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CN-121977084-A - High-tolerance metal gate valve

CN121977084ACN 121977084 ACN121977084 ACN 121977084ACN-121977084-A

Abstract

The application relates to the field of fluid control, in particular to a high-tolerance metal gate valve, which comprises a valve box, wherein a first valve port and a second valve port which are coaxial are arranged on the valve box, a guide rod is arranged in the valve box, a sliding seat is arranged on the guide rod, two sides of the sliding seat are respectively connected with a first valve plate and a second valve plate through elastic parts, the first valve plate is provided with a metal sealing ring, the second valve plate is provided with a metal abutting ring, a squeezing plate is arranged between the first valve plate and the second valve plate, a deflection mechanism is arranged between the squeezing plate and the valve plate, the squeezing plate is connected with a driving mechanism, the gate valve can be in a synchronous moving and squeezing sealing state, the valve box also has a dead point passing self-locking structure, a limiting structure and the like, the metal sealing ring and the like are specially designed, and the elastic parts are arc-shaped elastic plates and the like. The application achieves the technical effects of realizing stable and reliable extrusion sealing, ensuring the normal operation of the gate valve in different states and improving the tolerance and sealing performance of the gate valve.

Inventors

  • YUAN SHAOPENG
  • GU WENWEI

Assignees

  • 日扬电子科技(上海)有限公司

Dates

Publication Date
20260505
Application Date
20260326

Claims (10)

  1. 1. A high-tolerance metal gate valve comprises a valve box (1), wherein a first valve port (11) and a second valve port (12) which are coaxially arranged are formed on the valve box (1), and the high-tolerance metal gate valve is characterized in that a guide rod (2) which is perpendicular to the axes of the first valve port (11) and the second valve port (12) is arranged in the valve box (1), a sliding seat (3) is connected onto the guide rod (2) in a sliding manner, a first valve plate (33) is connected onto the side part of the sliding seat (3) close to the first valve port (11) through a first elastic piece (31), a second valve plate (34) is connected onto the side part of the sliding seat (12) through a second elastic piece (32), a metal sealing ring (331) is arranged on one side of the first valve plate (33) away from the sliding seat (3), a metal abutting ring (341) is arranged on one side of the second valve plate (34), a pressing plate (4) is arranged between the first valve plate (33) and the second valve plate (34), a pressing plate (4) is connected onto the side of the sliding seat (4) through a first elastic piece (31), a second valve plate (34) through a second elastic piece (32), a second valve plate (34) is connected onto a driving mechanism (7) through a second elastic piece (32), a pressing plate (4) is connected onto the first pressing plate (4), a driving mechanism (7), the valve plate is characterized in that the gate valve is in a synchronous moving state and an extrusion sealing state, the extrusion plate (4) drives the first valve plate (33), the second valve plate (34) and the sliding seat (3) to synchronously move between the first valve port (11) and the second valve port (12) along the guide rod (2) through the deflection mechanism in the synchronous moving state, the sliding seat (3) is blocked and limited to move in the extrusion sealing state, the extrusion plate (4) continues to move and generates displacement relative to the sliding seat (3), the deflection mechanism is driven to generate deflection action, the first valve plate (33) and the second valve plate (34) are further spread, the metal sealing ring (331) is in sealing fit with the first valve port (11), and the metal abutting ring (341) is in supporting abutting connection with the second valve port (12).
  2. 2. The high-tolerance metal gate valve according to claim 1, wherein the deflection mechanism has a dead-center self-locking position, and when the metal sealing ring (331) is pressed against the first valve port (11) in the extrusion sealing state, the deflection mechanism passes through the dead-center self-locking position and drives the extrusion plate (4) to abut against the mechanical stop part, so that after the driving mechanism (7) withdraws the pushing force, the deflection mechanism can maintain the locking state by utilizing the reverse elastic restoring force generated by the pressing of the metal sealing ring (331) and the metal abutting ring (341).
  3. 3. The high-tolerance metal gate valve according to claim 2, wherein the deflection mechanism comprises a plurality of deflection blocks (5) which are arranged in parallel, two ends of each deflection block (5) are respectively clamped between a first valve plate (33) and a pressing plate (4) and between a second valve plate (34) and the pressing plate (4) in a swinging way, abutting grooves (6) matched with the ends of the deflection blocks (5) are formed on opposite inner side surfaces of the first valve plate (33), the second valve plate (34) and the pressing plate (4), a connecting inclined surface (61) and a transverse surface (62) are connected at the bottom of each abutting groove (6), protruding deflection fulcra (63) are formed at the connecting position of each inclined surface (61) and the transverse surface (62), the ends of the deflection blocks (5) are abutted against the deflection fulcra (63) to form swinging fit, limiting lugs (35) serving as mechanical stop parts are arranged on the sliding seat (3), and when the deflection blocks (5) swing from the inclined surface (61) to the transverse surface (62) and are abutted against the self-locking lugs (35).
  4. 4. A high tolerance metal gate valve according to claim 3, wherein a limit structure for limiting the travel of the slide (3) is provided in the valve housing (1) or on the guide rod (2), and in the compression sealing state, the slide (3) is blocked by the limit structure to limit the travel, and the compression plate (4) continues to move and moves relative to the slide (3).
  5. 5. The high-tolerance metal gate valve according to claim 4, wherein an adjusting plate (9) is fixed on the inner wall of the valve box (1), one end of the guide rod (2) far away from the driving mechanism (7) is fixed on the adjusting plate (9), an adjusting bolt (91) is connected to the adjusting plate (9) in a threaded mode, and the end portion of the adjusting bolt (91) forms the limiting structure for limiting the moving stroke of the sliding seat (3).
  6. 6. A high-tolerance metal gate valve according to claim 3, characterized in that said metal sealing ring (331) is arranged coaxially to the metal abutment ring (341), and said deflector blocks (5) are arranged symmetrically in groups centered on the axis of the metal sealing ring (331).
  7. 7. A high tolerance metal gate valve according to claim 1, wherein the sealing surface of the metal sealing ring (331) is coated with a layer of soft metal powder.
  8. 8. The high-tolerance metal gate valve according to claim 1, wherein the first valve port (11) is provided with a conical groove (111), the metal sealing ring (331) is of a conical structure matched with the conical groove (111), a large port of the metal sealing ring (331) is arranged towards the first valve port (11) to realize line sealing or surface sealing after being abutted against the conical groove (111), the first valve plate (33) is provided with a frustum (332), a small port of the metal sealing ring (331) is sleeved on the frustum (332), and the frustum (332) is provided with a cover plate (333) for position limiting.
  9. 9. The high-tolerance metal gate valve according to claim 1, wherein the first elastic piece (31) and the second elastic piece (32) are arc-shaped elastic plates, a clamping groove (36) matched with the arc-shaped elastic plates is formed in the top end of the sliding seat (3), a positioning pin (361) is inserted into the clamping groove (36), the bottom end of the arc-shaped elastic plates is fixedly arranged on the sliding seat (3), and the top ends of the arc-shaped elastic plates are connected to the positioning pin (361) in a sliding mode through sliding holes.
  10. 10. The high-tolerance metal gate valve according to claim 1, wherein the first valve plate (33) and the second valve plate (34) are both rectangular in structure, the side edges of the first valve plate (33) and the second valve plate (34) are both provided with lug plates (39) used for being connected with arc-shaped elastic plates, and the slide seat (3) is provided with avoidance grooves (37) for providing movable spaces for the lug plates (39).

Description

High-tolerance metal gate valve Technical Field The application relates to the field of fluid control, in particular to a high-tolerance metal gate valve. Background In the fields of high precision such as semiconductor manufacturing, high energy physics, nuclear industry, aerospace and the like, a process chamber is often in extreme environments such as ultra-high vacuum, extremely high temperature or strong radiation, and under the working conditions, the traditional rubber sealing material can age, air out or embrittle in radiation and is not applicable any more, so that an all-metal sealing gate valve is required to be adopted, and in order to achieve a strict leakage rate index, an extremely large sealing specific pressure is required to be applied to a metal sealing ring by the all-metal sealing gate valve, and a driving mechanism inside a valve plate is required to drive the valve plate to perform long-stroke switching movement and also a huge transverse expanding force is required to be provided at a closing position. At present, the prior metal gate valve internal driving mechanism mainly has two main technical schemes and inherent technical defects that the first type is a steel ball inclined surface type driving structure which converts longitudinal thrust into transverse stretching force by rolling a steel ball on a conical track or an inclined surface, however, the steel ball is in typical point contact with the track, under the action of huge thrust required for constructing a metal hard seal, the Hertz contact stress of the steel ball and the track contact point is extremely high, the high stress state exists for a long time, the local plastic deformation or the metal stripping of the track surface is extremely easy to occur, further, the valve action is blocked and the precision is lost, the generated metal particles can seriously pollute a clean vacuum chamber, the integral tolerance of the valve is poor, the service life is limited, the second type is a wedge block, the wedge block structure is extruded by virtue of large-area sliding friction, the friction resistance is large, and the metal cold welding is extremely easy to occur in a vacuum environment, and the valve is blocked. In summary, how to design a driving mechanism that can avoid high stress abrasion caused by point contact, simplify the internal structure, and provide stable and reliable high-load transverse expanding force is a technical problem to be solved in the field of metal gate valves at present. Disclosure of Invention In order to overcome the defects in the prior art, the application provides the high-tolerance metal gate valve, which can realize stable synchronous movement and reliable extrusion sealing, ensure the normal operation of the gate valve in different states and improve the technical effects of the tolerance and sealing performance of the gate valve. The application is realized by the following technical scheme: A high-tolerance metal gate valve comprises a valve box, a first valve port and a second valve port which are coaxially arranged are formed on the valve box, guide rods which are perpendicular to the axes of the first valve port and the second valve port are arranged in the valve box, a sliding seat is connected to the guide rods in a sliding mode, a first valve plate is connected to the side part, close to the first valve port, of the sliding seat through a first elastic piece, a second valve plate is connected to the side part, close to the second valve port, of the sliding seat through a second elastic piece, a metal sealing ring is arranged on one side, away from the sliding seat, of the first valve plate, a metal abutting ring is arranged on one side, away from the sliding seat, of the second valve plate, a pressing plate is arranged between the first valve plate and the second valve plate, a deflection mechanism is arranged between the pressing plate and the first valve plate, and the second valve plate, and a driving mechanism is connected to the pressing plate along the guide rods, so that the sliding seat is in a synchronous moving state and a pressing sealing state, the pressing plate is driven by the deflection mechanism to synchronously move along the first valve plate, the second valve plate and the guide rods, the second valve plate is in a synchronous moving state, the pressing plate is in a pressing state, the synchronous moving state, the pressing plate is driven by the metal sealing ring is continuously, and the pressing plate is in a pressing state, and the pressing plate is in a sealing state, and the pressing plate is formed, and the pressing plate is in a sealing state, and the pressing plate is continuously pressed against the valve plate, and the second valve plate and the valve plate. The deflection mechanism arranged on the high-tolerance metal gate valve has the advantages that the deflection mechanism has obvious effects, in a synchronous moving state, the extrusion plat