CN-121977409-A - High-precision measuring rod for large semiconductor quartz square cavity

CN121977409ACN 121977409 ACN121977409 ACN 121977409ACN-121977409-A

Abstract

The invention discloses a high-precision measuring rod for a large square cavity of semiconductor quartz, which relates to the technical field of detection tools and comprises a measuring rod body, wherein the width of the measuring rod body gradually reduces from a mounting end to a measuring end, and one side surface of the mounting end is hinged with a joint through a rotating assembly; the joint is including the mounting groove that runs through the upper surface setting, and the mounting groove intercommunication has the installation cavity, and the outside end intercommunication of installation cavity is equipped with the erection joint of slope. The invention can effectively solve the difficult problem of measuring the shape and position of the large depth in the narrow space of the quartz large square cavity, obviously improves the measurement precision and meets the requirement of semiconductor manufacture on high-precision measurement. The degree of freedom of the measuring rod is greatly improved, so that the measuring rod can be flexibly operated in a complex space environment. The stability of the measuring rod is enhanced, and the measuring error caused by shaking of the measuring rod is effectively avoided.

Inventors

ZHANG RONG
LIU ANJIAN
LIN SHENGXIONG
YANG JUN

Assignees

杭州大和热磁电子有限公司

Dates

Publication Date: 20260505
Application Date: 20251230

Claims (10)

1. A high-precision measuring rod for a large semiconductor quartz square cavity is characterized in that, The measuring rod comprises a measuring rod body, wherein the width of the measuring rod body gradually reduces from a mounting end to a measuring end, and one side surface of the mounting end is hinged with a joint through a rotating assembly; The joint comprises a mounting groove which penetrates through the upper surface, the mounting groove is communicated with a mounting cavity, and the outer side end of the mounting cavity is communicated with an inclined mounting opening.
2. The high-precision measuring rod for the large semiconductor quartz cavity according to claim 1, wherein the mounting cavity is provided with a first opening at the mounting side, the length of the mounting cavity is larger than that of the mounting groove, and the mounting cavity is arranged below the mounting groove.
3. The high-precision measuring rod for the large semiconductor quartz cavity according to claim 1 or 2, wherein the mounting port is arranged on the outer side face of the mounting end of the joint, the bottom end of the mounting port is provided with a first guide inclined plane, the first guide inclined plane is obliquely arranged towards the mounting cavity, and the included angle alpha between the first guide inclined plane and the bottom face of the joint is 30-60 degrees.
4. The high-precision measuring rod for the large semiconductor quartz cavity according to claim 3, wherein the bottom end of the first guide inclined surface extends to the bottom surface of the joint, the top end extends to the mounting cavity, the mounting opening is arranged at the mounting side opening, the top end of the mounting opening is provided with the second guide inclined surface, and the second guide inclined surface is obliquely arranged towards the mounting groove.
5. The high-precision measuring rod for the large semiconductor quartz cavity according to claim 1, wherein the connector is provided with a first mounting hole in a penetrating manner at one side of the mounting groove close to the measuring end, the connector is provided with a second mounting hole in a penetrating manner at one side of the mounting cavity close to the measuring end, and the first mounting hole is communicated with the mounting cavity.
6. The high-precision measuring rod for the large square cavity of the semiconductor quartz according to claim 5, wherein the length ratio d of the mounting groove to the mounting cavity is 0.2-0.5, the height ratio h is 0.6-0.8, the longitudinal section of the measuring rod body is trapezoid, and the length L is more than 600mm.
7. The high-precision measuring rod for the large semiconductor quartz square cavity according to claim 1, wherein a rotating cavity is arranged on one face of the joint, facing the measuring rod body, and a second opening is arranged on the rotating cavity, facing the measuring rod body, and a rotating shaft is arranged on one face of the measuring rod body, facing the joint.
8. The high-precision measuring rod for the large semiconductor quartz square cavity according to claim 7, wherein the end part of the rotating shaft is connected with a rotating member, a plurality of rotating arms are uniformly arranged on the circumference of the rotating member, the rotating arms are arc-shaped, and a buffer groove is formed in one side of the root part of the rotating arm.
9. The high-precision measuring rod for the large semiconductor quartz cavity according to claim 8, wherein the rotating member extends into the rotating cavity, a limiting block is arranged on the surface, facing the wall surface of the rotating cavity, of the outer side end of the rotating arm, a limiting groove is formed in the corresponding position of the wall of the rotating cavity, and the limiting block is clamped in the limiting groove.
10. The high-precision measuring rod for the large square cavity of the semiconductor quartz according to claim 7, wherein the rotating shaft is arranged in the second opening, and a bearing is arranged between the outer circumference of the rotating shaft and the inner wall surface of the second opening.

Description

High-precision measuring rod for large semiconductor quartz square cavity Technical Field The invention relates to the technical field of detection tools, in particular to a high-precision measuring rod for a large square cavity of semiconductor quartz. Background The quartz large square cavity for the semiconductor is a long and narrow cuboid product with large size, the internal height is low, about 50mm, the length can reach about 1200mm, a plurality of small counter bores are arranged at the position of about 600mm in the center of the product, the depth (tolerance + -0.05) and the parallelism (0.1 mm) of the small counter bores need to be measured, and the three-dimensional measuring head cannot enter the measurement due to insufficient internal space, and the common height measuring rod has the defects of insufficient length, large deflection after lengthening, poor precision, poor joint freedom degree and stability, easy deformation and difficulty in meeting the measurement requirement. The problem of measurement complexity of the quartz large square cavity for the semiconductor is not solved for a long time, and the quartz large square cavity for the semiconductor becomes a pain point in the industry, the current measurement method is to measure the distance size at the outside first, then measure the wall thickness by using an ultrasonic thickness meter, and further calculate the distance from the inner wall position to the reference surface, but the method is time-consuming and labor-consuming, has large accumulated error and low precision, and cannot meet the requirement of semiconductor manufacturing on high-precision measurement. CN220893297U, publication No. 2024, 05/03, discloses an ultrasonic thickness gauge with easily-fixed probe, comprising an ultrasonic thickness gauge main body and a probe connected with the ultrasonic thickness gauge main body through a cable, wherein a fixing component is arranged on the ultrasonic thickness gauge main body, the fixing component comprises an outer sleeve sleeved on the probe and a micro vacuum pump arranged on the ultrasonic thickness gauge main body, an air chamber is arranged in the outer sleeve, a plurality of vacuum suction cups are fixedly arranged on the bottom surface of the outer sleeve, the vacuum suction cups are communicated with the air chamber, a hose is fixedly arranged between the outer sleeve and the micro vacuum pump, the tail end of the hose is communicated with the air chamber, a threaded joint is fixedly arranged at the end part of the hose, which is close to the outer sleeve, a limit disc is fixedly arranged on the threaded joint, and the threaded joint is in threaded connection with the outer sleeve. The ultrasonic thickness gauge can measure the size of the counter bore in the quartz large square body for semiconductors, but is time-consuming and labor-consuming and has large accumulated error. Disclosure of Invention The invention provides a high-precision measuring rod for a large quartz square cavity of a semiconductor, which realizes high-precision measurement of the shape and position of a large depth in a narrow space of the large quartz square cavity by arranging a connector and a measuring rod body. It is a further object of the present invention to improve the degree of freedom and stability of the measuring rod and to ensure the accuracy of the measurement by providing a joint and a swivel assembly. The high-precision measuring rod for the large semiconductor quartz cavity comprises a measuring rod body, wherein the width of the measuring rod body gradually reduces from a mounting end to a measuring end, one side face of the mounting end is hinged with a connector through a rotating assembly, the connector comprises a mounting groove which penetrates through the upper surface, the mounting groove is communicated with a mounting cavity, and the outer side end of the mounting cavity is communicated with an inclined mounting opening. Preferably, the mounting cavity is provided with a first opening at the mounting side, the mounting cavity length is greater than the mounting groove length, and the mounting cavity is arranged below the mounting groove. The mounting groove depth is the same with the installation cavity depth, and the mounting groove also is equipped with the opening at first opening homonymy, and when the measuring stick was installed on the altitude chi, the setting element on the altitude chi was installed in mounting groove and installation cavity, and the setting element outside end is L shape. The upper surface of the measuring end of the measuring rod body is provided with a connecting shaft for connecting a measuring piece. The outer side end of the locating piece is a fixed block, and the bolt penetrates through the first mounting hole to be connected with the fixed block, so that the locating piece is preliminarily fixed in the joint. The structural design ensures that the measuring rod is more firm