
7. The flexible suction device integrated debugging tooling assembly of claim 6, further comprising a dovetail block leveling block comprising a first plane and a second plane disposed away from each other, the dovetail block leveling block being configured to be placed in the housing, the first plane being configured to be engaged with a bottom surface of a dovetail block mounting plate, the second plane being configured to be engaged with a bottom wall of the housing.
8. The integrated debugging method for the flexible adsorption device is characterized by being realized by applying the integrated debugging tool assembly for the flexible adsorption device according to any one of claims 1 to 7, and comprises the following steps: placing the shell on the shell positioning plate surface to enable the bottom surface of the shell to be attached to the shell positioning plate surface; installing a bearing fixing seat on the shell; Placing two adsorption strip components on the first positioning surface, attaching the adsorption surfaces of the adsorption strips in the two adsorption strip components to the first positioning surface, and fixing the two adsorption strip components to the bearing fixing seat; And placing the other two adsorption strip components on the second positioning surface, enabling the adsorption surfaces of the adsorption strips in the two adsorption strip components to be attached to the second positioning surface, and fixing the two adsorption strip components on the shell.
9. The flexible adsorption device integrated debugging method according to claim 8, wherein the flexible adsorption device integrated debugging tool assembly further comprises a first positioning pin, a second positioning pin and a limit stop, the first positioning pin comprises a first pin body and a first stop part which are sequentially connected and coaxially arranged, the diameter of the first stop part is larger than that of the first pin body, the second positioning pin comprises a second pin body and a second stop part which are sequentially connected and coaxially arranged, the diameter of the second stop part is larger than that of the second pin body, the diameter of the second pin body is smaller than that of the first pin body, the limit stop comprises a third stop part and a plug part, one end of the plug part is fixed to the third stop part, the size of the plug part in the thickness direction of the third stop part is smaller than that of the third stop part, and the plug part is positioned in the middle of the third stop part; the bearing fixing seat is installed on the shell, and the bearing fixing seat comprises: sequentially penetrating the first pin body through the shell and a bearing mounting hole on the bearing fixing seat; sequentially penetrating the second pin body through the pin holes in the shell and the bearing fixing seat; Inserting the inserting piece part of the limit stop into the cross groove on the bearing fixing seat, and enabling the third stop part to be in abutting connection with the shell; correspondingly, after the two adsorption strip components are placed on the first positioning surface, the adsorption surfaces of the adsorption strips in the two adsorption strip components are attached to the first positioning surface, and the two adsorption strip components are fixed on the bearing fixing seat, the device further comprises: taking out the first locating pin from the bearing mounting hole, and mounting the cross torsion spring bearing in the bearing mounting hole; and taking the second locating pin out of the pin hole and separating the limit stop from the cross groove.
10. The integrated debugging method of the flexible adsorption device according to claim 8, wherein the integrated debugging tool assembly of the flexible adsorption device further comprises a dovetail block alignment tool and a dovetail block leveling block, the dovetail block alignment tool comprises a groove body part and a limiting block part fixed on the groove body part, a through groove is formed on the groove body part, the limiting block part is positioned in the middle of the through groove, and the dovetail block leveling block comprises a first plane and a second plane which are arranged in a deviating manner; Before the shell is placed on the shell positioning plate surface to enable the bottom surface of the shell to be attached to the shell positioning plate surface, the method further comprises: Placing the dovetail block in a mounting groove on a dovetail block fixing plate, and bonding the dovetail block with the wall of the mounting groove; Before the dovetail block is firmly adhered with the mounting groove, the dovetail block alignment fixture is arranged on the dovetail block, the side walls at two sides of the dovetail block fixing plate are in one-to-one corresponding contact with the inner walls at two sides of the groove body part, the limiting block part extends into the groove on the dovetail block, Disassembling the dovetail block alignment fixture from the dovetail block fixing plate and the dovetail block; Placing a dovetail block leveling block in the inner cavity of the shell, and attaching a second plane to the bottom wall of the shell; placing the dovetail block fixing plate in the inner cavity of the shell, and enabling the first plane to be attached to the bottom surface of the dovetail block fixing plate; the adjusting rod assembly is arranged on the end cover through a bolt and a nut, and the bolt and the nut are in pre-tightening connection; Covering the end cover on the top port of the shell, and abutting the top of the ceramic ball head of the adjusting rod assembly with the dovetail block; locking the bolt and the nut; And taking the dovetail block leveling block out of the shell.

Description

Flexible adsorption device integrated debugging tool assembly and integrated debugging method Technical Field The application relates to the technical field of mask plate transmission, in particular to an integrated debugging tool assembly of a flexible adsorption device and an integrated debugging method. Background The mask is an important material in the mask transmission process, is high in price and extremely easy to damage, and the exchange manipulator is responsible for carrying out material transmission between the mask table and the picking and placing manipulator. In the transmission process, the safety and reliability of the mask plate are required to be ensured. The flexible adsorption device (see application publication number CN118721159A, the invention name is adsorption device for the exchange plate manipulator and the invention patent application of the exchange plate manipulator) is taken as an important component part of the exchange plate manipulator, and plays a decisive role in the reliability and safety of materials in the transmission process. In the prior art, the coplanarity of the adsorption surface of the flexible adsorption device is poor, so that the adsorption performance and the sealing performance are poor, and the safety and the reliability of materials in the transmission process are poor. Disclosure of Invention The application aims at least one technical problem related to the background technology and provides an integrated debugging tool assembly and an integrated debugging method for a flexible adsorption device. In order to achieve the above purpose, the present application adopts the following technical scheme: The application provides an integrated debugging tool assembly of a flexible adsorption device, which comprises a tool bottom plate, wherein the tool bottom plate comprises a main plate part and a convex plate part fixed on the main plate part, the main plate part is provided with a bottom surface, the convex plate part protrudes out of the main plate part from one side deviating from the bottom surface in a first direction, the main plate part comprises a first positioning surface and a second positioning surface, the first positioning surface is positioned on one side of the convex plate part in a second direction, the second positioning surface is positioned on the other side of the convex plate part, the surface of the convex plate part deviating from the main plate part is a shell positioning surface, the first positioning surface and the second positioning surface face the same and are parallel to the bottom surface, the first direction is perpendicular to the bottom surface, and the second direction is perpendicular to the first direction. Optionally, the integrated debugging tool assembly of the flexible adsorption device further comprises a first positioning pin, wherein the first positioning pin comprises a first pin body and a first stop block part which are connected in sequence and coaxially arranged, the diameter of the first stop block part is larger than that of the first pin body, and the first pin body is used for connecting the shell of the flexible adsorption device and the bearing fixing seat in the second direction. Optionally, the integrated debugging tool assembly of the flexible adsorption device further comprises a second positioning pin, the second positioning pin comprises a second pin body and a second stop block part which are connected in sequence and coaxially arranged, the diameter of the second stop block part is larger than that of the second pin body, the diameter of the second pin body is smaller than that of the first pin body, the second pin body is used for being connected with a shell of the flexible adsorption device and a bearing fixing seat in the second direction, and the second positioning pin is used for being arranged below the first positioning pin in the first direction. Optionally, the integrated debugging tool assembly of the flexible adsorption device further comprises a limit stop, the limit stop comprises a third stop part and an inserting piece part, one end of the inserting piece part is fixed to the third stop part, the size of the inserting piece part in the thickness direction of the third stop part is smaller than that of the third stop part, the inserting piece part is located in the middle of the third stop part, the thickness direction of the third stop part is parallel to the second direction, the inserting piece part is used for being inserted into a bearing fixing seat, and the third stop part in the second direction is used for being abutted against the shell. Optionally, the limit stop further includes a fourth stop portion, the tab portion, the third stop portion, and the fourth stop portion are sequentially connected, and a size of the third stop portion in a thickness direction of the stop portion is smaller than a size of the fourth stop portion. Optionally, the integrated debugging tool