CN-121977417-A - Accurate size induction type measuring instrument based on glass matrix

CN121977417ACN 121977417 ACN121977417 ACN 121977417ACN-121977417-A

Abstract

The invention relates to the technical field of high-precision optical detection, in particular to a precise dimension induction type measuring instrument based on a glass matrix, which is used for detecting the relative position between two adjacent lenses in a telescope reflector array and comprises the following components: the target carrier is provided with a detected target object; the sensor carrier is provided with a sensing element for detecting the position of the detected object, a fixing component for fixing the object carrier on the back surface of one lens, and/or fixing the sensor carrier on the back surface of the other adjacent lens, and a height adjusting component is arranged between the fixing component and the object carrier and/or the sensor carrier. The invention solves the problem of adaptability caused by the fact that the height difference between adjacent lenses fluctuates far beyond the self sub-nanometer measuring stroke of the sensor in actual assembly by arranging the height adjusting component between the fixing component and the target carrier or the sensor carrier.

Inventors

LIU GUOQIANG
LI WEI
LI MINGXIA
Cao Longxuan
ZHAO GUOFENG
DIAO WEIDONG
CHEN GUANGZHENG

Assignees

安徽见行科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260408

Claims (10)

1. A glass matrix based accurate dimension sensing gauge for detecting the relative position between two adjacent mirrors (100) in a telescope mirror array, comprising: A target carrier (10) for being mounted on the back surface of one of the lenses (100), wherein the target carrier (10) is provided with a target object (11) to be detected; A sensor carrier (20) for being mounted on the back surface of another adjacent lens (100), wherein the sensor carrier (20) is provided with a sensing element (21) for detecting the position of the detected object (11); -a fixation assembly (30), at least one of the target carrier (10) and the sensor carrier (20) being mounted to the back of the lens (100) by means of the fixation assembly (30); a height adjustment assembly is provided between the fixing assembly (30) and the target carrier (10) and/or the sensor carrier (20), the height adjustment assembly being configured to enable the target carrier (10) and/or the sensor carrier (20) to remain relatively fixed with the fixing assembly (30) at a plurality of different heights.
2. The glass-matrix-based precision dimension-sensing measuring instrument according to claim 1, characterized in that the height-adjustment assembly comprises an adjustment plate (40), the adjustment plate (40) being arranged between the fixation assembly (30) and the target carrier (10) or the sensor carrier (20), the target carrier (10) or the sensor carrier (20) being provided with at least three third contacts (12) on the side opposite to the adjustment plate (40), the adjustment plate (40) being provided with first conical grooves (41) cooperating with each third contact (12) on the side opposite to the target carrier (10) or the sensor carrier (20), the first conical grooves (41) being provided with at least two groups, each group comprising a number of the first conical grooves (41) corresponding to the number of third contacts (12), the depths of the different groups of the first conical grooves (41) being different.
3. The glass-matrix-based precision dimension-sensing type measuring instrument according to claim 2, wherein at least three fourth contacts (323) are provided on a side of the fixed assembly (30) opposite to the adjusting plate (40), a second tapered groove (42) is provided on a side of the adjusting plate (40) opposite to the fixed assembly (30) and is matched with each fourth contact (323), and at least two groups of second tapered grooves (42) are provided, each group comprises a plurality of second tapered grooves (42) corresponding to the number of the fourth contacts (323), and the depths of the second tapered grooves (42) of different groups are identical.
4. The glass-substrate-based precision dimension-sensing measuring instrument according to claim 1, characterized in that the height-adjustment assembly comprises an adjustment plate (40), the adjustment plate (40) being arranged between the fixing assembly (30) and the target carrier (10) or the sensor carrier (20), the side of the fixing assembly (30) opposite to the adjustment plate (40) being provided with at least three fourth contacts (323), the side of the adjustment plate (40) opposite to the fixing assembly (30) being provided with second tapered grooves (42) cooperating with each of the fourth contacts (323), the second tapered grooves (42) being provided with at least two groups, each group comprising a plurality of the second tapered grooves (42) corresponding to the number of the fourth contacts (323), the second tapered grooves (42) of different groups being different in depth.
5. A glass matrix based precision dimension induction measuring instrument according to claim 3, characterized in that the fixing assembly (30) comprises a rooting block (31) and a base (32), the rooting block (31) being fixedly connected with the back of the lens (100) by means of gluing, the base (32) being connected with the rooting block (31) by means of a fastening assembly, the base (32) being provided with at least three first contacts (321) opposite the back of the lens (100) and at least two second contacts (322) opposite the side of the lens (100), the fastening assembly being configured such that it is capable of generating a first elastic force in a first direction and a second elastic force in a second direction to the base (32), wherein the first elastic force makes the first contacts (321) abut against the back of the lens (100) and the second contacts (322) abut against the side of the lens (100).
6. The glass matrix-based precise dimension sensing type measuring instrument according to claim 5, wherein the fastening assembly comprises a screw (33), a first nut (34), a first elastic element (35) and a second elastic element (36), wherein the screw (33) is mounted between the rooting block (31), a limiting part for preventing the screw (33) from moving in a direction away from the lens (100) is arranged between the screw (33) and the rooting block (31), the first nut (34) is in threaded connection with the screw (33), the first nut (34) is provided with a first pressing surface (341) and a second pressing surface (342) which are distributed in a step shape and face the back of the lens (100), the first elastic element (35) is arranged between the first pressing surface (341) and the rooting block (31), the second elastic element (36) is arranged between the second pressing surface (342) and the base (32), and the second elastic element (36) is used for applying elastic force to the base (32).
7. The glass-matrix-based precision dimension-sensing measurement instrument of claim 6, wherein the first elastic element (35) comprises an arched portion (351) and a translating portion (352), the arched portion (351) being located between the first compression surface (341) and the rooting piece (31), one end of the arched portion (351) close to the second contact (322) being fixedly secured against the rooting piece (31), one end of the arched portion (351) remote from the second contact (322) being connected with the translating portion (352), the translating portion (352) being slidably connected with the rooting piece (31) in the second direction, one end of the translating portion (352) remote from the arched portion (351) being connected with a lateral elastic deformation unit (353), the lateral elastic deformation unit (353) being located opposite a stop wall (324) provided on the base (32) in the second direction, the first elastic element (35) being configured to enable the lateral elastic deformation unit (353) to be compressed against the base (32) when the arched portion (351) is compressed against the first elastic deformation unit (353).
8. The glass-matrix-based precision dimension-sensing measuring instrument according to claim 7, characterized in that the fixing assemblies (30) are provided in two groups, one group (30) being used for fixing the target carrier (10) to the back of one of the lenses (100) and the other group (30) being used for fixing the sensor carrier (20) to the back of the other adjacent lens (100).
9. The glass-based precision dimension-sensing type measuring instrument of claim 8, wherein in response to a height-adjustment assembly being provided between the fixing assembly (30) and the target carrier (10), a second nut (37) is provided on a screw (33) of the fixing assembly (30) on which the target carrier (10) is located, the second nut (37) being located on a side of the target carrier (10) facing away from the lens (100), a third elastic element (38) being provided between the second nut (37) and the target carrier (10), the second nut (37) elastically pressing the target carrier (10) in the first direction by the third elastic element (38), and/or And a height adjusting component is arranged between the fixing component (30) and the sensor carrier (20), a second nut is arranged on a screw rod of the fixing component (30) where the sensor carrier (20) is located, the second nut is positioned on one side of the sensor carrier (20) opposite to the lens (100), a third elastic element is arranged between the second nut and the sensor carrier (20), and the second nut elastically compresses the sensor carrier (20) along the first direction through the third elastic element.
10. The glass-matrix-based precision dimension induction type measuring instrument according to claim 5, characterized in that each of the first contact (321), the third contact (12) and the fourth contact (323) is aligned one by one along the first direction, respectively, the rooting block (31), the base (32), the target carrier (10), the sensor carrier (20) and the adjustment plate (40) are made of quartz glass.

Description

Accurate size induction type measuring instrument based on glass matrix Technical Field The invention relates to the technical field of high-precision optical detection, in particular to a precise size induction type measuring instrument based on a glass substrate. Background In the reflection surface system of astronomical telescope, in order to obtain larger luminous flux and higher angular resolution, a reflection array structure formed by splicing a plurality of sub-mirrors is often adopted. The structure requires that each sub-mirror meets certain space position requirements in the assembly and operation process so as to ensure the optical co-phase characteristic of the whole reflecting surface. Therefore, a high-precision displacement sensor needs to be arranged between adjacent sub-mirrors, and the relative position of the sub-mirrors is detected in real time and used as the basis for the correction of a subsequent active optical system. However, in actual assembly, the height difference fluctuation exists between different adjacent lenses, and the optical co-phase requires the sensor to have extremely high resolution and extremely small measuring range, so that the height difference fluctuation is far beyond the self sub-nanometer measuring stroke of the sensor, and the measuring stroke of the sensor cannot directly cover the geometrical fall of a plurality of millimeters, thereby causing the problem of adaptability of the measuring instrument between different lenses. Disclosure of Invention In view of the above-mentioned drawbacks of the prior art, it is an object of the present invention to provide a glass-matrix based accurate size sensing measuring instrument capable of adapting to height differences between different adjacent lenses. To achieve the above and other related objects, the present invention provides a glass substrate-based precise dimension sensing type measuring instrument for detecting a relative position between two adjacent lenses in a telescope mirror array, comprising: the target carrier is provided with a detected target object; The sensor carrier is provided with a sensing element for detecting the position of the detected object; a fixing assembly for fixing the target carrier to the back surface of one of the lenses and/or for fixing the sensor carrier to the back surface of the other adjacent lens; a height adjusting component is arranged between the fixing component and the target carrier and/or the sensor carrier; the height adjustment assembly is configured to enable the target carrier and/or the sensor carrier to remain relatively stationary with the stationary assembly at a plurality of different heights. In an alternative embodiment of the invention, the height adjusting assembly comprises an adjusting plate, the adjusting plate is arranged between the fixing assembly and the target carrier or the sensor carrier, at least three third contacts are arranged on one side of the target carrier or the sensor carrier opposite to the adjusting plate, a first conical groove matched with each third contact is arranged on one side of the adjusting plate opposite to the target carrier or the sensor carrier, at least two groups of the first conical grooves are arranged, each group comprises a plurality of first conical grooves corresponding to the number of the third contacts, and the deep parts of the first conical grooves are different from each other. In an alternative embodiment of the invention, at least three fourth contacts are arranged on the side, opposite to the adjusting plate, of the fixing assembly, a second conical groove matched with each fourth contact is arranged on the side, opposite to the fixing assembly, of the adjusting plate, at least two groups of second conical grooves are arranged, each group of second conical grooves comprises a plurality of second conical grooves corresponding to the number of the fourth contacts, and the depths of the second conical grooves in different groups of second conical grooves are the same. In an alternative embodiment of the invention, the height adjusting assembly comprises an adjusting plate, the adjusting plate is arranged between the fixing assembly and the target carrier or the sensor carrier, at least three fourth contacts are arranged on one side of the fixing assembly opposite to the adjusting plate, second conical grooves matched with the fourth contacts are arranged on one side of the adjusting plate opposite to the fixing assembly, at least two groups of second conical grooves are arranged, each group of second conical grooves comprises a plurality of second conical grooves corresponding to the number of the fourth contacts, and the depths of the second conical grooves in different groups are different. In an alternative embodiment of the invention, the fixing assembly comprises a rooting block and a base, the rooting block is fixedly connected with the back surface of the lens in an adhesive manner, the base is