CN-121976160-A - Titanium oxide nanosheet photoelectric film material and preparation method thereof

Abstract

The invention discloses a titanium oxide nanosheet photoelectric film material and a preparation method thereof, and belongs to the technical field of functional films. The invention adopts the pulse radio frequency temperature control reactive sputtering technology with controllable oxygen content to realize the self-organized growth and amorphous stable regulation of the titanium oxide nano-sheet at 50-100 ℃, thereby obtaining the titanium oxide film material with amorphous porous lamellar nano-sheet island-shaped structure. The titanium oxide nanosheet photoelectric film material prepared by the invention has an amorphous porous lamellar nanosheet island-shaped tissue structure, and is endowed with excellent optical modulation performance and electrochemical energy storage performance, so that the film material can synchronously realize the storage and release of electric quantity in the electrochromic process, can intuitively represent the energy storage state through color change, and is suitable for the fields of photoelectric multifunctional devices, intelligent dimming energy storage devices and other related advanced energy devices.

Inventors

• SHI YINGDI
• LIANG WEITAO
• LIU MENGCHEN
• WANG XINYI
• WANG LIRONG
• TANG KAI

Assignees

• 安徽科技学院

Dates

Publication Date

20260505

Application Date

20260210

Claims (10)

1. 1. The titanium oxide nano-sheet photoelectric film material is characterized in that the titanium oxide nano-sheet photoelectric film material is obtained by depositing amorphous porous layered titanium oxide nano-sheet island-shaped tissue structures on a conductive substrate with oxygen-containing functional groups on the surface; the amorphous porous layered titanium oxide nano-sheet island-shaped tissue structure is formed by distributing titanium oxide nano-sheets in an island-shaped mode, and a communicated or semi-communicated gap structure is formed between adjacent nano-sheet island-shaped tissues to form a continuous film.
2. 2. The titanium oxide nanoplatelet photovoltaic thin film material of claim 1, wherein the gap size between adjacent nanoplatelet island structures is 10nm to 100nm.
3. 3. The titania nanoplatelet photovoltaic thin film material of claim 1, wherein the nanoplatelet island tissue has a lateral dimension of 100nm to 800nm.
4. 4. The titanium oxide nanosheet photovoltaic film material of claim 1, wherein the thickness of the titanium oxide nanosheet photovoltaic film material is 500 nm-1000 nm.
5. 5. The titanium oxide nanoplatelet photovoltaic thin film material of claim 1 having a surface capacity of 10mF/cm 2 ～20mF/cm 2 and an apparent diffusion coefficient of 1.0 x 10 -7 mol·cm -2 ·s -1/2 ～3.0×10 -7 mol·cm -2 ·s -1/2 .
6. 6. The titanium oxide nano-sheet photoelectric film material according to claim 1, wherein the titanium oxide nano-sheet photoelectric film material is formed by performing pulse radio frequency reactive sputtering deposition at 50-100 ℃ under the vacuum of < 2 x 10 -4 Pa and the mixed atmosphere of inert atmosphere and oxygen, wherein the metal titanium is used as a target material, so as to form an amorphous porous layered titanium oxide nano-sheet island-shaped tissue structure on a conductive substrate with an oxygen-containing functional group on the surface, and the volume fraction of oxygen in the mixed atmosphere is 5-40%.
7. 7. The method for preparing the titanium oxide nanosheet photoelectric thin film material according to any one of claims 1-6, which is characterized by comprising the following steps: Placing the conductive glass substrate under ultraviolet-ozone condition for surface activation treatment, removing organic pollutants on the surface, and introducing oxygen-containing functional groups to obtain the conductive glass substrate with the oxygen-containing functional groups on the surface; Under the condition of vacuum degree of < 2X 10 -4 Pa, under the mixed atmosphere of inert atmosphere and oxygen, taking metallic titanium as a target material, performing pulse radio frequency reactive sputtering deposition on a conductive glass substrate with an oxygen-containing functional group on the surface at 50 ℃ to 100 ℃ to form an amorphous porous layered titanium oxide nano-sheet island-shaped tissue structure, and obtaining the titanium oxide nano-sheet photoelectric film material.
8. 8. The method for preparing the titanium oxide nanosheet photoelectric film material according to claim 7, wherein the ultraviolet-ozone condition is that the ultraviolet irradiation time is 5 min-30 min and the ozone concentration is 10mg/m 3 ～50mg/m 3 .
9. 9. The method for preparing the titanium oxide nanosheet photoelectric thin film material according to claim 7, wherein the pulse radio frequency reactive sputtering condition is that sputtering power is 1W/cm 2 ～5W/cm 2 , sputtering air pressure is 0.5 Pa-2.5 Pa, and working distance is 6 cm-12 cm.
10. 10. The method for preparing a titanium oxide nanosheet photoelectric thin film material according to claim 7, wherein in the pulsed radio frequency reactive sputtering process, the frequency of pulsed radio frequency is 13.56MH Z , the single pulse period is 100 s-1000 s, the sputtering time is 25 s-500 s, and the relaxation time is 50 s-750 s.

Description

Titanium oxide nanosheet photoelectric film material and preparation method thereof Technical Field The invention belongs to the technical field of functional films, and particularly relates to a titanium oxide nanosheet photoelectric film material and a preparation method thereof. Background The development of multifunctional thin film materials with optical modulation and energy storage functions has become an important research direction in the fields of material science and energy technology. The electrochromic material can realize the regulation and control of visible light and near infrared light transmittance through reversible ion embedding/extracting process under the action of external voltage, and has wide application prospect in the fields of intelligent windows, display devices, energy-saving buildings and the like. However, conventional electrochromic devices generally have only an optical modulation function, which still has room for improvement in terms of energy utilization efficiency. Furthermore, electrochemical energy storage devices rely on rapid transport and reversible storage of ions in the electrode material for energy storage. If the optical modulation and energy storage functions can be integrated in a single electrode material, the device structure can be simplified, and the overall energy utilization efficiency of the system can be obviously improved. Therefore, the development of the photoelectric multifunctional material capable of simultaneously having electrochromic property and energy storage property has important significance. Titanium oxide materials are receiving great attention due to their high chemical stability, rich resources and controllable electrochemical properties. However, the existing titanium oxide thin films are mostly in compact or crystalline structures, ion diffusion paths are limited, electrochemical reaction kinetics are slow, and requirements for fast optical response and high-efficiency energy storage are difficult to meet. Disclosure of Invention In order to solve the technical problems that the ion diffusion path of the existing titanium oxide film is limited, the electrochemical reaction kinetics is slower, and the requirements of quick optical response and high-efficiency energy storage are difficult to meet. The invention provides a titanium oxide nanosheet photoelectric film material and a preparation method thereof. The invention obtains the titanium oxide film material with amorphous porous lamellar nano-sheet island structure through the cooperative regulation and control of the film microstructure and the preparation process, thereby improving the optical modulation performance, the electrochemical response characteristic and the charge storage capacity of the material. In order to achieve the above object, the technical scheme of the present invention is as follows. The first object of the invention is to provide a titanium oxide nano-sheet photoelectric film material, which is formed by depositing amorphous porous layered titanium oxide nano-sheet island-shaped tissue structures on a conductive substrate with oxygen-containing functional groups on the surface, so as to obtain the titanium oxide nano-sheet photoelectric film material; the amorphous porous layered titanium oxide nano-sheet island-shaped tissue structure is formed by distributing titanium oxide nano-sheets in an island-shaped mode, and a communicated or semi-communicated gap structure is formed between adjacent nano-sheet island-shaped tissues to form a continuous film. As a preferred embodiment, the gap structure size between adjacent titanium oxide nanoplatelets is 10nm to 100nm. In a preferred embodiment, the transverse dimension of the nanoplatelet island structure is 100nm to 800nm. As a preferable implementation mode, the thickness of the titanium oxide nano-sheet photoelectric film material is 500-1000 nm. As a preferred implementation mode, the surface capacity of the titanium oxide nano-sheet photoelectric film material is 10mF/cm 2～20mF/cm2, the apparent diffusion coefficient is 1.0x10 -7mol·cm-2·s-1/2～3.0×10-7mol·cm-2·s-1/2, and the storage and release of electric quantity can be synchronously realized in the optical modulation process. As a preferred implementation mode, the optical modulation amplitude of the film material in the visible light wave band is 10% -40%, the coloring efficiency is 5 2/C～20cm2/C, the complete coloring time is 10 s-20 s, and the complete fading time is 1 s-5 s. As a preferred implementation mode, the titanium oxide nano-sheet photoelectric film material is formed by performing pulse radio frequency reactive sputtering deposition at 50-100 ℃ under the vacuum of < 2X 10 < -4 > Pa and in the mixed atmosphere of inert atmosphere and oxygen, wherein the metal titanium is used as a target material, so that an amorphous porous layered titanium oxide nano-sheet island-shaped tissue structure is formed on a conductive substrate with an oxygen-