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CN-121977333-A - Quartz tube drying device

CN121977333ACN 121977333 ACN121977333 ACN 121977333ACN-121977333-A

Abstract

The invention discloses a quartz tube drying device, which relates to the technical field of quartz tube processing and comprises a device main body, wherein the device main body comprises a box body, an inner cavity is formed in the box body, an installation disc dividing the inner cavity into a drying cavity and an equipment cavity is arranged on the inner wall of the inner cavity, a vertical rotating shaft is arranged at the center of the installation disc in a rotating mode, a clamping mechanism and a turbine for clamping a quartz tube are detachably arranged on the outer wall of the rotating shaft, a driving cavity for installing the turbine is arranged in the equipment cavity, and a second blowing device is arranged on the outer wall of the driving cavity. Through the cooperation setting of fixture, pivot, turbine, when fixture rotates, because centrifugal force effect, drive holder upwards moves, and then mentions the quartz capsule, has realized the suspension centre gripping to the quartz capsule for the quartz capsule breaks away from the contact with the support, thereby has better stoving effect to quartz capsule bottom and inner wall.

Inventors

  • LI LAIBIN
  • ZHU JIANING

Assignees

  • 辽宁汉京半导体材料有限公司

Dates

Publication Date
20260505
Application Date
20260402

Claims (10)

  1. 1. The quartz tube drying device is characterized by comprising a device main body, wherein the device main body comprises a box body (110) with an inner cavity, the inner wall of the inner cavity is provided with a mounting disc (210) for dividing the inner cavity into a drying cavity (111) and an equipment cavity (112), a rotating shaft (130) is arranged in the center of the mounting disc (210) in a rotating mode, a clamping mechanism and a turbine (150) are detachably arranged on the rotating shaft (130), a driving cavity (140) for the turbine (150) to be installed is arranged in the equipment cavity (112), and a second blowing device (170) is installed on the outer wall of the driving cavity (140); The clamping mechanism comprises a sleeve (310) which is detachably arranged on the rotating shaft (130), a plurality of supporting components are arranged on the outer wall of the sleeve (310), a placing component is arranged on each supporting component, a clamping piece is arranged on the placing component in a vertical sliding mode, the supporting components comprise a cantilever arm (321) and a supporting arm (323) which are hinged to the outer wall of the sleeve (310), one end, far away from the sleeve (310), of the supporting arm (323) is in sliding connection with the cantilever arm (321), and one end, far away from the sleeve (310), of the cantilever arm (321) is connected with the clamping piece; The clamping piece includes driving piece (342) of vertical slip setting, and the bottom of driving piece (342) articulates and is equipped with a plurality of centre gripping arms (341) that correspond with mount (332), and the slip is equipped with slider (343) on driving piece (342), and the lateral wall of slider (343) articulates and is equipped with connecting rod (347) that correspond with mount (332), and one end that slider (343) was kept away from to connecting rod (347) is articulated with centre gripping arm (341).
  2. 2. The quartz tube drying device according to claim 1, wherein each placing component comprises a fixed ring (331), the side wall of the fixed ring (331) is provided with an extension arm fixedly connected with the sleeve (310), the top surface of the fixed ring (331) is provided with a plurality of fixing frames (332) which are arranged at equal intervals along the circumference of the fixed ring (331), a placing cavity is formed between all the fixing frames (332), connecting discs (335) are arranged at the tops of all the fixing frames (332), a bearing piece (334) for placing the quartz tube is detachably arranged in the fixed ring (331), the top wall of the bearing piece (334) is provided with a round hole, and a cross-shaped bracket (3341) is arranged in the round hole.
  3. 3. A quartz tube drying apparatus according to claim 2, wherein the inner wall of the retaining ring (331) has an internal thread and the outer wall of the carrier (334) has an external thread which mates with the internal thread.
  4. 4. The quartz tube drying device according to claim 2, wherein the cantilever arm (321) is provided with a first chute (322) at one end close to the sleeve (310), one end of the support arm (323) far away from the sleeve (310) is slidably arranged in the first chute (322), the connecting rod (347) is hinged with the clamping arm (341) through the hinge shaft, the inside of the fixing frame (332) is provided with through grooves, and both sides of the inner wall of each through groove are provided with sliding grooves (333) for the hinge shaft to slide up and down.
  5. 5. The quartz tube drying device according to claim 2, wherein the driving member (342) penetrates through the side wall of one end of the connecting disc (335) to form an adjusting groove (3421), the sliding member (346) is slidably arranged in the adjusting groove (3421), the top wall of the driving member (342) is provided with an extending rod extending upwards, one end of the cantilever arm (321) far away from the sleeve (310) is provided with a movable opening (324) for the extending rod to penetrate through, two sides of the inner wall of the movable opening (324) are provided with second sliding grooves (325) for the sliding member (346) to slide through, and one end of the driving member (342) penetrating through the connecting disc (335) is provided with a fastening piece (348) through threads.
  6. 6. A quartz tube drying apparatus according to claim 2, characterized in that a second spring (345) is arranged between the connecting disc (335) and the sliding block (343), and a first spring (344) is arranged between the sliding block (343) and the driving member (342).
  7. 7. The quartz tube drying device according to claim 1, wherein the opening of the drying chamber (111) is clamped with a cover body (120), the bottom wall of the cover body (120) is provided with an extending part (121) extending downwards, an air passage (131) is arranged in the rotating shaft (130), an air chamber (122) communicated with the air passage (131) is formed between the inner wall of the cover body (120) and the inside of the extending part (121), a plurality of air outlet holes are formed in the inner wall of the cover body (120) and the inner wall of the extending part (121), an air cavity is formed in the mounting disc (210), an air hole (132) communicated with the air cavity and the air passage (131) is formed in the rotating shaft (130), a first air blowing device (160) is arranged at the bottom of the box body (110), and a plurality of spray heads (220) communicated with the air cavity are mounted on the top wall of the mounting disc (210).
  8. 8. The quartz tube drying device according to claim 1, wherein the top of the inner wall of the mounting plate (210) is provided with a water collecting cavity (230), the top surface of the mounting plate (210) is recessed inwards, a plurality of water inlet holes (240) communicated with the water collecting cavity (230) are formed in the center of the top surface of the mounting plate (210), and a water collecting assembly (180) for extracting water in the water collecting cavity (230) is arranged in the equipment cavity (112).
  9. 9. The quartz tube drying device according to claim 7, wherein the outer wall of the rotating shaft (130) and the extending portion (121) is provided with a spline portion (133), a sleeve (123) is rotatably arranged in the center of the inner wall of the cover body (120), a first spline groove (124) matched with the spline portion (133) is formed in the sleeve (123), a through hole (125) communicated with the air cavity (122) is formed in the top surface of the sleeve (123), and a second spline groove (350) matched with the spline portion (133) is formed in the sleeve (310).
  10. 10. The quartz tube drying device according to claim 7, wherein the bottom wall of the air cavity is provided with round holes communicated with the driving cavity (140), and one-way valves are arranged in the round holes and used for preventing gas in the air cavity from entering the driving cavity (140).

Description

Quartz tube drying device Technical Field The invention relates to the technical field of quartz tube processing, in particular to a quartz tube drying device. Background The quartz tube is used as a key component with high purity, high temperature resistance and stable chemical property, and is widely applied to the preparation and treatment processes of semiconductors, photovoltaic materials, optical fiber preformed bars and high-purity chemicals. In the cleaning process after the manufacture or use, it is important to thoroughly remove the residual moisture or solvent on the surface, and any trace residue may cause pollution, thermal stress cracking or performance defects in the subsequent high-temperature process. Therefore, efficient drying is a necessary step to ensure the quality and process reliability of the quartz tube. The traditional drying method mainly depends on a static hot air oven, the quartz tube is placed in the oven by the method, and the quartz tube is dried by natural convection of hot air, and the method has the advantages of long drying period, low efficiency, unsmooth air circulation and easiness in forming drying dead angles, so that moisture or solvent residues are caused. Disclosure of Invention In order to solve the technical problems, the invention provides a quartz tube drying device. The technical proposal is as follows: The quartz tube drying device comprises a device main body, wherein the device main body comprises a box body with an inner cavity, the inner wall of the inner cavity is provided with a mounting disc for dividing the inner cavity into a drying cavity and an equipment cavity, a rotating shaft is arranged in the center of the mounting disc in a rotating mode, a clamping mechanism and a turbine are detachably arranged on the rotating shaft, a driving cavity for installing the turbine is arranged in the equipment cavity, and a second blowing device is arranged on the outer wall of the driving cavity; The clamping mechanism comprises a sleeve which is detachably arranged on the rotating shaft, a plurality of supporting components are arranged on the outer wall of the sleeve, a placing component is arranged on each supporting component, a clamping piece is arranged on the placing component in a vertical sliding mode, each supporting component comprises a cantilever arm and a supporting arm which are hinged to the outer wall of the sleeve, one end of each supporting arm is connected with the cantilever arm in a sliding mode, and one end of each cantilever arm is connected with the clamping piece; The clamping mechanism comprises a sleeve which is detachably arranged on the rotating shaft, a plurality of supporting components are arranged on the outer wall of the sleeve, a placing component is arranged on each supporting component, a clamping piece is arranged on the placing component in a vertical sliding mode, each supporting component comprises a cantilever arm and a supporting arm which are hinged to the outer wall of the sleeve, one end, far away from the sleeve, of the supporting arm is in sliding connection with the cantilever arm, and one end, far away from the sleeve, of the cantilever arm is connected with the clamping piece; further, every place the subassembly including solid fixed ring, gu fixed ring lateral wall be equipped with sleeve fixed connection's extension arm, gu fixed ring top surface is equipped with along gu fixed ring circumference equidistant a plurality of mounts that set up, forms jointly between all mounts and places the chamber, all mount tops are equipped with the connection pad jointly, gu fixed ring inside can dismantle and be equipped with the carrier that is used for placing the quartz capsule, and the carrier roof has the round hole, is equipped with the support that is the cross in the round hole. Further, the inner wall of the fixing ring is provided with an internal thread, and the outer wall of the bearing piece is provided with an external thread matched with the internal thread. Further, the cantilever arm is close to one end of the sleeve and is provided with a first chute, one end of the supporting arm, far away from the sleeve, is slidably arranged in the first chute, the connecting rod is hinged with the clamping arm through the hinge shaft, the inside of the fixing frame is provided with through grooves, and two sides of the inner wall of each through groove are provided with sliding grooves for the hinge shaft to slide up and down. Further, the regulating groove is formed in the side wall of one end of the connecting disc, the sliding piece is arranged in the regulating groove in a sliding mode, the top wall of the driving piece is provided with an extension rod extending upwards, a movable opening for the extension rod to penetrate is formed in one end, far away from the sleeve, of the cantilever arm, a second sliding groove for the sliding piece to slide is formed in two sides of the inner wall of the movable openi