CN-121978005-A - Structured light illumination confocal super-resolution measurement system and method

CN121978005ACN 121978005 ACN121978005 ACN 121978005ACN-121978005-A

Abstract

The invention relates to a structured light illumination confocal super-resolution measurement system and a structured light illumination confocal super-resolution measurement method, and relates to the technical field of optical measurement. The system comprises a Digital Micromirror Device (DMD), a sample platform, an electric displacement platform, a microscopic imaging component, a complementary metal oxide semiconductor imaging Component (CMOS) and computer equipment, wherein the DMD is used for adjusting a point light source array and a structural light field. The confocal super-resolution measurement method based on the DMD can realize high-precision and high-resolution three-dimensional surface reconstruction by combining a structural light field and a signal-to-noise separation technology. By utilizing the flexibility of the DMD and the advantages of the super-resolution technology, the invention effectively improves the spatial resolution and the speed of confocal imaging, and ensures that the measurement process is more accurate. In addition, the low-rank decomposition and the self-supervision deep learning method are combined, so that the image reconstruction process is optimized, noise interference is restrained, and the overall performance of the system is further improved.

Inventors

ZHANG XIANGCHAO
GENG JIE
LOU LIANG
ZHU LIMIN

Assignees

杭州光则科技有限公司

Dates

Publication Date: 20260505
Application Date: 20260107

Claims (10)

1. The structured light illumination confocal super-resolution measurement system is characterized by comprising a digital micromirror device DMD, a sample platform, an electric displacement platform, a microscopic imaging component, a complementary metal oxide semiconductor imaging component CMOS and computer equipment; The DMD, the sample platform, the electric displacement platform, the microscopic imaging component and the CMOS imaging component are respectively in communication connection with the computer equipment; The DMD is used for adjusting the point light source array and the structural light field; The sample platform is used for bearing a sample to be tested; the electric displacement platform is used for realizing displacement scanning; The CMOS imaging component is used for recording optical signals; the computer device is used for carrying out data processing to obtain a structured light illumination confocal super-resolution measurement result.
2. The system of claim 1, wherein the sample to be measured is implemented as a planar mirror.
3. A method for measuring a confocal super-resolution of structured light, wherein the method is applied to a computer device in a structured light illumination confocal super-resolution measurement system according to claim 1 or 2, and comprises: constructing the conjugation relation between the DMD and the CMOS imaging component; constructing a point light source array corresponding to the DMD; controlling the electric displacement platform to scan the point light source array to obtain a scanning result, wherein the scanning result is realized as image data; generating confocal super-resolution measurement raw data based on the image data; And carrying out reconstruction processing on the confocal super-resolution measurement raw data to obtain confocal super-resolution measurement data.
4. A method according to claim 3, wherein said constructing the conjugate relationship of the DMD and the CMOS imaging element comprises: determining a sample plane reflector and a sample calibration chart corresponding to the sample plane reflector; loading the sample calibration map to a DMD; the DMD is calibrated by the sample calibration map to build a conjugate relationship of the DMD and the CMOS imaging assembly.
5. The method of claim 4, wherein calibrating the DMD by the sample calibration map to construct a conjugate relationship of the DMD and the CMOS imaging assembly comprises: Determining at least three feature points in the sample calibration graph and feature point coordinates corresponding to the features; Coarse calibration is carried out on the sample calibration graph through the characteristic point coordinates; and in response to the completion of the coarse calibration, carrying out the fine calibration based on the axial conjugation by combining the relative positions of the DMD and the CMOS imaging component so as to construct the conjugation relation between the DMD and the CMOS imaging component.
6. A method according to claim 3, wherein said constructing an array of point light sources corresponding to said DMD comprises: Acquiring a modulation parameter corresponding to the DMD; And constructing a point light source array corresponding to the DMD based on the modulation parameter.
7. A method according to claim 3, wherein the controlling the electric displacement platform to scan the array of point light sources to obtain a scan result comprises: Controlling the electric displacement platform to scan the point light source array to obtain scanning data; And generating a scanning result based on the scanning data by combining a data processing method, wherein the data processing method comprises at least one of a centroid method, a maximum value searching method and a data fitting method.
8. A method according to claim 3, wherein said generating confocal super-resolution measurement raw data based on said image data comprises: Loading a sine and cosine stripe pattern with four-step phase shift by combining a stripe projection principle; and generating confocal super-resolution measurement original data based on the sine and cosine stripe pattern.
9. A method according to claim 3, wherein reconstructing the confocal super-resolution measurement raw data to obtain confocal super-resolution measurement data comprises: And carrying out intrinsic signal extraction on the confocal super-resolution measurement data by combining a low-rank decomposition method to obtain the confocal super-resolution measurement data, wherein the low-rank decomposition method is a reconstruction method based on a self-supervision deep learning method.
10. The method according to claim 9, wherein the method further comprises: Performing accuracy verification by applying the structured light illumination confocal super-resolution measurement result to obtain an accuracy verification result; and generating adjustment parameters based on the accuracy verification result, wherein the adjustment parameters are used for correcting the self-supervision deep learning method.

Description

Structured light illumination confocal super-resolution measurement system and method Technical Field The invention relates to the technical field of optical measurement, in particular to a structured light illumination confocal super-resolution measurement system and a structured light illumination confocal super-resolution measurement method. Background Optical is a science for researching the behavior and properties of light, and an optical microscope is developed based on the behavior and properties of light, and is subjected to multiple technical innovations and application expansion, and in the development of the past decades, the research in the fields of semiconductor lithography, life science and the like has reached the nano scale, and the corresponding measurement technology faces greater challenges and higher requirements. Limited by the optical diffraction limit, the spatial resolution of the common optical microscope cannot exceed 200nm, so that the application range of the optical microscope is greatly reduced, the measurement requirements of various research fields cannot be met, and the advantages cannot be fully reflected. Therefore, how to break through the diffraction limit and realize the imaging with ultra-high optical resolution becomes the focus and development direction of the technical field of optical microscopy. Thanks to the unique optical design, the confocal microscopic measurement technology has strong practicability, can provide high-resolution and high-contrast images, has good real-time imaging and three-dimensional reconstruction capabilities and better axial chromatography capability, and the transverse resolution is better than that of a common optical microscope and can reach 1.4 times theoretically. Conventional confocal microscopes typically employ point-by-point mechanical scanning, which is slow to image, sometimes increasing speed by sacrificing imaging field of view and resolution. Therefore, how to improve the scanning measurement efficiency becomes a breakthrough key of the confocal measurement technology. In recent years, light splitting devices such as Nipkow discs, microlens arrays, digital micromirror devices (Digital Micromirror Device, DMD) and the like are widely applied, so that parallel rapid scanning is realized, and the defects of the traditional point-by-point scanning mode are effectively overcome. On the other hand, to cope with the demand for higher confocal imaging resolution, various super-resolution methods have been proposed, including structured light illumination microscopy (Structure Illumination Microscopy, SIM), stimulated emission depletion microscopy (Stimulated Emission Depletion Microscopy, STED), and the like, and have been used extremely widely. The digital micromirror device (Digital Micromirror Device, DMD) is an array of micro-mirrors of a certain size, which is easily controlled by a program to split light and control parameters of the split light. The DMD can realize high-speed parallel scanning and axial scanning by virtue of the advantages of rapid response, strong flexibility, high light energy utilization rate and the like. In the aspect of the structural light illumination super-resolution microscopy, the current more is to complete the regulation and control of the structural light field by means of a spatial light modulator, such as a liquid crystal SLM, a ferroelectric SLM or a digital micromirror device (Digital Micromirror Device, DMD), so that the regulation and control precision is high, the speed is high, and the operation difficulty and the complexity of an instrument device are greatly simplified. However, the frequency of the fringe illumination field is limited by the diffraction limit of an optical system, so that the resolution can only exceed the diffraction limit by one time at most, and in addition, the fringe illumination field is not a direct imaging technology, and data post-processing and image reconstruction are required, so that artificial noise or residues are inevitably brought in the link, and the detail resolution of a sample is affected. With the continuous development of confocal microscopy and the continuous improvement of measurement requirements, the improvement of confocal imaging speed and confocal imaging resolution becomes the research focus and technical problem in the field. It is therefore necessary to design a confocal super-resolution measurement method. Disclosure of Invention The invention relates to a structured light illumination confocal super-resolution measurement system and a method, which can combine measurement requirements and improve confocal imaging speed and confocal imaging resolution, and the technical scheme is as follows: In one aspect, a structured light illumination confocal super-resolution measurement system is provided, the system comprising a DMD, a sample platform, an electrical displacement platform, a microscopic imaging assembly, a complementary metal ox