CN-121976162-A - Gear strengthening process and equipment based on ion implantation and gradient coating

CN121976162ACN 121976162 ACN121976162 ACN 121976162ACN-121976162-A

Abstract

The invention provides a gear strengthening process and equipment based on ion implantation and gradient coating, which belong to the technical field of gear production equipment and comprise workpiece preparation, workpiece cleaning, ion implantation, functional coating deposition, and the like. Meanwhile, the structure and stress state of the gear surface layer can be improved by preprocessing the gear surface through nitrogen ion implantation, a good bonding basis is provided for subsequent coating deposition, and the gradient deposition design of the CrN layer and the WC-DLC coating can effectively relieve the interface stress between the coating and the matrix and improve the bonding strength of the film base, so that the problems of poor bonding force and easy peeling of the film base in the traditional single coating process are solved, and the wear resistance and the service life of the gear are further improved.

Inventors

HUANG LETIAN
TANG JINYUAN
SHEN XIAOCHENG
JIANG TINGTING
Lu Ruize

Assignees

中南大学

Dates

Publication Date: 20260505
Application Date: 20260122

Claims (10)

1. The gear strengthening process based on ion implantation and gradient coating is characterized by comprising the following steps of: preparing a workpiece, namely conveying a gear to be processed into a process chamber; The work piece cleaning, namely vacuumizing the process chamber, feeding argon until the pressure is constant, starting an ECR ion source to generate argon plasma, and starting a direct current bias power supply connected with a gear to clean the gear; the ion implantation, namely, nitrogen is fed into the process chamber, the concentration of the nitrogen and the argon is maintained, the Cr target and the WC target in the process chamber are shielded, and the gear is subjected to nitrogen ion implantation; And (3) functional coating deposition, namely firstly removing shielding of the Cr target, depositing a CrN layer, then removing shielding of the WC target, stopping nitrogen transmission, feeding acetylene gas, and depositing a WC-DLC coating.
2. The ion implantation and gradient coating based gear strengthening process of claim 1, wherein the process chamber is first evacuated to a vacuum level during the cleaning of the workpiece Pa to Pa Pa。
3. The ion implantation and gradient coating based gear strengthening process of claim 1, wherein a negative bias of-50V to-500V is applied to the gear while the workpiece is being cleaned.
4. The ion implantation and gradient coating based gear strengthening process of claim 1, wherein the ECR ion source is kept on during the ion implantation to generate nitrogen plasma of a set concentration, and then the dc bias power supply is raised to 10kV to 40kV.
5. The process for reinforcing a gear based on ion implantation and gradient coating according to claim 1, wherein during the deposition of the functional coating, the nitrogen gas is first turned off, the argon gas inlet amount is increased to 300SCCM, the shielding of the Cr target is canceled after the air pressure is constant, the Cr layer is first deposited, and then the nitrogen gas inlet is turned on, so as to deposit the CrN layer.
6. The ion implantation and gradient coating based gear strengthening process of claim 5, wherein the amount of argon introduced is reduced when depositing the CrN layer.
7. The process for strengthening gears based on ion implantation and gradient coating according to claim 1, wherein when the shielding of the Cr target is canceled, the Cr target dc sputtering current is turned on first, and the shielding is canceled after the power is stabilized; when the shielding of the WC target is canceled, the HiPIMS power supply of the WC target is started first, and the shielding is canceled after the power is stable.
8. The ion implantation and gradient coating based gear strengthening process of claim 1, wherein the temperature is below 200 ℃ when the workpiece cleaning, the ion implantation, and the functional coating deposition are all performed.
9. The ion implantation and gradient coating based gear strengthening process of claim 1, wherein shielding the Cr target and the WC target comprises: firstly, rotating a sputtering surface of the target to deviate from the gear, and then performing magnetic shielding between the gear and the sputtering surface; or firstly moving the target away from the gear, and then magnetically shielding the target between the gear and the target; Or firstly moving the target away from the gear, then rotating the sputtering surface of the target away from the gear, and then performing magnetic shielding between the two.
10. An ion implantation and gradient coating-based gear strengthening apparatus for performing the ion implantation and gradient coating-based gear strengthening process as set forth in any one of claims 1 to 9, comprising: an apparatus body defining a process chamber; a workpiece stage disposed in the process chamber and configured to support a gear; The biasing system is arranged on the workpiece platform and is used for applying a negative-pressure electric field to the gear; The vacuum system is connected with the process chamber and used for adjusting the vacuum degree of the process chamber; the plasma generation device is arranged in the process chamber and is used for generating plasma; The magnetron sputtering system is arranged in the process chamber, is staggered with the plasma generating device around the circumferential direction of the process chamber, is rotationally provided with a Cr target and a WC target, and comprises a target surface and a magnetic shielding surface, and the target surface and the magnetic shielding surface can alternately face the gear in the rotation process; the gas supply system is connected to the process chamber and is used for conveying nitrogen, argon and acetylene to the process chamber; And the temperature regulation and control system is connected with the process chamber and used for regulating the temperature of the process chamber.

Description

Gear strengthening process and equipment based on ion implantation and gradient coating Technical Field The invention belongs to the technical field of gear production equipment, and particularly relates to a gear strengthening process and equipment based on ion implantation and gradient coating. Background Aerospace gears are core precision components in aircraft power transmission systems, and their designs, materials and manufacturing processes have all been expanded around the goal of achieving near absolute reliable performance under extremely demanding conditions. The gears must be stable for tens of thousands of hours in severe environments with high rotational speed, heavy load, severe temperature alternation and limited lubrication, and failure thereof is directly related to flight safety, so that the manufacturing thereof exceeds the category of common mechanical parts and enters the field of extremely fusing material science, precision machining and surface engineering. As the machine operating speed increases, the gear operating environment becomes increasingly severe, and the industry has more stringent requirements on the surface properties of gears. The diamond-like carbon (DLC) coating has excellent mechanical properties, extremely low friction coefficient and excellent chemical stability, and has excellent application prospect in the surface treatment of aerospace gears. However, the problems of high internal stress, insufficient bonding strength of the film base and the like severely restrict the service reliability and service life of the film base. In the traditional gear surface strengthening technology, single coating technology such as Physical Vapor Deposition (PVD), chemical Vapor Deposition (CVD) and the like is mostly adopted, and the problems of poor film base binding force, easy spalling of the coating, difficult coverage of complex tooth surfaces and the like exist. For high-precision gears, the conventional ion implantation technology is difficult to realize uniform treatment of the whole tooth profile, so that the wear resistance and the fatigue strength are insufficient, and the service life and the reliability of the gears are affected. When multiple strengthening processes are needed, the workpieces are required to be transferred to different equipment for treatment, and the production efficiency is severely restricted due to the long transfer process and the repeated waiting for the equipment to vacuumize. Disclosure of Invention The present invention aims to solve at least one of the above technical problems in the prior art. Therefore, in a first aspect, the invention provides a gear strengthening process based on ion implantation and gradient coating, which can solve the problem of low production efficiency. In a second aspect, the present invention provides an ion implantation and gradient coating based gear strengthening apparatus for performing the above process. An ion implantation and gradient coating based gear strengthening process according to an embodiment of the first aspect of the present invention includes: preparing a workpiece, namely conveying a gear to be processed into a process chamber; The work piece cleaning, namely vacuumizing the process chamber, feeding argon until the pressure is constant, starting an ECR ion source to generate argon plasma, and starting a direct current bias power supply connected with a gear to clean the gear; the ion implantation, namely, nitrogen is fed into the process chamber, the concentration of the nitrogen and the argon is maintained, the Cr target and the WC target in the process chamber are shielded, and the gear is subjected to nitrogen ion implantation; And (3) functional coating deposition, namely firstly removing shielding of the Cr target, depositing a CrN layer, then removing shielding of the WC target, stopping nitrogen transmission, feeding acetylene gas, and depositing a WC-DLC coating. The gear strengthening process based on ion implantation and gradient coating provided by the embodiment of the invention has at least the following beneficial effects: According to the process, multiple working procedures such as workpiece preparation, cleaning, ion implantation and functional coating deposition are integrated in the same process chamber, the workpiece is not required to be transferred among different devices, multiple vacuumizing and waiting processes are effectively avoided, and the production efficiency is remarkably improved. Meanwhile, the structure and stress state of the gear surface layer can be improved by preprocessing the gear surface through nitrogen ion implantation, a good bonding basis is provided for subsequent coating deposition, and the gradient deposition design of the CrN layer and the WC-DLC coating can effectively relieve the interface stress between the coating and the matrix and improve the bonding strength of the film base, so that the problems of poor bonding force and easy peeling