CN-121977900-A - Multi-gas-component detection pretreatment device and application method thereof

CN121977900ACN 121977900 ACN121977900 ACN 121977900ACN-121977900-A

Abstract

The invention discloses a multi-gas component detection pretreatment device and a use method thereof, wherein the device comprises a gas sample pipeline system, a standard gas pipeline system and a detection pipeline system, a gas sample and standard gas are respectively selected and switched through a first sample selecting valve and a second sample selecting valve, a calibration pipeline is additionally arranged between the first sample selecting valve and the second sample selecting valve and is controlled through a third sample selecting valve, the selected gas is distributed to different detection instruments through a fourth sample selecting valve for analysis, the integration of automatic, sequential detection and online calibration of multi-path gas samples is realized, the operation steps are greatly simplified, the detection efficiency, the accuracy of results and the detection safety are improved, and the device is particularly suitable for complex industrial scenes requiring continuous monitoring of various gases and multi-gas components.

Inventors

LIU DAN
LI ZHAO
LI QIANCHENG
LIN ZHIQIANG
Lin Enbin
GUO HAOXU
MA BINQI
LIAO HONGCHANG

Assignees

福建恒申电子材料科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260121

Claims (10)

1. The multi-gas component detection pretreatment device is characterized by comprising a gas sample pipeline system, a standard gas pipeline system and a detection pipeline system, wherein the gas sample pipeline system comprises a plurality of groups of gas sample pipelines and a plurality of groups of detection pipelines, the downstream of all the gas sample pipelines are collected and connected to the inlet of a shared first sample valve, the standard gas pipeline system comprises a plurality of groups of standard gas pipelines and a second sample valve, the downstream of all the standard gas pipelines are collected and connected to the inlet of a shared second sample valve, the standard gas pipeline system further comprises a helium pipeline, the outlet of the helium pipeline is connected to the inlet of the second sample valve, the detection pipeline system comprises a fourth sample valve and a plurality of groups of detection pipelines, the inlet of the fourth sample valve is connected with the outlet of the first sample valve through pipelines, a detection instrument is arranged on each group of detection pipelines, one end of the detection pipeline is connected to one outlet of the fourth sample valve, the other end of the detection pipeline is connected with a treatment pipeline, the other end of the detection instrument is connected with the calibration pipeline is arranged between the inlet of the first sample valve and the second sample valve, and the third sample valve is arranged on the outlet of the third sample valve.
2. The pretreatment device for multi-gas component detection according to claim 1, wherein a pressure reducing valve and a manual valve are connected in series to all lines in the gas sample line system, respectively.
3. The multi-gas component detection pretreatment device according to claim 1, wherein a pressure reducing valve and a manual valve are connected in series to all the lines in the standard gas line system.
4. The pretreatment device for multi-gas component detection according to claim 1, wherein pneumatic valves are connected in series to the front and rear of the on-line detection instrument in the detection pipeline system.
5. The multi-gas component detection pretreatment device according to claim 1, wherein the tail gas treatment pipeline is provided with a pneumatic valve and a vacuum pipeline is arranged in parallel, and the vacuum pipeline is provided with a pneumatic valve and a vacuum pump.
6. The multi-gas component detection pretreatment device of claim 1, wherein a pneumatic valve is arranged on a pipeline between the second sample selecting valve and the third sample selecting valve.
7. The pretreatment device for multi-gas component detection of claim 1, wherein a concentration control line is further connected in parallel to the line between the second sample valve and the third sample valve.
8. A method for using a multi-gas component detection pretreatment device is characterized in that, the detection device according to any one of claims 1 to 7, comprising the steps of: The method comprises the steps of firstly, replacing a gas pipeline, namely, using high-purity helium gas to replace the gas pipeline through a PLC (programmable logic controller) setting program, and detecting the content of various components in the helium gas in the gas pipeline by using a detecting instrument after the replacement is finished, so that the content is ensured to be lower than the content of various components in a gas sample to be detected, and pollution is avoided; Calibrating the detecting instrument, namely enabling the standard gas to enter the corresponding detecting instrument through a PLC (programmable logic controller) setting program, and calibrating the allowable range of the gas; Step three, detecting a gas sample, namely, entering the gas sample into a corresponding detection instrument through a PLC set program, and detecting the content of each component of the gas sample; and fourthly, gas pipeline replacement, namely performing gas pipeline replacement by using high-purity helium through a PLC (programmable logic controller) setting program, so as to ensure that no gas sample exists in the gas pipeline.
9. The method for using the gas component detection pretreatment device according to claim 8, wherein the detection instrument in the second step is calibrated by helium purging, pipeline blowing, pipeline evacuating, standard gas purging and instrument detection in the following order.
10. The method for using the gas component detection pretreatment device according to claim 8, wherein the gas sample detection in the third step is performed by pipeline blowing, pipeline evacuating, gas sample purging and instrument detection in the following order.

Description

Multi-gas-component detection pretreatment device and application method thereof Technical Field The present invention relates to a gas component detection apparatus, and more particularly, to a multi-gas component detection pretreatment apparatus and a method for using the same. Background In the electronic industry, the particular gases used generally require purities higher than 99.99999% (7N), in which various trace impurity components are to be accurately detected. At present, for different kinds of impure substances, detection instruments with a plurality of different principles are often required to be adopted for analysis respectively. In order to reasonably control equipment investment cost, a manufacturing enterprise usually connects a plurality of detection instruments to the same set of gas pretreatment device, and realizes the switching of different gas samples or standard gases by manually operating valves. However, this prior art solution has the following significant drawbacks: 1. the detection efficiency is low, when different gas samples or standard gases are switched, the pretreatment system needs a long time to complete replacement, and is limited by analysis configuration, and the detection can be carried out only on a single gas sample or a few components at a time, so that the high-throughput and multi-component parallel analysis is difficult to realize. 2. The operation reliability is poor, relies on manual switch valve, leads to the gas passageway to switch by mistake easily because of misoperation, not only influences the accuracy of analysis result, still probably brings the security risk. 3. The system is easy to produce cross contamination, and because the 'dead volume' exists in the pretreatment device, when different gas samples or standard gases are alternated, residual gas is difficult to be completely replaced, so that the subsequent detection is interfered, and the accuracy and the repeatability of detection data are affected. 4. The expandability and flexibility are insufficient, the existing system is usually designed aiming at gas samples of fixed types and quantity, and each time one gas or component to be detected is added, a corresponding pretreatment unit or even a detection instrument is often required to be added, so that the system is complex in structure, high in cost and difficult to adapt to the production detection requirement of rapid change. Accordingly, there is a need for improvements in the pretreatment device structure and analysis methods of existing gas detection systems to overcome the above-described drawbacks. Disclosure of Invention In view of the above, the present invention provides a multi-gas component detection pretreatment device and a method for using the same, which solves the above problems by improving the structure of the detection pretreatment device. In order to achieve the aim, the multi-gas component detection pretreatment device comprises a gas sample pipeline system, a standard gas pipeline system and a detection pipeline system, wherein the gas sample pipeline system comprises a plurality of groups of gas sample pipelines and a plurality of groups of detection pipelines, the downstream of all the gas sample pipelines are collected and connected to the inlet of a shared first sample valve, the standard gas pipeline system comprises a plurality of groups of standard gas pipelines and a second sample valve, the downstream of all the standard gas pipelines are collected and connected to the inlet of a shared second sample valve, the standard gas pipeline system further comprises a helium pipeline, the outlet of the helium pipeline is connected to the inlet of the second sample valve, the detection pipeline system comprises a fourth sample valve and a plurality of groups of detection pipelines, the inlet of the fourth sample valve is connected with the outlet of the first sample valve through pipelines, a detection instrument is arranged on each group of detection pipelines, one end of each detection pipeline is connected to one outlet of the fourth sample valve, the other end of each detection pipeline is connected with the processing pipeline, the other end of each detection pipeline is connected with the outlet of the fourth sample valve, and a calibration pipeline is arranged between the first sample valve and the calibration pipeline is arranged on the first sample valve. Further, all pipelines in the gas sample pipeline system are respectively connected with a pressure reducing valve and a manual valve in series. Further, a pressure reducing valve and a manual valve are respectively connected in series on all pipelines in the standard gas pipeline system. Further, pneumatic valves are respectively connected in series with the front and the rear of the detecting instrument on the pipeline in the detecting pipeline system. Further, the tail gas treatment pipeline is provided with a pneumatic valve and is connected with a vacuum pi