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CN-121976166-A - Graphene composite film preparation device with wave absorbing function

CN121976166ACN 121976166 ACN121976166 ACN 121976166ACN-121976166-A

Abstract

The invention relates to the technical field of graphene film production, in particular to a graphene composite film preparation device with a wave absorbing function, which comprises a mounting plate, wherein a box body is fixed at the center of the top of the mounting plate, a heating plate for heating a substrate is fixedly arranged in the box body, clamps for clamping the substrate are symmetrically fixed at the top of the heating plate, a vacuum pump for vacuumizing the box body is fixed at the top of the mounting plate, one side of the box body is connected with an air inlet component through an air inlet pipe, a first valve is opened in the process of starting the vacuum pump to exhaust air in the box body, the motor drives the fan blade to rotate positively, the fan blade rotates in the cylinder to enable the cylinder to generate air flow from top to bottom, dust remained on the substrate can float through the impact of the air flow, and then the dust is taken out in the flowing process of the air flow, so that the effect of cleaning the substrate is achieved.

Inventors

  • LI ZHAO
  • SONG YANPING
  • LI NIAN
  • WANG ZHENYANG

Assignees

  • 安徽格兰科新材料技术有限公司

Dates

Publication Date
20260505
Application Date
20240202

Claims (10)

  1. 1. The graphene composite film preparation device with the wave absorbing function comprises a mounting plate (1), and is characterized in that a box body (2) is fixed at the center of the top of the mounting plate (1), a heating plate (4) for heating a substrate is fixedly arranged in the box body (2), clamps (3) for clamping the substrate are symmetrically fixed at the top of the heating plate (4), a vacuum pump (8) for vacuumizing the box body (2) is fixed at the top of the mounting plate (1), one side of the box body (2) is connected with an air inlet component through an air inlet pipe (6), and an air flow circulation component is arranged at the inner top of the box body (2); In the process of vacuumizing, the airflow circulation assembly generates airflow from top to bottom to impact the top of the substrate, residual dust on the top of the substrate is blown away, and in the process of air inlet of the air inlet assembly to the inside of the box body (2), the airflow circulation assembly is used for disturbing the inlet airflow and fully mixing the airflow entering the inside of the box body (2).
  2. 2. The graphene composite film preparation device with the wave absorbing function according to claim 1, wherein the airflow circulation assembly comprises a cylinder (15), the cylinder (15) is fixed on the inner top side wall of the box body (2), fan blades (14) are installed in the cylinder (15) through the rotation assembly, and communicating pipes (19) are fixedly communicated on the outer wall of the cylinder (15).
  3. 3. The graphene composite film preparation device with the wave absorbing function according to claim 2, wherein the rotating assembly comprises a supporting frame (11), the supporting frame (11) is fixedly installed at the top of the box body (2), a motor (12) is fixed at the top of the supporting frame (11), an output shaft of the motor (12) penetrates through the supporting frame (11) and is fixedly provided with a rotating rod (13), one end, far away from the motor (12), of the rotating rod (13) penetrates through the top side wall of the box body (2) and is fixedly provided with a fan blade (14), and the fan blade (14) is located inside the cylinder (15).
  4. 4. The graphene composite film preparation device with the wave absorbing function according to claim 3, wherein an installation shell (20) is fixed at the top of the heating plate (4), one end, far away from the cylinder (15), of the communicating pipe (19) is fixedly communicated with the top of the installation shell (20), and an air supply port (21) is fixedly formed in one side, facing the clamp (3), of the installation shell (20).
  5. 5. The graphene composite film preparation device with the wave absorbing function according to claim 1, wherein the air inlet assembly comprises a first air inlet pipe (16) and a second air inlet pipe (22), the first air inlet pipe (16) is fixedly communicated on the outer wall of the air inlet pipe (6), the air outlet end of the first air inlet pipe (16) is provided with a first one-way valve (17), the second air inlet pipe (22) is fixedly communicated on the outer wall of the air inlet pipe (6), and the air outlet end of the second air inlet pipe (22) is provided with a second one-way valve (23).
  6. 6. The graphene composite film preparation device with the wave-absorbing function according to claim 5, wherein a heating cavity is formed in the heating plate (4), and a heater (5) is fixed at the inner top of the heating cavity; an inclined plate (18) is fixedly arranged in the box body (2), and the inclined plate (18) is positioned at one side of an air outlet of the air inlet pipe (6).
  7. 7. The graphene composite film preparation device with the wave absorbing function according to claim 6, wherein a combustion chamber (25) is arranged at the center of the top of the mounting plate (1), an opening is formed in the bottom of the box body (2), the heating cavity is communicated with the combustion chamber (25) through the opening, a second valve (32) is installed in the opening, and a heat conducting plate (33) is installed in the heating cavity; the air outlet end of the vacuum pump (8) is fixedly communicated with a connecting pipe (24), and one end, far away from the vacuum pump (8), of the connecting pipe (24) penetrates through the bottom of the mounting plate (1) and is communicated with the combustion chamber (25).
  8. 8. The graphene composite film preparation device with the wave absorbing function according to claim 7, wherein an air pump (26) is fixed at the top of the mounting plate (1), an air outlet end of the air pump (26) is fixedly communicated with an air pipe (27), one end of the air pipe (27), which is far away from the air pump (26), penetrates through the mounting plate (1) and then is communicated with the combustion chamber (25), a first exhaust pipe (28) is fixedly communicated with the inner wall of the combustion chamber (25), one end, which is far away from the combustion chamber (25), of the first exhaust pipe (28) penetrates through the inner wall of the mounting plate (1), and one end, which is far away from the combustion chamber (25), of the first exhaust pipe (28) is located above the mounting plate (1).
  9. 9. The graphene composite film preparation device with the wave absorbing function according to claim 8, wherein a preheating box (29) is fixed at one end of the air inlet pipe (6) far away from the box body (2), a first exhaust pipe (28) is fixedly communicated with the bottom of the preheating box (29), and a second exhaust pipe (30) is fixedly communicated with one side of the top of the preheating box (29); the upper half part of the preheating box (29) is sleeved on the outer wall of the first air inlet pipe (16), and the lower half part of the preheating box (29) is sleeved on the outer wall of the second air inlet pipe (22).
  10. 10. The graphene composite film preparation device with the wave absorbing function according to claim 9, wherein a purifying box (31) is fixed at the top of the mounting plate (1), one end of the second exhaust pipe (30) far away from the preheating box (29) penetrates through the top of the purifying box (31) and enters the inside of the purifying box (31), purifying liquid is contained in the inside of the purifying box (31), an air outlet end of the second exhaust pipe (30) is located in the purifying liquid, and a discharge pipe is fixedly communicated with one side of the top of the purifying box (31).

Description

Graphene composite film preparation device with wave absorbing function Technical Field The invention relates to the technical field of graphene film production, in particular to a graphene composite film preparation device with a wave absorbing function. Background The graphene has a linear energy band structure, a conduction band and a valence band are intersected, and the bandwidth is zero. This means that graphene can absorb electromagnetic waves of various frequencies. Graphene has excellent wave absorbing properties due to its unique energy band structure and high electron density. Not only can realize high-efficiency wave absorption in microwave and infrared wave bands, but also has the potential of realizing wide absorption in visible light wave bands. The graphene has wide application prospects in the fields of material science, electronics, optics and the like. A device for preparing graphene by CVD and a method for preparing a graphene film are disclosed in the patent with publication number CN 112938945B. The invention provides a device for preparing graphene by CVD (chemical vapor deposition), which comprises a bracket base, a graphene growth substrate and a top cover. The support base is of an annular closed structure, a through hole is formed in the top of the support base, and a fixing column is arranged on one inner side wall of the through hole. The stiff end of graphite alkene growth substrate is the bending type, and is equipped with the trompil with fixed column looks adaptation. The inside wall of the top cover is provided with a fixed plate, and the fixed plate is provided with an opening matched with the fixed column. In the process of preparing a graphene film by Chemical Vapor Deposition (CVD), dust and particles on the surface of a substrate are usually removed by using tools such as a dust-free cloth and a brush, but in the process of processing the substrate, if dust exists on the tools during the process of using the tools, the dust on the tools is at risk of falling onto the substrate, so that tiny particles and dust are generated on the surface of the substrate, and then during the growth process, the graphene may form aggregates or cavities around the dust, so that the uniformity of the film is affected. Disclosure of Invention The invention aims to solve the defects that in the prior art, when an operator uses a tool, if dust exists on the tool, the dust on the tool falls on a substrate to cause tiny particles and dust on the surface of the substrate, and graphene possibly forms aggregation or cavities around the dust in the growth process to influence the uniformity of a film, and provides a graphene composite film preparation device with a wave absorbing function. In order to achieve the purpose, the graphene composite film preparation device with the wave absorbing function comprises a mounting plate, wherein a box body is fixed at the center of the top of the mounting plate, a heating plate for heating a substrate is fixedly arranged in the box body, clamps for clamping the substrate are symmetrically fixed at the top of the heating plate, a vacuum pump for vacuumizing the box body is fixed at the top of the mounting plate, one side of the box body is connected with an air inlet assembly through an air inlet pipe, and an air flow circulation assembly is arranged at the inner top of the box body; in the process of vacuumizing, the airflow circulation assembly generates airflow from top to bottom to impact the top of the substrate, residual dust on the top of the substrate is blown away, and in the process of air inlet of the air inlet assembly to the inside of the box body, the airflow circulation assembly is used for disturbing the inlet airflow and fully mixing the airflow entering the inside of the box body. In a further embodiment, the air flow circulation assembly comprises a cylinder, the cylinder is fixed on the side wall of the inner top of the box body, the fan blades are installed in the cylinder through the rotation assembly, and the communicating pipe is fixedly communicated with the outer wall of the cylinder. In a further embodiment, the rotating assembly comprises a supporting frame, the supporting frame is fixedly arranged at the top of the box body, a motor is fixed at the top of the supporting frame, an output shaft of the motor penetrates through the supporting frame and is fixed with a rotating rod, one end, far away from the motor, of the rotating rod penetrates through the side wall of the top of the box body and is fixed with fan blades, and the fan blades are located inside the cylinder. In a further embodiment, the top of the heating plate is fixed with a mounting shell, one end of the communicating pipe, which is far away from the cylinder, is fixedly communicated with the top of the mounting shell, and an air supply port is fixedly arranged on one side, which faces the clamp, of the mounting shell. In a further embodiment, the air inlet assembl