CN-121973315-A - Device and method for cold isostatic pressing forming of ceramic tube

CN121973315ACN 121973315 ACN121973315 ACN 121973315ACN-121973315-A

Abstract

The invention discloses a device and a method for cold isostatic pressing forming a ceramic tube, and aims to solve the defect that a porous ceramic tube cold isostatic pressing forming core rod is difficult to demould. The invention comprises a molding die sleeve and a plurality of core rods, wherein a plurality of lower positioning columns are arranged at the bottom of the molding die sleeve, a plurality of upper positioning columns are arranged at the top of the molding die sleeve, the lower ends of the core rods are connected with the lower positioning columns in a plug-in manner, the upper ends of the core rods are connected with the upper positioning columns in a plug-in manner, all the upper positioning columns are connected into a whole, and all the lower positioning columns are connected into a whole. The forming die sleeve is internally provided with a plurality of core rods, so that a porous ceramic tube is processed, all upper positioning columns are connected into a whole, all lower positioning columns are connected into a whole, the core rods are reliably positioned, the position deviation is difficult to occur, and the demoulding operation is convenient.

Inventors

Yin Baocheng
LIU YUPENG
YAO XIANGMIN

Assignees

杭州大和江东新材料科技有限公司

Dates

Publication Date: 20260505
Application Date: 20251223

Claims (10)

1. The device for cold isostatic pressing forming of the ceramic tube is characterized by comprising a forming die sleeve and a plurality of core rods, wherein a plurality of lower positioning columns are arranged at the bottom of the forming die sleeve, a plurality of upper positioning columns are arranged at the top of the forming die sleeve, the lower ends of the core rods are connected with the lower positioning columns in a plug-in manner, the upper ends of the core rods are connected with the upper positioning columns in a plug-in manner, all the upper positioning columns are connected into a whole, and all the lower positioning columns are connected into a whole.
2. The apparatus for cold isostatic pressing of ceramic tube as defined in claim 1, wherein a bottom cover is provided at the bottom of the forming die sleeve, a lower insertion hole is provided on the bottom cover to be fitted with the lower positioning column, and the lower positioning column is inserted into the lower insertion hole.
3. The apparatus for cold isostatic pressing of ceramic tube as defined in claim 1, wherein the top of the forming die sleeve is detachably connected with a closing plug, an upper insertion hole which is matched with the upper positioning column is arranged on the closing plug, and the upper positioning column is inserted in the upper insertion hole.
4. A cold isostatic pressing arrangement for ceramic tubes as defined in claim 1 wherein the bottom and top of the forming die sleeve are sealed with a lower seal sleeve and an upper seal sleeve, respectively.
5. The apparatus for cold isostatic pressing of ceramic tubes as recited in claim 1, wherein the core rod, the upper positioning post and the lower positioning post are all metal pieces.
6. The apparatus for cold isostatic pressing of ceramic tubes as claimed in any one of claims 1-5, wherein all upper positioning columns are connected as a whole by a top plate and all lower positioning columns are connected as a whole by a bottom plate, and wherein the top plate and the bottom plate are connected and positioned by a connecting frame.
7. The apparatus of claim 6, wherein the bottom plate and the top plate are each provided with at least two connecting posts, the connecting frame comprises an upper connecting rod and a lower connecting rod, the upper connecting rod and the lower connecting rod are connected through a supporting rod, the connecting posts on the bottom plate are fixedly connected with the lower connecting rod, and the connecting posts on the top plate are fixedly connected with the upper connecting rod.
8. A method for processing ceramic tube, characterized by using the device for cold isostatic pressing ceramic tube according to any one of claims 1-7, comprising the steps of S1, loading a core rod into a forming die sleeve, connecting the lower end of the core rod with a lower positioning column, S2, filling powder into the forming die sleeve, vibrating and compacting, S3, connecting a sealing plug at the upper end opening of the forming die sleeve, connecting an upper connecting column at the upper end of the core rod, connecting the upper connecting column to the sealing plug, S4, loading the forming die sleeve into a cold isostatic press for pressing, S5, and demoulding.
9. The method for processing ceramic tube according to claim 8, wherein before filling powder in S2, a positioning ring is sleeved on the inner wall of the upper end of the forming die sleeve, positioning seats corresponding to the core rods are arranged on the inner wall of the positioning ring, positioning holes are arranged on the positioning seats, the upper end of the core rods are inserted into the positioning holes, a plurality of elastic clamping seats are connected on the positioning ring at intervals in the circumferential direction, and the elastic clamping seats are clamped on the outer wall of the forming die sleeve.
10. The method of claim 8, wherein at S3, all upper positioning posts are connected to form an integral top plate fastening connection upper link, all lower positioning posts are connected to form an integral bottom plate fastening connection lower link, and the upper link and the lower link are connected by a support bar.

Description

Device and method for cold isostatic pressing forming of ceramic tube Technical Field The invention relates to a ceramic tube processing technology, in particular to a device and a method for cold isostatic pressing forming of a ceramic tube. Background At present, ceramic tubes are basic and key functional components in semiconductor manufacturing, and are commonly used in the scenes of high-temperature process furnace tubes, wafer boats, components in etching processes, thermal processing, packaging and the like. Most of common ceramic tubes are of a single-hole structure, and after cold isostatic pressing, demolding is relatively easy, such as a cold isostatic pressing mold for producing a smoke purifying ceramic tube disclosed in China patent application No. 2018214764550. In some scenes, porous ceramic tubes are needed, and in the cold isostatic pressing process, a plurality of core rods are needed to be arranged, and the core rods and a die cavity are eccentrically arranged, so that the core rods are stressed unevenly in the circumferential direction, the positions of the core rods are easy to deviate, and the demolding is difficult. Disclosure of Invention In order to overcome the defects, the invention provides a device and a method for cold isostatic pressing forming of a ceramic tube, which can realize the forming of a porous ceramic tube and is convenient to demold. In order to solve the technical problems, the device for cold isostatic pressing ceramic tube comprises a forming die sleeve and a plurality of core rods, wherein a plurality of lower positioning columns are arranged at the bottom of the forming die sleeve, a plurality of upper positioning columns are arranged at the top of the forming die sleeve, the lower ends of the core rods are connected with the lower positioning columns in a plug-in manner, the upper ends of the core rods are connected with the upper positioning columns in a plug-in manner, all the upper positioning columns are connected into a whole, and all the lower positioning columns are connected into a whole. And installing a plurality of core rods in the molding die sleeve, filling powder into the molding die sleeve, and then performing cold isostatic pressing molding to process the porous ceramic tube. All the upper positioning columns are connected into a whole, and all the lower positioning columns are connected into a whole, so that in the cold isostatic pressing process, the core rod is reliably positioned, the position deviation is not easy to occur, and the demolding operation is convenient. Preferably, a bottom cover is arranged at the bottom of the forming die sleeve, a lower jack matched with the lower positioning column is arranged on the bottom cover, and the lower positioning column is inserted into the lower jack. The lower locating column is inserted into the lower jack on the bottom cover, and the locating is accurate and reliable. Preferably, the top of the molding die sleeve is detachably connected with a closing plug, an upper jack matched with the upper positioning column is arranged on the closing plug, and the upper positioning column is inserted into the upper jack. The sealing plug is connected to the top of the forming die sleeve, so that the forming die sleeve is sealed, and the subsequent cold isostatic pressing operation is facilitated. The upper positioning column is inserted into the upper insertion hole on the sealing plug, and the positioning is accurate and reliable. Preferably, the bottom and the top of the forming die sleeve are respectively provided with a lower sealing sleeve and an upper sealing sleeve. The arrangement of the lower sealing sleeve and the upper sealing sleeve greatly improves the sealing performance. Preferably, the core rod, the upper positioning column and the lower positioning column are all metal pieces. The metal material has good structural strength, is not easy to deform, and is convenient for cold isostatic pressing and demoulding operation. Preferably, all the upper positioning columns are connected into a whole through a top plate, all the lower positioning columns are connected into a whole through a bottom plate, and the top plate and the bottom plate are connected and positioned through a connecting frame. The connecting frame connects the top plate and the bottom plate together, so that the relative positions of the upper positioning column and the lower positioning column are stable, the mutual positions of the upper positioning column and the lower positioning column cannot be changed, the stability of the core rod is ensured, the core rod is prevented from deforming and shifting, and the demolding operation of the core rod is facilitated. Preferably, the bottom plate and the top plate are provided with at least two connecting columns, the connecting frame comprises an upper connecting rod and a lower connecting rod, the upper connecting rod is connected with the lower connecting rod through a support