CN-121973341-A - Quartz tube processing jig

Abstract

The invention discloses a quartz tube processing jig which comprises a graphite paste block, wherein the graphite paste block comprises a shaping surface which is attached to a quartz tube, an adjusting seat is connected to the graphite paste block, an extension rotating rod is rotatably connected to the adjusting seat, a limit sleeve rod is sleeved on the extension rotating rod, the adjusting seat comprises an adjusting cover, a plurality of limit holes are formed in the adjusting cover, a communication gap is formed between each limit hole, the width of the communication gap is larger than that of the extension rotating rod, the width of the communication gap is smaller than that of a limit sleeve rod, and the limit sleeve rod can axially slide relative to the extension rotating rod and can be clamped with the limit holes. The invention provides a quartz tube processing jig which can be used for rapidly carrying out angle adjustment on a holding part and a graphite paste block, and can be used for rapidly locking and unlocking operations, and meanwhile, the stability after angle adjustment can be ensured.

Inventors

• Xiang Hanli
• WU RANHONG
• YANG JUN

Assignees

• 杭州大和热磁电子有限公司

Dates

Publication Date

20260505

Application Date

20251229

Claims (10)

1. 1. The utility model provides a quartz capsule processing tool, its characterized in that, including graphite subsides piece, graphite subsides piece is including the shaping face of laminating with quartz capsule, be connected with the regulation seat on the graphite subsides piece, it is connected with the extension bull stick to rotate on the regulation seat, the spacing loop bar has been cup jointed on the extension bull stick, the regulation seat is including adjusting the cover, be provided with a plurality of spacing holes on the regulation cover, respectively be provided with the intercommunication clearance between the spacing hole, the intercommunication clearance width is greater than extension bull stick width, the intercommunication clearance width is less than spacing loop bar width, spacing loop bar can prolong bull stick axial slip relatively and can the block connect spacing hole.
2. 2. The quartz tube machining jig according to claim 1, wherein the adjusting seat is rotatably connected with a rotating shaft, the rotating shaft is connected with an extension rotating rod, and the limiting holes are circumferentially distributed with the rotating center of the rotating shaft as the center of circle.
3. 3. The quartz tube processing jig of claim 1, wherein the stop hole is in clearance fit with a stop collar bar, and wherein the stop collar bar is in clearance fit with an extension bar.
4. 4. The quartz tube machining jig of claim 1, wherein the limit sleeve rod is provided with a pushing handle on one side far away from the adjusting seat, the extension rotating rod is provided with a fixed handle on one side far away from the adjusting seat, the pushing handle comprises a hollowed-out part, and the fixed handle is located in the hollowed-out part.
5. 5. The quartz tube tooling jig of claim 1, wherein the elongated rotating rod comprises a fixed end block positioned in the adjustment seat, the stop collar comprises a stop end block positioned adjacent one side of the fixed end block, and a return spring is disposed between the fixed end block and the stop end block.
6. 6. The quartz tube machining jig of claim 5, wherein the return spring is sleeved on the extension turning rod, and the diameter of the return spring is smaller than the width of the communication gap.
7. 7. The quartz tube machining jig of claim 5, wherein the fixed end block and the limiting end block are provided with sinking grooves which are connected with the return spring in a clamping manner, and when the return spring is compressed to the limit, the height of the return spring is smaller than the sum of the heights of the two sinking grooves.
8. 8. The quartz tube machining jig of claim 1, wherein the extension turning rod comprises a fixed end block positioned in the adjusting seat, the limit sleeve rod comprises a limit end block close to one side of the fixed end block, a fixed latch is arranged on one side of the fixed end block close to the limit end block, and a limit latch is arranged on one side of the limit end block close to the fixed end block.
9. 9. The quartz tube processing jig of claim 8, wherein the fixed latch and/or the limiting latch are provided with mating guide surfaces.
10. 10. The quartz tube processing jig according to any one of claims 1 to 9, wherein base plates are arranged on two sides of the adjusting base, connecting holes are formed in the base plates, and bolts connected with the graphite paste blocks are arranged on the connecting holes.

Description

Quartz tube processing jig Technical Field The invention relates to the technical field of quartz tube processing, in particular to a quartz tube processing jig. Background With the development of the semiconductor industry, the requirements on the dimensional accuracy of quartz pieces required by equipment are higher and higher. The quartz tube product is used as a large cavity container in the equipment, the inside of the large cavity container is filled with process gas, and in the production operation process, the influence of the tube sealing arc part on the process gas flow is large, the performance of the equipment is influenced, so that the dimensional accuracy of the arc surface of the tube sealing part is required to be improved, and the product design requirement is met. For example, bulletin number "CN120622797a", a "quartz tube bending device and method" is disclosed, including the workstation, the workstation bottom is close to four corners department and installs the landing leg, the workstation top is close to right side and installs fixed frame two, fixed frame two inner wall is connected with the connecting axle one through the bearing frame rotation, connecting axle one outer wall fixed cover is equipped with the V type and supports the roller, be provided with the clearance part that is used for clearing up the V type and supports the roller on the fixed frame two, set up two sets of actuating mechanism that are used for crooked quartz tube on the workstation. However, in practical application, the fixture is required to be used for trimming the arc area of the bent pipe, and because manual trimming is required, the arc positions of all positions are different, the use habits of all staff are different, and the trimming precision and efficiency can be influenced by a single holding angle. Disclosure of Invention Aiming at the problem that the angle of the processing jig is inconvenient to adjust when the quartz tube is trimmed in the prior art, the invention provides the quartz tube processing jig which can rapidly adjust the angle of a holding part and a graphite patch, can rapidly lock and unlock the operation and can ensure the stability after angle adjustment. In order to achieve the above purpose, the present invention adopts the following technical scheme. The utility model provides a quartz capsule processing tool, including graphite subsides piece, graphite subsides piece is including the shaping face of laminating with quartz capsule, be connected with the regulation seat on the graphite subsides piece, it is connected with the extension bull stick to rotate on the regulation seat, cup jointed spacing loop bar on the extension bull stick, the regulation seat is including adjusting the cover, it is provided with a plurality of spacing holes on the cover to adjust, respectively be provided with the intercommunication clearance between the spacing hole, the intercommunication clearance width is greater than extension bull stick width, the intercommunication clearance width is less than spacing loop bar width, spacing loop bar can prolong bull stick axial sliding relatively and can block connection spacing hole. According to the application, the graphite sticking block can be attached to the arc area on the quartz tube, the attaching area is a shaping surface, the shape of the shaping surface is required to be matched with the shape of the trimming, and further the trimming precision of the quartz tube is ensured, when a plurality of arc areas exist on the quartz tube and are required to be trimmed, the positions of the arc areas are different, so that the angle of a worker holding a processing jig can be changed, the force acting direction of the worker can be correspondingly changed, meanwhile, the operation modes of the workers are also different from person to person, the relative connection angle of the handle and the graphite sticking block is required to be adjusted in the using process, the complicated adjustment step is required in the processing process if a conventional bolt-nut fastening mode is adopted, and meanwhile, the connection stability between the handle and the graphite sticking block is required to be realized through the tight connection relation between the nut and the bolt, and if the bolt-nut is loose, the trimming precision is influenced. Therefore, aiming at the problems, the adjusting seat is arranged on the graphite patch, the adjusting seat is rotationally connected with the extension rotating rod, and the extension rotating rod can enable a worker to remotely operate the graphite patch to repair, so that the arc area is prevented from being burnt; the adjusting seat is provided with an adjusting cover, a plurality of limiting holes are formed in the adjusting cover, a certain distance can be reserved between the limiting holes, the limiting holes can be adjacently arranged, overlapping areas can be reserved between the limiting holes, the limiting hol