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CN-121977984-A - Method and system for monitoring operation and maintenance of equipment in purifying machine room

CN121977984ACN 121977984 ACN121977984 ACN 121977984ACN-121977984-A

Abstract

The invention relates to the technical field of monitoring operation and maintenance, and discloses a method and a system for monitoring operation and maintenance of equipment in a purifying machine room, wherein the method comprises the steps of obtaining a surface deposition image of an associated witness face of an airflow component of a micropore array, analyzing micropore array arrangement construction information from the surface deposition image, and calculating effective permeability of micropores; positioning micropore centers according to arrangement construction information, performing pore circumference radial statistics on a deposition intensity field to generate a pore circumference jet deposition radial distribution map, calculating a microjet deposition diffusion attenuation factor based on the map in a limited microjet influence domain, performing physical field coupling on the attenuation factor and micropore effective permeability, analyzing a micropore flow field inertia enhancement coefficient and macroscopic particle deposition modal weight, synthesizing an equipment operation comprehensive risk index, and finally responding to the index and permeability attenuation degree to generate an operation and maintenance strategy comprising micropore panel surface clean restoration intensity and airflow tissue flow equalization correction amplitude.

Inventors

  • CHEN SHIJUN
  • WANG JIZHONG

Assignees

  • 山东耘威科技有限公司

Dates

Publication Date
20260505
Application Date
20260123

Claims (9)

  1. 1. The utility model provides a clean room equipment control operation and maintenance method, is applied to image sensor, characterized in that includes: Acquiring a surface deposition image aiming at a relevant witness surface of the micropore array airflow component based on an image sensor, analyzing micropore array arrangement structural characteristics from the surface deposition image, and calculating effective micropore permeability representing micropore blocking state; Positioning micropore centers according to the micropore array arrangement structure characteristics, performing pore circumference radial statistics on a deposition intensity field of the surface deposition image, and generating a pore circumference jet deposition radial distribution map representing the spatial distribution state of particles under the action of microjet; In a micro-jet influence domain defined by the micropore array arrangement structure characteristics, calculating a micro-jet deposition diffusion attenuation factor representing the radial attenuation deceleration rate of deposition distribution based on the pore periphery jet deposition radial distribution map; Performing physical field coupling on the microjet deposition diffusion attenuation factor and the effective micropore permeability to analyze out a micropore flow field inertia enhancement coefficient and macroscopic particle deposition modal weight, and further synthesizing an equipment operation comprehensive risk index; And responding to the comprehensive risk index of the equipment operation and the attenuation degree of the effective permeability of the micropores, and generating an operation and maintenance strategy comprising the clean restoration strength of the surface of the micropore panel and the flow equalization correction amplitude of the airflow tissue.
  2. 2. The method for monitoring operation and maintenance of equipment in a clean room according to claim 1, wherein analyzing the micropore array arrangement structure feature from the surface deposition image comprises: Performing a frequency domain analysis or geometric transformation on the surface deposition image to locate a set of micropore centers; Counting the median value of the detection radius of each micropore in the micropore center set, and calculating to obtain a physical aperture; counting the median value of the center distances of adjacent micropores in the micropore center set, and calculating to obtain lattice hole distances; based on triangular staggered lattice arrangement priori, dividing the product of the square of the physical aperture and the circumferential rate by half of the product of the square of the lattice pitch and the root number III, and calculating to obtain a theoretical design aperture ratio; the micropore array arrangement structure features comprise the physical aperture, the lattice hole pitch and the theoretical design aperture ratio.
  3. 3. The method for monitoring operation of equipment in a clean room as set forth in claim 2, wherein calculating the effective permeability of micropores characterizing the plugging condition of the micropores comprises: for each micropore, defining a statistic area in the micropore by taking the center of the micropore as the center and taking the physical aperture as the constraint; In the intra-hole statistical region, calculating the proportion of the number of pixels with gray values higher than the self-adaptive threshold value to the total number of pixels in the region to obtain single Kong Shijiao permeability; Carrying out arithmetic average on the single-hole visual permeability of all micropores to obtain the full-view-field average permeability; Multiplying the theoretical design aperture ratio by the full-view-field average permeability to obtain the micropore effective permeability.
  4. 4. The method for monitoring operation and maintenance of equipment in a clean room according to claim 1, wherein positioning a micropore center according to the micropore array arrangement structure features, performing pore circumferential radial statistics on a deposition intensity field of the surface deposition image, and generating a pore circumferential jet deposition radial distribution map representing a spatial distribution state of particles under the action of microjet, comprises: performing background normalization processing on the surface deposition image, and mapping gray values into normalized deposition intensity fields; For each micropore, taking the center of the micropore as a polar coordinate origin, and carrying out integral averaging on the numerical values of the deposition intensity field on the circumferential path at a set radial distance to obtain a single-pore radial distribution curve; And carrying out arithmetic average on the single-hole radial distribution curves of all micropores to generate the hole periphery jet deposition radial distribution map.
  5. 5. The method for monitoring operation and maintenance of equipment in a clean room as claimed in claim 1, wherein in a micro-jet influence domain defined by the micro-pore array arrangement structure characteristics, a micro-jet deposition diffusion attenuation factor characterizing a deposition distribution along a radial attenuation deceleration rate is calculated based on the pore perimeter jet deposition radial distribution map, and the method comprises: determining the lower bound and the upper bound of the radial interval of the microjet influence domain according to the physical aperture and the lattice pitch in the micropore array arrangement structure characteristics; Selecting a plurality of discrete radial sampling points between the lower boundary and the upper boundary of the radial interval, and obtaining the corresponding numerical value of the radial distribution map of the hole periphery jet deposition; and under a double-logarithmic coordinate system, carrying out linear regression fitting on the numerical value of the pore periphery jet deposition radial distribution map and radial sampling points, and taking the slope obtained by fitting as the micro jet deposition diffusion attenuation factor.
  6. 6. The method for monitoring operation and maintenance of equipment in a clean room according to claim 1, wherein the step of performing physical field coupling on the micro-jet deposition diffusion attenuation factor and the effective permeability of the micro-holes to resolve a micro-hole flow field inertia enhancement coefficient and a macro-particle deposition modal weight comprises the steps of: Scaling the microjet deposition diffusion attenuation factor by an exponential function, and multiplying the reciprocal of the effective permeability of the micropores to obtain the micropore flow field inertia enhancement coefficient; Setting a structural threshold radius in the influence domain of the microjet, and constructing a power function definite integral ratio related to the microjet deposition diffusion attenuation factor based on the inverse proportion of the ring diameter and the particle diameter to obtain the macroscopic particle deposition modal weight, wherein the molecule of the power function definite integral ratio is a power square value of the structural threshold radius and the lower boundary of a radial interval, and the denominator is a power square value of the upper boundary of the radial interval and the lower boundary of the radial interval.
  7. 7. The method for monitoring operation and maintenance of equipment in a clean room as set forth in claim 6, wherein the synthesizing equipment operation comprehensive risk index comprises: Performing logarithmic transformation on the microporous flow field inertia enhancement coefficient to obtain an inertia risk component; Performing logic-based transformation on the macroscopic particle deposition modal weight to obtain modal risk components; And carrying out weighted summation on the inertia risk component and the modal risk component, and inputting the summation result into an S-shaped function for normalization mapping to obtain the equipment operation comprehensive risk index.
  8. 8. The method for monitoring operation and maintenance of equipment in a clean room as claimed in claim 1, wherein generating an operation and maintenance policy including a micropore panel surface clean recovery strength and an airflow tissue flow equalization correction magnitude in response to the equipment operation comprehensive risk index and the attenuation degree of the micropore effective permeability comprises: Calculating the relative loss proportion of the effective permeability of the micropores based on the theoretical design aperture ratio determined by the structural characteristics of the micropore array arrangement, so as to obtain the attenuation rate of the permeability of the micropores; performing unit interval cutoff treatment on the comprehensive risk index of the equipment operation to obtain the clean restoration strength of the surface of the micropore panel; and performing evolution operation on the micropore permeability attenuation rate, performing product coupling on an operation result and the surface clean restoration strength of the micropore panel subjected to bias amplification, and performing unit interval truncation processing on the coupling result to obtain the airflow tissue flow equalization correction amplitude.
  9. 9. A clean room equipment monitoring operation and maintenance system applied to the clean room equipment monitoring operation and maintenance method as set forth in any one of claims 1 to 8, comprising: The image analysis and permeability calculation module is used for acquiring a surface deposition image aiming at the associated witness surface of the micropore array airflow component, analyzing micropore array arrangement structural characteristics from the surface deposition image, and calculating effective permeability of micropores representing micropore blocking states; The radial pattern generation module is used for positioning micropore centers according to the micropore array arrangement structure characteristics, performing pore circumferential radial statistics on a deposition intensity field of the surface deposition image, and generating a pore circumferential jet deposition radial distribution pattern representing the spatial distribution state of particles under the action of microjet; The attenuation factor calculation module is used for calculating a micro-jet deposition diffusion attenuation factor representing the deposition distribution along the radial attenuation deceleration rate based on the pore periphery jet deposition radial distribution map in a micro-jet influence domain defined by the micro-pore array arrangement structure characteristics; The risk index synthesis module is used for carrying out physical field coupling on the micro-jet deposition diffusion attenuation factor and the micropore effective permeability, analyzing a micropore flow field inertia enhancement coefficient and a macroscopic particle deposition modal weight, and further synthesizing an equipment operation comprehensive risk index; And the strategy generation module is used for responding to the comprehensive risk index of the equipment operation and the attenuation degree of the effective permeability of the micropores to generate an operation and maintenance strategy comprising the clean restoration strength of the surface of the micropore panel and the flow equalization correction amplitude of the airflow tissue.

Description

Method and system for monitoring operation and maintenance of equipment in purifying machine room Technical Field The invention relates to the technical field of monitoring operation and maintenance, in particular to a method and a system for monitoring operation and maintenance of equipment in a purifying machine room. Background In the field of semiconductor and precision manufacturing, clean room pollution control is moving from purely concern for airborne particle concentration to more critical surface Particle Deposition Rate (PDR) management. However, existing operation and maintenance systems have significant limitations in that, first, monitoring lacks mechanism analysis. The existing surface scanning system only counts the number and coverage rate of particles, ignores the hydrodynamic information contained in the deposition distribution form, and cannot utilize the deposition pattern to reversely push the microscopic flow field states of key components such as FFU perforated panels and the like. Second, microscopic degradation is difficult to perceive. Microscopic blockage of the micropores of the perforated panel due to scaling can cause increased velocity of the microjet and inertial focusing effects, exacerbating large particle deposition. Such microscopic changes are difficult to capture by macroscopic anemometers or conventional visual inspection. Finally, the operation and maintenance strategy lacks quantitative guidance. Due to lack of decoupling quantification of flow field degradation and particle risk, operational decisions often rely on periodic planning or post-remediation, resulting in contradictions of excessive cleaning increasing costs or response hysteresis affecting yield. Disclosure of Invention The invention provides a method and a system for monitoring operation and maintenance of equipment in a purifying machine room, which solve the technical problems in the background technology. In a first aspect, a method for monitoring operation and maintenance of equipment in a clean room is applied to an image sensor, and includes: Acquiring a surface deposition image aiming at a relevant witness surface of the micropore array airflow component based on an image sensor, analyzing micropore array arrangement structural characteristics from the surface deposition image, and calculating effective micropore permeability representing micropore blocking state; Positioning micropore centers according to the micropore array arrangement structure characteristics, performing pore circumference radial statistics on a deposition intensity field of the surface deposition image, and generating a pore circumference jet deposition radial distribution map representing the spatial distribution state of particles under the action of microjet; In a micro-jet influence domain defined by the micropore array arrangement structure characteristics, calculating a micro-jet deposition diffusion attenuation factor representing the radial attenuation deceleration rate of deposition distribution based on the pore periphery jet deposition radial distribution map; Performing physical field coupling on the microjet deposition diffusion attenuation factor and the effective micropore permeability to analyze out a micropore flow field inertia enhancement coefficient and macroscopic particle deposition modal weight, and further synthesizing an equipment operation comprehensive risk index; And responding to the comprehensive risk index of the equipment operation and the attenuation degree of the effective permeability of the micropores, and generating an operation and maintenance strategy comprising the clean restoration strength of the surface of the micropore panel and the flow equalization correction amplitude of the airflow tissue. In a second aspect, a monitoring operation and maintenance system for equipment in a clean room is applied to any one of the monitoring operation and maintenance methods for equipment in a clean room, and the monitoring operation and maintenance system includes: The image analysis and permeability calculation module is used for acquiring a surface deposition image aiming at the associated witness surface of the micropore array airflow component, analyzing micropore array arrangement structural characteristics from the surface deposition image, and calculating effective permeability of micropores representing micropore blocking states; The radial pattern generation module is used for positioning micropore centers according to the micropore array arrangement structure characteristics, performing pore circumferential radial statistics on a deposition intensity field of the surface deposition image, and generating a pore circumferential jet deposition radial distribution pattern representing the spatial distribution state of particles under the action of microjet; The attenuation factor calculation module is used for calculating a micro-jet deposition diffusion attenuation factor representing th