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CN-121974692-A - Y (Y)2O3Preparation method and application of spray powder

CN121974692ACN 121974692 ACN121974692 ACN 121974692ACN-121974692-A

Abstract

The invention relates to a preparation method and application of Y 2 O 3 spraying powder, wherein the preparation method comprises the following steps of S1, mixing Y 2 O 3 powder with a solvent to obtain a mixture, S2, sanding the mixture to obtain first slurry, S3, mixing the first slurry with a binder to obtain second slurry, S4, spraying and granulating the second slurry serving as a raw material to obtain pre-processed powder, S5, sintering the pre-processed powder, S6, sorting out pre-processed powder with uniform particles, S7, carrying out plasma spheroidization on the pre-processed powder sorted out in the step S6 to obtain high-specific-gravity spherical powder, and S8, sorting out the high-specific-gravity spherical powder with uniform particles to obtain Y 2 O 3 spraying powder. The Y 2 O 3 spraying powder prepared by the invention has high specific gravity, uniform particle size distribution, good fluidity and high specific gravity, can be used for facilitating spraying and effectively improving the quality of a spraying coating.

Inventors

  • GONG CAI
  • SU YU

Assignees

  • 厦门一为超材料科技有限公司

Dates

Publication Date
20260505
Application Date
20260205

Claims (10)

  1. 1. The preparation method of the Y 2 O 3 spraying powder is characterized by comprising the following steps: S1, mixing Y 2 O 3 powder with a solvent to obtain a mixture; S2, sanding the mixture to obtain first slurry; s3, mixing the first slurry with a binder to obtain a second slurry; S4, performing spray granulation by taking the second slurry as a raw material to obtain a pre-processed powder; s5, sintering the pre-processed powder; S6, sorting out the pre-processed powder with uniform particles; s7, performing plasma spheroidization on the pre-processed powder separated in the step S6 to obtain high-specific-gravity spherical powder; s8, sorting out high-specific-gravity spherical powder with uniform particles to obtain Y 2 O 3 spray powder.
  2. 2. The preparation method of claim 1, wherein in the step S1, the purity of Y 2 O 3 powder is more than or equal to 99.9%, the average particle size is less than or equal to 10 μm, the solvent is water, and the water consumption is 100-200% of the mass of Y 2 O 3 powder.
  3. 3. The method of claim 1, wherein in step S2, the granularity is controlled to be less than or equal to 1 μm during sanding, and the sanding time is 2-12h.
  4. 4. The method of claim 1, wherein in step S3, the binder is used in an amount of 0.5-5% by mass of the first slurry, and the binder is an aqueous solution of polyvinyl alcohol in a concentration of 10-30%.
  5. 5. The preparation method of the powder according to claim 1, wherein in the step S4, in the spray granulation process, the air inlet temperature is 180-220 ℃, the air outlet temperature is 80-120 ℃ and the frequency is 10-50Hz, and the granularity of the obtained pre-processed powder is more than or equal to 15 mu m and the specific surface area is less than or equal to 3m 2 /g.
  6. 6. The method of claim 1, wherein in step S5, the sintering temperature is 1000-1600 ℃ and the holding time is 2-10h.
  7. 7. The method of claim 1, wherein the pre-processed powder has a particle size D50 of 15-50 μm in step S6.
  8. 8. The method of claim 1, wherein in step S7, the RF power of the plasma spheroidizing device is 20-70kW, the argon flow is 15-60SLPM, the powder feeding flow is 5-20g/min, and the particle size of the high specific gravity spherical powder obtained by the plasma spheroidizing treatment is not less than 10 μm and the specific surface area is not more than 0.2m 2 /g.
  9. 9. The method according to claim 1, wherein the high specific gravity spherical powder is selected in step S8 to have a particle size D50 of 10 to 40. Mu.m.
  10. 10. Use of the Y 2 O 3 spray powder prepared by the preparation method of any one of claims 1 to 9 for the preparation of protective coatings.

Description

Preparation method and application of Y 2O3 spraying powder Technical Field The invention relates to the technical field of thermal spraying raw material powder, in particular to a preparation method and application of Y 2O3 spraying powder. Background Yttria (Y 2O3) has become an irreplaceable critical material for protective coatings within semiconductor chip fabrication equipment cavities due to its high melting point (> 2400 ℃), excellent chemical stability, low saturated vapor pressure, and extremely low etch rate in a plasma environment. In addition, Y 2O3 coatings also exhibit great application potential in the tip end fields of the nuclear industry, aerospace and the like. Atmospheric Plasma Spraying (APS) is the dominant technique for preparing Y 2O3 coatings. At present, Y 2O3 spraying powder is mainly prepared by adopting a spray granulation-sintering method. The powder obtained by the method has more and larger pores inside, so that the tap density of the powder prepared by the method is difficult to reach 60 percent (about 3.0 g/cm <3 >) of the theoretical density, and most of the tap density is lower than 50 percent of the theoretical density. Therefore, two problems are easily caused in the spraying process, namely insufficient powder melting to form unmelted particles which become defects in the coating, and the gas in the pores expands due to heating, so that the particles can explode or form a porous coating with low strength. Disclosure of Invention The invention aims to provide a preparation method and application of Y 2O3 spraying powder, and the Y 2O3 spraying powder prepared by the preparation method has the advantages of uniform particle size distribution, good fluidity and high specific gravity, is favorable for spraying, and can effectively improve the quality of a sprayed coating. In order to achieve the above purpose, the invention adopts the following technical scheme: A preparation method of Y 2O3 spraying powder comprises the following steps: S1, mixing Y 2O3 powder with a solvent to obtain a mixture; S2, sanding the mixture to obtain first slurry; s3, mixing the first slurry with a binder to obtain a second slurry; S4, performing spray granulation by taking the second slurry as a raw material to obtain a pre-processed powder; s5, sintering the pre-processed powder; S6, sorting out the pre-processed powder with uniform particles; s7, performing plasma spheroidization on the pre-processed powder separated in the step S6 to obtain high-specific-gravity spherical powder; s8, sorting out high-specific-gravity spherical powder with uniform particles to obtain Y 2O3 spray powder. Preferably, in the step S1, the purity of the Y 2O3 powder is more than or equal to 99.9%, the average particle size is less than or equal to 10 mu m, the solvent is water, and the water consumption is 100-200% of the mass of the Y 2O3 powder. Preferably, in the step S2, the granularity is controlled to be less than or equal to 1 mu m during sanding, and the sanding time is 2-12h. Preferably, in the step S3, the using amount of the binder is 0.5-5% of the mass of the first slurry, the binder is a polyvinyl alcohol aqueous solution, and the concentration of the binder is 10-30% of the polyvinyl alcohol aqueous solution. Preferably, in the step S4, in the spray granulation process, the air inlet temperature is 180-220 ℃, the air outlet temperature is 80-120 ℃ and the frequency is 10-50Hz, and the granularity of the prepared powder obtained by granulation is more than or equal to 15 mu m and the specific surface area is less than or equal to 3m 2/g. Preferably, in step S5, the sintering temperature is 1000-1600 ℃ and the heat preservation time is 2-10h. Preferably, in step S6, the pre-processed powder is sorted to a particle size D50 of 15-50 μm. Preferably, in the step S7, the radio frequency power of the plasma spheroidizing equipment is 20-70kW, the argon flow is 15-60SLPM, the powder feeding flow rate is 5-20g/min, and the granularity of the high specific gravity spherical powder obtained by the plasma spheroidizing treatment is more than or equal to 10 mu m, and the specific surface area is less than or equal to 0.2m 2/g. Preferably, in step S8, the high specific gravity spherical powder is sorted to have a particle size D50 of 10 to 40. Mu.m. The invention also discloses application of the Y 2O3 spraying powder prepared by the preparation method in preparation of protective coatings. The invention has the following beneficial effects: 1. The invention carries out spray granulation on Y 2O3 powder first, and after sintering, the pre-processed powder obtained by granulation can lead the binder to be decomposed and volatilized, and then forms a single body through the physical process of melting, spheroidizing and solidifying (namely step S7), in the process of physical change, high-temperature plasma (ionization formation of argon, helium and the like) is used as a heat source, the pre-processed powder wit