CN-121976174-A - Support rod structure for TOPCon battery production and use method

CN121976174ACN 121976174 ACN121976174 ACN 121976174ACN-121976174-A

Abstract

The invention discloses a support rod structure for TOPCon battery production and a use method thereof, which relate to the technical field of photovoltaic battery manufacturing and comprise an insulating rod, a first insulating spacer and a second insulating spacer, the first insulating spacer bush and the second insulating spacer bush are sleeved on the insulating rod, and the first insulating spacer bush and the second insulating spacer bush are arranged at intervals along the length direction of the insulating rod. The support rod structure is used for realizing the functions of stably bearing and positioning, isolating conductive risks, guiding amorphous silicon deposition and guaranteeing discharge stability by matching with the graphite boat. According to the invention, the first insulating spacer and the second insulating spacer are arranged on the insulating rod, so that the deposition position of amorphous silicon on the supporting rod structure is fundamentally changed, amorphous silicon is mainly deposited on the part which is not easy to cause the conduction of the supporting rod structure, the risk of conducting the first insulating spacer and the second insulating spacer in the amorphous silicon deposition process is greatly reduced, and the service life of the supporting rod structure is prolonged.

Inventors

YANG WENJU
LIU BINGLONG
ZHANG MIN
ZHANG FAYU
LI WEI

Assignees

宜宾英发德坤科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260204

Claims (10)

1. The support rod structure for TOPCon battery production is characterized by comprising an insulating rod, a first insulating spacer and a second insulating spacer, wherein the first insulating spacer and the second insulating spacer are sleeved on the insulating rod and are arranged at intervals along the length direction of the insulating rod; the first insulating spacer comprises a first inner collar and a first outer collar sleeved outside the insulating rod, the end part of the first outer collar is correspondingly protruded out of the end part of the first inner collar, and a first accommodating space is formed between the first inner collar and the first outer collar in a surrounding mode; the second insulating spacer comprises a second inner sleeve ring and a second outer sleeve ring which are sleeved outside the insulating rod, the end part of the second inner sleeve ring correspondingly protrudes out of the end part of the second outer sleeve ring, and a second accommodating space is formed between the second inner sleeve ring and the second outer sleeve ring in a surrounding mode.
2. The strut structure for TOPCon battery production as in claim 1, wherein there are two connection modes between the strut structure and the graphite boat: When the graphite boat consists of a single boat piece, the boat angle of the graphite boat is directly overlapped on the surfaces of the first insulating spacer and the second insulating spacer, so that a connecting effect is realized, and the shape and the size of the boat angle of the graphite boat are matched with those of the corresponding insulating spacer; When graphite boat comprises a plurality of boat pieces, all boat pieces all are equipped with the mounting hole of position looks adaptation, the bracing piece structure sets up inside the mounting hole, realizes the effect of connecting all boat pieces.
3. The strut structure for TOPCon battery production according to claim 2, wherein when the first connection mode is adopted, the contact surface between the boat corner of the graphite boat and the first insulating spacer and the contact surface between the boat corner of the graphite boat and the second insulating spacer are provided with anti-slip positioning structures, and when the second connection mode is adopted, the installation hole is internally provided with an insulating bushing or is coated with an insulating coating.
4. The strut structure for TOPCon battery production as in claim 1, wherein the first inner collar, the first outer collar, the second inner collar and the second outer collar are made of a high temperature resistant and corrosion resistant material.
5. The support rod structure for TOPCon battery production according to claim 1, wherein the insulating rod is made of silicon carbide, the thermal conductivity of the insulating rod is 30-300 w/M.K, the thermal expansion coefficient is 4-4.4x -6 /K, the compression strength at room temperature is not lower than 3900MPa, and the bending strength is not lower than 380MPa.
6. The support rod structure for TOPCon battery production according to claim 1, wherein corundum sleeves are sleeved outside the first insulating spacer and the second insulating spacer, the purity of the corundum sleeves is not lower than 99.5%, the insulating strength is not lower than 10KV/mm, and the bending strength at room temperature is 300-500 mpa.
7. The strut structure for TOPCon battery production according to claim 1, wherein the distance between the first insulating spacer and the second insulating spacer is adjustable, the distance between the long electrode time interval and the short electrode time interval is 207.5±2mm, and the distance between the short electrode time interval and the long electrode time interval is 65±2mm.
8. A method of using the TOPCon battery production support bar structure according to any one of claims 1 to 7, comprising the steps of: step S1, fixing an insulating rod on a PECVD (plasma enhanced chemical vapor deposition) equipment bracket, sequentially installing a first insulating spacer bush and a second insulating spacer bush, and fastening after adjusting the positions and the distances of the first insulating spacer bush and the second insulating spacer bush; S2, selecting a corresponding connection mode according to the structure of the graphite boat, connecting the graphite boat with the support rod assembly, and detecting the insulation performance through electrical test equipment; step S3, debugging PECVD equipment, and adjusting radio-frequency power supply parameters, reaction gas flow, chamber temperature and pressure to ensure uniform and stable discharge of cathode and anode of the graphite boat; s4, starting an amorphous silicon deposition process, and guiding amorphous silicon to be deposited on the outer surfaces of the first outer sleeve ring and the second outer sleeve ring and gaps between the outer surfaces and the end parts of the first outer sleeve ring and the second outer sleeve ring by utilizing the structures of the first insulating spacer and the second insulating spacer; And S5, monitoring the operation parameters and the discharge state of the PECVD equipment in real time, and timely adjusting the technological parameters of the amorphous silicon deposition process when abnormality is found.
9. The method of claim 8, wherein the graphite boat in step S2 is made of high purity graphite material.
10. The method of claim 8, wherein the operating parameters in step S5 include power, voltage, current of the rf power source, flow rate and pressure of the reactant gas, and temperature and pressure in the chamber.

Description

Support rod structure for TOPCon battery production and use method Technical Field The invention relates to the technical field of photovoltaic cell manufacturing, in particular to a support rod structure for TOPCon cell production and a use method. Background TOPCon (Tunnel Oxide Passivated Contact) battery, namely tunneling oxide passivation contact battery, has become the key technology in the current photovoltaic market by virtue of advantages of high conversion efficiency, low attenuation performance, high mass production cost performance and the like, and the core is that an ultrathin silicon oxide tunneling layer and a doped polysilicon layer are prepared on the back surface of a silicon wafer to form a passivation contact structure, so that carrier recombination is greatly reduced, and the photoelectric conversion efficiency of the battery is improved. In the whole TOPCon battery production and manufacturing process, the positive back film process is crucial, and the process mainly aims to deposit a layer of Si 3H4 film on the surface of a silicon wafer, so that the film has an antireflection function, the light absorption efficiency of the silicon wafer is effectively improved, a good passivation effect is achieved, the electronic recombination on the surface of the silicon wafer can be reduced, meanwhile, the compact structure of the silicon wafer can prevent the silicon wafer from being oxidized, and a key guarantee effect is played on the performance and stability of the battery. In the front-back film process, plasma Enhanced Chemical Vapor Deposition (PECVD) techniques are widely used. In the technical implementation process, a graphite boat is used as a key carrier for bearing a silicon wafer, the boat corners of the graphite boat are required to be accurately lapped on a supporting rod, then an electric field is applied through an electrode rod or a discharge seat electrode, an electric field is formed between boat sheets of the graphite boat, reaction gas is promoted to be ionized, plasma is generated, active particles in the plasma interact with the reaction gas, and then a required film is formed on the surface of the silicon wafer in a deposition mode. However, in long-term actual production operation, a problem occurs that doped amorphous silicon is gradually deposited on the support rods due to complex physical and chemical reactions in the reaction process and special process environments, the deposition amount of the doped amorphous silicon is continuously accumulated along with the increase of production time and process times, and when the deposition amount reaches a certain degree, an originally insulated support rod can generate a conduction phenomenon which can seriously and negatively affect the discharge stability of the cathode and the anode of the graphite boat, so that the discharge process becomes unstable, the uniformity of film deposition is poor, and the performance consistency of the battery is further affected. More serious, once the conduction problem is serious, the radio frequency power supply discharge alarm is triggered, and the production process is forced to be interrupted. In order to solve the above problems, the support rod is maintained or replaced regularly, but the maintenance process needs to consume a great deal of manpower, material resources and time cost, and may introduce new production risks in the process of shutting down and re-debugging the equipment, thereby generating potential adverse effects on the quality of the product. Based on the above, the support rod structure for TOPCon battery production and the use method thereof are provided, so that the defects existing in the prior art scheme can be eliminated. Disclosure of Invention The invention aims to provide a support rod structure for TOPCon battery production and a use method thereof, which are used for solving the problems that the conventional support rod is easy to be conducted due to deposition of doped amorphous silicon in the background art, so that normal discharge of a graphite boat is disturbed, frequent maintenance or replacement of the support rod is caused, and finally the production efficiency and the product quality are reduced. In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a TOPCon is bracing piece structure for battery production, bracing piece structure is used for cooperating the graphite boat to realize the stable bearing location, keep apart electrically conductive risk, guide amorphous silicon deposit and ensure the function of discharge stability, bracing piece structure includes insulator spindle, first insulating spacer and second insulating spacer all overlap and locate on the insulator spindle, and both follow insulator spindle length direction interval setting; the first insulating spacer comprises a first inner collar and a first outer collar sleeved outside the insulating ro