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CN-121977956-A - Device and method for detecting performance of thinned grinding wheel tool bit

CN121977956ACN 121977956 ACN121977956 ACN 121977956ACN-121977956-A

Abstract

The invention discloses a device and a method for detecting the performance of a tool bit of a thinned grinding wheel, wherein the device comprises a base, one end of the base is provided with a control component for preliminarily determining a position and a test component for accurately determining the position, a control component is connected with the test component through a connecting piece, and the other end of the base is provided with an adjusting component for adjusting the position of the grinding wheel to be tested; the invention realizes the full-automatic detection and evaluation of the small-size tool bit sample of the full-size grinding wheel for the double indexes of hardness and strength, can be applied to the quick verification of the feasibility and the optimization effect of a new formula of the grinding wheel, and is used as a priori test means of the stability and reliability indexes of the thinned grinding wheel product.

Inventors

  • LI HANYANG
  • Sheng Zemin
  • JIA JIA
  • YI HUI

Assignees

  • 江苏号角精密科技有限公司

Dates

Publication Date
20260505
Application Date
20260324

Claims (10)

  1. 1. The device for detecting the performance of the thinned grinding wheel tool bit comprises a base (1) and is characterized in that the base is respectively arranged in a first direction (x) and a second direction (y) along the length direction and the height direction of the base (1), the first direction (x) and the second direction (y) are perpendicular to each other, one end of the base (1) is provided with a control component (2) for initially determining a position and a test component (3) for accurately determining the position, the control component (2) is connected with the test component (3) through an adapter piece (4), and the other end of the base (1) is provided with an adjusting component (5) for adjusting the position of a measured grinding wheel.
  2. 2. The thinned grinding wheel bit performance detection apparatus as set forth in claim 1, wherein the control assembly (2) comprises: The control motor (21), the control motor (21) is arranged on the base (1) through being provided with a connecting seat (22), and the connecting seat (22) is arranged on the base (1); the screw rod (23), the screw rod (23) is connected to the control motor (21) and is arranged on the connecting seat (22), and the control motor (21) controls the screw rod (23) to drive; the sliding block (24) is connected to the screw rod (23) and is arranged on the connecting seat (22), and the sliding block (24) is driven to run in the second direction (y) through the screw rod (23).
  3. 3. The device for detecting the performance of the thinned grinding wheel tool bit according to claim 1, wherein the adapter (4) comprises an adapter block (41) and an adapter frame (42), the adapter block (41) is mounted on the sliding block (24), the adapter frame (42) is mounted on the adapter block (41) and the adapter block (41) is used for adjusting an angle, and the adapter frame (42) is provided with a crack defect detection camera (9).
  4. 4. A thinning wheel cutting head performance testing apparatus in accordance with claim 3 wherein said testing assembly (3) comprises: A force sensor (31), wherein the force sensor (31) is mounted on the slider (24) connected to the adapter block (41); An electric micrometer module (32), wherein the electric micrometer module (32) is arranged below the force sensor (31); And the diamond pressure head (33) is arranged below the electric micrometer module (32).
  5. 5. The device for detecting the performance of a thinned grinding wheel bit according to claim 1, wherein the adjusting assembly (5) comprises: a linear slide rail (51), the linear slide rail (51) being mounted to the base (1) in the first direction (x); The linear sliding table (52), the linear sliding table (52) is movably arranged on the linear sliding rail (51); The linear motor linear module (53), the linear motor linear module (53) is installed on the linear slide rail (51) and controls the linear slide table (52) to operate in the first direction (x) on the linear slide rail (51); The positioning disc (54), the positioning disc (54) install in through setting up rotatory module (55) sharp slip table (52), rotatory module (55) install in sharp slip table (52), rotatory module (55) control positioning disc (54) rotate.
  6. 6. The device for detecting the performance of the thinned grinding wheel tool bit according to claim 5, wherein the positioning plate (54) is provided with a horizontal positioning camera (6) for positioning in the horizontal direction, and the base (1) is provided with a height positioning camera (7) for positioning in the height direction.
  7. 7. The thinned grinding wheel tool bit performance detection device according to claim 6, wherein the base (1) is further provided with a visual image acquisition device, a force signal acquisition device and an upper computer, the horizontal direction positioning camera (6) and the height direction positioning camera (7) are connected to the visual image acquisition device, the visual image acquisition device is used for acquiring direction signal data, the force sensor (31) is connected to the force signal acquisition device, the force signal acquisition device is used for acquiring force signal data, and the visual image acquisition device and the force signal acquisition device are connected to the upper computer and are used for performing visual image analysis and force signal data tracking by the upper computer.
  8. 8. The method for detecting the performance of the thinned grinding wheel bit according to any one of claims 1 to 7, which is characterized by comprising the following steps: S1, installing a grinding wheel to be tested on the positioning disc (54), wherein the grinding wheel comprises a grinding wheel cutter head (81) and a grinding wheel base body (82), and starting a test program in an upper computer operation interface; S2, evaluating and testing hardness indexes of the cutter head; And S3, evaluating and testing the compressive strength index of the cutter head.
  9. 9. The method for detecting the performance of the thinned grinding wheel bit according to claim 8, wherein the step S1 comprises the following steps: a1, selecting the number of the tool bit with the hardness index to be measured, for example, no. 1-No. 15; A2, after the test is started, the horizontal positioning camera (6) is used for positioning the No.1 grinding wheel cutter head (81) in the horizontal direction; a3, calculating according to a positioning algorithm set by a system and combining the size of an installed grinding wheel, wherein the grinding wheel moves along with the linear sliding table (52) under the drive of the linear motor linear module (53) and rotates under the drive of the rotary module (55) until the center position of a grinding wheel tool bit (81) to be detected is positioned under the diamond pressing head (33); a4, the diamond pressing head (33) starts to descend in the second direction (y) at 300mm/min under the driving of the linear motor linear module (53), and is positioned by the height direction positioning camera (7), when the diamond pressing head (33) is about to contact, the control motor (21) stops driving, and the electric micrometer module (32) drives the diamond pressing head (33) to descend in the second direction (y) and reduces the descending speed to 5-10 mm/min; a5, when the force sensor (31) detects that the pressure value is larger than 0.1N, recording the coordinate position in the height direction at the moment as an initial height value H 0 ; a6, under the drive of the electric micrometer module (32), the diamond pressure head (33) further descends by 0.4mm at H 0 , and the system takes the pressure value at the moment as a relative hardness evaluation index P 1 ; a7, repeating the steps a 2-a 6, continuously evaluating the relative hardness indexes of the No. 2-No. 15 grinding wheel tool bits (81), and comparing the final result with the relative hardness index P 01 of the reference group so as to qualitatively evaluate the hardness indexes of the current test tool bit.
  10. 10. The method for detecting the performance of the thinned grinding wheel bit according to claim 8, wherein the step S2 comprises the following steps: b1, selecting the number of the tool bit with the hardness index to be measured, such as No. 16-No. 30; b2, after the test is started, the horizontal positioning camera (6) is used for positioning the No.16 grinding wheel cutter head (81) in the horizontal direction; b3, calculating according to a positioning algorithm set by a system and combining with the size of an installed grinding wheel, wherein the grinding wheel moves along with the linear sliding table (52) under the drive of the linear motor linear module (53) and rotates under the drive of the rotary module (55) until the center position of the grinding wheel tool bit (81) to be detected is positioned under the diamond pressing head (33); b4, the diamond pressing head (33) starts to descend in the second direction (y) at 300mm/min under the driving of the linear motor linear module (53), and is positioned by the height direction positioning camera (7), when the diamond pressing head (33) is about to contact, the control motor (21) stops driving, and the electric micrometer module (32) drives the diamond pressing head (33) to descend in the second direction (y) and reduces the descending speed to 5-10 mm/min; b5, when the force sensor (31) detects that the pressure value is larger than 0.1N, the crack defect detection camera (9) starts to start and acquires image information in real time; And b6, transmitting the image data information to the upper computer, and monitoring the occurrence of crack defects according to a crack defect detection algorithm set by a system, wherein the crack defect detection algorithm specifically comprises the following steps: b61, eliminating interference of factors such as light rays, and carrying out background correction and lens distortion correction on the image; b62, defining rectangular structural elements, and performing morphological algorithms such as corrosion, expansion, opening/closing operation and the like; b63, suppressing image noise and burr information by Gaussian filtering, eliminating interference so as to make the existing crack information clearer and more discernable, g(x, y) = 1/(2Πσ2)·exp(-(x2 + y2)/(2σ2)); B64, carrying out feature detection on the edge operator based on the gradient, calculating the magnitude of a gradient value by applying a Canny operator, determining the position and the direction of the edge, judging the generation of crack defects, and calculating the gradient and the direction of pixel points around each pixel point (x, y): Grad(x, y) = [f(x+1, y) - f(x-1, y)) 2 + (f(x, y+1) - f(x, y-1)) 2] 1/2 Dir(x, y) = arctan((f(x, y+1) - f(x, y-1))/ (f(x+1, y) - f(x-1, y))); b7, when the system detects that a crack defect occurs, the system takes the pressure value at the moment as an evaluation index P 2 of relative compressive strength; b8, repeating the steps b 2-b 6, continuously evaluating the relative hardness indexes of the No. 17-No. 30 cutter heads, and comparing the final result with the relative compressive strength index P 02 of the reference group so as to qualitatively evaluate the compressive strength index of the cutter heads tested at this time.

Description

Device and method for detecting performance of thinned grinding wheel tool bit Technical Field The invention relates to the technical field of grinding, in particular to a device and a method for detecting the performance of a thinned grinding wheel tool bit. Background In the thinning processing, the material on the surface of the workpiece is removed by the cutter heads arranged on the section of the grinding wheel under the relative motion generated by the high-speed rotation of the grinding wheel and the workpiece, so that the workpiece reaches the required surface quality and target thickness index, in the semiconductor industry, thinning is used as a key process procedure, in a plurality of process links applied to the chip manufacturing process, in order to improve the chip capacity of the grinding wheel in the thinning process and improve the heat dissipation condition in the thinning grinding process, the grinding wheel tool bit is generally required to have a structure with larger porosity and more air holes, and therefore, the failure defect that the tool bit is broken easily occurs in the service of the thinning grinding wheel. The prior art has the following defects: at present, for the evaluation of hardness and strength indexes, a traditional testing method needs to manufacture a sample piece which accords with the specific size standard of a hardness and strength tester, and the installation and contact state and the actual state installed on a grinding wheel have large difference, so that the performance indexes of the actual grinding wheel tool bit cannot be accurately evaluated. Disclosure of Invention The invention aims to provide a device and a method for detecting the performance of a thinned grinding wheel tool bit, which are used for solving the problems in the background technology. The device for detecting the performance of the thinned grinding wheel tool bit comprises a base, wherein the base is respectively arranged in a first direction and a second direction along the length direction and the height direction of the base, the first direction and the second direction are mutually perpendicular, one end of the base is provided with a control component for initially determining a position and a test component for accurately determining the position, the control component is connected with the test component through an adapter, and the other end of the base is provided with an adjusting component for adjusting the position of a grinding wheel to be detected. Preferably, the control assembly includes: The control motor is arranged on the base through a connecting seat, and the connecting seat is arranged on the base; The screw rod is connected with the control motor and is arranged on the connecting seat, and the control motor controls the screw rod to drive; the sliding block is connected to the screw rod and is installed on the connecting seat, and the sliding block is driven to operate in the second direction through the screw rod. Preferably, the adapter comprises an adapter block and an adapter frame, wherein the adapter block is arranged on the sliding block, the adapter frame is arranged on the adapter block and is used for adjusting an angle, and the adapter frame is provided with a crack defect detection camera. Preferably, the test assembly comprises: the force sensor is arranged on the slider and connected with the slider through the adapter block; An electric micrometer module, which is arranged below the force sensor; And the diamond pressure head is arranged below the electric micrometer module. Preferably, the adjusting assembly includes: The linear sliding rail is arranged on the base in the first direction; The linear sliding table is movably arranged on the linear sliding rail; The linear motor linear module is arranged on the linear slide rail and controls the linear sliding table to run in the first direction and to be positioned on the linear slide rail; The positioning disc is installed in the linear sliding table through the rotary module, the rotary module is installed in the linear sliding table, and the rotary module controls the positioning disc to rotate. Preferably, a horizontal direction positioning camera for horizontal direction positioning is mounted on the positioning disk, and a height direction positioning camera for height direction positioning is mounted on the base. Preferably, the base is further provided with a visual image acquisition device, a force signal acquisition device and an upper computer, the horizontal direction positioning camera and the height direction positioning camera are connected to the visual image acquisition device, the visual image acquisition device is used for acquiring direction signal data, the force sensor is connected to the force signal acquisition device, the force signal acquisition device is used for acquiring force signal data, and the visual image acquisition device and the force signal acquisition device a