CN-121977494-A - Multi-angle adjusting device for detecting ceramic products by profilometer and use method

Abstract

The scheme discloses a multi-angle adjusting device for detecting ceramic products by a profiler, which comprises a measuring platform, wherein the height of one end of the measuring platform is fixed, the height of the other end of the measuring platform is adjustable, at least two positioning blocks are arranged on the upper surface of the measuring platform, and the rotation angle of each positioning block and the position of the upper surface of the measuring platform are continuously adjustable. The scheme also discloses a using method of the device. The measuring platform has the advantages that the inclination of the measuring platform can be continuously adjusted to adapt to any inclination angle of a workpiece to be measured, the platform mounting hole is a long hole to adapt to the workpiece with any size, the platform mounting hole, the positioning block mounting round hole and the positioning block mounting long hole form infinite positions and angle matching, the abnormal outer contour of the workpiece can be randomly matched, the measuring platform is convenient to assemble and disassemble and adjust, the measuring efficiency is greatly improved, and the measuring precision is guaranteed.

Inventors

• HUANG XINXIN
• SHI QINGWANG
• LI QI

Assignees

• 杭州大和江东新材料科技有限公司

Dates

Publication Date

20260505

Application Date

20251211

Claims (10)

1. 1.A multi-angle adjusting device for detecting ceramic products by a profiler comprises a measuring platform and is characterized in that, The height of one end of the measuring platform is fixed, and the height of the other end of the measuring platform is adjustable; The upper surface of the measuring platform is provided with at least two positioning blocks, and the rotation angle of the positioning blocks and the position of the upper surface of the measuring platform are continuously adjustable.
2. 2. The multi-angle adjusting device for detecting ceramic products by using a profiler according to claim 1, further comprising a rotatable screw, wherein a screw position adjusting block is in threaded fit with the screw, the screw position adjusting block can axially translate along the screw by rotating the screw, the screw position adjusting block is hinged with one end of a side rod, and the other end of the side rod is hinged with one end with adjustable height of a measuring platform.
3. 3. The multi-angle adjustment device for detecting ceramic products by profiler according to claim 2, wherein one end of the screw is provided with a screw rotating handle.
4. 4. A multi-angle adjustment device for use in profiler inspection of ceramic products according to claim 1,2 or 3, further comprising at least one auxiliary lifting mechanism comprising: The sliding rail is parallel to the screw rod; the sliding block can slide on the sliding rail; One end of the side rod is hinged with the sliding block, and the other end is hinged with one end of the measuring platform, the height of which is adjustable.
5. 5. The multi-angle adjusting device for detecting ceramic products by using a profiler according to claim 1, 2 or 3, wherein the measuring platform is provided with a plurality of platform mounting holes, the platform mounting holes are long holes, the positioning block is provided with at least one positioning block mounting round hole corresponding to the platform mounting holes, and the platform mounting holes are detachably connected with the positioning block mounting round holes through fasteners.
6. 6. The multi-angle adjustment device for detecting ceramic products by using a profiler according to claim 5, wherein the measurement platform is provided with at least one pair of platform mounting holes parallel to each other in length direction, the positioning block is further provided with a positioning block mounting long hole, the hole distance between the positioning block mounting long hole and the positioning block mounting round hole is matched with the hole distance between the pair of platform mounting holes, and the platform mounting holes and the positioning block mounting long holes are detachably connected by fasteners.
7. 7. The multi-angle adjustment device for detecting ceramic products by a profiler according to claim 6, wherein the length direction of the positioning block mounting slot hole is arc-shaped, and the center of the arc-shaped circle is the center of the positioning block mounting round hole.
8. 8. The multi-angle adjusting device for detecting ceramic products by a profiler according to claim 7, wherein the shape of the positioning block is a trapezoid, the positioning block mounting round hole is on the short bottom side of the trapezoid, and the positioning block mounting long hole is on the long bottom side of the trapezoid.
9. 9. A multi-angle adjustment device for detecting ceramic products by a profiler according to claim 1,2 or 3, wherein the measuring platform and the positioning block are made of engineering plastics.
10. 10. The application method of the multi-angle adjusting device for detecting ceramic products by using a profiler is characterized by comprising the following steps of: 1) Adjusting the inclination angle of the measuring platform; 2) Adjusting the position and angle of the positioning block; 3) Fixing and measuring a workpiece; 4) The operation is ended.

Description

Multi-angle adjusting device for detecting ceramic products by profilometer and use method Technical Field The invention relates to the field of measurement auxiliary devices, in particular to a multi-angle adjusting device for detecting ceramic products by a profiler and a method for using the device. Background In the field of ceramic product production and quality detection, contour accuracy is a key index for measuring product performance and assembly suitability, and a contour instrument is used as high-accuracy contour detection equipment and is widely applied to the contour parameter measurement process of ceramic products. Especially in the semiconductor equipment field, ceramic parts are used for core components in a large number because of the characteristics of high temperature resistance, corrosion resistance, excellent insulativity and the like, the contour precision of the ceramic parts directly influences the assembly precision and the operation stability of the semiconductor equipment, and higher requirements are put on the reliability and the cleanliness of the detection process. The ceramic products have various specification types, not only comprise products with standardized sizes and shapes, but also relate to a large number of to-be-detected pieces with nonstandard specifications and special-shaped structures, and the contour detection of the nonstandard ceramic products brings multiple requirements to the workpiece fixing and posture adjusting device. The Chinese patent document CN112762882A discloses a device capable of commonly measuring a clamp on the 5 th month and 7 th year of 2021, which comprises a bottom plate, an X-axis moving mechanism, a Y-axis moving mechanism, a rotating mechanism and a testing platform which are fixedly connected in sequence, wherein the bottom plate is fixedly connected to an operation platform of a profiler, and any measuring clamp is fixedly connected to the testing platform. The prior fixing device for contour measurement is designed for standard specification ceramic products, and has the following technical defects: 1. The suitability is limited, the supporting structure of the existing device is mostly of fixed size and angle, even if an adjustable mechanism is designed, the adjustable position and dimension are difficult to match with nonstandard ceramic products of different shapes and sizes, and the problems of inaccurate positioning or incapability of stable fixation are easy to occur; 2. The inclination measurement stability is not enough, the overall inclination angle of a to-be-detected piece is often required to be adjusted in the measurement process of the profilometer so as to meet the requirements of different measurement visual angles, the prior device lacks a reliable anti-falling structure, and the to-be-detected ceramic product is easy to fall off in an inclined state, so that the measurement precision is influenced, and the workpiece is possibly damaged; 3. And 4, the suitability of materials is insufficient, the fixed jig for contour measurement on the market is mostly made of all-metal materials, the requirements of ceramic parts used for semiconductor equipment on surface cleanliness are extremely high, when the metal jig is in direct contact with the ceramic to be detected, metal scraps are easy to adhere or chemical contact is polluted, the surface cleanliness of the parts does not reach the standard, and then the assembly precision and the operation stability of the semiconductor equipment are affected, so that the special use requirements of the semiconductor field cannot be met. Disclosure of Invention Based on the problems, the multi-angle adjusting device for detecting the ceramic products by the profiler and the using method thereof can efficiently adjust a plurality of positions and dimensions, are compatible with ceramic products to be detected of nonstandard specifications and different shapes and sizes, and are beneficial to rapidly completing accurate detection of the ceramic products. In order to achieve the first aim, the invention adopts the following technical scheme that the multi-angle adjusting device for detecting ceramic products by a profiler comprises a measuring platform, The height of one end of the measuring platform is fixed, and the height of the other end of the measuring platform is adjustable; The upper surface of the measuring platform is provided with at least two positioning blocks, and the rotation angle of the positioning blocks and the position of the upper surface of the measuring platform are continuously adjustable. The device is characterized by further comprising a screw rod capable of rotating, wherein a screw rod position adjusting block is in threaded fit with the screw rod, the screw rod is rotated to enable the screw rod position adjusting block to axially translate along the screw rod, the screw rod position adjusting block is hinged with one end of a side rod, and the other end o