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CN-121977079-A - Recovery medium valve with controllable back suction quantity

CN121977079ACN 121977079 ACN121977079 ACN 121977079ACN-121977079-A

Abstract

The invention belongs to the technical field of valve bodies, and discloses a recovery medium valve with controllable back suction quantity, which comprises a valve body component, wherein a valve core component for controlling medium on-off is arranged in one end of the valve body component, when the valve is in an open circuit state, a recovery fin plate forms an opening and closing structure at the periphery of a recovery pedestal table, when the recovery fin plate changes from a closed structure to an open structure at the periphery of the recovery pedestal table, a liquid pumping structure is formed between the recovery fin plate and the recovery pedestal table, at this time, the medium in the medium outlet channel enters the liquid pumping cavity formed by the recovery wing plate and the recovery bottom shaft table through the seat bin liquid suction groove, when the recovery wing plate is changed from an open structure to a closed structure at the periphery of the recovery bottom shaft table, the medium in the liquid pumping cavity between the recovery bottom shaft table and the recovery wing plate is compressed and discharged from the seat bin liquid discharge pipe, and through the structure, the medium breaking and medium recovery of the valve body in the valve body assembly are realized, and the pumping of the recovery medium is synchronously realized.

Inventors

  • WANG QIONG
  • ZHANG ZHIJUN

Assignees

  • 迅势科技(苏州)有限公司

Dates

Publication Date
20260505
Application Date
20260407

Claims (10)

  1. 1. The medium recycling valve with the controllable back suction quantity comprises a valve body assembly (100) and is characterized in that a valve core assembly (200) for controlling medium on-off is arranged in one end of the valve body assembly (100), a medium recycling module for recycling the medium is arranged in the other end of the valve body assembly (100), a back suction quantity control assembly (300) for controlling the back suction quantity is arranged at the top of the medium recycling module, and when the valve core assembly (200) is controlled to block the medium at the inlet of the valve body assembly (100), the medium recycling module is automatically triggered to recycle the medium at the outlet of the valve body assembly (100).
  2. 2. The valve with controllable back suction capacity for recycling medium according to claim 1, wherein the valve body assembly (100) comprises a third valve body (103), two ends of the top of the third valve body (103) are respectively fixedly provided with a first valve body (101) and a second valve body (102), a valve core moving cavity (107) is formed inside the first valve body (101), a first moving cavity (108) and a second moving cavity (111) are formed inside the second valve body (102), a grooved inner disc (109) is fixedly arranged between the first moving cavity (108) and the second moving cavity (111), a medium inlet channel (104), a medium blocking channel (105) and a medium outlet channel (106) are formed inside the third valve body (103), a sealing cavity (116) is formed at one end of the third valve body (103) opposite to the top of the valve core moving cavity (107), a recycling cavity (115) is formed at the other end of the third valve body (103) opposite to the top of the second moving cavity (111), a first side of the second moving cavity (111) is provided with a first inlet (110), a pilot inlet (112) is formed at one side of the first moving cavity (111), a second interface (114) is arranged on one side of the medium outlet channel (106).
  3. 3. The valve with the controllable back suction capacity for recycling media according to claim 2, wherein the valve core assembly (200) comprises a valve core piston (201), a first top pressing spring (202) and a second top pressing spring (203) are fixedly arranged at the top of the valve core piston (201), and a first sealing ring (204) is fixedly arranged at the bottom of the valve core piston (201); The valve core piston (201) moves up and down in the valve core moving cavity (107), the edge of the first sealing ring (204) is in airtight and fixed connection with the top of the airtight cavity (116), and the tops of the first jacking spring (202) and the second jacking spring (203) are abutted to and fixed to the top of the valve core moving cavity (107).
  4. 4. The valve for recovering medium with controllable back suction amount according to claim 3, wherein the back suction amount control assembly (300) comprises a control screw (301), and a tightening screw cap (303) and a limiting table (302) are fixedly arranged at the top and the bottom of the control screw (301); the control screw rod (301) is in threaded connection with the top of the second valve body (102), the limiting table (302) is arranged in the first moving row cavity (108), and the tightening nut (303) is arranged above the second valve body (102).
  5. 5. The recycling medium valve with controllable back suction amount of claim 4, wherein the medium recycling module comprises a medium recycling assembly (400), the medium recycling assembly (400) comprises a collision sliding rod (403), a connecting piston (401) and a back suction piston (404) are fixedly arranged at the top and the bottom of the collision sliding rod (403), a second sealing ring (405) is fixedly arranged at the bottom of the back suction piston (404), and a collision spring (402) is fixedly arranged at the bottom of the connecting piston (401); The interference slide bar (403) and the inner disc (109) with the groove are penetrated and slide, the connecting piston (401) moves up and down in the first moving row cavity (108), the back suction piston (404) moves up and down in the second moving row cavity (111), the edge of the second sealing ring (405) is fixedly connected with the top of the recovery cavity (115) in a sealing way, and the top and the bottom of the interference spring (402) are respectively fixed on the connecting piston (401) and the inner disc (109) with the groove.
  6. 6. The recycling medium valve with controllable back suction amount according to claim 4, wherein the medium recycling module comprises a driving piston assembly (500), a driving shaft assembly (600), a recycling arm assembly (700) and a recycling bin assembly (800), the driving piston assembly (500) comprises a piston rod (501), a first driving piston (503) and a second driving piston (504) are fixedly arranged at the top and the bottom of the piston rod (501) respectively, a connecting bottom rod (505) is fixedly arranged at the bottom of the second driving piston (504), a collar (507) is fixedly arranged at the bottom of the connecting bottom rod (505), a raised head (506) is fixedly arranged on the inner wall of the collar (507), and a reset spring (502) is fixedly arranged at the bottom end of the first driving piston (503); The driving shaft assembly (600) comprises a driving shaft bottom rod (601), driving shaft ejector rods (603) and fixed arm rings (604) are fixedly arranged at the top and the bottom of the driving shaft bottom rod (601), spiral sliding grooves (602) are formed in the driving shaft ejector rods (603), a plurality of pawls (605) are rotatably arranged on the inner wall of the bottom of the fixed arm rings (604), and pawl springs (606) are fixedly arranged between the pawls (605) and the inner wall of the fixed arm rings (604); The recovery arm assembly (700) comprises a recovery end shaft lever (701), a ratchet wheel (702) and a recovery bottom shaft table (703) are fixedly arranged at the top and the bottom of the recovery end shaft lever (701), a plurality of recovery fin plates (704) are rotatably arranged on the recovery bottom shaft table (703), and fin plate springs (705) are fixedly arranged between the recovery fin plates (704) and the recovery bottom shaft table (703); The recycling bin assembly (800) comprises a recycling bin (801), a bin liquid suction groove (804) and a bin liquid discharge pipe (803) are arranged at the bottom of the recycling bin (801), and an inclined block (802) is fixedly arranged on the inner wall of the recycling bin (801).
  7. 7. The valve for recovering medium with controllable back suction amount according to claim 6, wherein the recovering seat cabin (801) is fixedly arranged in the recovering cavity (115), the seat cabin liquid suction groove (804) is communicated with the medium outlet channel (106), the seat cabin liquid discharge pipe (803) is provided with a one-way valve, and the seat cabin liquid discharge pipe (803) penetrates through the third valve body (103) to be communicated with an external medium recovering system.
  8. 8. The valve for recycling medium with controllable back suction amount as set forth in claim 6, wherein the top of the recycling bin (801) and the top of the recycling cavity (115) are fixedly provided with an inner groove sealing disk, the recycling end shaft lever (701) is rotatably arranged on the inner groove sealing disk through a bearing, the ratchet wheel (702) is positioned above the inner groove sealing disk, the recycling pedestal (703) is positioned below the inner groove sealing disk, and the recycling pedestal (703) is positioned in the recycling bin (801).
  9. 9. The valve with the controllable back suction capacity for recycling media of claim 6, wherein the fixed arm ring (604) is sleeved outside the ratchet wheel (702), the pawl (605) is abutted against the ratchet wheel (702) through pushing of the pawl spring (606), an inner groove fixed disc is arranged at the bottom of the second moving row cavity (111), the driving shaft bottom rod (601) is rotatably arranged on the inner groove fixed disc through a bearing, and the driving shaft ejector rod (603) is arranged above the inner groove fixed disc.
  10. 10. The valve for recovering medium with controllable amount of suck-back according to claim 6, wherein the piston rod (501) and the grooved inner disc (109) slide through, the first driving piston (503) moves up and down in the first moving chamber (108), the second driving piston (504) slides up and down in the second moving chamber (111), the collar (507) is sleeved outside the driving shaft ejector rod (603), the raised head (506) is inserted in the spiral chute (602), and the top and bottom of the return spring (502) are respectively fixed on the first driving piston (503) and the grooved inner disc (109).

Description

Recovery medium valve with controllable back suction quantity Technical Field The invention belongs to the technical field of valve bodies, and particularly relates to a recycling medium valve with a controllable back suction amount. Background At present, a medium valve commonly used in the semiconductor industry is made of corrosion-resistant materials such as PFA (perfluoroalkoxy resin) and has a certain medium recovery function. However, the recovery valve in the prior art has the following problems: the back suction quantity cannot be accurately controlled, and most valves adopt a fixed recovery structure or a simple negative pressure adsorption mode, and the back suction quantity cannot be adjusted according to actual process requirements, so that excessive recovery or incomplete recovery of the medium is often caused. Excessive recovery can cause medium waste and process fluctuation, and insufficient recovery can cause pipeline residue to influence the purity and consistency of the next process. The recovery efficiency is low, the structure is complex, a part of valves are designed in a multi-component separation mode, the recovery process depends on an external power system, the structure is complex, the response is slow, and the integrated semiconductor intelligent production line is not easy to integrate. Therefore, a special valve which can not only resist strong corrosion and high-purity medium, but also realize accurate and controllable back suction quantity, has compact structure, is easy to integrate and is suitable for a semiconductor clean environment is needed to improve the process stability, the resource utilization rate and the chip yield. Disclosure of Invention To solve the problems set forth in the background art. The invention provides a recycling medium valve with controllable back suction quantity, which has the characteristic of easy integration. In order to achieve the above purpose, the invention provides a recycling medium valve with controllable back suction amount, which comprises a valve body assembly, wherein a valve core assembly for controlling on-off of a medium is arranged in one end of the valve body assembly, a medium recycling module for recycling the medium is arranged in the other end of the valve body assembly, a back suction amount control assembly for controlling the back suction amount is arranged at the top of the medium recycling module, and when the valve core assembly is controlled to block the medium at the inlet of the valve body assembly, the medium recycling module is automatically triggered to recycle the medium at the outlet of the valve body assembly. In a preferred scheme of a recycling medium valve with controllable back suction capacity, the valve body assembly comprises a third valve body, a first valve body and a second valve body are respectively and fixedly arranged at two ends of the top of the third valve body, a valve core cavity is formed in the first valve body, a first motion cavity and a second motion cavity are formed in the second valve body, a grooved inner disc is fixedly arranged between the first motion cavity and the second motion cavity, a medium inlet channel, a medium blocking channel and a medium outlet channel are formed in the third valve body, one end of the third valve body is opposite to the top of the valve core cavity, a closed cavity is formed in the other end of the third valve body opposite to the top of the second motion cavity, a first pilot inlet is formed in one side of the bottom of the second motion cavity, a second pilot inlet is formed in one side of the bottom of the valve core cavity, a first interface is formed in one side of the medium inlet channel, and a second interface is formed in one side of the medium outlet channel. In the preferable scheme of the recycling medium valve with controllable back suction quantity, the valve core assembly comprises a valve core piston, a first top pressing spring and a second top pressing spring are fixedly arranged at the top of the valve core piston, and a first sealing ring is fixedly arranged at the bottom of the valve core piston; the valve core piston moves up and down in the valve core moving cavity, the edge of the first sealing ring is fixedly connected with the top of the closed cavity in a closed mode, and the tops of the first top pressing spring and the second top pressing spring are fixedly abutted to the top of the valve core moving cavity. In the preferable scheme of the recycling medium valve with controllable back suction quantity, the back suction quantity control assembly comprises a control screw, and a tightening nut and a limiting table are respectively fixedly arranged at the top and the bottom of the control screw; The control screw is in threaded connection with the top of the second valve body, the limiting table is arranged in the first moving cavity, and the tightening nut is arranged above the second valve body. In the preferred scheme o