CN-121973344-A - Power-off control device for wafer chuck positioning mechanism and wafer cutting device

CN121973344ACN 121973344 ACN121973344 ACN 121973344ACN-121973344-A

Abstract

The invention discloses a power-off control device and a wafer cutting device for a wafer chuck positioning mechanism, wherein the power-off control device comprises an emergency power supply and a control unit, the wafer chuck positioning mechanism comprises a vacuum chuck and a vacuumizing system, the emergency power supply supplies power to the control unit when an external power supply is powered off, the control unit monitors the external power supply, starts power-off emergency control when the external power supply is abnormally powered off, controls the vacuum chuck to keep an air suction state, monitors and judges whether a product exists on the vacuum chuck, controls the vacuum chuck to keep the air suction state continuously when the vacuum chuck has the product, and controls the vacuum chuck to finish the air suction state when the vacuum chuck does not have the product. According to the invention, the emergency power supply is used for controlling the vacuum chuck to keep the air suction state only when a product exists on the vacuum chuck, so that the energy is effectively saved, and the small-capacity energy storage equipment can be used as the emergency power supply, so that the cost is effectively saved.

Inventors

Han Chaolu
LIU KUNQI
ZHONG HAN
FU YU
LI QUAN
GUO WEIGANG
LIU FUQI

Assignees

广东泰来封测科技有限公司

Dates

Publication Date: 20260505
Application Date: 20251230

Claims (10)

1. A outage controlling means for wafer sucking disc positioning mechanism, wafer sucking disc positioning mechanism includes vacuum chuck and evacuating system, vacuum chuck is used for adsorbing the wafer, evacuating system connects vacuum chuck's evacuation hole, and right under the control of vacuum control valve vacuum chuck evacuation or stop evacuating, its characterized in that: The power-off control device comprises an emergency power supply and a control unit, wherein the emergency power supply supplies power to the control unit when the external power supply is powered off, the control unit monitors the external power supply, starts power-off emergency control when the external power supply is powered off abnormally, controls the vacuum chuck to keep in an air suction state, monitors and judges whether a product exists on the vacuum chuck, controls the vacuum chuck to keep in the air suction state when the product exists on the vacuum chuck, and controls the vacuum chuck to finish the air suction state when the product does not exist on the vacuum chuck.
2. The power-down control device for a wafer chuck positioning mechanism as set forth in claim 1, wherein said control unit monitors a power-down of an external power source and an energized state of said vacuum control valve, and initiates a power-down emergency control when the external power source and said vacuum control valve are simultaneously powered down.
3. The power-down control device for a wafer chuck positioning mechanism as set forth in claim 2, wherein the control unit comprises a first detection circuit that monitors an external power source and outputs a first signal to the control circuit when the external power source is powered down, a second detection circuit that monitors an energized state of the vacuum control valve and outputs a second signal to the control circuit when the vacuum control valve is powered down, and a control circuit that initiates power-down emergency control when the control circuit is simultaneously powered down by the first signal and the second signal.
4. The apparatus of claim 3, wherein the first detection circuit comprises a first relay, the vacuum control valve comprises a coil for controlling the on/off of the valve and a contact switch associated with the coil, the second detection circuit comprises a contact switch of the vacuum solenoid valve, the coil of the first relay is connected between two phases of the external power supply, the contact switch of the first relay is connected with a first input end of the control circuit, the contact switch of the vacuum solenoid valve is connected with a second input end of the control circuit, and the control circuit starts the power-off emergency control when the coil of the first relay and the coil of the vacuum solenoid valve are simultaneously disconnected.
5. The power-off control device for a wafer chuck positioning mechanism according to claim 1, further comprising a bypass vacuumizing mechanism, wherein the bypass vacuumizing mechanism comprises a vacuum generator and an emergency control valve, the vacuum generator is connected with a vacuumizing hole of the vacuum chuck and vacuumizes or stops vacuuming the vacuum chuck under the control of the emergency control valve, the control unit is connected with the emergency control valve and controls the valve of the emergency control valve to be conducted after power-off emergency control is started so as to enable the vacuum chuck to keep in a suction state, the control unit also monitors whether a product exists on the vacuum chuck, controls the valve of the emergency control valve to be continuously conducted so as to enable the vacuum chuck to keep in the suction state when the product exists on the vacuum chuck, and controls the valve of the emergency control valve to be closed so as to enable the vacuum chuck to end in the suction state when the product does not exist on the vacuum chuck.
6. The power-off control device for the wafer chuck positioning mechanism according to claim 5, wherein the emergency control valve is an electromagnetic valve, the control unit comprises a control circuit and an intermediate relay, a normally open contact of the intermediate relay and a coil of the emergency control valve are connected in series between the positive electrode and the negative electrode of a power supply end of the control unit, and the control circuit is connected with the coil of the intermediate relay so as to control the opening and closing of the emergency control valve by controlling the on-off of the coil of the intermediate relay.
7. The power-off control device for a wafer chuck positioning mechanism as recited in claim 1, further comprising a vacuum sensor for detecting a vacuum value on said vacuum chuck, wherein said control unit controls said vacuum chuck to maintain a suction state after a power-off emergency control is started, and determines whether a product is present on said vacuum chuck based on a signal detected by said vacuum sensor after said vacuum chuck maintains a suction state.
8. The power-off control device for a wafer chuck positioning mechanism as set forth in claim 7, wherein said vacuum sensor outputs a vacuum signal to said control unit when detecting a vacuum value equal to or greater than a predetermined value, said control unit determining that a product is present on said vacuum chuck when said vacuum signal is received.
9. The power-off control device for a wafer chuck positioning mechanism as set forth in claim 1, wherein said control unit controls said vacuum chuck to end a suction state after a predetermined time period has elapsed when no product is present on said vacuum chuck.
10. The wafer cutting device is characterized by comprising a wafer chuck positioning mechanism, a cutting mechanism and a power-off control device, wherein the wafer chuck positioning mechanism comprises a vacuum chuck and a vacuumizing system, the vacuumizing system is connected with a vacuumizing hole of the vacuum chuck and vacuumizes or stops vacuuming the vacuum chuck under the control of a vacuum control valve, the vacuum chuck is a cutting table of the cutting mechanism and is used for adsorbing a wafer, the cutting mechanism is used for cutting the wafer on the vacuum chuck, and the power-off control device is the power-off control device for the wafer chuck positioning mechanism according to any one of claims 1-9; The external power supply is connected with the wafer chuck positioning mechanism and the cutting mechanism and supplies power for the wafer chuck positioning mechanism and the cutting mechanism, the external power supply is connected with the emergency power supply, the emergency power supply transmits the power of the external power supply to the power-off control device to supply power for the power-off control device when the external power supply is powered on normally, and the energy storage battery of the external power supply is controlled to supply power for the control unit when the external power supply is powered off.

Description

Power-off control device for wafer chuck positioning mechanism and wafer cutting device Technical Field The invention relates to the field of semiconductor manufacturing, in particular to a power-off control device for a wafer chuck positioning mechanism and a wafer cutting device. Background In the semiconductor manufacturing process, if vacuum loss (such as equipment outage, abnormal on-off and the like) occurs during wafer cutting, the wafer position deviation and the cutting path deformation can be caused, so that the problems of deviation cutting, missing cutting, chip damage and the like are caused, and the yield is directly influenced. For this core problem, it is necessary to avoid quality problems caused by such abnormalities by means of a vacuum holding device. In the prior art, the external power supply is generally only switched to the UPS for accidental power failure, however, the electric quantity of the UPS is closely related to the cost of the UPS, if the UPS is used for completely replacing the external power supply during power failure, a high-capacity UPS with high cost is needed, and if the power failure time is too long, the long-time uninterrupted power failure switching is difficult to ensure. Therefore, there is an urgent need for a power-off control device that can solve the above problems. Disclosure of Invention The invention aims to provide a power-off control device and a wafer cutting device for a wafer chuck positioning mechanism, which can effectively save energy by controlling a vacuum chuck to keep a suction state by using an emergency power supply only when a product exists on the vacuum chuck, so that the invention can use a small-capacity energy storage device as an emergency power supply and effectively save cost. In order to achieve the above purpose, the invention provides a power-off control device for a wafer chuck positioning mechanism, which comprises a vacuum chuck and a vacuumizing system, wherein the vacuum chuck is used for adsorbing a wafer, the vacuumizing system is connected with a vacuumizing hole of the vacuum chuck and vacuumizes or stops vacuumizing the vacuum chuck under the control of a vacuum control valve, the power-off control device comprises an emergency power supply and a control unit, the emergency power supply supplies power to the control unit when the external power supply is powered off, the control unit monitors the external power supply, starts power-off emergency control when the external power supply is abnormally powered off, controls the vacuum chuck to keep in a suction state, monitors and judges whether a product exists on the vacuum chuck, controls the vacuum chuck to keep in the suction state when the vacuum chuck has the product, and controls the vacuum chuck to end in the suction state when the vacuum chuck does not have the product. Preferably, the control unit monitors the power failure of the external power supply and the power-on state of the vacuum control valve, and starts power failure emergency control when the external power supply and the vacuum control valve are simultaneously powered off. The scheme prevents the power-off emergency control from being started during normal restarting and prevents the power-off emergency control from being triggered by mistake. Specifically, the control unit comprises a first detection circuit, a second detection circuit and a control circuit, wherein the first detection circuit monitors an external power supply and outputs a first signal to the control circuit when the external power supply is powered off, the second detection circuit monitors the power-on state of the vacuum control valve and outputs a second signal to the control circuit when the vacuum control valve is powered off, and the control circuit starts power-off emergency control when the control circuit is simultaneously powered on by the first signal and the second signal. More specifically, the first detection circuit comprises a first relay, the vacuum control valve comprises a coil for controlling the on-off of the valve and a contact switch which is in related action with the coil, the second detection circuit comprises a contact switch of the vacuum electromagnetic valve, the coil of the first relay is connected between two phases of wires of an external power supply, the contact switch of the first relay is connected with a first input end of the control circuit, the contact switch of the vacuum electromagnetic valve is connected with a second input end of the control circuit, and the control circuit starts power-off emergency control when the coil of the first relay and the coil of the vacuum electromagnetic valve are simultaneously disconnected. The power-off control device comprises a vacuum suction unit, a control unit and a control unit, wherein the vacuum suction unit is used for controlling the vacuum suction unit to open or close the vacuum suction unit, the control unit is used for controlling the emergen