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CN-121977100-A - Pneumatic sequential locking module and vacuum valve

CN121977100ACN 121977100 ACN121977100 ACN 121977100ACN-121977100-A

Abstract

The application discloses a pneumatic sequential locking module and a vacuum valve. The module comprises an air distribution block, a first unidirectional control assembly, a second unidirectional control assembly, a first mechanical trigger mechanism, a second mechanical trigger mechanism and a pneumatic unlocking mechanism. When the valve is opened, the second driving mechanism horizontally retreats to the right position to establish back pressure, and the pneumatic unlocking mechanism is triggered to release the locking in the vertical direction, so that strict L-shaped sequential movement is realized. The vacuum valve is integrated with the module, and a two-to-two transverse driving layout is adopted inside the module, and the module is matched with a flat elliptic piston and a connecting sheet decoupling structure with toughness. The application utilizes pure pneumatic-mechanical logic to realize accurate interlocking of single air source to double-shaft action, effectively reduces dust generation caused by friction of the sealing ring, basically prevents the valve plate from falling accidentally, and has the advantages of compact structure, safety, reliability, long service life and the like.

Inventors

  • YUAN SHAOPENG
  • GU WENWEI

Assignees

  • 日扬电子科技(上海)有限公司

Dates

Publication Date
20260505
Application Date
20260326

Claims (10)

  1. 1. A pneumatic sequential locking module for controlling a vacuum valve for L-shaped movement, said vacuum valve comprising a first drive mechanism (200) driving a valve plate (320) to move in a vertical direction and a second drive mechanism (210) driving the valve plate (320) to move in a horizontal direction, said module comprising: The air distribution block comprises an air distribution block body (110), wherein a vertical air passage (111) and a horizontal air passage (112) which are mutually communicated are arranged in the air distribution block body, and the air distribution block body is provided with a first air port (113) and a second air port (114) which are connected with an external air source and a plurality of control ports which are connected with a first driving mechanism (200) and a second driving mechanism (210); The first unidirectional control assembly (120) is arranged in the vertical direction air channel (111), and is connected with a first mechanical trigger mechanism (130); The second unidirectional control assembly (140) is arranged in the horizontal direction air channel (112), the second unidirectional control assembly (140) is connected with a second mechanical triggering mechanism (150), and the second mechanical triggering mechanism (150) is configured to be physically triggered when the first driving mechanism (200) drives the valve plate (320) to move to a first closing position, so as to control the second unidirectional control assembly (140) to conduct the horizontal direction air channel (112); the first mechanical triggering mechanism (130) is configured to be physically triggered when the second driving mechanism (210) drives the valve plate (320) to move to a first opening position, the first unidirectional control assembly (120) is controlled to conduct the vertical direction air channel (111), and when the air pressure of the vertical direction air channel (111) reaches a preset threshold value, the pneumatic unlocking mechanism (160) is opened to release locking in the vertical direction; the valve (301) moves along the sequence of vertically lifting to horizontally sealing or horizontally retreating to vertically falling through switching the air inlet and outlet states of the first air vent (113) and the second air vent (114).
  2. 2. A pneumatic sequential locking module according to claim 1, further comprising: the unidirectional pressure regulating valve (170) is arranged in series in the horizontal air channel (112) leading to the second driving mechanism (210); the unidirectional pressure regulating valve (170) is configured to regulate the pressure of the gas entering the second drive mechanism (210) only during the sealing stroke of the valve (301), without restricting the gas flow pressure or flow rate during the retracting stroke of the valve (301).
  3. 3. The utility model provides a vacuum valve, includes valve body (300), valve rod (310) and valve plate (320), valve body (300) are equipped with valve (301), valve rod (310) swing joint in valve body (300), valve plate (320) are fixed in valve rod (310) tip, valve plate (320) are used for opening and close valve (301), its characterized in that still includes: the pneumatic sequential locking module of claim 1 or 2; The middle connecting component (400) is fixed at the center of the valve rod (310) and is movably connected with the valve body (300); The valve comprises a valve body (300), a first driving mechanism (200) and a second driving mechanism (210), wherein the first driving mechanism (200) is at least arranged in the valve body (300) and is adjacent to the first driving mechanism (200) and positioned on two sides of the middle connecting assembly (400), the output end of the first driving mechanism (200) is connected with the middle connecting assembly (400), the second driving mechanism (210) is arranged in the valve body (300) and positioned between the adjacent first driving mechanisms (200), and the output end of the second driving mechanism (210) is opposite to the middle connecting assembly (400).
  4. 4. A vacuum valve according to claim 3, wherein the valve body (300) has a mounting cavity (302) formed therein, the intermediate connection assembly (400) is located in the mounting cavity (302), and the intermediate connection assembly (400) comprises: A slider (410) fixed to the valve stem (310) and extending toward both sides away from the valve stem (310); One end of the connecting sheet (420) is fixedly connected with one side, far away from the valve rod (310), of the sliding block (410), the other end of the connecting sheet is connected with the output end of the first driving mechanism (200) after extending along the length of the valve rod (310), and the connecting sheet (420) has preset toughness so as to reduce radial force transmitted to the first driving mechanism (200) when the vacuum valve moves in different directions.
  5. 5. The vacuum valve according to claim 4, wherein the output end of the first driving mechanism (200) is connected with a first movable connecting piece (430), the end of the connecting piece (420) is provided with a movable connecting hole, and the first movable connecting piece (430) penetrates through the movable connecting hole along the horizontal direction, so that the connecting piece (420) has a preset movable allowance along the horizontal direction and is relatively fixed along the vertical direction.
  6. 6. The vacuum valve according to claim 4, wherein the valve body (300) is provided with a movable hole (303) communicating the inside and the outside of the installation cavity (302), the slider (410) is connected with a guide rod (440) in a vertical sliding manner, the end part of the guide rod (440) can be abutted to the cavity wall of the installation cavity (302), one end of the guide rod (440) penetrates through the movable hole (303), and a preset movable allowance is reserved between the end part of the guide rod (440) and the wall of the movable hole (303) along the horizontal direction.
  7. 7. The vacuum valve according to claim 6, wherein a first trigger structure (450) is arranged at one end of the guide rod (440) located outside the mounting cavity (302), the first trigger structure (450) can be abutted against the first mechanical trigger mechanism (130), a second trigger structure (460) is connected to the output end of the first driving mechanism (200), and the second trigger structure (460) can be abutted against the second mechanical trigger mechanism (150).
  8. 8. The vacuum valve as claimed in claim 4, wherein the installation cavity (302) has a semi-arc chute (304) formed on a cavity wall, a sliding portion (411) is formed on one side of the slider (410), and the sliding portion (411) is slidably connected with the semi-arc chute (304) when the valve plate (320) moves in a vertical direction.
  9. 9. A vacuum valve according to claim 3, wherein the second driving mechanism (210) comprises a flat elliptic piston (211), an elliptic cavity is formed in the valve body (300), the flat elliptic piston (211) is slidably connected to the inner wall of the elliptic cavity along the horizontal direction, the flat elliptic piston (211) is connected with an intermediate connection assembly (400) through a first connection piece (213), and the elliptic cavity is communicated with a plurality of control ports.
  10. 10. The vacuum valve according to claim 9, wherein the flat elliptic piston (211) is provided with a first mounting groove (212), a notch of the first mounting groove (212) is exposed out of the flat elliptic piston (211), the first connecting piece (213) is mounted in the first mounting groove (212) and is detachably connected with the intermediate connecting assembly (400), a sealing plate (214) is arranged on one side of the flat elliptic piston (211) away from the first mounting groove (212), and the sealing plate (214) is detachably connected with the valve body (300).

Description

Pneumatic sequential locking module and vacuum valve Technical Field The application relates to the technical field of valves, in particular to a pneumatic sequential locking module and a vacuum valve. Background In the field of semiconductor manufacturing (e.g., etching, thin film deposition), vacuum valves are a core component that enables isolation of a vacuum chamber from the atmosphere. However, the existing conventional L-motion (L-shaped motion) vacuum rectangular valve has the following main technical defects in practical application: The motion trail of the existing L-motion valve usually completes compound motion under the same driving, and at the moment that the valve plate and the sealing surface of the valve body are about to be attached or detached, the mechanical structure often generates unavoidable rotation or sliding friction components. This friction causes the surface of the seal ring to experience shear forces and thus produce tiny wear and, in turn, dust particles of a small diameter. In extremely demanding semiconductor processes, such as 14nm and below, these particles, once they fall into the wafer, can cause short circuits, open circuits, or device failures, severely degrading chip yields. Dust generated by abrasion not only pollutes products, but also reduces the cleanliness grade of the vacuum chamber, and is difficult to meet the requirements of ultra-high clean environments such as ISO1 grade and the like. In order to solve the problem that the sealing ring rubs and dust is generated due to rotation or sliding components in the sealing process of the traditional single-shaft driving L-shaped valve, a plurality of improvements have been proposed in the related art. For example, chinese patent publication No. CN107763236a discloses a vacuum valve. The vacuum valve utilizes the relative motion of the sliding block and the guide rail and the specific guiding component of the tilting-adjusting direction to decompose the motion of the valve plate into two stages of longitudinal transportation and transverse compression by arranging a complex longitudinal stroke-linear guiding device and a complex transverse stroke-linear guiding device. The design can reduce the friction of the sealing ring on the joint surface to a certain extent. However, although the above related art realizes motion separation, in practical ultra-clean environment application and engineering manufacturing, there still exists a technical problem to be solved in that, in order to realize sequential switching between longitudinal and transverse directions, the related art adopts a plurality of groups of mutually nested or parallel guide rail sliding block systems, and relies on precise mechanical cooperation to realize motion conversion. The structure has the advantages of high number of parts, extremely high processing precision requirement, high manufacturing cost, easy occurrence of gaps of the complex mechanical transmission chain due to abrasion after long-term operation, and increased maintenance difficulty and failure rate. Disclosure of Invention The application provides a pneumatic sequential locking module and a vacuum valve, which aim to solve the technical problem of cost increase caused by complex structure of the existing vacuum valve. In a first aspect, the present application provides a pneumatic sequential locking module, which adopts the following technical scheme: A vacuum valve for controlling L-shaped movement, the vacuum valve comprising a first drive mechanism for driving the valve plate to move in a vertical direction and a second drive mechanism for driving the valve plate to move in a horizontal direction, the module comprising: the air distribution block body is internally provided with a vertical air passage and a horizontal air passage which are mutually communicated, and is provided with a first air vent and a second air vent which are connected with an external air source, and a plurality of control ports which are connected with the first driving mechanism and the second driving mechanism; The first unidirectional control assembly is arranged in the vertical direction air passage and is connected with a first mechanical trigger mechanism; the second unidirectional control assembly is arranged in the horizontal air channel and is connected with a second mechanical triggering mechanism, and the second mechanical triggering mechanism is configured to be physically triggered when the first driving mechanism drives the valve plate to move to a first closing position so as to control the second unidirectional control assembly to conduct the horizontal air channel; The first mechanical trigger mechanism is configured to be physically triggered when the second driving mechanism drives the valve plate to move to a first opening position, the first unidirectional control component is controlled to conduct the vertical gas circuit, and when the air pressure of the vertical gas circuit reaches a