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CN-121977126-A - Multifunctional integrated pipe fitting structure

CN121977126ACN 121977126 ACN121977126 ACN 121977126ACN-121977126-A

Abstract

The invention discloses a multifunctional integrated pipe fitting structure, which comprises a pipe body with an inner cavity, wherein a plurality of pipe orifices are integrally arranged on the pipe body, a double-sided sealing element is arranged in at least one pipe orifice, an inner pipe fitting is arranged on the double-sided sealing element, and a detection equipment hanging point is arranged on the inner side of the double-sided sealing element. The multifunctional integration increases the space utilization rate, can be used for matching high-integration equipment, simultaneously satisfies multiple functions, remarkably improves the cost utilization rate, and can be used for batch production. The method not only reduces the production and manufacturing cost, but also can adapt to more complicated use working conditions and performance requirements in the development process of semiconductor equipment. The double-sided sealing piece realizes the arrangement of the supporting structure in the pipeline, different detection devices can be installed on the hanging points of the detection equipment according to the needs, the detection of different functions of the internal state in the pipeline is directly realized, and the pipeline connection requirement of high-requirement complete equipment can be met.

Inventors

  • LI ZONGYUAN
  • CHEN JUN
  • XIE RUYING

Assignees

  • 杭州大和热磁电子有限公司

Dates

Publication Date
20260505
Application Date
20251011

Claims (10)

  1. 1. The multifunctional integrated pipe fitting structure comprises a pipe main body (1) with an inner cavity (11), and is characterized in that a plurality of pipe orifices are integrally arranged on the pipe main body (1), a double-sided sealing element (7) is arranged in at least one pipe orifice, an inner pipe fitting (6) is arranged on the double-sided sealing element (7), and a detection equipment hanging point (9) is arranged on the inner side of the double-sided sealing element (7).
  2. 2. The multifunctional integrated pipe fitting structure according to claim 1, wherein the double-sided sealing member (7) comprises a sealing plate body (71) and a double-sided sealing locking pipe fitting (8) arranged on the sealing plate body (71).
  3. 3. The multifunctional integrated pipe fitting structure according to claim 2, wherein a circulation cavity (80) is arranged in the double-sided sealing locking pipe fitting (8), and an inner end sealing structure (84) and an outer end sealing structure (85) are respectively arranged at the inner end and the outer end of the double-sided sealing locking pipe fitting (8).
  4. 4. A multi-functional integrated pipe fitting structure as claimed in claim 3, wherein said inner end seal structure (84) comprises an inner seal plate mounting groove (86) and an inner end seal ring groove (83) provided on an inner end face, and a plurality of inner end face thread locking holes (82), and said outer end seal structure (85) comprises an outer end seal ring groove and a plurality of outer end face thread locking holes (81) provided on an outer end face.
  5. 5. The multi-functional integrated piping structure according to claim 4, wherein said inner end sealing structure (84) is connected to an inner sealing plate (50), and said outer end sealing structure (85) is connected to an outer sealing plate (60).
  6. 6. The multifunctional integrated pipe fitting structure according to claim 2, wherein the sealing plate body (71) is provided with a first sealing surface (72) and a second sealing surface (73), and the sealing plate body (71) is provided with a communication hole (74) penetrating the first sealing surface (72) and the second sealing surface (73) at a position deviated from the central axis of the sealing plate body (71).
  7. 7. The multifunctional integrated pipe fitting structure according to any one of claims 1 to 6, wherein one end of the inner pipe fitting (6) is connected with the double-sided sealing element (7) and communicated to the outside of the double-sided sealing element (7), and the other end of the inner pipe fitting (6) is connected with another pipe orifice except the pipe orifice where the double-sided sealing element is located.
  8. 8. The multifunctional integrated pipe fitting structure according to any one of claims 1 to 6, wherein the inner pipe fitting (6) is respectively communicated with double-sided sealing elements (7) on two pipe orifices.
  9. 9. The multifunctional integrated pipe fitting structure according to any one of claims 1 to 6, wherein each pipe orifice is provided with a plurality of welding flanges with different functions, and the welding flanges are of different specifications and models according to the functions.
  10. 10. The multifunctional integrated pipe fitting structure according to any one of claims 1 to 6, characterized in that the detection device hanging point (9) is used for connecting with a built-in detection device.

Description

Multifunctional integrated pipe fitting structure Technical Field The invention relates to the technical field of pipelines, in particular to a multifunctional integrated pipe fitting structure. Background The existing pipeline welding products generally adopt the single-flow characteristic of straight pipes or 90-degree bent pipes, are used for medium transmission, or are used as pressure relief ports and the like, and are widely used in common pipeline welding products, but most of welding pipelines have relatively single functions. However, under the environment of special space and special working condition, such as in a semiconductor modularized integrated device, the preparation space, the processing space and the transmission space required by the working of a main chamber are extremely harsh, meanwhile, the functional requirements of the welding pipeline are diversified, the conventional single-function welding pipeline structure is not applicable any more and cannot meet the use requirements, and in order to increase the functions, the space arrangement design difficulty of the whole device is increased, the appearance of the product is influenced, and the cost is also increased. The pipeline welding device is widely applied to the fields of semiconductor equipment, optical fiber equipment, hydraulic engineering, gas and liquid transportation and the like, and mainly depends on unique advantages, such as multiple-variable structure adaptation to complex and special structures, low cost and capability of meeting the use requirements by selecting adaptation pipelines and flange welding. In the prior art, a multi-channel pipeline such as a three-way pipe is adopted, but the multi-channel pipeline such as the three-way pipe and the four-way pipe realizes multi-port design, for example, chinese patent document CN 216867860U discloses a multi-way pipe, the multi-way pipe comprises a main pipeline, a side pipeline is arranged on one side of the top of the main pipeline, the side pipeline is mutually communicated with the main pipeline, a first communication port is arranged at the joint of the side pipeline and the main pipeline, a one-way valve mechanism for enabling the first communication port to be in one-way conduction is arranged in the side pipeline, and the one-way valve mechanism comprises an elastic valve and a fixing piece for fixing the elastic valve at the position of the first communication port. However, the existing multi-way pipe has a limited function, and in front of industrial products with increasingly improved demands, the problems of cost and multiple design difficulty are solved in a superposition quantity mode, so that the multifunctional expectation can be achieved, and the multi-way pipe is also broken through. Disclosure of Invention The invention aims to solve the problems that the existing pipeline in the existing semiconductor modularized integrated equipment is single in function or complex in structure, large in space arrangement difficulty, incapable of realizing diversified requirements on preparation space, processing space, transmission space and the like required by working of a main cavity, and the like. The technical scheme includes that the multifunctional integrated pipe fitting structure comprises a pipe body with an inner cavity, a plurality of pipe orifices are integrally arranged on the pipe body, a double-sided sealing piece is arranged in at least one pipe orifice, an inner pipe fitting is arranged on the double-sided sealing piece, and a hanging point of detection equipment is arranged on the inner side of the double-sided sealing piece. The multifunctional integrated pipe fitting structure is characterized in that a plurality of pipe orifices are arranged, the pipe orifices can form a plurality of branches, a double-sided sealing piece is arranged on the pipe orifice according to requirements, the pipe orifices can be opened and closed through the double-sided sealing piece, so that different functions are realized, the arrangement of a supporting structure in a pipeline is realized, the internal state can be detected in the pipeline, the double-sided sealing piece can flexibly adjust functions required by different use environments, a detection equipment hanging point is arranged in an inner cavity on the inner side of the double-sided sealing piece, different detection devices can be selectively arranged on the detection equipment hanging point according to requirements, the requirements for detecting air pressure water pressure, shunting media, pressure relief and detecting the internal media state can be met, different detection functions can be realized, the pipeline connection requirements of high-requirement complete equipment can be met, and the multifunctional integrated pipe fitting structure is convenient and quick, and high in efficiency. The multifunctional integration increases the space utilization rate, can be used for matching high-integra