CN-121976975-A - Semiconductor product processing equipment and mist removal system

CN121976975ACN 121976975 ACN121976975 ACN 121976975ACN-121976975-A

Abstract

The invention discloses a semiconductor product processing device and a mist exhausting system, wherein a mist exhausting fan is connected with a rack through a damping mechanism, vibration of the mist exhausting fan can be effectively prevented from being transmitted to the rack, processing precision is improved, the damping mechanism can adopt different structures according to requirements, when a connector is adopted, the connector is connected to the top of a first supporting rod through a first damping connecting seat and to the bottom of a second supporting rod of the rack through a second damping connecting seat, the second supporting rod can effectively limit the connector, the problem that the connector falls down due to the fact that the mist exhausting fan is arranged on the first side of the connector is avoided, shear force born by bolts connecting the first damping connecting seat and the second damping connecting seat with the first supporting rod and the second supporting rod is reduced, and structural stability and safety of the damping structure are effectively guaranteed. When adopting the support, simple structure to adopt two-stage shock-absorbing structure, can furthest keep apart the vibrations and the frame of fog fan of arranging, thereby avoid the influence to the main shaft.

Inventors

WANG TAI
YANG YUNLONG
GAO JINLONG
ZHANG SHAOKUN
HU XIAOBO
LIU BINGXIAN

Assignees

江苏京创先进电子科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260122

Claims (10)

1. The semiconductor product processing equipment comprises a mist exhausting system, wherein the mist exhausting system comprises a mist exhausting fan, and the mist exhausting fan is connected with a frame through a damping mechanism, and is characterized in that: The damping mechanism comprises a connector, the mist exhausting fan is arranged on a first side of a main body of the connector, a first connecting piece is arranged on the first side of the main body, a second connecting piece is arranged on a second side, opposite to the first side, of the main body, the first connecting piece is connected to the top of a first supporting rod on the frame through a first damping connecting seat, the extending direction of the first supporting rod is perpendicular to the distribution direction of the first connecting piece and the second connecting piece, and the second connecting piece is connected to the bottom of a second supporting rod of the frame through a second damping connecting seat; or the damping mechanism comprises a support, a group of third damping connecting seats used for connecting the mist exhausting fan are arranged on the support, and the support is connected with the frame through the damping connecting mechanism.
2. The semiconductor product processing apparatus according to claim 1, wherein the mist exhausting fan comprises a housing, an air inlet pipe is arranged at the bottom of the housing, an air outlet pipe is arranged at the side of the housing, and a power source is arranged at the top of the housing.
3. The semiconductor product processing apparatus according to claim 1, wherein the first side of the main body is provided with a first connecting pipe, the second side is provided with a second connecting pipe, the first connecting pipe and the second connecting pipe are coaxial and extend horizontally, the air inlet pipe of the mist exhaust fan is connected with the first connecting pipe through a 90-degree elbow, and the second connecting pipe is used for connecting with the first mist exhaust pipe of the processing box.
4. The semiconductor product processing apparatus according to claim 3, wherein the third side of the main body is provided with a third connection pipe for connecting the second mist discharge pipe on the cleaning tub, the third connection pipe extending obliquely downward.
5. The semiconductor product processing apparatus according to claim 4, wherein an automatic valve is provided between the third connection pipe and the second mist discharge pipe.
6. The semiconductor product manufacturing apparatus according to any one of claims 1 to 5, wherein the second connection pipe of the connector is connected to the first mist discharge pipe of the process tank via a hose or a bellows and/or the third connection pipe of the connector is connected to the second mist discharge pipe of the cleaning tub via a hose.
7. The semiconductor product processing apparatus of claim 1, wherein the third shock absorbing connector is three or four and equally distributed circumferentially.
8. The semiconductor product processing apparatus according to claim 1, wherein the shock absorbing connection mechanism comprises a rubber pad, a locking plate and a connecting bolt, the rubber pad is clamped on two sides of a vertical plate of the bracket, the rubber pad and the vertical plate are connected with a third supporting rod of the frame in a matched manner through the connecting bolt penetrating through the rubber pad and the vertical plate, and the connecting bolt is in non-contact with the rubber pad and the locking plate.
9. The semiconductor product processing apparatus according to claim 7 or 8, wherein the air inlet pipe is connected to one end of a tee joint through a hose, and the other two ends of the tee joint are connected to the first mist discharge pipe and the second mist discharge pipe.
10. The fog discharging system comprises a fog discharging fan, wherein the fog discharging fan is arranged on the damping mechanism, and is characterized in that: The damping mechanism comprises a connector, the mist exhausting fan is arranged on a first side of a main body of the connector, a first connecting piece is arranged on the first side of the main body, a second connecting piece is arranged on a second side, opposite to the first side, of the main body, the first connecting piece is connected to the top of a first supporting rod on the frame through a first damping connecting seat, the extending direction of the first supporting rod is perpendicular to the distribution direction of the first connecting piece and the second connecting piece, and the second connecting piece is connected to the bottom of a second supporting rod of the frame through a second damping connecting seat; or the damping mechanism comprises a support, a group of third damping connecting seats used for connecting the mist exhausting fan are arranged on the support, and the support is connected with the frame through the damping connecting mechanism.

Description

Semiconductor product processing equipment and mist removal system Technical Field The invention relates to the field of semiconductor processing equipment, in particular to semiconductor product processing equipment and a mist exhausting system. Background When the semiconductor products such as wafers are thinned and cut, the cooling liquid needs to be sprayed to the cutting position or the thinning position, so that a large amount of water mist can be generated in a processing box of a processing mechanism, and therefore, a mist discharge pipe is arranged on the processing box and is connected with a mist extraction fan, and the water mist in the processing box is discharged to the outside. As shown in the patent document disclosed in the application publication No. CN119897527a, the mist exhaust fan is directly and rigidly connected to the frame, when only one mist exhaust fan is used, the power of the mist exhaust fan needs to be set larger, which causes larger vibration during operation of the mist exhaust fan, and the vibration during operation of the mist exhaust fan is transmitted to the main shaft of the processing mechanism, thereby affecting the processing precision of the main shaft. Disclosure of Invention The invention aims to solve the problems in the prior art and provides a semiconductor product processing device and a mist exhausting system. The aim of the invention is achieved by the following technical scheme: The semiconductor product processing equipment comprises a mist exhausting system, wherein the mist exhausting system comprises a mist exhausting fan, and the mist exhausting fan is connected with a rack through a damping mechanism; The damping mechanism comprises a connector, the mist exhausting fan is arranged on a first side of a main body of the connector, a first connecting piece is arranged on the first side of the main body, a second connecting piece is arranged on a second side, opposite to the first side, of the main body, the first connecting piece is connected to the top of a first supporting rod on the frame through a first damping connecting seat, the extending direction of the first supporting rod is perpendicular to the distribution direction of the first connecting piece and the second connecting piece, and the second connecting piece is connected to the bottom of a second supporting rod of the frame through a second damping connecting seat; or the damping mechanism comprises a support, a group of third damping connecting seats used for connecting the mist exhausting fan are arranged on the support, and the support is connected with the frame through the damping connecting mechanism. Preferably, the mist exhausting fan comprises a shell, an air inlet pipe is arranged at the bottom of the shell, an air outlet pipe is arranged at the side part of the shell, and a power source is arranged at the top of the shell. Preferably, the first side of main part sets up first connecting pipe, second side and sets up the second connecting pipe, first connecting pipe and second connecting pipe coaxial and horizontal extension, the intake pipe of arranging the fog fan passes through 90 elbow connection first connecting pipe, the second connecting pipe is used for connecting the first fog pipe of arranging of processing case. Preferably, a third connecting pipe for connecting the second mist discharging pipe on the cleaning barrel body is arranged on the third side of the main body, and the third connecting pipe extends obliquely downwards. Preferably, an automatic valve is arranged between the third connecting pipe and the second mist discharging pipe. Preferably, the second connecting pipe of the connector is connected with the first mist discharging pipe of the processing box through a hose or a corrugated pipe, and/or the third connecting pipe of the connector is connected with the second mist discharging pipe of the cleaning barrel body through a hose. Preferably, the third shock absorption connecting seats are three or four and equally distributed circumferentially. Preferably, the damping connecting mechanism comprises a rubber pad, a locking plate and connecting bolts, the rubber pad is clamped on two sides of a vertical plate of the support, the rubber pad and the vertical plate are connected with a third supporting rod of the frame in a matched mode through the connecting bolts penetrating through the rubber pad and the vertical plate, and the connecting bolts are in non-contact with the rubber pad and the locking plate. Preferably, the air inlet pipe is connected with one end of a tee joint through a hose, and the other two ends of the tee joint are connected with the first mist discharging pipe and the second mist discharging pipe. The mist exhausting system comprises a mist exhausting fan which is arranged on the damping mechanism, The damping mechanism comprises a connector, the mist exhausting fan is arranged on a first side of a main body of the connector, a first c