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CN-121973312-A - Processing method of special-shaped inner contour ceramic boat

CN121973312ACN 121973312 ACN121973312 ACN 121973312ACN-121973312-A

Abstract

The invention relates to a processing method of a special-shaped inner contour ceramic boat, which comprises the following steps of 1) proportioning, 2) filling prepared powder into a mould, compacting, demoulding to form a green body, wherein the mould comprises an outer flexible outer mould and an inner rigid core rod, 3) sintering the green body to form a mature blank, supporting both ends of the green body by using a jig during sintering, and 4) machining the mature blank to obtain a finished product. The method has the advantages that 1, hard tungsten steel is adopted as a core rod and is buried in material powder, the inner contour is guaranteed not to deform in the sintering process of the green body, 2, jigs matched with the shape and the size of the special-shaped inner contour are adopted to support the two ends of the green body in pairs, the outer dimension is guaranteed not to deform in the sintering process of the green body, 3, the jigs and the green body are prepared simultaneously in the same ingredients, the jig and the green body are guaranteed to shrink in the same proportion in the sintering process, and the sintering effect of the green body cannot be influenced by the jigs.

Inventors

  • Pei Ruomin
  • MA YUQI
  • CAI DEQI

Assignees

  • 杭州大和江东新材料科技有限公司

Dates

Publication Date
20260505
Application Date
20251212

Claims (10)

  1. 1. The processing method of the special-shaped inner contour ceramic boat is characterized by comprising the following steps of: 1) Proportioning; 2) Filling the prepared material powder into a mould, compacting, and demoulding to form a green body, wherein the mould comprises an external flexible outer mould and an internal rigid core rod; 3) Sintering the green body to form a mature blank, wherein both ends of the green body are supported by a jig during sintering; 4) And (5) machining the cooked blank to obtain a finished product.
  2. 2. The method for manufacturing a ceramic boat with a special-shaped inner contour according to claim 1, wherein the flexible outer mold is a cylindrical rubber barrel, and both ends of the flexible outer mold are provided with rubber covers.
  3. 3. The method for processing the special-shaped inner contour ceramic boat according to claim 2, wherein the rigid core rod is made of tungsten steel, the hardness is 89-95 HRA, and the outer contour roughness is less than Ra0.2.
  4. 4. A method of manufacturing a profiled inner contour ceramic boat as defined in claim 1, 2 or 3, wherein the flexible outer mold is covered with a screen.
  5. 5. The method for processing a special-shaped inner contour ceramic boat according to claim 4, wherein the mesh number of the screen is 18-35 mesh.
  6. 6. The method for machining the special-shaped inner contour ceramic boat according to claim 4, wherein a gap between the screen and the flexible outer mold is 0.5-2 mm.
  7. 7. A method of manufacturing a profiled inner contour ceramic boat as defined in claim 1, 2 or 3, wherein said jig has axial, radial and circumferential limits on the green body.
  8. 8. The method for machining the special-shaped inner contour ceramic boat according to claim 7, wherein one part of the jig is matched with the shape and the size of the inner contour of the end part of the green body and can be inserted into the inner contour of the end part of the green body, and the other part of the jig is provided with a plane in contact with a field, and the plane is parallel to the semi-cylindrical bottom surface of the inner contour of the green body.
  9. 9. A method of manufacturing a profiled inner contour ceramic boat as defined in claim 1, 2 or 3, wherein said jig is prepared simultaneously with the green body in the same ingredients.
  10. 10. A method of manufacturing a profiled inner contour ceramic boat as defined in claim 1, 2 or 3, wherein the pressure is transferred using a liquid medium when compacting the mold.

Description

Processing method of special-shaped inner contour ceramic boat Technical Field The invention relates to the field of ceramic processing, in particular to a processing method of a special-shaped inner contour ceramic boat. Background The ceramic boat is a common laboratory apparatus, is mainly used for high-temperature treatment, sintering, calcining or sample bearing, and has wide application in the fields of material science, chemistry, metallurgy and the like. In the application of preparing semiconductor equipment, due to the severe working condition environment, high-temperature, high-humidity and corrosive gases exist, and a ceramic boat is needed to meet the requirements of high hardness, high temperature resistance, non-conduction, stable chemical properties and the like. The special-shaped inner contour ceramic boat has circular outer contour, concentric semi-circle with the outer contour, long axial length, diameter-depth ratio up to 20 or more, and the boat body with two ends and the bottom surface of the semi-circle with inner contour. The special-shaped inner contour ceramic boat can optimize stress distribution, improve fatigue resistance, prevent corrosion, deformation or fracture of materials, prolong service life of parts and reduce equipment shutdown risk. However, the processing difficulty of the special-shaped inner contour ceramic boat is high. Chinese patent document CN208825552U discloses a tungsten rod ceramic boat in 2019, 5 and 7 days, wherein the ceramic boat uses a ceramic plate as a bottom plate, a semicircular groove with the diameter consistent with that of the tungsten rod is formed on the ceramic plate, 4 tungsten rod blanks can be placed on the semicircular groove, and the tungsten rod blanks are supported, so that deformation in the sintering process is avoided. In practical application, the ceramic boat of the specification has a special-shaped inner contour, and the diameter-depth ratio is large, so that the ceramic boat is easy to deform after sintering, and the lifting mode in the prior art cannot be simply used. Disclosure of Invention Based on the problems, the invention provides a processing method of the special-shaped inner contour ceramic boat, which can be used for processing the ceramic boat with the special-shaped inner contour and large diameter-depth ratio with low cost and high efficiency. In order to achieve the aim, the invention adopts the following technical scheme that the processing method of the special-shaped inner contour ceramic boat comprises the following steps: 1) Proportioning; 2) Filling the prepared material powder into a mould, compacting, and demoulding to form a green body, wherein the mould comprises an external flexible outer mould and an internal rigid core rod; 3) Sintering the green body to form a mature blank, wherein both ends of the green body are supported by a jig during sintering; 4) And (5) machining the cooked blank to obtain a finished product. Preferably, the flexible outer mold is a cylindrical rubber barrel, and both ends of the flexible outer mold are provided with rubber covers. Preferably, the rigid core rod is made of tungsten steel, the hardness is 89-95 HRA, and the outer contour roughness is smaller than Ra0.2. Preferably, the flexible outer mold is coated with a screen. Preferably, the mesh number of the screen is 18 to 35 mesh. Preferably, the gap between the screen and the flexible outer die is 0.5-2 mm. Preferably, the jig has axial, radial and circumferential limits on the green body. Preferably, one part of the jig is matched with the shape and the size of the inner contour of the end part of the green body and can be inserted into the inner contour of the end part of the green body, and the other part of the jig is provided with a plane which is in contact with a field and is parallel to the semi-cylindrical bottom surface of the inner contour of the green body. Preferably, the jig and the green body are prepared simultaneously for the same ingredients. Preferably, the pressure is transmitted using a liquid medium when compacting the mould. The beneficial effect of this scheme is: 1, adopting hard tungsten steel as a core rod, embedding the core rod into the powder, and ensuring that the inner contour is not deformed in the sintering process of the green body; and 3, the jig and the green body are prepared simultaneously, so that the jig and the green body shrink in the same proportion during sintering, and the sintering effect of the green body cannot be influenced by the jig. Drawings FIG. 1 is an axially exploded view of the mold of the present invention; FIG. 2 is an exploded view of the mold of the present invention; FIG. 3 is a schematic diagram of the mating relationship of a green body and a jig; Fig. 4 is a schematic structural view of the finished product. Wherein, the rubber cylinder 10, the rubber cover 11, the rigid core rod 12, the screen 13, Green body 20, jig 21, finished product 30, end hole