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CN-121977418-A - Angle-adjustable micro-scale capacitive measuring instrument

CN121977418ACN 121977418 ACN121977418 ACN 121977418ACN-121977418-A

Abstract

The invention discloses an angle-adjustable microscale capacitive measuring instrument, which relates to the technical field of high-precision measuring instruments and is used for detecting the relative position between two adjacent lenses in a telescope reflector array, and comprises a target carrier, a measuring device and a measuring device, wherein the target carrier is used for installing a measured target; the sensor carrier is arranged opposite to the target carrier and is provided with a sensing element for detecting the position of a detected target object; the fixing unit is provided with two groups; the invention can ensure that the sensing element is always strictly parallel and opposite to the object to be measured, thoroughly eliminate oblique detection deviation caused by an included angle of the lens, and greatly improve the precision of micro-scale capacitance measurement.

Inventors

  • LIU GUOQIANG
  • LI WEI
  • LI MINGXIA
  • Cao Longxuan
  • ZHAO GUOFENG
  • DIAO WEIDONG
  • CHEN GUANGZHENG

Assignees

  • 安徽见行科技有限公司

Dates

Publication Date
20260505
Application Date
20260408

Claims (10)

  1. 1. An angle-adjustable microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors (10) in a telescope mirror array, comprising: A target carrier (20) for mounting a target object (23) to be measured; A sensor carrier (30) which is arranged opposite to the target carrier (20) and is provided with a sensing element (31) for detecting the position of the detected target object (23); the fixing units (40) are provided with two groups, and the two groups of fixing units (40) are respectively used for fixing the target carrier (20) and the sensor carrier (30) relative to the lens (10); the angle adjusting unit (50) is used for detecting the angle difference of the fixing units (40) on the two lenses (10) and adjusting the angle of the target carrier (20) and the fixing units (40) when the target carrier is fixed relative to each other according to the angle difference so as to keep the measured target object (23) and the sensing element (31) in a parallel state; The angle adjusting unit (50) comprises an inserting rod (51), inserting blocks (52) and an executing part, wherein the inserting rod (51) can be inserted into the inserting blocks (52) in a one-to-one mode, the inserting blocks (52) are respectively arranged on the two fixing units (40), the fixing blocks (53) are fixedly connected to the inserting rods (51), the two fixing blocks (53) are hinged through a rotating shaft (54), one fixing block (53) is of a telescopic structure, the other fixing block (53) is fixedly connected with the rotating shaft (54), an angle sensor (55) used for measuring the rotating angle of the fixing block (53) is arranged on the rotating shaft (54), and the executing part is configured to enable a target carrier (20) to rotate by a specified angle relative to the fixing units (40) and the angle is identical with the relative rotating angle of the two fixing blocks (53).
  2. 2. The angle-adjustable micro-scale capacitive measuring instrument according to claim 1, wherein the target carrier (20) is composed of a target plate (21) and a support plate (22), the target plate (21) and the support plate (22) are hinged through a hinge (24), the support plate (22) can be relatively fixed with the lens (10) through a fixing unit (40), and the measured target object (23) is mounted on the target plate (21).
  3. 3. The angle-adjustable micro-scale capacitive measuring instrument as set forth in claim 2, wherein the actuator comprises an angle sensor (56) and a driving member (57), the driving member (57) is mounted on the support plate (22) and is used for driving the target plate (21) to rotate relative to the support plate (22), and the angle sensor (56) is mounted between the target plate (21) and the support plate (22) and is used for detecting the angle of the target plate (21) relative to the support plate (22).
  4. 4. An angularly adjustable micro-scale capacitive measuring instrument according to claim 3, characterized in that said driving member (57) is provided as a cylinder, both ends of which are connected to the target plate (21) and the support plate (22), respectively.
  5. 5. The angle-adjustable micro-scale capacitive measuring instrument according to claim 2, wherein the fixing unit (40) comprises a base (41) and a rooting block (42), the rooting block (42) is fixedly connected with the lens (10) in an adhesive mode, a contact block (411) is arranged on the side edge of the base (41), the contact block (411) abuts against the side face of the lens (10), the base (41) is connected with the rooting block (42) through a fastening component (43), and the fastening component (43) is configured to enable the base (41) to abut against the surface of the lens (10) and be fixed relative to the rooting block (42).
  6. 6. The angle-adjustable micro-scale capacitive measuring instrument of claim 5, wherein a height adjustment mechanism is provided between said fixing unit (40) and the support plate (22), said height adjustment mechanism being configured to maintain the support plate (22) relatively fixed to the fixing unit (40) at a plurality of different heights.
  7. 7. The angle-adjustable micro-scale capacitive measuring instrument of claim 6, wherein the height adjusting mechanism comprises an adjusting plate (61), the adjusting plate (61) is arranged between a base (41) and a supporting plate (22), at least three stepped grooves (62) are formed in the base (41), balls (63) with the same number of the stepped grooves (62) are fixedly connected to the bottom of the adjusting plate (61), and the balls (63) are in sliding fit with the corresponding stepped grooves (62).
  8. 8. The angle-adjustable micro-scale capacitive measuring instrument of claim 7, wherein two adjacent steps of said step groove (62) are connected by an inclined plane.
  9. 9. The angle-adjustable micro-scale capacitive measuring instrument of claim 7, wherein the fastening assembly (43) comprises a screw (431), a nut (432), a first elastic element (433), a clamping block (434), a locking groove (435), a locking piece (436) and a second elastic element (437), the screw (431) is fixedly connected with the rooting block (42) through the clamping block (434), the screw (431) is in threaded connection with the nut (432), the first elastic element (433) is installed between the nut (432) and the adjusting plate (61), the nut (432) can apply elastic pressure to the adjusting plate (61) through the first elastic element (433), the locking groove (435) is formed in the supporting plate (22), the locking piece (436) is fixedly installed at the top end of the nut (432) and can be matched with the locking groove (435), the second elastic element (437) is installed in the locking groove (435), and the locking piece (436) can apply elastic pressure to the supporting plate (61) through the second elastic element (437).
  10. 10. An angularly adjustable micro-scale capacitive measuring instrument according to claim 7, characterized in that at least three contacts (7) are arranged between the adjusting plate (61) and the supporting plate (22), said contacts (7) being fixed to the adjusting plate (61) or the supporting plate (22).

Description

Angle-adjustable micro-scale capacitive measuring instrument Technical Field The invention relates to the technical field of high-precision measuring instruments, in particular to an angle-adjustable microscale capacitance measuring instrument. Background In astronomical observation field, in order to improve luminous flux and angular resolution of telescope, the reflecting surface system mostly adopts an array structure spliced by multiple sub-mirrors, and the structure requires each sub-mirror to maintain accurate spatial position during assembly and operation so as to ensure optical co-phase characteristics of the reflecting surface. Therefore, high-precision displacement sensors are required to be distributed between adjacent sub-mirrors, the relative positions (especially the height difference) of the displacement sensors are detected in real time, data basis is provided for the position correction of an active optical system, and the micro-scale capacitive measuring sensors become mainstream choices due to high precision and quick response. The adjacent sub-mirrors of the astronomical telescope reflector array are not coplanar, but are arranged in a preset included angle, and the adjacent mirrors are symmetrical about the same reference plane in an ideal state, so that the actual assembly is influenced by factors such as processing, technology, environment and the like, the actual included angle between the mirrors has random errors and no fixed standard, the core requirement of capacitance measurement is that a sensing element is strictly parallel and opposite to a measured object, the included angles of the mirrors can enable the sensing element and the measured object to be distributed along with the mirrors in an included angle, and the sensor detects an inclined distance, so that the height difference detection generates deviation, and the detection implementation difficulty is greatly improved. Disclosure of Invention The invention aims to provide an angle-adjustable micro-scale capacitance type measuring instrument so as to solve the problems in the background technology. In order to achieve the above purpose, the invention provides a micro-scale capacitive measuring instrument with adjustable angle, which is used for detecting the relative position between two adjacent lenses in a telescope reflector array, and comprises the following steps: a target carrier for mounting a target object to be measured; The sensor carrier is arranged opposite to the target carrier and is provided with a sensing element for detecting the position of a detected target object; the fixing units are respectively used for fixing the target carrier and the sensor carrier relative to the lens; The angle adjusting unit is used for detecting the angle difference of the fixing units on the two lenses and adjusting the angle of the target carrier and the fixing unit when the target carrier is fixed relatively according to the angle difference so that the measured target object and the sensing element are kept in a parallel state; The angle adjusting unit comprises an inserting rod, inserting blocks and an executing part, wherein the inserting rod can be inserted into the inserting blocks and is arranged in two corresponding to each other, the two inserting blocks are respectively arranged on the two fixing units, the two inserting rods are fixedly connected with the fixing blocks, the two fixing blocks are hinged through a rotating shaft, one fixing block is of a telescopic structure, the other fixing block is fixedly connected with the rotating shaft, an angle sensor I used for measuring the rotating angle of the fixing blocks is arranged on the rotating shaft, and the executing part is configured to enable a target carrier to rotate by a designated angle relative to the fixing units, wherein the angle is identical with the relative rotating angle of the two fixing blocks. The target carrier is composed of a target plate and a supporting plate, the target plate is hinged with the supporting plate through a hinge, the supporting plate can be relatively fixed with the lens through a fixing unit, and the tested target object is mounted on the target plate. As a further scheme of the invention, the executing part comprises an angle sensor II and a driving piece, wherein the driving piece is arranged on the supporting plate and is used for driving the target plate to rotate relative to the supporting plate, and the angle sensor II is arranged between the target plate and the supporting plate and is used for detecting the angle of the target plate relative to the supporting plate. As a further scheme of the invention, the driving piece is provided as a cylinder, and two ends of the cylinder are respectively connected with the target plate and the supporting plate. As a further scheme of the invention, the fixing unit comprises a base and a rooting block, wherein the rooting block is fixedly connected with the lens in an adhesiv