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CN-121974553-A - Quartz tube fine burning device and fine burning method

CN121974553ACN 121974553 ACN121974553 ACN 121974553ACN-121974553-A

Abstract

The invention discloses a quartz tube finish burning device and a finish burning method, comprising a device main body provided with a universal fixing clamp assembly, wherein an external welding gun mechanism with triaxial displacement and angle adjustment is arranged on the device main body, an internal welding gun mechanism with triaxial displacement and angle adjustment is arranged outside the device main body, the internal welding gun mechanism extends to the inner side of the external welding gun mechanism along the axial direction of the device main body to form an internal and external welding gun synchronous finish burning mechanism, the internal welding gun mechanism comprises an internal welding gun adjusting mechanism and an internal welding gun assembly, and the external welding gun mechanism comprises an external welding gun adjusting mechanism and an external welding gun assembly. The quartz tube fine burning device can realize synchronous automatic fine burning of the inner wall and the outer wall of the quartz tube, avoids the occurrence of the phenomenon that the quartz tube is heated and deformed or not burnt out due to the out-of-sync of the inside and the outside through synchronous operation of the inner welding gun and the outer welding gun, and effectively improves the precision and the production efficiency of fine burning.

Inventors

  • WANG ZHENLI
  • SUN CHAO
  • GENG JIAN
  • WU RANHONG
  • YANG JUN

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251209

Claims (10)

  1. 1. A quartz tube finish burning device comprises a device main body (1) provided with a universal fixing clamp assembly and is characterized in that a triaxial displacement and angle adjustment type external welding gun mechanism (3) is arranged on the device main body (1), a triaxial displacement and angle adjustment type internal welding gun mechanism (2) is arranged outside the device main body, the internal welding gun mechanism (2) extends to the inner side of the external welding gun mechanism (3) along the axial direction of the device main body to form an internal and external welding gun synchronous finish burning mechanism, the internal welding gun mechanism (2) comprises an internal welding gun adjusting mechanism (5) and an internal welding gun assembly (6), and the external welding gun mechanism (3) comprises an external welding gun adjusting mechanism (7) and an external welding gun assembly (8).
  2. 2. The quartz tube fine burning device according to claim 1, wherein the internal welding gun adjusting mechanism (5) is arranged on an adjusting gun rack mechanism (4), and the internal welding gun assembly (6) realizes adjustment of triaxial directions and angles through the adjusting gun rack mechanism (4) and the internal welding gun adjusting mechanism (5).
  3. 3. The quartz tube fine burning device according to claim 1, wherein the internal welding gun adjusting mechanism (5) comprises a Y-axis screw rod module (51), an X-axis screw rod module (52) arranged on the Y-axis screw rod module (51), and an angle rotating mechanism (53) arranged on the X-axis screw rod module (52).
  4. 4. The quartz tube fine burning device according to claim 3, wherein the Y-axis screw module (51) comprises a Y-axis screw driving device (511), a Y-axis screw assembly (512) and a Y-direction digital displacement display (513), and the X-axis screw module (52) comprises an X-axis screw driving device (521), an X-axis screw assembly (522) and an X-direction digital displacement display (523).
  5. 5. The quartz tube fine burning device according to claim 3, wherein the angle rotating mechanism (53) comprises a rotating driving mechanism (532) and an inner welding gun rotating support (533) driven to rotate by the rotating driving mechanism, the rotating driving mechanism (532) adopts a worm and gear driving mechanism, and a worm wheel in the worm and gear driving mechanism is arranged on the inner welding gun rotating support (533).
  6. 6. The quartz tube fine burning device according to claim 1, wherein the inner welding gun assembly (6) comprises an inner oxygen tube (61), an inner hydrogen tube (62) and a plurality of inner welding guns (63) which are distributed in an arc shape.
  7. 7. The quartz tube fine burning device according to any one of claims 1 to 6, wherein the external welding gun adjusting mechanism (7) comprises a Y-direction sliding adjusting mechanism (71) arranged on the device main body (1), a Z-direction lifting mechanism (73) arranged on the Y-direction sliding adjusting mechanism (71), an X-direction adjusting mechanism (72) arranged on the Z-direction lifting mechanism (73), and a rotation angle adjusting mechanism (74).
  8. 8. The quartz tube fine burning device according to claim 7, wherein the Y-direction sliding adjusting mechanism (71) comprises a Y-direction adjusting driving assembly (711) and a Y-direction adjusting sliding seat (712), the Z-direction lifting mechanism (73) comprises a vertical lifting guide rod (731) arranged on the Y-direction adjusting sliding seat (712), a lifting support plate (732) connected to the vertical lifting guide rod (731) and a Z-direction lifting driving mechanism (733), the X-direction adjusting mechanism (72) comprises a driving part (721), a transmission part (722) connected with the driving part and a pair of transmission seats (723) oppositely arranged on the transmission part (722), and the rotating angle adjusting mechanism (74) comprises an angle adjusting driving part (741), an angle adjusting screw rod (742) connected with the angle adjusting driving part (741) and an angle adjusting gear arranged inside the transmission seats.
  9. 9. The quartz tube finishing burner apparatus of any of claims 1 to 6, wherein said outer torch assembly (8) comprises a plurality of outer torches (81) and torch mounts (82) arranged in an arcuate configuration.
  10. 10. A finish burning method using the quartz tube finish burning device according to any one of claims 1 to 9, characterized by comprising the steps of: S1, mounting a quartz round tube product to be subjected to fine burning on a device main body; S2, installing an internal welding gun mechanism, extending an internal welding gun assembly into a quartz round tube product to be burned, and adjusting the Y-direction, X-direction and Z-direction positions and angles of an internal welding gun adjusting mechanism; S3, synchronously adjusting the Y-direction, X-direction and Z-direction positions and circumferential angular movements of the external welding gun assembly through an external welding gun adjusting mechanism 7; s4, enabling the inner welding gun assembly and the outer welding gun assembly to be positioned at corresponding positions of the inner wall and the outer wall of the quartz round tube product to be subjected to fine burning; S5, synchronously starting the inner welding gun assembly and the outer welding gun assembly to realize synchronous finish burning of the inner wall and the outer wall of the quartz round tube product to be finish burned.

Description

Quartz tube fine burning device and fine burning method Technical Field The invention relates to the technical field of semiconductor devices, in particular to a quartz tube fine burning device and a fine burning method. Background With the rapid development of the chip industry, the semiconductor device industry has developed rapidly. Quartz glass products are also increasingly demanded as important components in semiconductor devices. When the quartz big tube is finely burned on the device, manual adjustment of the welding gun is time-consuming and labor-consuming, production efficiency is affected, manual adjustment cannot be quantified, staff is more complex to match, and the situation that heating deformation or incomplete burning still occurs in multi-person matching is easy to occur. In order to realize automatic operation, the prior art, such as a Chinese patent document CN118343979A, discloses a full-automatic vertical type fine burning device for quartz tubes, which comprises a bottom plate and a first support frame arranged on the left side of the bottom plate, wherein a second support frame is arranged at the upper end of the first support frame, a third support frame is arranged on the right side of the bottom plate, a third support block is arranged in the third support frame, and the full-automatic vertical type fine burning device further comprises a first support block which is arranged in the second support frame, a first connecting disc is arranged in the first support block, a first motor is arranged on the right side of the first connecting disc, connecting teeth are arranged on the rear side of the first connecting disc, a guide block is arranged on the right side of the second support frame, and a second support block is arranged on the right side of the first support block. This full-automatic vertical smart equipment of burning of quartz tube is convenient for carry out spacing fixedly to the quartz tube in the in-process of using, guarantees the security of the smart processing of burning of device, is convenient for carry out the lift adjustment to calcining rifle simultaneously, improves the calcining efficiency of device, has better suitability. However, the technical scheme can only calcine the outer wall of the quartz tube, but cannot realize synchronous fine calcination of the inner wall and the outer wall. Aiming at the problems of complex operation and heating deformation or incomplete burning in the existing quartz tube fine burning process, it is necessary to design a quartz tube fine burning device, which can effectively solve the problem that an internal welding gun cannot quantitatively and uniformly cooperate with an external welding gun when the existing quartz tube is fine burned. Disclosure of Invention The invention aims to solve the problems that when the existing quartz tube is finely burned on equipment, an internal welding gun cannot be quantitatively matched with an external welding gun at a constant speed, so that the finely burning effect is poor, and the like. The quartz tube precision burning device comprises a device main body provided with a universal fixing clamp assembly, wherein an external welding gun mechanism with triaxial displacement and angle adjustment is arranged on the device main body, an internal welding gun mechanism with triaxial displacement and angle adjustment is arranged outside the device main body, the internal welding gun mechanism extends to the inner side of the external welding gun mechanism along the axial direction of the device main body to form an internal and external welding gun synchronous precision burning mechanism, the internal welding gun mechanism comprises an internal welding gun adjusting mechanism and an internal welding gun assembly, and the external welding gun mechanism comprises an external welding gun adjusting mechanism and an external welding gun assembly. This quartz capsule burns device thoroughly, through setting up one can adjust in triaxial direction and circumference angle's outside welder mechanism and can adjust in triaxial direction and circumference angle's inside welder mechanism, form inside and outside welder synchronous smart mechanism of burning through inside welder mechanism and outside welder, can realize the synchronous automatic smart fever to quartz capsule inner wall and outer wall, through the synchronous operation of inside and outside welder, the emergence of quartz capsule heating deformation or the phenomenon of not burning out that leads to because of inside and outside dyssynchrony has been avoided, the commonality mounting fixture subassembly can realize the clamp fastening to the quartz capsule of various different specifications, thereby can realize the inside and outside synchronous smart fever of the quartz capsule of various specifications, precision and production efficiency of smart fever have effectively been improved, moreover, the steam generator is simple in structu